JP2022127343A - Turn bar for conveying thin film - Google Patents

Abstract

To provide a turn bar for conveying a thin film that can be easily replaced only at the defective point when a defect occurs on the roll-shaped peripheral surface.SOLUTION: An inventive turn bar for conveying a thin film includes: a thin film supporting member 110 having an arcuate roll-shaped peripheral surface 112a on which a gas ejection portion for ejecting gas to a thin film continuous body W is formed; a joint member 120 for connecting the two thin film supporting members 110; and a fastening bolt 140 for fastening the thin film supporting member 110 and the joint member 120, wherein there are formed a through-path for air supply 111c which communicates with the gas ejection portion and extends in the axial direction of the thin film support member 110, a bolt insertion hole 111d which passes through the fastening bolt 140 and extends in the axial direction, and a screw hole 111e screwed with the fastening bolt 140, and there are formed a through-hole for ventilation 121a extending in the axial direction in communication with the through-path for air supply 111c of the thin film support member 110, a bolt insertion hole 122 extending in the axial direction while passing through the fastening bolt 140, and a screw hole 123 screwed with the fastening bolt 140, in the joint member 120.SELECTED DRAWING: Figure 2

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turn bar for conveying a thin film that supports a continuous thin film in a non-contact levitation state with gas to change the conveying direction.

2. Description of the Related Art Conventionally, a thin film conveying device for conveying a thin film continuous body such as a thin film sheet or a thin film includes a turn bar for changing the conveying direction of the thin film continuous body.
Such a turn bar comprises a shaft member, two rotating rollers arranged at both ends of the shaft member, and a conveying member made of a porous material arranged between the two rotating rollers, A turn bar is known in which gas is overflowed from a porous material to levitate a continuous web-like work and convey the work while changing the conveying direction (see, for example, Patent Document 1).

JP 2020-132412 A

In the turn bar described above, the conveying member is a roll member having a longitudinal dimension of at least the same width as the web, in order to levitate the entire width of the web by gas pressure.
Therefore, since the conveying member is an elongated roll member extending in the longitudinal direction of the bar, a portion of the roll-shaped peripheral surface of the conveying member facing the web is clogged or damaged. Even in such a case, it is necessary to replace the entire conveying member, that is, the conveying member itself, and there is room for further improvement in maintainability of the turn bar.

Therefore, the present invention is to solve the problems of the prior art as described above. That is, the object of the present invention is to remove only the member at the location where the trouble occurs when the trouble occurs on the roll-shaped peripheral surface. To provide a turn bar for transporting a thin film which can be easily exchanged.

The invention according to claim 1 comprises a plurality of thin film supporting members each having a roll-shaped circumferential surface formed with a gas ejecting portion for ejecting gas toward a thin film continuum, and a joint member coaxially connecting the thin film supporting members to each other. A turn bar for transporting a thin film, comprising a fastening member for fastening the joint member to the thin film support member, and supporting a thin film continuous body being transported in a non-contact floating state by gas to change the transport direction, wherein the thin film support A member includes an air supply through-path portion that communicates with the gas ejection portion and extends in the axial direction, a fastening insertion hole portion that passes through the fastening member and extends in the axial direction, and a screw hole portion that is screwed with the fastening member. wherein the joint member includes a ventilation through hole portion communicating with the air supply through passage portion of the thin film support member and extending in the axial direction, and a fastening insertion hole portion extending in the axial direction through the fastening member. and a threaded hole portion to be screwed with the fastening member, the above-described problem is solved.

In addition to the configuration of the thin film conveying turn bar described in claim 1, the invention according to claim 2 is characterized in that the joint member is inserted into the thin film support member along the axial direction, It is intended to further solve the problem.

The invention according to claim 3, in addition to the structure of the turn bar for transporting thin films according to claim 1 or claim 2, is characterized in that when the thin film supporting member and the joint member are fastened with the fastening member, the thin film is A sealing member that seals a gap between the air supply through-path portion of the support member and the ventilation through-hole portion of the joint member is disposed between the joint member and the thin film support member, This solves the problems described above.

According to a fourth aspect of the invention, in addition to the structure of the turn bar for transporting thin films according to the first or third aspect, the thin film support member and the joint member are configured to connect the fastening member with the thin film support member. By inserting and fastening the thin film support member or the joint member from one end side in the axial direction, the above-described problems can be further solved.

The invention according to claim 5, in addition to the configuration of the turn bar for transporting thin films according to any one of claims 1 to 4, is characterized in that the thin film supporting member has a fastening insertion hole portion and a screw hole portion. , are arranged at equal intervals on the end surface of the thin film support member, and the fastening insertion hole portion and the screw hole portion of the joint member are arranged at equal intervals on the end surface of the joint member. This will further solve the problem.

