JP2022522182A - Vi族前駆体化合物 - Google Patents
Vi族前駆体化合物 Download PDFInfo
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- JP2022522182A JP2022522182A JP2021550070A JP2021550070A JP2022522182A JP 2022522182 A JP2022522182 A JP 2022522182A JP 2021550070 A JP2021550070 A JP 2021550070A JP 2021550070 A JP2021550070 A JP 2021550070A JP 2022522182 A JP2022522182 A JP 2022522182A
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- molybdenum
- compound according
- tungsten
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Classifications
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- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
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- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
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Abstract
Description
式中、Mは、モリブデン、クロム、及びタングステンから選択され、Xは、フルオロ、クロロ、ブロモ、及びヨードから選択され、各L1及びL2は、同じものか又は異なるものであって、
(i)Mが配位した単座ヒドロカルビル配位子を構成するか、又は
(ii)一緒になって、Mが配位した二座ヒドロカルビル配位子を形成し、
当該方法は、
(A)式
の化合物を、(a)約0.1%(w/w)から約48%(w/w)の式HXの化合物を含有する水と、(b)式L1及び/又はL2の化合物とに接触させること、及びこれに続いて、
(B)式(I)の化合物を固体又は液体として単離すること、を含む。
さらなる実施形態では、本発明は、式(I)の化合物を固体又は液体の形態で提供し、
式中、Mは、モリブデン、クロム、及びタングステンから選択され、Xは、フルオロ、クロロ、ブロモ、及びヨードから選択され、各L1及びL2は、同じものか又は異なるものであって、
(i)Mが配位した単座ヒドロカルビル配位子を構成するか、又は
(ii)一緒になって、Mが配位した二座ヒドロカルビル配位子を形成する。
特定の実施形態では、式(I)の化合物は、約3重量パーセント未満の不純物を有する。他の実施形態では、式(I)の化合物は、1重量パーセント未満の不純物を有する。他の実施形態では、式(I)の化合物は結晶形態で単離される。式(I)の化合物のかかる結晶形態の特定の例としては、MoO2Cl2(CH3CN)2及びWO2Cl2(CH3CN)2及びMoO2Cl2(テトラヒドロフラン)2が挙げられる。さらなる実施形態では、本発明は、結晶形態の式MoO2Cl2(CH3CN)2を有し、図1に示すX線結晶構造を有する化合物を提供する。さらなる実施形態では、本発明は、結晶形態の式WO2Cl2(CH3CN)2を有し、図2に示すX線結晶構造を有する化合物を提供する。さらなる実施形態では、本発明は、結晶形態の式MoO2Cl2(テトラヒドロフラン)2を有し、図5に示すX線結晶構造を有する化合物を提供する。これらの結晶形態は、以下の実験セクションでさらに述べる。
a=12.0350(8)Å α=90°
b=11.5956(9)Å β=90°
c=26.5807(15)Å γ=90°の単位格子寸法を有する化合物を提供する。
a=8.7091(6)Å α=90°
b=8.2536(7)Å β=90°
c=12.8021(8)Å γ=90°の単位格子寸法を有する化合物を提供する。
a=7.4048(4)Å α=90°
b=12.5437(6)Å β=90°
c=13.7487(7)Å γ=90°の単位格子寸法を有する化合物を提供する。
の出発物質、すなわち、Mがクロム、モリブデン、又はタングステンから選択され、Aが第I族及び第II族金属又はアンモニウムカチオンから選択される一般式A2MO4の化合物を用いて調製することができる。かかるカチオンとしては、例えば、Li+、Na+、K+、NH4 +、アルキルアンモニウム化合物などが挙げられる。かかる化合物を、式L1及び/又はL2の化合物の存在下でHXと同様に反応させて、所望の前駆体化合物を得ることができる。
式中、Mは、モリブデン、クロム、及びタングステンから選択され、Xは、フルオロ、クロロ、ブロモ、及びヨードから選択され、各L1及びL2は、同じものか又は異なるものであって、
(i)Mが配位した単座ヒドロカルビル配位子を構成するか、又は
(ii)一緒になって、Mが配位した二座ヒドロカルビル配位子を形成し、
蒸着条件下で、モリブデン、クロム、又はタングステン含有材料を当該基板上に堆積させること、を含む方法を提供する。
以下の一般的手順を用いて、式(I)の化合物を調製することができる。
MoO3(20.0g、138mmol)を、磁気撹拌子を備えた500mL丸底フラスコに入れた。HCl(200mL、37%)をMoO3に直接添加し、水冷コンデンサー(5℃)を装備した反応フラスコに入れ、得られた薄緑色の懸濁液を油浴を用いてほぼ還流(95℃)まで加熱した。約2時間後、反応物は透明な薄緑色の溶液として示された。反応物を室温に冷却した後、氷浴に入れた。この時点で、冷却した溶液にDME(50mL)を直接添加し、反応物を室温に加温し、一晩撹拌した。翌朝、薄緑色の溶液を1L分液漏斗に注ぎ、DCM(2×200mL)で抽出した。有機層を合わせ、MgSO4を使用して乾燥させ、濾過し、磁気撹拌子を備えた1L丸底フラスコに入れ、溶媒を減圧下で除去して、MoO2Cl2(ジメトキシエタン)をオフホワイトの固体として得た。質量=12.68g、収率=31.8%。生成物を真空昇華(80℃、25mTorr)によって精製することができる。1H NMR(400MHz、C6D6、298K):δ3.29(s,6H);2.78(s,4H)ppm.13C{1H}NMR(100MHz、C6D6、298K):δ70.68,64.13ppm.
