CN112673448A - 金属囊封光电阴极电子发射器 - Google Patents

金属囊封光电阴极电子发射器 Download PDF

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Publication number
CN112673448A
CN112673448A CN201980059591.0A CN201980059591A CN112673448A CN 112673448 A CN112673448 A CN 112673448A CN 201980059591 A CN201980059591 A CN 201980059591A CN 112673448 A CN112673448 A CN 112673448A
Authority
CN
China
Prior art keywords
protective film
photocathode structure
photocathode
electron emitter
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980059591.0A
Other languages
English (en)
Chinese (zh)
Inventor
G·德尔加多
K·艾奥凯密迪
F·希尔
G·洛佩兹
R·F·加西亚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Priority to CN202311361910.8A priority Critical patent/CN118263073A/zh
Publication of CN112673448A publication Critical patent/CN112673448A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/32—Secondary-electron-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3425—Metals, metal alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3426—Alkaline metal compounds, e.g. Na-K-Sb
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
CN201980059591.0A 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器 Pending CN112673448A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311361910.8A CN118263073A (zh) 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862732937P 2018-09-18 2018-09-18
US62/732,937 2018-09-18
US16/259,317 US10714295B2 (en) 2018-09-18 2019-01-28 Metal encapsulated photocathode electron emitter
US16/259,317 2019-01-28
PCT/US2019/051372 WO2020060954A1 (en) 2018-09-18 2019-09-17 Metal encapsulated photocathode electron emitter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202311361910.8A Division CN118263073A (zh) 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器

Publications (1)

Publication Number Publication Date
CN112673448A true CN112673448A (zh) 2021-04-16

Family

ID=69773104

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201980059591.0A Pending CN112673448A (zh) 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器
CN202311361910.8A Pending CN118263073A (zh) 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202311361910.8A Pending CN118263073A (zh) 2018-09-18 2019-09-17 金属囊封光电阴极电子发射器

Country Status (8)

Country Link
US (1) US10714295B2 (OSRAM)
JP (1) JP7185772B2 (OSRAM)
KR (1) KR102545439B1 (OSRAM)
CN (2) CN112673448A (OSRAM)
DE (1) DE112019004659T5 (OSRAM)
IL (1) IL281346B2 (OSRAM)
TW (1) TWI800681B (OSRAM)
WO (1) WO2020060954A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116230469A (zh) * 2023-03-03 2023-06-06 宏策(浙江)半导体有限公司 一种光电阴极及其制备方法和应用

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11495428B2 (en) * 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040140432A1 (en) * 2002-10-10 2004-07-22 Applied Materials, Inc. Generating electrons with an activated photocathode
US20100025796A1 (en) * 2008-08-04 2010-02-04 Amir Massoud Dabiran Microchannel plate photocathode
WO2013090261A1 (en) * 2011-12-12 2013-06-20 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using ebccd detectors
CN104561901A (zh) * 2013-10-22 2015-04-29 中国科学院上海硅酸盐研究所 一种掺铊的碘化铯复合薄膜及其制备方法
US20180174794A1 (en) * 2016-12-20 2018-06-21 Kla-Tencor Corporation Electron Beam Emitters with Ruthenium Coating

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3706885A (en) * 1971-01-29 1972-12-19 Gen Electric Photocathode-phosphor imaging system for x-ray camera tubes
US4008106A (en) * 1975-11-13 1977-02-15 The United States Of America As Represented By The Secretary Of The Army Method of fabricating III-V photocathodes
US5684360A (en) * 1995-07-10 1997-11-04 Intevac, Inc. Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
US6005247A (en) 1997-10-01 1999-12-21 Intevac, Inc. Electron beam microscope using electron beam patterns
KR100423849B1 (ko) * 2001-09-11 2004-03-22 한국과학기술원 매우 얇은 보호막을 갖는 광음극
US9601299B2 (en) * 2012-08-03 2017-03-21 Kla-Tencor Corporation Photocathode including silicon substrate with boron layer
US10748730B2 (en) * 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040140432A1 (en) * 2002-10-10 2004-07-22 Applied Materials, Inc. Generating electrons with an activated photocathode
US20100025796A1 (en) * 2008-08-04 2010-02-04 Amir Massoud Dabiran Microchannel plate photocathode
WO2013090261A1 (en) * 2011-12-12 2013-06-20 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using ebccd detectors
CN104561901A (zh) * 2013-10-22 2015-04-29 中国科学院上海硅酸盐研究所 一种掺铊的碘化铯复合薄膜及其制备方法
US20180174794A1 (en) * 2016-12-20 2018-06-21 Kla-Tencor Corporation Electron Beam Emitters with Ruthenium Coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116230469A (zh) * 2023-03-03 2023-06-06 宏策(浙江)半导体有限公司 一种光电阴极及其制备方法和应用

Also Published As

Publication number Publication date
US10714295B2 (en) 2020-07-14
US20200090895A1 (en) 2020-03-19
TW202025197A (zh) 2020-07-01
KR20210046820A (ko) 2021-04-28
KR102545439B1 (ko) 2023-06-20
IL281346B1 (en) 2024-04-01
DE112019004659T5 (de) 2021-06-17
IL281346A (en) 2021-04-29
JP7185772B2 (ja) 2022-12-07
CN118263073A (zh) 2024-06-28
WO2020060954A1 (en) 2020-03-26
JP2022501772A (ja) 2022-01-06
IL281346B2 (en) 2024-08-01
TWI800681B (zh) 2023-05-01

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Application publication date: 20210416