JP2022511707A - 電気部品 - Google Patents
電気部品 Download PDFInfo
- Publication number
- JP2022511707A JP2022511707A JP2021525669A JP2021525669A JP2022511707A JP 2022511707 A JP2022511707 A JP 2022511707A JP 2021525669 A JP2021525669 A JP 2021525669A JP 2021525669 A JP2021525669 A JP 2021525669A JP 2022511707 A JP2022511707 A JP 2022511707A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrical
- layers
- laminate
- passivation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002161 passivation Methods 0.000 claims abstract description 303
- 239000000919 ceramic Substances 0.000 claims abstract description 79
- 239000000758 substrate Substances 0.000 claims abstract description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 85
- 239000000463 material Substances 0.000 claims description 55
- 239000000377 silicon dioxide Substances 0.000 claims description 40
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 38
- 239000000203 mixture Substances 0.000 claims description 26
- 238000009429 electrical wiring Methods 0.000 claims description 22
- 229910010293 ceramic material Inorganic materials 0.000 claims description 21
- 230000007547 defect Effects 0.000 claims description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 18
- 229910052735 hafnium Inorganic materials 0.000 claims description 12
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- 239000011734 sodium Substances 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- 241000588731 Hafnia Species 0.000 claims description 7
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims description 3
- 239000006104 solid solution Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 2
- 229910001451 bismuth ion Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910001414 potassium ion Inorganic materials 0.000 claims description 2
- 229910001415 sodium ion Inorganic materials 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 583
- 239000000543 intermediate Substances 0.000 description 65
- 239000000126 substance Substances 0.000 description 34
- 238000000151 deposition Methods 0.000 description 31
- 239000010409 thin film Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 29
- 230000008021 deposition Effects 0.000 description 22
- 239000012530 fluid Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 18
- 238000005530 etching Methods 0.000 description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 12
- 238000000231 atomic layer deposition Methods 0.000 description 11
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000008901 benefit Effects 0.000 description 8
- 150000001768 cations Chemical class 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- JGGINSANQXMSKJ-UHFFFAOYSA-N [O-2].[Ta+5].[Si+4] Chemical compound [O-2].[Ta+5].[Si+4] JGGINSANQXMSKJ-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 238000000224 chemical solution deposition Methods 0.000 description 5
- 239000000976 ink Substances 0.000 description 5
- 239000000395 magnesium oxide Substances 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 5