一般式A2MO4(式中、M=クロム、モリブデン、又はタングステン、A=リチウム、ナトリウム、又はカリウム)
すなわち、一般式A2MO4の化合物(式中、Mがクロム、モリブデン又はタングステンから選択され、Aが第I族及び第II族金属又はアンモニウムカチオンから選択される)例として、Li+、Na+、K+、NH4 +、アルキルアンモニウム化合物などが挙げられる。
配位子置換を利用して、式(I)の化合物を合成することができる。例えば、上記手順番号1を用いてMoO2Cl2(N,N-ジメチルホルムアミド)2錯体を作製し、次いで、N,N-ジメチルホルムアミド配位子を加溶媒分解によってジメトキシエタンに置換してMoO2Cl2(ジメトキシエタン)を生成することができる。
識別コード NB00618-002
実験式 C4 H6 Cl2 Mo N2 O2
式量 280.95
温度 100.0K
波長 0.71073Å
結晶系 斜方晶系
空間群 Pnma
単位格子寸法 a=12.0350(8)Å α=90°
b=11.5956(9)Å β=90°
c=26.5807(15)Å γ=90°
体積 3709.4(4)Å3
Z,Z’ 16,4
密度(計算値) 2.012Mg/m3
吸光係数 1.945mm-1
F(000) 2176
結晶サイズ 0.24x0.19x0.18mm3
データ収集のためのシータ範囲 1.857~26.718°
指数範囲 -15<=h<=15、-14<=k<=14、
-33<=l<=32
収集された反射 22254
独立した反射 4134[R(int)=0.0475]
シータ完全性=25.242° 99.9%
吸収補正 等価物から半経験的
最大及び最小送信 0.7454及び0.6516
精密化方法 F2上の全行列最小二乗
データ/拘束/パラメータ 4134/0/222
F2の適合度 1.008
最終R指数[I>2シグマ(I)] R1=0.0258、wR2=0.0518
R指数(全データ) R1=0.0388、wR2=0.0558
消光係数 0.00013(2)
最大のdiffピーク及びホール 0.492及び-0.462e.Å-3
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x y z U(eq)
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Mo(4) 7248(1) 2500 4414(1) 10(1)
Mo(2) 2330(1) 7500 3151(1) 10(1)
Mo(1) 2455(1) 2500 3069(1) 11(1)
Mo(3) 7667(1) 7500 4464(1) 12(1)
Cl(2) 4372(1) 2500 2868(1) 17(1)
Cl(3) 1038(1) 7500 2486(1) 19(1)
Cl(4) 4104(1) 7500 3531(1) 15(1)
Cl(5) 5845(1) 7500 4786(1) 20(1)
Cl(7) 7535(1) 2500 3536(1) 17(1)
Cl(8) 7804(1) 2500 5264(1) 16(1)
Cl(1) 877(1) 2500 3592(1) 19(1)
Cl(6) 9054(1) 7500 3833(1) 19(1)
O(1) 2102(2) 3651(1) 2715(1) 19(1)
N(2) 3254(2) 6256(2) 2597(1) 13(1)
N(1) 3109(2) 3737(2) 3706(1) 16(1)
N(3) 6849(2) 8742(2) 3887(1) 16(1)
O(4) 6389(2) 1350(2) 4438(1) 18(1)
O(3) 8142(2) 6347(2) 4788(1) 21(1)
C(2) 3871(2) 5026(2) 4428(1) 17(1)
C(1) 3436(2) 4302(2) 4022(1) 13(1)
C(4) 4342(2) 4940(2) 1977(1) 18(1)
C(7) 9534(2) 4320(2) 4355(1) 10(1)
N(4) 8773(2) 3745(2) 4367(1) 15(1)
C(8) 10517(2) 5057(2) 4342(1) 15(1)
O(2) 1813(2) 8648(2) 3461(1) 19(1)
C(3) 3728(2) 5680(2) 2325(1) 13(1)
C(6) 5822(2) 10073(2) 3259(1) 17(1)
C(5) 6407(2) 9324(2) 3608(1) 12(1)
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Mo(4)-Cl(7) 2.3601(9)
Mo(4)-Cl(8) 2.3561(9)
Mo(4)-O(4) 1.6885(17)
Mo(4)-O(4)#1 1.6885(17)
Mo(4)-N(4)#1 2.338(2)
Mo(4)-N(4) 2.338(2)
Mo(2)-Cl(3) 2.3547(9)
