KR20230145052A - Turn bar for thin film transport - Google Patents

Abstract

To provide a turn bar for transporting thin films in which only the defective part can be easily and freely replaced when a defect occurs on the surrounding surface of the roll. A thin film support member 110 having an arc-shaped roll-shaped peripheral surface 112a on which a gas ejection portion for blowing out gas is formed with respect to the thin film continuous body W, and a joint member 120 connecting the two thin film support members 110, and , an air supply passage 111c having a fastening bolt 140 for fastening the thin film support member 110 and the joint member 120, and communicating with the gas ejection portion and extending in the axial direction of the thin film support member 110. A bolt insertion hole 111d extending in the axial direction by inserting the fastening bolt 140, and a threaded hole 111e threaded with the fastening bolt 140 are formed, and a thin film support member is formed in the joint member 120. A ventilation through-hole 121a extending in the axial direction in communication with the air supply through-passage 111c of (110) and a bolt insertion hole 122 extending in the axial direction by inserting the fastening bolt 140, are fastened. A threaded hole 123 that is threaded with the bolt 140 is formed.

Description

Turn bar for thin film transport

The present invention relates to a turn bar for thin film transport that supports a thin film continuous body in a non-contact floating state by a gas and changes the transport direction.

Conventionally, a thin film conveying device for conveying a thin film continuous body such as a thin film sheet or thin film film is equipped with a turn bar that changes the conveying direction of the thin film continuous body.

This turn bar is provided with a shaft member, two rotating rollers respectively disposed at both ends of the shaft member, and a conveying member made of a porous material disposed between the two rotating rollers, and allows the gas to escape from the porous material. ) to levitate a continuous web-shaped workpiece and convey it while changing the conveyance direction is known (for example, see Patent Document 1).

Patent Document 1: Japanese Patent Laid-Open No. 2020-132412

In the above-described turn bar, the conveyance member is a roll member having a bar longitudinal dimension at least the same width as that of the web in order to levitate it with gas pressure across the entire width of the web.

Therefore, since the conveying member is a roll member with a long body extending in the longitudinal direction of the bar, defects such as clogging or breakage may occur on a portion of the roll peripheral face of the conveying member facing the web. Even if this occurs, it is necessary to replace the entire conveyance member, that is, the conveyance member itself, and there is room for further improvement in the maintainability of the turn bar.

Therefore, the present invention solves the problems of the prior art as described above, that is, the purpose of the present invention is to create a thin film in which only the members at the defective parts can be easily and freely exchanged when a defect occurs in the peripheral surface of the roll. A turn bar for return is provided.

The invention according to claim 1 includes a plurality of thin film support members formed on a roll-shaped peripheral surface with a gas ejection portion that ejects gas toward the thin film continuum, a joint member coaxially connecting the thin film support members to each other, and the thin film support member. A turn bar for thin film transport, which includes a fastening member for fastening a joint member, and supports a thin film continuous body in transport in a non-contact floating state by gas to change the transport direction, wherein the thin film support member communicates with the gas blowing portion. It has an axially extending air supply through-pass portion, a fastening insertion hole portion extending in the axial direction by inserting the fastening member, and a threaded hole portion screwed with the fastening member, and the joint member is of the thin film support member. By having a ventilation through-hole portion that communicates with the air supply passage portion and extends in the axial direction, a fastening insertion hole portion that inserts the fastening member and extends in the axial direction, and a threaded hole portion that engages the fastening member. , to solve the above-mentioned challenges.

In the invention according to claim 2, in addition to the configuration of the turn bar for transporting the thin film described in claim 1, the joint member is interpolated into the thin film support member along the axial direction, thereby achieving the above-described problem. It's more of a solution.

The invention according to claim 3, in addition to the configuration of the turn bar for transporting the thin film according to claim 1 or claim 2, provides an air supply passage portion of the thin film support member when the thin film support member and the joint member are fastened with the fastening member. The above-described problem is solved by providing a sealing member that seals the gap between the through-hole portion for ventilation of the joint member and the joint member and the thin film support member.

The invention according to claim 4, in addition to the configuration of the turn bar for transporting the thin film according to claim 1 of either claim 1 or 3, is provided wherein the thin film support member and the joint member attach the fastening member to one end side in the axial direction. By inserting and fastening the thin film support member or the joint member from the above, the above-mentioned problem is further solved.

The invention according to claim 5 is, in addition to the configuration of the turn bar for transporting the thin film described in any one of claims 1 to 4, the fastening insertion hole portion and the threaded hole portion of the thin film supporting member include the thin film supporting member. are respectively arranged at equal intervals in the cross section of the joint member, and the fastening insertion hole portion and the threaded hole portion of the joint member are respectively disposed at equal intervals in the cross section of the joint member, thereby further solving the above-described problem. It is done.