The invention according to claim 6 is, in addition to the configuration of the turn bar for transporting thin films according to any one of claims 1 to 5, wherein the thin film support member and the joint member are annular, and the thin film A closing member that closes the end opening of the supporting member is arranged coaxially with the thin film supporting member, and the closing member has a vent portion that communicates with the hollow portion of the thin film supporting member. , which further solves the problems described above.

According to the first aspect of the present invention, there is provided a turn bar for conveying a thin film, comprising a plurality of thin film support members having a roll-shaped peripheral surface formed with a gas ejection portion for ejecting gas toward a thin film continuum, and the thin film support members coaxially arranged with each other. By providing the joint member to be connected and the fastening member for fastening the joint member to the thin film support member, the thin film continuous body being transported can be supported in a non-contact floating state by gas and the transport direction can be changed. It is possible to easily adjust the length of the thin film transfer turn bar and easily adjust the gas ejection amount in the longitudinal direction of the thin film transfer turn bar simply by increasing or decreasing the number of thin film support members and joint members. can.
The thin film support member includes an air supply through-path portion communicating with the gas ejection portion and extending in the axial direction, a fastening insertion hole portion extending in the axial direction through which the fastening member is inserted, and a screw hole portion screwed into the fastening member. and the joint member is fastened with a ventilation through hole portion communicating with the air supply through passage portion of the thin film support member and extending in the axial direction, and a fastening insertion hole portion extending in the axial direction through which the fastening member is inserted. The thin film support member and the joint member are connected by inserting the fastening member from the fastening insertion hole portion of the thin film support member and screwing it into the screw hole portion of the joint member. can be fastened, and the thin film support member and the joint member can be freely fastened by inserting the fastening member from the fastening insertion hole portion of the joint member and screwing it into the screw hole portion of the thin film support member. If clogging or damage occurs on the peripheral surface, the thin film support member can be easily removed by removing the fastening member from the thin film support member and the joint member and dismantling the turn bar for transporting the thin film. can be replaced.

According to the thin film transport turn bar of the second aspect of the invention, in addition to the effects of the thin film transport turn bar of the first aspect of the invention, the joint member is inserted in the thin film support member along the axial direction. As a result, the surface area of the thin film supporting member that supplies air to the thin film continuum becomes larger than the thin film conveying turn bar that is inserted in the joint member that does not support the thin film continuum. It can be supported more uniformly in a non-contact floating state.

According to the turn bar for transporting thin films according to the third aspect of the invention, in addition to the effects of the turn bar for transporting thin films according to the first or second aspect of the invention, the sealing member is provided between the thin film supporting member and the joint member. By being disposed between, when the thin film support member and the joint member are fastened with the fastening member, the gap between the air supply through-path portion of the thin film support member and the ventilation through-hole portion of the joint member is sealed. Since it is sealed by the member, it is possible to prevent gas from leaking out from the gap between the air supply through-path portion of the thin film support member and the ventilation through-hole portion of the joint member.

According to the turn bar for transporting thin films according to the invention of claim 4, in addition to the effects of the turn bar for transporting thin films of the invention according to claim 1 or claim 3, the thin film supporting member and the joint member , the fastening member is inserted through the thin film support member or the joint member from one end side in the axial direction and fastened, so that the fastening member is inserted through the thin film support member or the joint member from both sides in the axial direction and the thin film conveying turn bar is connected. Since the assembling process of the turn bar for transporting thin films is simplified compared to the case of assembling, the turn bar for transporting thin films can be efficiently assembled or disassembled.

According to the thin film transport turn bar of the invention according to claim 5, in addition to the effects of the thin film transport turn bar of the invention according to claims 1 to 4, the fastening insertion hole portion and the screw hole portion of the thin film support member are arranged at equal intervals on the end surface of the thin film support member, and the fastening insertion hole portion and the screw hole portion of the joint member are arranged at equal intervals on the end surface of the joint member, so that the joint member and When the thin film support member is fastened with the fastening member, the fastening force of the fastening member acts almost evenly in the circumferential direction, so gas leakage from the contact surface between the joint member and the thin film support member can be prevented. Not only can it be reliably prevented, distortion due to the fastening force of the fastening member is less likely to occur in the thin film conveying turn bar, the straightness of the thin film conveying turn bar is improved, and the thin film continuum is conveyed more stably. be able to.