Mo(2)-Cl(4) 2.3623(9)
Mo(2)-N(2) 2.343(2)
Mo(2)-N(2)#2 2.343(2)
Mo(2)-O(2) 1.6846(17)
Mo(2)-O(2)#2 1.6846(17)
Mo(1)-Cl(2) 2.3672(10)
Mo(1)-Cl(1) 2.3534(10)
Mo(1)-O(1)#1 1.6867(17)
Mo(1)-O(1) 1.6867(17)
Mo(1)-N(1) 2.355(2)
Mo(1)-N(1)#1 2.355(2)
Mo(3)-Cl(5) 2.3528(10)
Mo(3)-Cl(6) 2.3671(10)
Mo(3)-N(3) 2.323(2)
Mo(3)-N(3)#2 2.323(2)
Mo(3)-O(3)#2 1.6885(17)
Mo(3)-O(3) 1.6885(17)
N(2)-C(3) 1.137(3)
N(1)-C(1) 1.135(3)
N(3)-C(5) 1.134(3)
C(2)-C(1) 1.462(3)
C(4)-C(3) 1.462(3)
C(7)-N(4) 1.133(3)
C(7)-C(8) 1.461(3)
C(6)-C(5) 1.453(3)
Cl(8)-Mo(4)-Cl(7) 155.09(4)
O(4)#1-Mo(4)-Cl(7) 97.26(6)
O(4)-Mo(4)-Cl(7) 97.26(6)
O(4)#1-Mo(4)-Cl(8) 97.95(6)
O(4)-Mo(4)-Cl(8) 97.94(6)
O(4)#1-Mo(4)-O(4) 104.33(13)
O(4)#1-Mo(4)-N(4)#1 165.97(8)
O(4)-Mo(4)-N(4) 165.97(8)
O(4)-Mo(4)-N(4)#1 89.70(8)
O(4)#1-Mo(4)-N(4) 89.70(8)
N(4)-Mo(4)-Cl(7) 80.39(5)
N(4)#1-Mo(4)-Cl(7) 80.39(5)
N(4)-Mo(4)-Cl(8) 80.08(5)
N(4)#1-Mo(4)-Cl(8) 80.08(5)
N(4)-Mo(4)-N(4)#1 76.27(11)
Cl(3)-Mo(2)-Cl(4) 156.61(3)
N(2)-Mo(2)-Cl(3) 80.86(5)
N(2)#2-Mo(2)-Cl(3) 80.86(5)
N(2)-Mo(2)-Cl(4) 80.76(5)
N(2)#2-Mo(2)-Cl(4) 80.76(5)
N(2)#2-Mo(2)-N(2) 76.03(10)
O(2)#2-Mo(2)-Cl(3) 97.08(6)
O(2)-Mo(2)-Cl(3) 97.08(6)
O(2)-Mo(2)-Cl(4) 97.18(7)
O(2)#2-Mo(2)-Cl(4) 97.18(7)
O(2)#2-Mo(2)-N(2) 89.75(8)
O(2)-Mo(2)-N(2)#2 89.75(8)
O(2)-Mo(2)-N(2) 165.78(8)
O(2)#2-Mo(2)-N(2)#2 165.78(8)
O(2)#2-Mo(2)-O(2) 104.47(12)
Cl(1)-Mo(1)-Cl(2) 156.82(4)
Cl(1)-Mo(1)-N(1)#1 81.08(6)
Cl(1)-Mo(1)-N(1) 81.08(6)
O(1)-Mo(1)-Cl(2) 96.88(6)
O(1)#1-Mo(1)-Cl(2) 96.88(6)
O(1)#1-Mo(1)-Cl(1) 97.24(6)
O(1)-Mo(1)-Cl(1) 97.24(6)
O(1)#1-Mo(1)-O(1) 104.56(12)
O(1)-Mo(1)-N(1)#1 165.24(8)
O(1)#1-Mo(1)-N(1)#1 90.19(8)
O(1)-Mo(1)-N(1) 90.20(8)
O(1)#1-Mo(1)-N(1) 165.24(8)
N(1)#1-Mo(1)-Cl(2) 80.59(6)
N(1)-Mo(1)-Cl(2) 80.59(6)
N(1)#1-Mo(1)-N(1) 75.05(10)
Cl(5)-Mo(3)-Cl(6) 156.17(4)
N(3)#2-Mo(3)-Cl(5) 81.11(6)
N(3)-Mo(3)-Cl(5) 81.11(6)
N(3)-Mo(3)-Cl(6) 80.24(6)
N(3)#2-Mo(3)-Cl(6) 80.24(6)
N(3)#2-Mo(3)-N(3) 76.59(10)
O(3)#2-Mo(3)-Cl(5) 97.49(7)
O(3)-Mo(3)-Cl(5) 97.49(7)
O(3)-Mo(3)-Cl(6) 97.00(7)
O(3)#2-Mo(3)-Cl(6) 97.00(7)
O(3)#2-Mo(3)-N(3) 89.38(8)
O(3)-Mo(3)-N(3) 165.95(8)
O(3)-Mo(3)-N(3)#2 89.38(8)
O(3)#2-Mo(3)-N(3)#2 165.95(8)
O(3)#2-Mo(3)-O(3) 104.65(13)
C(3)-N(2)-Mo(2) 177.7(2)