The invention according to claim 6 is, in addition to the configuration of the turn bar for transporting a thin film according to any one of claims 1 to 5, wherein the thin film support member and the joint member are annular, and the end opening of the thin film support member is The above-described problem can be further solved by an occlusion member that occludes the area being arranged coaxially with the thin film support member, and the occlusion member having a vent portion communicating with the hollow portion of the thin film support member. It is done.

The turn bar for transporting thin films according to the invention according to claim 1 includes a plurality of thin film support members formed on the peripheral surface of the roll shape with gas ejection parts that eject gas toward the thin film continuum, and a joint member coaxially connecting the thin film support members to each other. By providing a fastening member for fastening the joint member to the thin film support member, it is possible to support the thin film continuous body being transported in a non-contact floating state by the gas and change the transport direction, as well as the number of thin film support members and coupling members. By simply increasing or decreasing the length of the turn bar for transporting thin films, the length of the turn bar for transporting thin films can be easily adjusted, or the amount of gas ejected can be easily adjusted in the longitudinal direction of the turn bar for transporting thin films.

In addition, the thin film support member has an air supply through-pass portion that communicates with the gas ejection portion and extends in the axial direction, a fastening insertion hole portion that extends in the axial direction by inserting the fastening member, and a threaded hole portion that engages the fastening member. , the joint member is threaded with the fastening insertion hole portion and the fastening member extending in the axial direction by inserting the fastening member and the ventilation through-hole portion that communicates with the air supply passage portion of the thin film support member and extends in the axial direction. By having a perforated portion, the fastening member is inserted from the fastening insertion hole portion of the thin film support member and threaded with the threaded hole portion of the joint member, so that the thin film support member and the joint member are freely fastened, and at the same time, the fastening member is connected to the joint member. Since the thin film support member and the joint member are freely fastened by inserting from the fastening insertion hole and threaded with the threaded hole part of the thin film support member, if a defect such as blockage or damage occurs on the surrounding surface of the roll, the fastening member is connected to the thin film support member. By dismantling the thin film transport turn bar by removing it from the member and joint member, only the defective thin film support member can be easily replaced.

According to the turn bar for transporting a thin film according to the invention according to claim 2, in addition to the effect caused by the turn bar for transporting a thin film according to the invention according to claim 1, the joint member is interpolated into the thin film support member along the axial direction, thereby supporting the thin film. Compared to a turn bar for thin film transport, where the member is interpolated into a joint member that does not support the thin film continuous body, the surface area of the thin film support member that supplies air to the thin film continuous body is increased, allowing the thin film continuous body to be floated more uniformly and in a non-contact floating state. I can support it.

According to the turn bar for transporting thin films of the invention according to claim 3, in addition to the effect caused by the turn bar for transporting thin films according to the invention according to claim 1 or claim 2, the sealing member is disposed between the thin film support member and the joint member. As a result, when the thin film support member and the joint member are fastened with the fastening member, the gap between the air supply passage portion of the thin film support member and the ventilation through hole portion of the joint member is sealed by the sealing member, so that the thin film support member It is possible to prevent gas from escaping from the gap between the air supply passage portion and the ventilation through hole portion of the joint member.

According to the turn bar for transporting a thin film of the invention according to claim 4, in addition to the effect caused by the turn bar for transporting a thin film of the invention according to claim 1 of claim 1, the thin film support member and the joint member include a fastening member. Since it is fastened by inserting into the thin film support member or joint member from one end side in the axial direction, the thin film conveyance turn bar is assembled by inserting the fastening member into the thin film support member or joint member from both sides in the axial direction. Since the assembly process of the turn bar for thin film transport is simplified, the turn bar for thin film transport can be efficiently assembled or dismantled.

According to the turn bar for transporting thin films according to the invention according to claim 5, in addition to the effect caused by the turn bar for transporting thin films according to the invention according to claims 1 to 4, the fastening insertion hole portion and the screw hole portion of the thin film support member each have a thin film The joint member and the thin film support member are fastened by being arranged at equal intervals in the cross section of the support member, and the fastening insertion hole portion and the screw hole portion of the joint member are respectively arranged at equal intervals in the cross section of the joint member. Since the fastening force of the fastening member when fastened to the member acts almost equally in the circumferential direction, it is not only possible to more reliably prevent gas from escaping from the contact surface between the joint member and the thin film support member. , distortion due to the fastening force by the fastening member is less likely to occur in the turn bar for transporting thin films, the straightness of the turn bar for transporting thin films is improved, and the thin film continuum can be transported more stably.