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000012876 topography Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 238000010146 3D printing Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000007641 inkjet printing Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002052 molecular layer Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- -1 tantara Chemical compound 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000877463 Lanio Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004121 SrRuO Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- HWEYZGSCHQNNEH-UHFFFAOYSA-N silicon tantalum Chemical compound [Si].[Ta] HWEYZGSCHQNNEH-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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Abstract
Description
ここで、本発明は、図面を参照して説明され、図面は本発明を説明することを意図しており、決して限定するものではなく、また分かりやすいように縮尺通りではない。
Claims (26)
- 微小電気機械システムデバイス用の絶縁された電気部品であって、
i) 厚さ方向に離間する第一の面および第二の面を備える基材層と、
ii) 前記基材層の前記第一の面上に配置される一つまたは複数の電気素子であって、前記一つまたは複数の電気素子のそれぞれは、
a) セラミック部材と、
b) 動作中に第一電極と第二の電極との間に前記セラミック部材を介して電位差が確立され得るように、前記セラミック部材に隣接して配置される前記第一および第二の電極と、を備える、一つまたは複数の電気素子と、
iii) 前記基材層の前記第一の面上に配置される前記一つまたは複数の電気素子のそれぞれを覆うように配置される、連続絶縁層、または絶縁層の積層体と、
iv) パッシベーション層、または複数のパッシベーション層の積層体であって、前記一つまたは複数の電気素子のそれぞれの前記第一の電極と第二の電極との間に電気的パッシベーションを設けるように、前記一つまたは複数の電気素子のそれぞれに隣接して配置され、それらを少なくとも部分的に覆い、前記パッシベーション層、または複数のパッシベーション層の前記積層体は、前記第一および第二の電極を互いに電気的に絶縁する、パッシベーション層、または複数のパッシベーション層の積層体と、を備え、
a) 前記少なくとも一つまたは複数の下部の電気素子のそれぞれに隣接して配置される前記パッシベーション層、または複数のパッシベーション層の前記積層体の少なくとも最も内側の層は不連続であり、および/または、
b) 複数のパッシベーション層の前記積層体は、前記下部の電気素子のそれぞれとは反対側の面に凹部が形成され、前記一つまたは複数の電気素子のそれぞれを覆う領域に凹部が設けられ、パッシベーション層の前記積層体が、パッシベーション層の前記積層体の他の非凹部領域と比較して、前記凹部全体にわたって厚さ方向により薄い、電気部品。 - 前記絶縁層、または絶縁層の積層体は、シリカ、ハフニア、ジルコニア、タンタラ、およびそれらの組み合わせの一つまたは複数の層から選択され、好ましくは、前記絶縁層、または絶縁層の積層体は、シリカおよび/またはタンタラの一つまたは複数の層を備える、請求項1に記載の電気部品。
- 前記電気部品は、i)複数のシリカ層、およびタンタラ、ジルコニアもしくはハフニアのうちの一つまたは複数の層、またはii)複数のタンタラ層、およびジルコニアもしくはハフニアのうちの一つまたは複数の層を備える絶縁層の積層体を備える、請求項2に記載の電気部品。
- 前記電気部品は、複数のシリカ層を備える絶縁層の積層体を備え、シリカ層は前記電気素子に隣接するように配置され、前記積層体はさらに複数のタンタラ層を備え、好ましくは前記シリカ層とタンタラ層は前記積層体の厚さにわたって概ね交互に配置される、請求項2または3のいずれかに記載の電機部品。
- 前記絶縁層、または絶縁層の積層体は、10nm~50nm、好ましくは12~30nm、より好ましくは15~25nmの厚さを有する、請求項1~4のいずれか一項に記載の電気部品。
- 前記絶縁層、または絶縁層の積層体は、前記下部のパッシベーション層の任意の不連続部または欠陥に少なくとも部分的に充填する、請求項1~5のいずれか一項に記載の電気部品。
- 前記下部の電気素子に隣接して配置される、前記パッシベーション層、またはパッシベーション層の積層体の少なくとも一つの層は、前記一つまたは複数の電気素子のそれぞれを覆う領域において不連続であり、好ましくは前記不連続領域は、前記一つまたは複数の下部の電気素子のそれぞれに通じる開口部を形成する、請求項1~6のいずれか一項に記載の電機部品。
- 前記電気部品は複数の隣接する電気素子を備え、前記パッシベーション層、または各下部の各電気要素に隣接して配置される前記パッシベーション層の積層体の少なくとも最も内側の層は、前記電気部品の隣接する電気素子間の少なくとも一つの中間領域にわたって不連続である、請求項1~7のいずれか一項に記載の電気部品。
- 前記電気部品は複数の隣接する電気素子を備え、電気部品は電気素子と基材の間に介在する少なくとも一つの中間層を備え、前記少なくとも一つの中間層は、前記電気部品の隣接する電気要素間の少なくとも一つの中間領域にわたって不連続である、請求項1~8のいずれか一項に記載の電気部品。
- 前記電気部品は複数の隣接する電気素子を備え、電気部品は電気素子と基材との間に介在する少なくとも一つの中間層を備え、前記少なくとも一つの中間層はハフニアを含み、および好ましくは前記電気部品の前記電気素子に隣接している、請求項1~9のいずれか一項に記載の電気部品。
- 前記パッシベーション層、またはパッシベーション層の積層体は、前記下部の電気素子のそれぞれとは反対側の面に凹部が形成され、前記一つまたは複数の電気素子のそれぞれを覆う領域に凹部が設けられ、前記パッシベーション層、またはパッシベーション層の積層体は、前記パッシベーション層、またはパッシベーション層の積層体の他の非凹部領域と比較して、前記凹部全体にわたって厚さ方向により薄い、請求項1~10のいずれか一項に記載の電気部品。
- 前記電気部品は、複数のパッシベーション層の積層体を備え、前記電気部品は、少なくとも一つの、好ましくは全ての電気素子の前記第一の電極および第二の電極を駆動回路に接続する電気配線を備え、前記電気配線は、複数のパッシベーション層の前記積層体の層間に少なくとも部分的に介在する、請求項1~11のいずれか一項に記載の電気部品。
- 前記積層体は、前記セラミック部材ならびに第一の電極および第二の電極に隣接して配置される最も内側のパッシベーション層と、一つまたは複数の別のパッシベーション層とを備え、前記電気配線は、前記積層体の二つの隣接するパッシベーション層の間に少なくとも部分的に介在し、好ましくは前記隣接する二つのパッシベーション層は前記最も内側のパッシベーション層を備えない、請求項12に記載の電気部品。