C(1)-N(1)-Mo(1) 177.7(2)
C(5)-N(3)-Mo(3) 177.0(2)
N(1)-C(1)-C(2) 179.3(3)
N(4)-C(7)-C(8) 179.7(3)
C(7)-N(4)-Mo(4) 177.4(2)
N(2)-C(3)-C(4) 179.7(3)
N(3)-C(5)-C(6) 178.8(3)
________________________________________
等価な原子を生成するために使用される対称変換:
#1x,-y+1/2,z #2x,-y+3/2,z
________________________________________
U11 U22 U33 U23 U13 U12
________________________________________
Mo(4) 9(1) 9(1) 13(1) 0 2(1) 0
Mo(2) 9(1) 10(1) 10(1) 0 3(1) 0
Mo(1) 13(1) 10(1) 10(1) 0 -3(1) 0
Mo(3) 15(1) 9(1) 11(1) 0 -4(1) 0
Cl(2) 16(1) 18(1) 17(1) 0 3(1) 0
Cl(3) 12(1) 23(1) 22(1) 0 -4(1) 0
Cl(4) 13(1) 18(1) 13(1) 0 -1(1) 0
Cl(5) 20(1) 19(1) 21(1) 0 3(1) 0
Cl(7) 19(1) 20(1) 13(1) 0 0(1) 0
Cl(8) 19(1) 17(1) 13(1) 0 2(1) 0
Cl(1) 15(1) 20(1) 23(1) 0 4(1) 0
Cl(6) 17(1) 20(1) 21(1) 0 2(1) 0
O(1) 21(1) 16(1) 21(1) 5(1) -4(1) 1(1)
N(2) 11(1) 12(1) 17(1) 1(1) -1(1) 2(1)
N(1) 18(1) 14(1) 17(1) -2(1) 0(1 -1(1)
N(3) 18(1) 13(1) 17(1) -2(1) -1(1) 1(1)
O(4) 17(1) 15(1) 21(1) -1(1) 3(1)-5(1)
O(3) 25(1) 16(1) 22(1) 4(1) -2(1) 4(1)
C(2) 20(2) 16(2) 17(2) -5(1) 0(1) 1(1)
C(1) 11(1) 13(1) 15(1) 5(1) 4(1) 4(1)
C(4) 21(2) 16(2) 16(1) -2(1) 4(1) 2(1)
C(7) 16(1) 9(1) 6(1) 1(1) 1(1) 3(1)
N(4) 17(1) 14(1) 13(1) -1(1) 0(1) 2(1)
C(8) 14(2) 16(2) 15(1) 3(1) -3(1)-4(1)
O(2) 17(1) 21(1) 20(1) -4(1) 5(1) 3(1)
C(3) 12(1) 13(1) 13(1) 3(1) -4(1)-2(1)
C(6) 18(2) 15(2) 18(1) 7(1) -3(1)-1(1)
C(5) 13(1) 10(1) 14(1) -2(1) 2(1)-2(1)
________________________________________
________________________________________
x y z U(eq)
________________________________________
H(2A) 3835 5837 4327 26
H(2B) 4645 4814 4496 26
H(2C) 3425 4910 4732 26
H(4A) 3937 4884 1658 27
H(4B) 4422 4169 2124 27
H(4C) 5080 5270 1916 27
H(8A) 10874 4995 4012 22
H(8B) 11040 4812 4604 22
H(8C) 10298 5860 4402 22
H(6A) 6256 10150 2949 26
H(6B) 5722 10835 3412 26
H(6C) 5094 9740 3181 26
________________________________________
識別コード NB00666-001
実験式 C4 H6 Cl2 N2 O2 W
式量 368.86
温度 100.0K
波長 0.71073Å
結晶系 斜方晶系
空間群 Pbcn
単位格子寸法 a=8.7091(6)Å α=90°
b=8.2536(7)Å β=90°
c=12.8021(8)Å γ=90°
体積 920.23(12)Å3
Z 4
密度(計算値) 2.662Mg/m3
吸光係数 13.088mm-1
F(000) 672
結晶サイズ 0.37×0.35×0.33mm3
データ収集のためのシータ範囲 3.183~28.277°
指数範囲 -11<=h<=10、-11<=k<=6、
-16<=l<=16
収集された反射 5168
独立した反射 1139[R(int)=0.0281]