According to the turn bar for transporting thin films of the invention according to claim 6, in addition to the effect caused by the turn bar for transporting thin films according to the invention according to claims 1 to 5, the thin film support member and the joint member are annular, and the end opening of the thin film support member is The occlusion member that occludes the portion is arranged coaxially with the thin film support member, and the occlusion member has a ventilation pore portion that communicates with the hollow portion of the thin film support member, so that the hollow portion of the thin film support member communicates with the outside. Therefore, even if the temperature of the hollow portion of the thin film support member increases with the turn bar for thin film transport assembled and the air collected in the hollow portion of the thin film support member expands, the air collected in this hollow portion can be easily discharged.

[Figure 1] A perspective view showing the use of a thin film transport device equipped with a turn bar for thin film transport, which is an embodiment of the present invention.
[FIG. 2] A perspective view of the turn bar for transporting thin films shown in FIG. 1.
[FIG. 3] An exploded perspective view of the turn bar for transporting thin films shown in FIG. 1.
[FIG. 4A] A left side view of the turn bar for transporting thin films shown in FIG. 2 as seen from IVA.
[FIG. 4B] A right side view of the turn bar for transporting thin films shown in FIG. 2 as seen from IVB.
[FIG. 4C] IVC-IVC cross-sectional view of FIG. 4A.
[FIG. 5A] Left side view of the thin film support member shown in FIG. 2.
[FIG. 5B] Cross-sectional view VB-VB of FIG. 5A.
[FIG. 5C] VC-VC cross-sectional view of FIG. 5A.
[FIG. 6A] Left side view of the joint member shown in FIG. 2.
[FIG. 6B] VIB-VIB cross-sectional view of FIG. 6A.

The present invention relates to a plurality of thin film support members formed on the roll-shaped peripheral surface of a gas ejection portion for ejecting gas toward a thin film continuous body, a joint member coaxially connecting the thin film support members to each other, and fastening the joint member to the thin film support member. It is a turn bar for transporting a thin film equipped with a fastening member, wherein the thin film support member includes an air supply passage portion that communicates with the gas ejection portion and extends in the axial direction, and a fastening insertion hole portion that inserts the fastening member and extends in the axial direction. A fastening device having a threaded hole portion that engages with the fastening member, wherein the joint member extends in the axial direction by inserting the fastening member with the ventilation through-hole portion that communicates with the air supply through-hole portion of the thin film support member and extends in the axial direction. It has an insertion hole portion and a threaded hole portion that engages with the fastening member, and the specific embodiment may be any as long as only the defective thin film support member can be freely exchanged when a defect occurs in the peripheral surface of the roll.

For example, the roll-shaped peripheral surface of the thin film support member may be formed on the entire circumference of the thin film support member as long as it is circular, or may be formed only on a portion of the thin film support member.

Therefore, the cross-sectional shape of the thin film support member may be circular or fan-shaped.

For example, the gas blowing portion of the thin film support member may have any shape as long as it can supply gas to the thin film continuous body. Specifically, it may be a porous material provided on the thin film support member, and may be formed around the roll-shaped perimeter of the thin film support member. Even micropores formed on the surface are acceptable.

For example, the gas ejected from the gas ejection portion of the thin film support member is preferably air, but may be another gas.

For example, the thin film support members are preferably hollow cylindrical bodies from the viewpoint of weight reduction, but may also be filled cylinders.

This is the same for joint members.

For example, the fastening member can fasten the joint member to the thin film support member, and may be any member as long as it is freely threaded with the threaded hole portion of the thin film support member or the threaded hole portion of the joint member.

In particular, if it is a member that can be inserted into the thin film support member or joint member from one direction and sequentially fasten the joint member to the thin film support member, the hexagonal hole mounting bolt is formed of a head having a hexagonal hole portion and a thread portion with a smaller diameter than the head portion. is an example, but the fastening member may be a member other than a hexagonal hole mounting bolt.

Example 1

Hereinafter, based on FIGS. 1 to 6B, a turn bar for transporting thin films, which is an embodiment of the present invention, will be described.

<1. Overview of conveying equipment for thin films>

First, based on FIG. 1, an outline of a thin film transport device equipped with a turn bar for thin film transport, which is an embodiment of the present invention, will be described.

Figure 1 is a perspective view of a thin film transport device equipped with a turn bar for thin film transport, which is an embodiment of the present invention.

The thin film conveying device 10 is a device for conveying a thin film continuous body, etc., and as shown in FIG. 1, a winder 11 for winding a thin film continuous body W wound on a roll R, and a winder ( An inspection device (12) for inspecting the condition of the thin film continuous body (W) wound around 11), and a turn bar (100) for thin film transport in the shape of a rod that supports the thin film continuous body being transported in a non-contact floating state by air and changes the transport direction. ) is provided.

<2. Overview of turn bars for thin film transport>

Next, based on FIGS. 2 to 4C, an outline of the turn bar 100 for thin film transport will be described.