According to the turn bar for transporting a thin film according to the sixth aspect of the invention, in addition to the effects of the turn bar for transporting a thin film according to the first to fifth aspects of the invention, the thin film supporting member and the joint member are annular, and the thin film A closing member that closes the end opening of the supporting member is arranged coaxially with the thin film supporting member, and the closing member has an air hole portion that communicates with the hollow portion of the thin film supporting member. Since the hollow portion of the thin film supporting member communicates with the outside, even if the temperature of the hollow portion of the thin film supporting member rises and the air accumulated in the hollow portion of the thin film supporting member expands while the thin film conveying turn bar is assembled, the hollow portion Accumulated air can be easily discharged.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a mode of use of a thin film conveying device equipped with a thin film conveying turn bar according to an embodiment of the present invention; The perspective view of the turn bar for thin film conveyance shown in FIG. FIG. 2 is a perspective exploded view of the thin film transfer turn bar shown in FIG. 1 ; The left side view seen from IVA of the turn bar for thin film conveyance shown in FIG. The right side view seen from IVB of the turn bar for thin film conveyance shown in FIG. IVC-IVC sectional view of FIG. 4A. FIG. 3 is a left side view of the thin film support member shown in FIG. 2; VB-VB sectional view of FIG. 5A. VC-VC cross-sectional view of FIG. 5A. Fig. 3 is a left side view of the joint member shown in Fig. 2; VIB-VIB sectional view of FIG. 6A.

The present invention consists of a plurality of thin film support members having a roll-shaped circumferential surface formed with gas ejection portions for ejecting gas toward a thin film continuum, a joint member for coaxially connecting the thin film support members, and the thin film support member. and a fastening member for fastening a joint member to the thin film conveying turn bar, wherein the thin film support member is inserted through the air supply through-path portion communicating with the gas ejection portion and extending in the axial direction and the fastening member. and a screw hole portion for screwing with the fastening member. and a fastening insertion hole extending in the axial direction through which the fastening member is inserted, and a threaded hole portion that is screwed with the fastening member, and only the thin film support member that has a problem when the roll-shaped peripheral surface has a problem Any specific embodiment may be used as long as is interchangeable.

For example, the roll-shaped peripheral surface of the thin film support member may be formed on the entire periphery of the thin film support member or may be formed only on a part of the thin film support member, as long as it is arcuate.
Therefore, the cross-sectional shape of the thin film support member may be circular as well as fan-shaped.

For example, the gas ejection part of the thin film supporting member may have any form as long as it can supply the gas to the thin film continuum. It may be fine holes formed in the roll-shaped peripheral surface of the supporting member.

For example, the gas ejected from the gas ejecting portion of the thin film support member is preferably air, but other gases may be used.

For example, the thin film support member is preferably a hollow cylindrical body from the viewpoint of weight reduction, but may be a solid columnar body.
This also applies to joint members.

For example, the fastening member may be any member as long as it can fasten the joint member to the thin film support member and can be screwed into the threaded hole portion of the thin film support member or the threaded hole portion of the joint member.
In particular, if it is a member that can be inserted into the thin film support member or the joint member from one direction and the joint member can be successively tightened to the thin film support member, it is formed of a head having a hexagonal hole portion and a screw portion having a smaller diameter than the head. A hexagon socket head bolt is an example, but the fastening member may be a member other than a hexagon socket head bolt.

A turn bar for transporting a thin film according to an embodiment of the present invention will be described below with reference to FIGS. 1 to 6B.

<1. Overview of transport equipment for thin films>
First, with reference to FIG. 1, an outline of a thin film transfer apparatus having a thin film transfer turn bar according to an embodiment of the present invention will be described.
FIG. 1 is a perspective view of a thin film conveying apparatus equipped with a thin film conveying turn bar according to an embodiment of the present invention.

The thin film conveying device 10 is a device for conveying a thin film continuous body or the like, and as shown in FIG. It is equipped with an inspection device 12 for inspecting the state of the thin film continuous W to be taken, and a rod-shaped thin film transport turn bar 100 for supporting the thin film continuous during transport in a non-contact floating state by air and changing the transport direction. .

<2. Outline of turn bar for transporting thin film>
Next, based on FIGS. 2 to 4C, the outline of the thin film transfer turn bar 100 will be described.
2 is a perspective view showing how the turn bar for transporting thin films shown in FIG. 1 is used, FIG. 3 is a perspective exploded view of the turn bar for transporting thin films shown in FIG. 1, and FIG. FIG. 4B is a right side view of the thin film transfer turn bar shown in FIG. 2 as seen from IVB; FIG. 4C is a cross-sectional view taken along IVC-IVC in FIG. 4A; be.