シータ完全性=25.242° 99.9%
吸収補正 等価物から半経験的
最大及び最小送信 0.6035及び0.3693
精密化方法 F2上の全行列最小二乗
データ/拘束/パラメータ 1139/0/52
F2の適合度 1.133
最終R指数[I>2シグマ(I)] R1=0.0183,wR2=0.0431
R指数(全データ) R1=0.0256,wR2=0.0459
消光係数 n/a
最大のdiffピーク及びホール 0.641及び-1.611e.Å-3
________________________________________
x y z U(eq)
________________________________________
W(1) 5000 3420(1) 2500 7(1)
Cl(1) 7382(1) 4003(1) 3276(1) 14(1)
O(1) 5680(3) 2149(3) 1552(2) 12(1)
N(1) 4324(4) 5646(4) 3495(2) 12(1)
C(2) 3798(5) 8375(4) 4431(3) 14(1)
C(1) 4080(4) 6841(4) 3911(3) 11(1)
________________________________________
________________________________________
W(1)-Cl(1)#1 2.3502(9)
W(1)-Cl(1) 2.3502(9)
W(1)-O(1)#1 1.710(3)
W(1)-O(1) 1.710(3)
W(1)-N(1)#1 2.312(3)
W(1)-N(1) 2.312(3)
N(1)-C(1) 1.141(5)
C(2)-H(2A) 0.9800
C(2)-H(2B) 0.9800
C(2)-H(2C) 0.9800
C(2)-C(1) 1.452(5)
Cl(1)-W(1)-Cl(1)#1 156.36(4)
O(1)-W(1)-Cl(1) 96.89(9)
O(1)#1-W(1)-Cl(1) 97.55(9)
O(1)-W(1)-Cl(1)#1 97.55(9)
O(1)#1-W(1)-Cl(1)#1 96.89(9)
O(1)-W(1)-O(1)#1 104.30(17)
O(1)-W(1)-N(1) 165.20(12)
O(1)-W(1)-N(1)#1 90.48(11)
O(1)#1-W(1)-N(1) 90.48(11)
O(1)#1-W(1)-N(1)#1 165.20(12)
N(1)-W(1)-Cl(1)#1 81.11(8)
N(1)#1-W(1)-Cl(1)#1 80.15(8)
N(1)#1-W(1)-Cl(1) 81.11(8)
N(1)-W(1)-Cl(1) 80.15(8)
N(1)-W(1)-N(1)#1 74.75(15)
C(1)-N(1)-W(1) 172.6(3)
H(2A)-C(2)-H(2B) 109.5
H(2A)-C(2)-H(2C) 109.5
H(2B)-C(2)-H(2C) 109.5
C(1)-C(2)-H(2A) 109.5
C(1)-C(2)-H(2B) 109.5
C(1)-C(2)-H(2C) 109.5
N(1)-C(1)-C(2) 178.8(4)
______________________________________
等価な原子を生成するために使用される対称変換:
#1-x+1,y,-z+1/2
________________________________________
U11 U22 U33 U23 U13 U12
________________________________________
W(1) 8(1) 5(1) 7(1) 0 -1(1) 0
Cl(1)11(1) 14(1) 16(1) -1(1) -4(1) -1(1)
O(1) 12(1) 11(1) 14(1) -1(1) -2(1) 1(1)
N(1) 10(2) 12(2) 12(2) 0(1) 0(1) -1(1)
C(2) 21(2) 8(2) 12(2) -3(1) -3(2) 2(1)
C(1) 11(2) 11(2) 11(2) 1(1) -4(2) -2(1)
________________________________________
x y z U(eq)
________________________________________
H(2A) 3864 9258 3921 16
H(2B) 4569 8540 4979 16
H(2C) 2772 8363 4744 16
________________________________________
実験式 C8 H16 Cl2 Mo O4
分子式 C8 H16 Cl2 Mo O4
式量 343.05
温度 200K
波長 0.71073Å
結晶系 斜方晶系
空間群 P212121
単位格子寸法 a=7.4048(4)Å =90°.
b=12.5437(6)Å =90°.
c=13.7487(7)Å =90°.
