JP2022514442A - センサ装置 - Google Patents
センサ装置 Download PDFInfo
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- JP2022514442A JP2022514442A JP2021547921A JP2021547921A JP2022514442A JP 2022514442 A JP2022514442 A JP 2022514442A JP 2021547921 A JP2021547921 A JP 2021547921A JP 2021547921 A JP2021547921 A JP 2021547921A JP 2022514442 A JP2022514442 A JP 2022514442A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0061—Force sensors associated with industrial machines or actuators
- G01L5/0076—Force sensors associated with manufacturing machines
- G01L5/009—Force sensors associated with material gripping devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/96—Touch switches
- H03K17/962—Capacitive touch switches
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/96—Touch switches
- H03K17/964—Piezoelectric touch switches
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/965—Switches controlled by moving an element forming part of the switch
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
- H03K2217/94—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00 characterised by the way in which the control signal is generated
- H03K2217/94036—Multiple detection, i.e. where different switching signals are generated after operation of the user is detected at different time instants at different locations during the actuation movement by two or more sensors of the same or different kinds
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
Abstract
Description
2: 層のスタック
3: 第1の基板
4: 静電容量センサ
4a: 電極層
4b: 下部電極
4c: 第1の誘電絶縁層
5: 圧電センサ
5a: 圧電センサの第1の層(下部電極層)
5b: 圧電センサの第2の層(強誘電体層)
5c: 圧電センサの第3の層(上部電極層)
6 センサ装置の表面
7: シールド
8: 第2の誘電絶縁層
9: 保護層
10: 第2の基板
11: ラミネート層
12: 第1の幾何学模様
13: 第2の幾何学模様
14: 操作フィンガー
15: 回路基板
16: 第1の信号成分(接近信号)
17: 接近検知装置
18: 第2の信号成分(接触信号)
19: 接触検出装置
Claims (12)
- センサ装置(1)であって、
少なくとも一つの第1の基板(3)と、
対象物の接近を取得するための静電容量センサ(4)と、
圧力または圧力変化を取得する圧電センサ(5)とを備え、
前記静電容量センサが前記第1の基板(3)の第1の面上に配置され、前記圧力センサ(5)が前記第1の基板(3)の第2の面上に配置され、前記第2の面が前記第1の面に対向しており、または、前記静電容量センサ(4)および前記圧電センサ(5)が前記基板(3)の同一面上に配置されている、
センサ装置。 - 請求項1において、
第2の基板(10)を備え、
前記静電容量センサ(4)が前記第1の基板(3)上に配置されており、
前記圧電センサ(5)が前記第2の基板(10)上に配置されており、
前記第2の基板(10)が前記第1の基板(3)の上にラミネートされている、
センサ装置。 - 請求項1または2において、
前記静電容量センサ(4)の底面積が実質的に前記圧電センサ(5)の底面積に一致し、かつ/または、前記静電容量センサ(4)および前記圧電センサ(5)がセンサスタック(2)を形成する、
センサ装置。 - 請求項の1ないし3のいずれかにおいて、
前記静電容量センサ(4)と前記圧電センサ(5)との間にシールド(7)を有する、
センサ装置。 - 請求項4において、
前記シールド(7)が、前記第1の基板(3)の前記静電容量センサ(4)とは反対側を向く面上に配置されている、
センサ装置。 - 請求項1ないし5のいずれかにおいて、
前記静電容量センサ(4)が、
電極層(4a)と、
下部電極(4b)とを備え、
前記電極層(4a)と前記下部電極(4b)とが、前記第1の基板(3)または第1の誘電絶縁層(4c)によって互いに絶縁されている、
センサ装置。 - 請求項1ないし6のいずれかにおいて、
前記圧電センサ(5)が、
好ましくはPEDOT:PSSから形成される下部電極層(5a)と、
強誘電体共重合体層(5b)と、
上部電極層(5c)と、
をさらに備えたセンサ装置。 - 請求項1ないし7のいずれかにおいて、
前記センサ装置の表面(6)を保護するためのラッカー層(9)を備え、前記ラッカー層(9)が前記静電容量センサ(4)の前記電極層(4a)上に形成されている、
センサ装置。 - 請求項1ないし8のいずれかにおいて、
前記シールド(7)と前記圧電センサ(5)との間に第2の誘電絶縁層(8)を備えた、
センサ装置。 - 請求項1ないし9のいずれかにおいて、