The thin film conveying turn bar 100 includes a cylindrical thin film support member 110, a cylindrical joint member 120 for coaxially connecting the two thin film support members 110, and a thin film support member 110 arranged coaxially with the thin film support member 110. A closing member 130 for closing the end opening of the supporting member 110 and a fastening bolt (fastening member) 140 for fastening the thin film supporting member 110 and the joint member 120 or the closing member 130 are provided.
The turn bar 100 for transporting the thin film also includes a washer 150 interposed between each of the thin film support member 110, the joint member 120 and the closing member 130 and the fastening bolt 140, and between the thin film support member 110 and the joint member 120 and between the thin film support member 110 and the joint member 120. An O-ring (sealing member) 160 is provided between the membrane support member 110 and the closure member 130 .
Further, the closing member 130 of the thin film transfer turn bar 100 is provided with an air supply port 170 connected to an air pipe connected to an air supply source (not shown).

The fastening bolt 140 is, as shown in FIG. 3, a hexagon socket head bolt formed from a cylindrical head having a hexagon socket and a threaded portion having a smaller diameter than the head.
In this embodiment, a short bolt 141 with a short threaded portion and a long bolt 142 with a long threaded portion are used as the fastening bolts 140 .
The diameter of the head of the short bolt 141 and the diameter of the head of the long bolt 142 are equal.

<3. Thin film supporting member>
Next, the thin film support member 110 that constitutes the turn bar 100 for thin film transfer will be described with reference to FIGS. 3, 4C, and 5A to 5C.
5A is a left side view of the thin film support member shown in FIG. 2, FIG. 5B is a cross-sectional view taken along line VB--VB of FIG. 5A, and FIG. 5C is a cross-sectional view taken along line VC--VC of FIG. 5A.

The thin film supporting member 110 is a cylindrical member as shown in FIG. It is

As shown in FIG. 5B, the base member 111 is formed with concave flange seat portions 111a on both end faces.
Furthermore, a hollow portion 111b extending in the Z direction, which is the axial direction, and passing through the thin film support member 110 is formed in the center of the flange seat portion 111a.
A diameter D of the flange seat portion 111 a is substantially equal to the diameter of the joint member 120 .
In addition, on the bottom surface of the flange seat portion 111a, an air supply through-path (air-supply through-path portion) 111c extending in the Z direction (axial direction) and communicating with the porous material 112 is provided. A bolt insertion hole (fastening insertion hole portion) 111d through which the long bolt 142 can be inserted, and a screw hole (screw hole portion) 111e into which the screw portion of the short bolt 141 is screwed are formed.

As shown in FIG. 5, the air supply through-path 111c is formed of a through-path main body 111c1 extending in the Z direction and penetrating the thin film support member 110, and branch holes 111c2 laterally branched from the through-path main body 111c1. It is
The branch hole 111c2 extends in the radial direction and communicates the through-path main body 111c1 and the porous material 112 with each other.

As shown in FIG. 5C, the bolt insertion hole 111d extends in the Z direction and penetrates the thin film support member 110, and a long bolt 142, which is a hexagon socket bolt, can be freely inserted.
That is, the bolt insertion hole 111d allows insertion of a large-diameter portion 111d1 having a larger diameter than the outer diameter of the head of the long bolt 142 and the screw portion of the long bolt 142. A small diameter portion 111d2 having a larger diameter than the outer diameter of the threaded portion of the long bolt 142 and a smaller diameter than the outer diameter of the head portion of the long bolt 142 is formed.
The center of the large diameter portion 111d1 coincides with the center of the small diameter portion 111d2.

The center of the air supply through-passage 111c (through-passage main body 111c1), the center of the bolt insertion hole 111d, and the center of the screw hole 111e formed in this way are arranged on the same circumference.
Further, the bolt insertion holes 111d and the screw holes 111e are arranged at equal intervals as shown in FIG. 5A.

The surface of the porous material 112 in contact with the base material 111 communicates with the outermost roll-shaped peripheral surface 112a.
As a result, the gas supplied to the porous material 112 from the branch holes 111c2 of the base material 111 flows into the surface in contact with the base material 111 and is ejected from the roll-shaped peripheral surface 112a.
Therefore, the roll-shaped peripheral surface 112a of the porous material 112 is formed with a gas ejection portion that ejects gas toward the thin film continuum.
Further, it can be said that the air supply through-path 111c communicates with the gas ejection portion.

<4. Joint member>
Next, the joint member 120 constituting the turn bar 100 for transporting thin films will be described with reference to FIGS. 3, 4C, 6A and 6B.
6A is a left side view of the joint member shown in FIG. 2, and FIG. 6B is a sectional view taken along line VIB-VIB of FIG. 6A.