体積 1277.03(11)Å3
Z 4
密度(計算値) 1.784Mg/m3
吸光係数 1.437mm-1
F(000) 688
結晶サイズ 0.15×0.15×0.1mm3
結晶色、晶癖 無色透明ブロック
データ収集のためのシータ範囲 2.198から26.382°
指数範囲 -9<=h<=9,-15<=k<=13,
-17<=l<=17
収集された反射 11549
独立した反射 2611[R(int)=0.0731]
シータ完全性=25.242° 99.9%
吸収補正 等価物から半経験的
最大及び最小送信 0.4652及び0.3891
精密化方法 F2上の全行列最小二乗
データ/拘束/パラメータ 2611/0/136
F2の適合度 1.065
最終R指数[I>2シグマ(I)] R1=0.0332、wR2=0.0838
R指数(全データ) R1=0.0361、wR2=0.0858
絶対構造パラメータ 0.00(5)
消光係数 n/a
最大のdiffピーク及びホール 0.360及び-0.510e.Å-3
実施例11では、U(eq)は、直交化Uijテンソルのトレースの1/3として定義される。
________________________________________
x y z U(eq)
________________________________________
Mo(1) 5728(1) 5036(1) 4146(1) 36(1)
Cl(2) 6796(2) 6222(1) 2947(1) 42(1)
Cl(1) 5665(2) 3642(1) 5296(1) 59(1)
O(3) 7484(4) 3874(3) 3290(2) 33(1)
O(4) 8555(5) 5286(3) 4799(3) 37(1)
O(2) 3868(5) 4641(4) 3542(4) 60(1)
O(1) 4986(7) 6018(4) 4890(3) 63(1)
C(6) 10956(8) 5056(5) 5895(4) 56(2)
C(1) 7073(9) 2746(4) 3220(4) 44(1)
C(8) 9173(9) 6336(5) 5068(4) 54(2)
C(2) 8331(10) 2315(4) 2433(4) 52(2)
C(4) 9009(8) 4133(5) 2657(4) 45(1)
C(7) 10698(10) 6210(6) 5705(8) 97(3)
C(3) 9888(9) 3099(5) 2452(5) 53(2)
C(5) 9912(11) 4520(5) 5131(5) 64(2)
________________________________________
_______________________________________
Mo(1)-Cl(2) 2.3575(14)
Mo(1)-Cl(1) 2.3576(15)
Mo(1)-O(3) 2.280(3)
Mo(1)-O(4) 2.300(4)
Mo(1)-O(2) 1.683(4)
Mo(1)-O(1) 1.692(4)
O(3)-C(1) 1.451(6)
O(3)-C(4) 1.462(6)
O(4)-C(8) 1.442(6)
O(4)-C(5) 1.463(8)
C(6)-H(6A) 0.9900
C(6)-H(6B) 0.9900
C(6)-C(7) 1.483(9)
C(6)-C(5) 1.469(8)
C(1)-H(1A) 0.9900
C(1)-H(1B) 0.9900
C(1)-C(2) 1.526(8)
C(8)-H(8A) 0.9900
C(8)-H(8B) 0.9900
C(8)-C(7) 1.438(9)
C(2)-H(2A) 0.9900
C(2)-H(2B) 0.9900
C(2)-C(3) 1.516(9)
C(4)-H(4A) 0.9900
C(4)-H(4B) 0.9900
C(4)-C(3) 1.478(8)
C(7)-H(7A) 0.9900
C(7)-H(7B) 0.9900
C(3)-H(3A) 0.9900
C(3)-H(3B) 0.9900
C(5)-H(5A) 0.9900
C(5)-H(5B) 0.9900
Cl(1)-Mo(1)-Cl(2) 160.67(6)
O(3)-Mo(1)-Cl(2) 81.43(9)
O(3)-Mo(1)-Cl(1) 83.31(10)
O(3)-Mo(1)-O(4) 76.68(12)
O(4)-Mo(1)-Cl(2) 83.21(10)
O(4)-Mo(1)-Cl(1) 81.78(10)
O(2)-Mo(1)-Cl(2) 96.61(17)
O(2)-Mo(1)-Cl(1) 95.55(17)
O(2)-Mo(1)-O(3) 91.38(18)
O(2)-Mo(1)-O(4) 167.97(18)
O(2)-Mo(1)-O(1) 104.3(2)
O(1)-Mo(1)-Cl(2) 94.13(16)
O(1)-Mo(1)-Cl(1) 97.36(16)
O(1)-Mo(1)-O(3) 164.1(2)
O(1)-Mo(1)-O(4) 87.7(2)
C(1)-O(3)-Mo(1) 122.6(3)
C(1)-O(3)-C(4) 109.8(4)
C(4)-O(3)-Mo(1) 127.3(3)
C(8)-O(4)-Mo(1) 120.9(3)
C(8)-O(4)-C(5) 107.6(5)
C(5)-O(4)-Mo(1) 131.1(4)
H(6A)-C(6)-H(6B) 108.9
C(7)-C(6)-H(6A) 110.8
C(7)-C(6)-H(6B) 110.8
C(5)-C(6)-H(6A) 110.8
C(5)-C(6)-H(6B) 110.8
C(5)-C(6)-C(7) 104.7(5)
O(3)-C(1)-H(1A) 110.7
O(3)-C(1)-H(1B) 110.7
O(3)-C(1)-C(2) 105.4(5)
H(1A)-C(1)-H(1B) 108.8
C(2)-C(1)-H(1A) 110.7
C(2)-C(1)-H(1B) 110.7
O(4)-C(8)-H(8A) 110.2
O(4)-C(8)-H(8B) 110.2
H(8A)-C(8)-H(8B) 108.5
C(7)-C(8)-O(4) 107.8(5)
