JP2022188433A5 - - Google Patents

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Publication number
JP2022188433A5
JP2022188433A5 JP2021096456A JP2021096456A JP2022188433A5 JP 2022188433 A5 JP2022188433 A5 JP 2022188433A5 JP 2021096456 A JP2021096456 A JP 2021096456A JP 2021096456 A JP2021096456 A JP 2021096456A JP 2022188433 A5 JP2022188433 A5 JP 2022188433A5
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JP
Japan
Prior art keywords
film
film forming
forming means
cathode unit
rotary cathode
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JP2021096456A
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English (en)
Japanese (ja)
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JP7716895B2 (ja
JP2022188433A (ja
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Priority to JP2021096456A priority Critical patent/JP7716895B2/ja
Priority claimed from JP2021096456A external-priority patent/JP7716895B2/ja
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Publication of JP2022188433A5 publication Critical patent/JP2022188433A5/ja
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JP2021096456A 2021-06-09 2021-06-09 成膜装置 Active JP7716895B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021096456A JP7716895B2 (ja) 2021-06-09 2021-06-09 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021096456A JP7716895B2 (ja) 2021-06-09 2021-06-09 成膜装置

Publications (3)

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JP2022188433A JP2022188433A (ja) 2022-12-21
JP2022188433A5 true JP2022188433A5 (https=) 2024-05-30
JP7716895B2 JP7716895B2 (ja) 2025-08-01

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JP2021096456A Active JP7716895B2 (ja) 2021-06-09 2021-06-09 成膜装置

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JP (1) JP7716895B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024118247A (ja) * 2023-02-20 2024-08-30 キヤノントッキ株式会社 成膜装置、成膜方法及び電子デバイスの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014116059A (ja) * 2012-11-16 2014-06-26 Iza Corp トンネルバリア層又はゲート絶縁膜の製造方法及びトンネルバリア層又はゲート絶縁膜の製造装置
JP2015216096A (ja) * 2014-04-25 2015-12-03 シャープ株式会社 有機エレクトロルミネッセンス表示装置用基板、有機エレクトロルミネッセンス表示装置、有機エレクトロルミネッセンス表示装置の製造方法、及び、有機エレクトロルミネッセンス表示装置の製造装置
US10886468B2 (en) * 2017-04-14 2021-01-05 Sakai Display Products Corporation Manufacturing method and manufacturing apparatus for organic EL display device

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