The joint member 120 is an annular member as shown in FIG. 3, and is inserted into the thin film support member 110 along the Z direction as shown in FIG. 4C and the like.
The end surface of the joint member 120 includes a concave sealing member seat portion 121 in which an O-ring 160 is placed, a bolt insertion hole (fastening insertion hole portion) 122, and a screw portion of a long bolt 142. and a screw hole (screw hole portion) 123 to be screwed together.

As shown in FIG. 6A, the sealing member seat portions 121 are circular in a side view, and are formed on both end surfaces of the joint member 120 as shown in FIG. 6B.
Further, at the center of the sealing member seat portion 121, a ventilation through-hole (ventilation through-hole portion) 121a extending in the Z direction, which is the axial direction, and penetrating the joint member 120 is formed.

The ventilation through hole 121a communicates with the air supply through passage 111c of the thin film support member 110 as shown in FIG.
The center of the ventilation through-hole 121 a coincides with the center of the sealing member seat portion 121 .
Further, the diameter of the ventilation through hole 121a is smaller than the outer diameter of the sealing member seat portion 121, as shown in FIG. 6A.
Therefore, the sealing member seat portion 121 is formed with a seat surface 121 b that contacts the O-ring 160 .

As shown in FIG. 6B, the bolt insertion hole 122 extends in the Z direction and penetrates the joint member 120, through which a short bolt 141, which is a hexagon socket head bolt, can be freely inserted.
That is, the bolt insertion hole 122 includes a large-diameter portion 122a having a diameter larger than the outer diameter of the head of the short bolt 141 and a short bolt 141 through which the threaded portion of the short bolt 141 can be inserted. and a small diameter portion 122b having a diameter larger than the outer diameter of the threaded portion of the long bolt 142 and smaller than the outer diameter of the head portion of the long bolt 142. As shown in FIG.
The center of the large diameter portion 122a coincides with the center of the small diameter portion 122b.

The centers of the through holes 121a for ventilation, the centers of the bolt insertion holes 122, and the centers of the screw holes 123 formed in this manner are arranged on the same circumference.
Moreover, the bolt insertion holes 122 and the screw holes 123 are arranged at regular intervals on the end face of the joint member 120, respectively, as shown in FIG. 6A.

<5. Closing member>
Next, the closing member 130 constituting the turn bar 100 for thin film transfer will be described with reference to FIGS. 3 to 4C.

The closing member 130 is a member arranged at the end opening portion of the thin film supporting member 110, and includes a left closing member 130L serving as the left end of the thin film conveying turn bar 100 and a right end of the thin film conveying turn bar 100. and a right closing member 130R.
Both the left blocking member 130L and the right blocking member 130R are formed of a disc-shaped flange portion 131 and a grip portion 132 protruding from the vicinity of the center of the flange portion 131 in the Z direction.

The diameter of the flange portion 131 is approximately equal to the outer diameter of the flange seat 111a of the membrane support member 110, as shown in FIGS. 4A-4C.
In the flange portion 131, a bolt insertion hole (bolt insertion hole portion) 131a extending in the axial direction (Z direction) of the thin film conveying turn bar 100 and through which the short bolt 141 can be inserted, and an air supply port 170 are screwed together. A flexible air supply port mounting hole (air supply port mounting hole portion) 131b and a vent hole (vent hole portion) 131c communicating with the hollow portion 111b of the thin film support member 110 are formed.
The positions of the bolt insertion holes 131a are different between the left blocking member 130L and the right blocking member 130R.

The bolt insertion hole 131a penetrates the flange portion 131 in the axial direction, and a short bolt 141, which is a hexagon socket head bolt, can be freely inserted therethrough.
That is, the bolt insertion hole 131a includes a large diameter portion larger than the outer diameter of the head of the short bolt 141 for accommodating the head of the short bolt 141, and a short bolt 141 through which the threaded portion of the short bolt 141 can be inserted. A small-diameter portion having a diameter larger than the outer diameter of the threaded portion and smaller than the outer diameter of the head of the short bolt 141 is formed.
The center of this large diameter portion coincides with the center of the small diameter portion.

The air supply port mounting hole 131b passes through the flange portion 131 in the axial direction, is formed with a female thread for screwing with the air supply port 170, and is tapered toward the thin film support member 110 side. ing.
Therefore, the diameter of the air supply port attachment hole 131b is reduced toward the thin film support member 110 side.
The center of the air supply port attachment hole 131b and the center of the bolt insertion hole 131a are arranged on the same circumference.