C(7)-C(8)-H(8A) 110.2
C(7)-C(8)-H(8B) 110.2
C(1)-C(2)-H(2A) 111.2
C(1)-C(2)-H(2B) 111.2
H(2A)-C(2)-H(2B) 109.1
C(3)-C(2)-C(1) 102.9(5)
C(3)-C(2)-H(2A) 111.2
C(3)-C(2)-H(2B) 111.2
O(3)-C(4)-H(4A) 110.7
O(3)-C(4)-H(4B) 110.7
O(3)-C(4)-C(3) 105.0(4)
H(4A)-C(4)-H(4B) 108.8
C(3)-C(4)-H(4A) 110.7
C(3)-C(4)-H(4B) 110.7
C(6)-C(7)-H(7A) 110.0
C(6)-C(7)-H(7B) 110.0
C(8)-C(7)-C(6) 108.4(6)
C(8)-C(7)-H(7A) 110.0
C(8)-C(7)-H(7B) 110.0
H(7A)-C(7)-H(7B) 108.4
C(2)-C(3)-H(3A) 111.0
C(2)-C(3)-H(3B) 111.0
C(4)-C(3)-C(2) 103.7(5)
C(4)-C(3)-H(3A) 111.0
C(4)-C(3)-H(3B) 111.0
H(3A)-C(3)-H(3B) 109.0
O(4)-C(5)-C(6) 106.4(5)
O(4)-C(5)-H(5A) 110.4
O(4)-C(5)-H(5B) 110.4
C(6)-C(5)-H(5A) 110.4
C(6)-C(5)-H(5B) 110.4
H(5A)-C(5)-H(5B) 108.6
________________________________________
等価な原子を生成するために使用される対称変換:
________________________________________
U11 U22 U33 U23 U13 U12
________________________________________
Mo(1)30(1)33(1)44(1) -1(1) 12(1) 0(1)
Cl(2)47(1)32(1)46(1) 7(1) -1(1) 0(1)
Cl(1)77(1)48(1)52(1) 10(1) 30(1) -8(1)
O(3) 35(2)24(2)38(2) -4(1) 9(2) -2(1)
O(4) 43(2)25(2)42(2) -5(2) -5(2) 0(2)
O(2) 31(2)63(3)87(3) 5(3) 1(2) -6(2)
O(1) 65(3)52(3)72(3)-10(2) 32(3) 12(2)
C(6) 43(3)66(5)59(4) 2(4) 4(2) -6(3)
C(1) 53(3)28(3)50(3) -8(2) -2(3) -7(3)
C(8) 75(4)31(3)56(4) -6(3) -11(3) -12(3)
C(2) 80(4)33(3)42(3) -8(3) -7(3) 16(3)
C(4) 49(3)39(3)46(3) -3(3) 19(3) 0(3)
C(7) 73(5)45(4)172(9)-34(5)-58(6) 10(4)
C(3) 58(3)42(4)59(4) -1(3) 20(3) 10(3)
C(5) 70(4)43(4)78(5) -5(3) -24(4) 13(3)
________________________________________
_______________________________________
x y z U(eq)
________________________________________
H(6A) 12249 4862 5854 67
H(6B) 10496 4862 6548 67
H(1A) 5794 2636 3035 52
H(1B) 7299 2385 3848 52
H(8A) 9528 6741 4481 64
H(8B) 8197 6730 5404 64
H(2A) 8745 1584 2591 62
H(2B) 7731 2309 1790 62
H(4A) 9857 4623 2988 54
H(4B) 8586 4471 2048 54
H(7A) 10480 6593 6324 116
H(7B) 11794 6512 5398 116
H(3A) 10766 2913 2968 64
H(3B) 10521 3115 1817 64
H(5A) 10710 4310 4586 76
H(5B) 9322 3872 5392 76
________________________________________
同時熱分析-示差走査熱量測定
Claims (20)
- ヒドロカルビル配位子が、少なくとも1個の酸素原子、硫黄原子、又は窒素原子をさらに含む、請求項1に記載の方法。
- L1及びL2が、独立して選択され、単座配位子を含むか、又は一緒になって二座配位子を形成し、ジアミン、トリアミン及びグリコールから選択される、請求項1に記載の方法。
- L1及びL2が、独立して選択され、単座配位子を含み、又は一緒になって二座配位子を形成し、t-ブチルニトリル、トルエン、テトラヒドロフラン、及びアセトニトリルから選択され、かかる基は、任意選択的に、ハロ、シアノ、ニトロ、C1~C6アルキル、C1~C6アルコキシ、テトラヒドロフラン、C1~C6アルコキシカルボニル、及びフェニル;1,2-ジメトキシエタン;1,2-ジエトキシエタン;1,2-ジメトキシプロパン;N,N-ジメチルアセトアミド;N,N-ジメチルホルムアミド;N,N-ジメチルシアノアセトアミド;N,N,N’,N’-テトラメチルエチレンジアミン、エチレンジアミン、ヘキサエチレンジアミン、ジエチレントリアミン、及びジエチレントリアミン;ジメチルスルホキシド;及びエチレングリコール、プロピレングリコール、1,2-プロパンジオール、1,3-プロパンジオール、1,4-ブタンジオール、1,5-ペンタンジオール、及び1,6-ヘキサンジオールから選択される1つ又は複数の基によって置換された基である、請求項1に記載の方法。
