JP2022501772A5 - - Google Patents

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Publication number
JP2022501772A5
JP2022501772A5 JP2021514985A JP2021514985A JP2022501772A5 JP 2022501772 A5 JP2022501772 A5 JP 2022501772A5 JP 2021514985 A JP2021514985 A JP 2021514985A JP 2021514985 A JP2021514985 A JP 2021514985A JP 2022501772 A5 JP2022501772 A5 JP 2022501772A5
Authority
JP
Japan
Prior art keywords
protective film
electron emitter
photocathode structure
substrate
photocathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021514985A
Other languages
English (en)
Japanese (ja)
Other versions
JP7185772B2 (ja
JP2022501772A (ja
Filing date
Publication date
Priority claimed from US16/259,317 external-priority patent/US10714295B2/en
Application filed filed Critical
Publication of JP2022501772A publication Critical patent/JP2022501772A/ja
Publication of JP2022501772A5 publication Critical patent/JP2022501772A5/ja
Application granted granted Critical
Publication of JP7185772B2 publication Critical patent/JP7185772B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021514985A 2018-09-18 2019-09-17 金属封入光電陰極電子エミッタ Active JP7185772B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862732937P 2018-09-18 2018-09-18
US62/732,937 2018-09-18
US16/259,317 US10714295B2 (en) 2018-09-18 2019-01-28 Metal encapsulated photocathode electron emitter
US16/259,317 2019-01-28
PCT/US2019/051372 WO2020060954A1 (en) 2018-09-18 2019-09-17 Metal encapsulated photocathode electron emitter

Publications (3)

Publication Number Publication Date
JP2022501772A JP2022501772A (ja) 2022-01-06
JP2022501772A5 true JP2022501772A5 (OSRAM) 2022-09-22
JP7185772B2 JP7185772B2 (ja) 2022-12-07

Family

ID=69773104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021514985A Active JP7185772B2 (ja) 2018-09-18 2019-09-17 金属封入光電陰極電子エミッタ

Country Status (8)

Country Link
US (1) US10714295B2 (OSRAM)
JP (1) JP7185772B2 (OSRAM)
KR (1) KR102545439B1 (OSRAM)
CN (2) CN112673448A (OSRAM)
DE (1) DE112019004659T5 (OSRAM)
IL (1) IL281346B2 (OSRAM)
TW (1) TWI800681B (OSRAM)
WO (1) WO2020060954A1 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11495428B2 (en) * 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths
CN116230469A (zh) * 2023-03-03 2023-06-06 宏策(浙江)半导体有限公司 一种光电阴极及其制备方法和应用

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3706885A (en) * 1971-01-29 1972-12-19 Gen Electric Photocathode-phosphor imaging system for x-ray camera tubes
US4008106A (en) * 1975-11-13 1977-02-15 The United States Of America As Represented By The Secretary Of The Army Method of fabricating III-V photocathodes
US5684360A (en) * 1995-07-10 1997-11-04 Intevac, Inc. Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
US6005247A (en) 1997-10-01 1999-12-21 Intevac, Inc. Electron beam microscope using electron beam patterns
KR100423849B1 (ko) * 2001-09-11 2004-03-22 한국과학기술원 매우 얇은 보호막을 갖는 광음극
US7015467B2 (en) 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
WO2010017136A1 (en) 2008-08-04 2010-02-11 Amir Dassoud Dabiran Microchannel plate photocathode
US10197501B2 (en) 2011-12-12 2019-02-05 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
US9601299B2 (en) * 2012-08-03 2017-03-21 Kla-Tencor Corporation Photocathode including silicon substrate with boron layer
CN104561901A (zh) 2013-10-22 2015-04-29 中国科学院上海硅酸盐研究所 一种掺铊的碘化铯复合薄膜及其制备方法
US10748730B2 (en) * 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10141155B2 (en) 2016-12-20 2018-11-27 Kla-Tencor Corporation Electron beam emitters with ruthenium coating
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter

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