The vent portion 131c is provided near the grip portion 132 and passes through the flange portion 131 in the axial direction.
The center of the vent hole portion 131c is arranged on the same straight line as the center O of the flange portion 131 (that is, the axial center of the thin film conveying turn bar 100) and the center of the air supply port mounting hole 131b.

The diameter of the grip portion 132 is smaller than the diameter of the flange portion 131, as shown in FIGS. 4A and 4B.

<6. O-ring>
The thickness of the O-ring 160 is larger than the depth of the concave sealing member seat portion 121 provided in the joint member 120 .
As a result, when the thin film support member 110 and the joint member 120 are fastened with the fastening bolt 140, the O ring 160 is crushed, and the air supply through-path 111c of the thin film support member 110 and the joint member 120 are separated from each other. can seal the gap with the ventilation through hole 121a.

<7. Assembly of turn bar for transporting thin film>
Next, based on FIG. 3, how to assemble the thin film transfer turn bar 100 will be described.

To assemble the thin film transfer turn bar 100, as shown in FIG. It is inserted into the concave flange seat portion 111a.
Then, the washer 150 and the short bolt are inserted into the bolt insertion hole 122 of the joint member 120 in a state in which the through hole 121a for ventilation of the joint member 120 and the through-passage main body 111c1 of the through-passage 111c for air supply of the thin film support member 110 face each other. 141 is inserted, and the short bolt 141 and the screw hole 111e of the thin film support member 110 are screwed together to fasten the thin film support member 110 and the joint member 120 together.
At this time, by fastening the thin film support member 110 and the joint member 120 with the short bolt 141, the joint member 120 is pressed against the thin film support member 110 by the head of the short bolt 141 and the washer 150, causing an axial force ( This axial force crushes the O-ring 160 and suppresses leakage of air from the gap between the thin film support member 110 and the joint member 120 .

With the O-ring 160 placed on the sealing member seat 121 on the exposed side of the joint member 120 , the joint member 120 is inserted into the concave flange seat 111 a provided in the thin film support member 110 .
Then, with the through-passage body 111c1 of the air-supply through-passage 111c of the thin-film support member 110 facing the ventilation through-hole 121a of the joint member 120, the washer 150 is inserted into the bolt insertion hole 111d of the thin-film support member 110. The thin bolt 142 is inserted, and the long bolt 142 and the screw hole 123 of the joint member 120 are screwed together to fasten the thin film support member 110 and the joint member 120 .
At this time, the thin film support member 110 and the joint member 120 are fastened with the long bolt 142, so that the thin film support member 110 is pressed against the joint member 120 by the head of the long bolt 142 and the washer 150, and the axial force is generated. This axial force crushes the O-ring 160 and prevents air from leaking out from the gap between the thin film support member 110 and the joint member 120 .

Through the above procedure, the thin film supporting member 110 and the joint member 120 are fastened to a predetermined length with the fastening bolts 140, and the end opening of the thin film supporting member 110 is closed with the closing member .
At this time, the washer 150 and the washer 150 are inserted into the bolt insertion holes 131a of the closing member 130 in a state in which the air supply port attachment hole 131b of the closing member 130 and the through passage body 111c1 of the air supply through passage 111c of the thin film support member 110 face each other. The short bolt 141 is inserted, and the short bolt 141 and the screw hole 111e of the thin film support member 110 are screwed together to fasten the thin film support member 110 and the closing member 130 together.

<8. Effect of Turn Bar 100 for Transporting Thin Film>
According to the thin film conveying turn bar 100 of the present embodiment described above, a plurality of thin film supporting members 110 having gas ejection portions for ejecting gas toward the thin film continuous body W are formed on the roll-shaped peripheral surface 112a, and the thin film supporting members The joint member 120 that coaxially connects the thin film continuum 110 to each other and the fastening bolt 140 that is a fastening member that fastens the joint member 120 to the thin film support member 110 allows the thin film continuum W being conveyed to be non-removed by the gas. Not only can the conveying direction be changed by supporting it in a contact floating state, but also the length of the thin film conveying turn bar 100 can be easily adjusted by simply increasing or decreasing the number of the thin film supporting members 110 and the joint members 120. The ejection amount can be easily adjusted in the longitudinal direction of the thin film transfer turn bar 100 .
Furthermore, through the thin film support member 110, an air supply through passage 111c, which is an air supply through passage portion that extends in the Z direction, which is the axial direction, and communicates with the gas ejection portion, and a fastening bolt 140 that extends in the Z direction are freely inserted. and a screw hole 111e, which is a screw hole portion to be screwed with the fastening bolt 140. a ventilation through-hole 121a that is a ventilation through-hole portion that communicates with the air supply through-path portion 111c; a bolt insertion hole 122 that is a fastening insertion hole portion that extends in the Z direction and allows the fastening bolt 140 to be inserted; Since the screw hole 123, which is a screw hole portion to be screwed with the fastening bolt 140, is formed, the fastening bolt 140 can be inserted from the bolt insertion hole 111d of the thin film support member 110 and screwed into the screw hole 123 of the joint member 120. The thin film support member 110 and the joint member 120 can be freely fastened together, and the fastening bolt 140 is inserted from the bolt insertion hole 122 of the joint member 120 and screwed into the screw hole 111e of the thin film support member 110 to screw the thin film support member. 110 and the joint member 120 can be freely fastened, and therefore, in the event that a problem such as clogging or breakage occurs on the roll-shaped peripheral surface, the fastening bolt 140 is removed from the thin film support member 110 and the joint member 120 and used for thin film transport. By dismantling the turn bar 100, it is possible to replace only the thin film support member 110 in which a problem has occurred.