- L1及びL2が一緒になって、エチレングリコール、プロピレングリコール、1,2-プロパンジオール、1,3-プロパンジオール、1,4-ブタンジオール、1,5-ペンタンジオール、1,6-ヘキサンジオール、N,N,N’,N’-テトラメチルエチレンジアミン、エチレンジアミン、及びジエチレントリアミンから選択される二座配位子を形成する、請求項1に記載の方法。
- Mがモリブデンであり、L1及びL2が1,2-ジメトキシエタン、テトラヒドロフラン又はアセトニトリルである、請求項1に記載の方法。
- ヒドロカルビル配位子が、少なくとも1個の酸素原子、硫黄原子、又は窒素原子をさらに含む、請求項1に記載の化合物。
- 式(I)の化合物が、約3重量パーセント未満の不純物を有する、請求項7に記載の化合物。
- 式(I)の化合物が結晶形態である、請求項7に記載の化合物。
- L1及びL2がアセトニトリルである、請求項7に記載の化合物。
- Mがモリブデンである、請求項7に記載の化合物。
- Mがタングステンである、請求項7に記載の化合物。
- 結晶形態の式MoO2Cl2(CH3CN)2を有し、1重量%未満の不純物を有する、請求項10に記載の化合物。
- 結晶形態の式WO2Cl2(CH3CN)2を有し、1重量%未満の不純物を有する、請求項10に記載の化合物。
- 結晶形態の式MoO2Cl2(CH3CN)2を有し、図1に示すX線結晶構造を有する、請求項10に記載の化合物。
- 結晶形態の式WO2Cl2(CH3CN)2を有し、図2に示すX線結晶学的構造を有する、請求項10に記載の化合物。
- 結晶形態の式MoO2Cl2(テトラヒドロフラン)2を有し、1重量%未満の不純物を有する、請求項10に記載の化合物。
- 水不混和性溶媒が、ジクロロメタン、酢酸エチル、ジエチルエーテル、トルエン、ベンゼン及びペンタンから選択される、請求項19に記載の方法。
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JP2017525156A (ja) * | 2014-08-14 | 2017-08-31 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 第6族遷移金属含有フィルムの蒸着のための第6族フィルム形成組成物 |
JP2021523983A (ja) * | 2018-05-31 | 2021-09-09 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 6族遷移金属含有膜の気相成長のための6族遷移金属含有組成物 |
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US3256184A (en) * | 1963-10-08 | 1966-06-14 | Exxon Research Engineering Co | Molybdenum-containing phosphosulfurized hydrocarbon, methods for its preparation, and its use in lubricants |
JP5255029B2 (ja) * | 2009-09-08 | 2013-08-07 | エア プロダクツ アンド ケミカルズ インコーポレイテッド | 金属含有フィルムの現像用のアミノエーテル含有液体組成物 |
JP2013541518A (ja) * | 2010-09-14 | 2013-11-14 | カウンシル・オブ・サイエンティフィック・アンド・インダストリアル・リサーチ | 有機金属モリブデンアセチリドジオキソ錯体およびその調製方法 |
KR20170116630A (ko) * | 2016-04-11 | 2017-10-20 | 삼성디스플레이 주식회사 | 페로브스카이트 화합물, 이를 포함한 박막 및 이를 포함한 광전자 장치 |
US10730816B2 (en) * | 2017-12-12 | 2020-08-04 | Wisconsin Alumni Research Foundation | Method of selectively oxidizing lignin |
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JP2021523983A (ja) * | 2018-05-31 | 2021-09-09 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 6族遷移金属含有膜の気相成長のための6族遷移金属含有組成物 |
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SG11202108652RA (en) | 2021-09-29 |
KR102649987B1 (ko) | 2024-03-22 |
KR20240038167A (ko) | 2024-03-22 |
TW202222816A (zh) | 2022-06-16 |
KR20210110728A (ko) | 2021-09-08 |
JP7299994B2 (ja) | 2023-06-28 |
TWI755689B (zh) | 2022-02-21 |
WO2020176767A1 (en) | 2020-09-03 |
US20200270289A1 (en) | 2020-08-27 |
TWI830133B (zh) | 2024-01-21 |
CN113490764A (zh) | 2021-10-08 |
EP3931367A4 (en) | 2022-11-09 |
EP3931367A1 (en) | 2022-01-05 |
US20220259236A1 (en) | 2022-08-18 |
US11807653B2 (en) | 2023-11-07 |
US20240034745A1 (en) | 2024-02-01 |
US11352383B2 (en) | 2022-06-07 |
TW202039523A (zh) | 2020-11-01 |
TW202406924A (zh) | 2024-02-16 |
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