- 前記電気部品は、前記セラミック部材ならびに前記一つまたは複数の電気素子のそれぞれの第一および第二の電極に隣接して配置される複数のパッシベーション層の積層体を備え、前記一つまたは複数の電気素子に隣接して配置される前記積層体の最も内側の層の組成は、前記積層体の少なくとも一つの他の層、好ましくは前記積層体のすべての他の層の組成とは異なる、請求項1~13のいずれか一項に記載の電気部品。
- 前記セラミック部材と、前記一つまたは複数の電気素子のそれぞれの第一および第二の電極は、層のスタックに配置され、それぞれは厚さ方向に延在する横方向面を有し、前記セラミック部材は、第一の面および厚さ方向に離間して対向する第二の面を有し、前記セラミック部材の前記第一の面は前記基材層に面し、および前記第一の電極は、前記基材層と前記セラミック部材の間に介在するように前記セラミック部材の前記第一の面に隣接して配置され、前記第二の電極は前記セラミック部材の前記第二の面に隣接して配置され、ならびに前記パッシベーション層、または複数のパッシベーション層の積層体は、少なくとも部分的に前記第二の電極を覆い、前記セラミック部材の前記横方向面と、前記一つまたは複数の電気素子のそれぞれの前記第一および第二の電極の前記横方向面に隣接して配置される、請求項1~14のいずれか一項に記載の電気部品。
- 前記一つまたは複数の電気素子のそれぞれの第一の電極および第二の電極は、交互嵌合電極であり、好ましくは、前記第一および第二の交互嵌合電極はそれぞれ複数の電極フィンガーを備える、請求項1~14のいずれか一項に記載の電気部品。
- 前記電気部品は、前記セラミック部材に隣接して配置される複数のパッシベーション層の積層体、ならびに各電気素子の第一の電極および第二の電極を備え、i)前記セラミック部材ならびに第一電極および第二の電極に隣接して配置される前記積層体の前記最も内側の層は、アルミナ、ジルコニア、シリカとタンタラの組み合わせおよび/もしくはハフニア、ならびに/またはii)前記積層体の少なくとも一つの他の層がシリカおよび/または窒化ケイ素を含む、請求項1~16のいずれか一項に記載の電気部品。
- 前記積層体の前記最も内側の層は、アルミナ、ジルコニア、シリカ、タンタラおよび/またはハフニアを含み、ならびに前記電気配線が間に介在する二つの隣接するパッシベーション層はそれぞれ、シリカおよび/または窒化ケイ素、好ましくはシリカを含む、請求項13に記載の電気部品。
- 前記セラミック部材は、鉛、チタン、ジルコニウム、ニオブ、および/または亜鉛イオンを含む、請求項1~18のいずれか一項に記載の電気部品。
- 前記セラミック材料は、Pb[ZrxTi1-x]O3(0≦x≦1)および/またはPb[(Mg1/3Nb2/3)xTi1-x]O3(0<x<1)から選択される、請求項1~19のいずれか一項に記載の電気部品。
- 前記セラミック部材は鉛を含まず、ビスマス、ナトリウムおよび/またはカリウムイオンを含み、好ましくは前記セラミック部材は、(Bi0.5Na0.5)TiO3、(Bi0.5K0.5)TiO3、Bi(Mg0.5Ti0.5)O3、(K0.5Na0.5)NbO3、BiFeO3、およびそれらの組み合わせを含む固溶体のうちの一つまたは複数から選択される、請求項1~19のいずれか一項に記載の電気部品。
- 前記絶縁された電気部品は、液滴吐出装置で使用するためのアクチュエータ部品である、請求項1~21のいずれか一項に記載の電気部品。
- 請求項1~22のいずれか一項に記載の絶縁された電気部品と、前記絶縁された電気部品に取り付けられ、前記絶縁された電気部品の前記一つまたは複数の電気素子のそれぞれを封止するように配置されるキャッピング層とを備える、微小電気機械システムデバイス。
- 前記絶縁された電気部品に取り付けられ、前記電気部品の前記キャッピング層に対向する面にあるように配置されるノズルプレートをさらに備える、請求項23に記載の装置。
- 請求項1~22のいずれか一項に記載の電気部品、または請求項23もしくは請求項24に記載のデバイスを備える、液滴吐出ヘッド。
- 請求項25に記載の液滴吐出ヘッドを備える、液滴吐出装置。
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JP6776554B2 (ja) | 2016-03-02 | 2020-10-28 | セイコーエプソン株式会社 | 圧電デバイス、memsデバイス、液体噴射ヘッド及び液体噴射装置 |
JP6909420B2 (ja) | 2016-05-19 | 2021-07-28 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置 |
US9987843B2 (en) * | 2016-05-19 | 2018-06-05 | Ricoh Company, Ltd. | Liquid discharge head, liquid discharge device, and liquid discharge apparatus |
JP6322731B1 (ja) * | 2017-01-06 | 2018-05-09 | 株式会社東芝 | インクジェット式記録ヘッド |
JP7062994B2 (ja) * | 2017-03-17 | 2022-05-09 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、および液体を吐出する装置 |
GB2579039A (en) * | 2018-11-15 | 2020-06-10 | Xaar Technology Ltd | Electrical component |
-
2018
- 2018-11-15 GB GB1818644.5A patent/GB2579041A/en not_active Withdrawn
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2019
- 2019-11-15 JP JP2021525669A patent/JP7492956B2/ja active Active
- 2019-11-15 CN CN201980075440.4A patent/CN113016084A/zh active Pending
- 2019-11-15 US US17/294,152 patent/US11957059B2/en active Active
- 2019-11-15 EP EP19809574.7A patent/EP3881366A1/en active Pending
- 2019-11-15 WO PCT/GB2019/053249 patent/WO2020099891A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2579041A (en) | 2020-06-10 |
US11957059B2 (en) | 2024-04-09 |
WO2020099891A1 (en) | 2020-05-22 |
EP3881366A1 (en) | 2021-09-22 |
JP7492956B2 (ja) | 2024-05-30 |
GB201818644D0 (en) | 2019-01-02 |
CN113016084A (zh) | 2021-06-22 |
US20220006000A1 (en) | 2022-01-06 |
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