In addition, since the joint member 120 is inserted in the thin film support member 110 along the Z direction, the thin film support member 110 does not support the thin film continuum W. In comparison, the surface area of the thin film support member 110 that supplies air to the thin film continuum W is larger, so the thin film continuum W can be more uniformly supported in a non-contact floating state.

Further, since the O-ring 160, which is a sealing member, is arranged between the thin film support member 110 and the joint member 120, when the thin film support member 110 and the joint member 120 are fastened with the fastening bolt 140, Since the gap between the air supply through-path 111c of the thin film support member 110 and the ventilation through-hole 121a of the joint member 120 is sealed by the O-ring 160, the air supply through-path 111c of the thin film support member 110 and the joint member 120 are sealed. It is possible to prevent gas from leaking out from the gap with the ventilation through hole 121a.

Further, the thin film support member 110 and the joint member 120 are fastened by inserting the fastening bolt 140 into the thin film support member 110 or the joint member 120 from one end side in the axial direction. Since the assembly process of the thin film conveying turn bar 100 is simplified as compared with the case where the thin film conveying turn bar 100 is assembled by inserting it into the thin film supporting member 110 or the joint member 120, the thin film conveying turn bar 100 can be efficiently assembled or dismantled. can do.

In addition, a recessed sealing member seat portion 121, which is a recessed sealing member seat portion having an outer diameter larger than that of the ventilation through hole 121a, is formed on the end surface of the joint member 120. Since the depth of the seat portion 121 is smaller than the thickness of the O-ring 160 , the thin film support member 110 and the joint member 120 are fastened with the fastening bolt 140 while the sealing member is placed on the sealing member seat portion 121 . Since the gap between the air supply through-path 111c of the thin film support member 110 and the ventilation through-hole 121a of the joint member 120 is sealed only by fastening with , the air supply through-path 111c of the thin film support member 110 and the joint member The gap between the ventilation through hole 121a of 120 and the through hole 121a can be easily sealed.

In addition, the bolt insertion holes 111d and the screw holes 111e of the thin film support member 110 are arranged at regular intervals on the end surface of the thin film support member 110, and the bolt insertion holes 122 and the screw holes 123 of the joint member 120 are arranged at equal intervals. Since the joint member 120 and the thin film support member 110 are arranged at equal intervals on the end surface of the joint member 120, the fastening force of the fastening bolt 140 when fastening the joint member 120 and the thin film support member 110 with the fastening bolt 140 acts substantially uniformly in the circumferential direction. Therefore, not only is it possible to more reliably prevent leakage of gas from the contact surface between the joint member 120 and the thin film supporting member 110 , but also the thin film conveying turn bar 100 is prevented from being distorted due to the fastening force of the fastening bolt 140 . The straightness of the thin film transport turn bar 100 is improved, and the thin film continuous body W can be transported more stably.

Furthermore, the bolt insertion holes 111d of the thin film support member 110 face the threaded holes 123 of the joint member 120, and the bolt insertion holes 122 of the joint member 120 face the threaded holes 111e of the thin film support member 110. The turn bar 100 for transporting thin films can be formed by preparing only one type of member 110 and one type of joint member 120 .

<Modification>
Although the thin film transport turn bar 100 according to one embodiment of the present invention has been described above, the thin film transport turn bar 100 of the present invention is not limited to the thin film transport turn bar 100 of the above embodiment.

For example, the amount of gas ejected from each thin film support member may be the same, or may be different in order to adjust the amount of gas ejected in the longitudinal direction.