前記センサ装置(1)が、
前記静電容量センサ(4)からの第1の信号(16)を検出するための接近検知装置(17)を備え、前記第1の信号(16)が接近信号であり、または、
前記圧電センサ(5)からの第2の信号(18)を検出するための接触検出装置(19)を備え、前記第2の信号(18)が接触信号である、
センサ装置。 - 操作装置であって、
少なくとも一つの操作フィンガー(14)を有し、個々の操作フィンガー(14)が、それぞれ請求項1ないし10のいずれかに記載のセンサ装置(1)を少なくとも1つ含む、
操作装置。 - 請求項1ないし10のいずれかに記載の前記センサ装置(1)の使用であって、
とくに協働環境における操作装置に対する対象物の接近および操作装置のグリップ工程における保持力の触覚的検知のための前記センサ装置の使用。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA50929/2018 | 2018-10-29 | ||
ATA50929/2018A AT521772B1 (de) | 2018-10-29 | 2018-10-29 | Sensorvorrichtung |
PCT/EP2019/079500 WO2020089211A1 (de) | 2018-10-29 | 2019-10-29 | Sensorvorrichtung |
Publications (1)
Publication Number | Publication Date |
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JP2022514442A true JP2022514442A (ja) | 2022-02-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2021547921A Pending JP2022514442A (ja) | 2018-10-29 | 2019-10-29 | センサ装置 |
Country Status (5)
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US (1) | US11994441B2 (ja) |
JP (1) | JP2022514442A (ja) |
AT (1) | AT521772B1 (ja) |
DE (1) | DE112019005380A5 (ja) |
WO (1) | WO2020089211A1 (ja) |
Families Citing this family (1)
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US11545615B2 (en) | 2020-09-09 | 2023-01-03 | Baker Hughes Oilfield Operations Llc | Method for manufacturing piezoelectric instrumentation devices with 3D structures using additive manufacturing |
Citations (4)
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JP2001243010A (ja) * | 2000-02-29 | 2001-09-07 | Alps Electric Co Ltd | 入力装置 |
WO2015098725A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社村田製作所 | 圧電センサ、タッチパネル |
JP2015155880A (ja) * | 2014-01-14 | 2015-08-27 | 日本写真印刷株式会社 | 圧力センサ |
JP2017203691A (ja) * | 2016-05-11 | 2017-11-16 | 東洋インキScホールディングス株式会社 | 静電容量型センサ及び荷重測定装置 |
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-
2018
- 2018-10-29 AT ATA50929/2018A patent/AT521772B1/de active
-
2019
- 2019-10-29 US US17/289,532 patent/US11994441B2/en active Active
- 2019-10-29 JP JP2021547921A patent/JP2022514442A/ja active Pending
- 2019-10-29 DE DE112019005380.9T patent/DE112019005380A5/de active Pending
- 2019-10-29 WO PCT/EP2019/079500 patent/WO2020089211A1/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001243010A (ja) * | 2000-02-29 | 2001-09-07 | Alps Electric Co Ltd | 入力装置 |
WO2015098725A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社村田製作所 | 圧電センサ、タッチパネル |
JP2015155880A (ja) * | 2014-01-14 | 2015-08-27 | 日本写真印刷株式会社 | 圧力センサ |
JP2017203691A (ja) * | 2016-05-11 | 2017-11-16 | 東洋インキScホールディングス株式会社 | 静電容量型センサ及び荷重測定装置 |
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WO2020089211A1 (de) | 2020-05-07 |
AT521772B1 (de) | 2020-05-15 |
DE112019005380A5 (de) | 2021-07-15 |
US20210396612A1 (en) | 2021-12-23 |
US11994441B2 (en) | 2024-05-28 |
AT521772A4 (de) | 2020-05-15 |
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