JP2022507297A5 - - Google Patents
Info
- Publication number
- JP2022507297A5 JP2022507297A5 JP2021525793A JP2021525793A JP2022507297A5 JP 2022507297 A5 JP2022507297 A5 JP 2022507297A5 JP 2021525793 A JP2021525793 A JP 2021525793A JP 2021525793 A JP2021525793 A JP 2021525793A JP 2022507297 A5 JP2022507297 A5 JP 2022507297A5
- Authority
- JP
- Japan
- Prior art keywords
- lift pin
- spring
- base
- bore
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862767823P | 2018-11-15 | 2018-11-15 | |
| US62/767,823 | 2018-11-15 | ||
| PCT/US2019/053259 WO2020101808A1 (en) | 2018-11-15 | 2019-09-26 | Lift pin holder assemblies and bodies including lift pin holder assemblies |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022507297A JP2022507297A (ja) | 2022-01-18 |
| JP2022507297A5 true JP2022507297A5 (https=) | 2022-10-04 |
| JP7507759B2 JP7507759B2 (ja) | 2024-06-28 |
Family
ID=70726318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021525793A Active JP7507759B2 (ja) | 2018-11-15 | 2019-09-26 | リフトピンホルダアセンブリ及びリフトピンホルダアセンブリを含む本体 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20200157678A1 (https=) |
| JP (1) | JP7507759B2 (https=) |
| KR (1) | KR102851410B1 (https=) |
| CN (1) | CN112889145A (https=) |
| TW (1) | TWI822892B (https=) |
| WO (1) | WO2020101808A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019185124A1 (de) * | 2018-03-27 | 2019-10-03 | Vat Holding Ag | Stifthubvorrichtung mit kupplung zum aufnehmen und lösen eines tragstifts |
| DE102020123556A1 (de) * | 2020-09-11 | 2022-03-17 | Mbs Ag | Vorrichtung zur Montage mindestens eines Stromleiters in einen Sensor und Stromsensor |
| JP7715464B2 (ja) * | 2021-09-02 | 2025-07-30 | 東京エレクトロン株式会社 | 基板処理装置 |
| KR102396865B1 (ko) * | 2021-12-08 | 2022-05-12 | 주식회사 미코세라믹스 | 정전척 |
| TWI831544B (zh) * | 2021-12-31 | 2024-02-01 | 南韓商細美事有限公司 | 升降銷單元、包括其的基板支撐單元及基板處理設備 |
| TW202431530A (zh) | 2022-09-26 | 2024-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 提昇銷總成及配重 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2804003B2 (ja) * | 1995-04-06 | 1998-09-24 | 日本ピラー工業株式会社 | 半導体ウエハーの熱処理装置 |
| DE29709988U1 (de) * | 1997-06-09 | 1997-08-14 | Hoechst Ag, 65929 Frankfurt | Leicht lösbare Arretierung für Abdeckhauben von Maschinen mit bewegten Teilen |
| DE19728273C1 (de) * | 1997-07-02 | 1998-12-10 | Fuss Fritz Gmbh & Co | Verriegelungseinrichtung für Möbel |
| JPH1164177A (ja) * | 1997-08-22 | 1999-03-05 | Shinku Kogaku Kk | 真空チャンバー用のトランスファー装置 |
| JP3559176B2 (ja) | 1998-09-25 | 2004-08-25 | 大日本スクリーン製造株式会社 | 基板保持装置および基板処理装置 |
| JP3954287B2 (ja) * | 1999-06-28 | 2007-08-08 | 東京エレクトロン株式会社 | ウェハキャリア用蓋体の着脱装置 |
| KR20040092831A (ko) * | 2003-04-29 | 2004-11-04 | 아남반도체 주식회사 | Ｓｍｉｆ의 분리용이용 파드위치결정핀과 파드플레이트의결합구조 및 그 방법 |
| KR101381207B1 (ko) * | 2007-05-31 | 2014-04-04 | 주성엔지니어링(주) | 가동부재를 가지는 기판지지핀 홀더 및 이를 포함하는기판처리장치 |
| KR101433864B1 (ko) * | 2007-11-30 | 2014-09-01 | 주성엔지니어링(주) | 기판 승강 장치 |
| US20090314211A1 (en) * | 2008-06-24 | 2009-12-24 | Applied Materials, Inc. | Big foot lift pin |
| US20110014396A1 (en) * | 2009-07-14 | 2011-01-20 | Applied Materials, Inc. | Recirculating linear rolling bushing |
| US20110164955A1 (en) * | 2009-07-15 | 2011-07-07 | Applied Materials,Inc. | Processing chamber with translating wear plate for lift pin |
| DE202011051396U1 (de) * | 2011-09-22 | 2013-01-08 | Düspohl Maschinenbau Gmbh | Profilummantelungsmaschine |
| JP2017022343A (ja) * | 2015-07-15 | 2017-01-26 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体製造装置、ウエハリフトピン穴清掃治具 |
| US10490436B2 (en) * | 2015-11-04 | 2019-11-26 | Applied Materials, Inc. | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
| US10460977B2 (en) * | 2016-09-29 | 2019-10-29 | Lam Research Corporation | Lift pin holder with spring retention for substrate processing systems |
| US10262887B2 (en) * | 2016-10-20 | 2019-04-16 | Lam Research Corporation | Pin lifter assembly with small gap |
-
2019
- 2019-09-26 US US16/584,452 patent/US20200157678A1/en not_active Abandoned
- 2019-09-26 CN CN201980069562.2A patent/CN112889145A/zh active Pending
- 2019-09-26 JP JP2021525793A patent/JP7507759B2/ja active Active
- 2019-09-26 KR KR1020217017893A patent/KR102851410B1/ko active Active
- 2019-09-26 WO PCT/US2019/053259 patent/WO2020101808A1/en not_active Ceased
- 2019-10-29 TW TW108138971A patent/TWI822892B/zh active
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