For example, in this embodiment, the porous material 112 is impregnated with resin, but the porous material may not be impregnated with resin.
In addition, the surface of the porous material may be clogged in order to prevent self-excited vibration.

For example, the roll-shaped peripheral surface 112a of the porous material 112 may be impregnated with resin to prevent dust from flying from the surface.
Further, both side surfaces of the porous material 112 are preferably sealed to prevent gas from leaking out.

For example, although the threaded hole 123 of the joint member 120 has a bottom in the present embodiment, it may penetrate the joint member 120 .

For example, in the present embodiment, the O-ring 160 was arranged on the sealing member seat portion 121 of the joint member 120, but the sealing member for arranging the O-ring 160 on the thin film support member 110 side is provided. A seat may be provided.
Even when the concave sealing member seat portion is provided on the thin film supporting member 110 side, the diameter of the sealing member seat portion is larger than the diameter of the air supply through-path 111 c of the thin film supporting member 110 . .

For example, in this embodiment, two types of fastening bolts 140, the short bolt 141 and the long bolt 142, are used. One type of bolt may be used by adjusting the length, the position of the large diameter portion, the thickness of the flange portion of the closing member, and the like.

DESCRIPTION OF SYMBOLS 10... Transport apparatus for thin film 11... Winding machine 12... Inspection device 100... Turn bar for transporting thin film 110... Thin film support member 111... Base material 111a... For concave flange Seat portion 111b Hollow portion 111c Through passage for air supply (through passage portion for air supply)
111c1... Penetration main body 111c2... Branch hole 111d... Bolt insertion hole (fastening insertion hole portion)
111d1 Large diameter portion 111d2 Small diameter portion 111e Screw hole (screw hole portion)
112... Porous material 112a... Roll-shaped peripheral surface

Reference numeral 120: Joint member 121: Concave sealing member seat portion 121a: Through hole for ventilation (through hole portion for ventilation)
121b: seat surface 122: bolt insertion hole (fastening insertion hole portion)
122a large diameter portion 122b small diameter portion 123 screw hole (screw hole portion)

130... Closing member 130L... Left side closing member 130R... Right side closing member 131... Flange portion 131a... Bolt insertion hole (bolt insertion hole portion)
131b: air supply port mounting hole (air supply port mounting hole portion)
131c ・・・ vent (vent part)
132 ・・・ Grasping part

140 ・・・ Fastening bolt (fastening member)
141 ・・・ Short bolt 142 ・・・ Long bolt

150... washer 160... O-ring (sealing member)
170 ・・・ Air supply port

W: thin film continuum R: roll D: diameter of flange seat

Claims (6)

A plurality of thin film support members having a roll-shaped circumferential surface formed with gas ejection portions for ejecting gas toward the thin film continuum, a joint member coaxially connecting the thin film support members, and the joint member to the thin film support member. A turn bar for conveying a thin film that supports a thin film continuum being conveyed in a non-contact floating state by gas and changes the conveying direction,
The thin film support member includes an air supply through-path portion communicating with the gas ejection portion and extending in the axial direction, a fastening insertion hole portion extending in the axial direction through the fastening member, and a screw screwed into the fastening member. a hole portion;
The joint member includes a ventilation through hole portion communicating with the air supply through passage portion of the thin film support member and extending in the axial direction, a fastening insertion hole portion extending in the axial direction through the fastening member, and the fastening member. A turn bar for conveying a thin film, characterized in that it has a threaded hole portion that is screwed with. 2. A turn bar for conveying thin films according to claim 1, wherein said joint member is inserted in said thin film supporting member along said axial direction. A sealing member for sealing a gap between an air supply through-path portion of the thin-film support member and a ventilation through-hole portion of the joint member when the thin-film support member and the joint member are fastened by the fastening member. is disposed between the joint member and the thin film support member. 3. The thin film support member and the joint member are fastened together by inserting the fastening member through the thin film support member or the joint member from one end side in the axial direction. The turn bar for conveying a thin film according to any one of Claims 1 to 3. The fastening insertion hole portion and the screw hole portion of the thin film support member are arranged at regular intervals on the end face of the thin film support member,
5. The joint member according to any one of claims 1 to 4, wherein the fastening insertion hole portion and the screw hole portion of the joint member are arranged at equal intervals on the end surface of the joint member. Turn bar for transporting thin films. The thin film support member and the joint member are annular,
A closing member that closes the end opening of the thin film support member is arranged coaxially with the thin film support member,
6. The turn bar for conveying thin films according to claim 1, wherein the closing member has a vent portion communicating with the hollow portion of the thin film support member.

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