FIG. 2 is a perspective view showing a usage mode of the turn bar for transporting thin films shown in FIG. 1, FIG. 3 is a perspective exploded view of the turn bar for transporting thin films shown in FIG. 1, and FIG. 4A is shown in FIG. 2. is a left side view seen from IVA of the turn bar for transporting thin films shown in FIG. 4B, is a right side view seen from IVB of the turn bar for transporting thin films shown in FIG. 2, and FIG. 4C is an IVC-IVC cross-sectional view of FIG. 4A.

The turn bar 100 for transporting thin films includes a cylindrical thin film support member 110, a cylindrical joint member 120 that coaxially connects the two thin film support members 110 to each other, and a thin film support member ( 110) and a closing member 130 arranged coaxially to block the end opening of the thin film support member 110, and a fastening for fastening the thin film support member 110 and the joint member 120 or the blocking member 130. A bolt (fastening member) 140 is provided.

In addition, this thin film transport turn bar 100 is a washer interposed between each of the thin film support member 110, joint member 120, and closure member 130 and the fastening bolt 140. ) 150, and an O-ring (sealing member) 160 disposed between the thin film support member 110 and the joint member 120 and between the thin film support member 110 and the closure member 130. there is.

Furthermore, an air supply port 170 connected to an air pipe connected to an air supply source (not shown) is mounted on the blocking member 130 of the thin film transport turn bar 100.

As shown in FIG. 3, the fastening bolt 140 is a hexagonal hole mounting bolt formed of a cylindrical head having a hexagonal hole portion and a thread portion having a smaller diameter than the head.

In this embodiment, as the fastening bolt 140, a short bolt 141 with a short thread portion and a long bolt 142 with a long thread portion are used.

Additionally, the diameter of the head of the short bolt 141 and the diameter of the head of the long bolt 142 are the same.

<3. Thin film support member>

Next, based on FIGS. 3, 4C, and 5A to 5C, the thin film support member 110 constituting the turn bar 100 for thin film transport will be described.

FIG. 5A is a left side view of the thin film support member shown in FIG. 2, FIG. 5B is a cross-sectional view taken along VB-VB in FIG. 5A, and FIG. 5C is a cross-sectional view taken along VC-VC in FIG. 5A.

The thin film support member 110 is a cylindrical member as shown in FIG. 3 and is composed of a cylindrical metal base 111 and a cylindrical porous material 112 provided on the outer periphery of the base 111.

And, as shown in FIG. 5B, this base material 111 has concave flange seat portions 111a formed on both end surfaces.

Furthermore, a hollow portion 111b is formed in the center of this flange seat 111a, extending in the axial Z direction and penetrating the thin film support member 110.

The diameter D of the flange seat 111a is substantially equal to the diameter of the joint member 120.

In addition, on the bottom of the flange seat 111a, an air supply passage (air supply passage portion) 111c extends in the Z direction (axial direction) and communicates with the porous material 112, and extends in the Z direction. A bolt insertion hole (fastening insertion hole portion) 111d through which the long bolt 142 is freely inserted, and a threaded hole (screw hole portion) 111e for threading with the thread portion of the short bolt 141, are formed.

As shown in FIG. 5, the air supply through passage 111c includes a through passage main body 111c1 extending in the Z direction and penetrating the thin film support member 110, and a through passage main body 111c1 branching laterally from the through passage main body 111c1. It is formed as a fumarole (111c2).

The branch hole 111c2 extends in the radial direction and connects the through-path main body 111c1 and the porous material 112.

As shown in FIG. 5C, the bolt insertion hole 111d extends in the Z direction and penetrates the thin film support member 110, and the long bolt 142, which is a hexagonal hole mounting bolt, is freely inserted.

That is, the bolt insertion hole 111d freely inserts the large-diameter portion 111d1, which has a larger diameter than the outer diameter of the head of the long bolt 142, which accommodates the head of the long bolt 142, and the threaded portion of the long bolt 142. It is formed as a small diameter portion 111d2 that is larger than the outer diameter of the threaded portion of the long bolt 142 and smaller than the outer diameter of the head of the long bolt 142.

The center of this large-diameter portion 111d1 coincides with the center of the small-diameter portion 111d2.

The center of the air supply passage 111c (through passage main body 111c1) formed in this way, the center of the bolt insertion hole 111d, and the center of the screw hole 111e are arranged on the same circumference.

Additionally, the bolt insertion hole 111d and the screw hole 111e are each arranged at equal intervals, as shown in FIG. 5A.

As for the porous material 112, the surface in contact with the base material 111 and the roll-shaped peripheral surface 112a of the outermost surface communicate with each other.

As a result, the gas supplied to the porous material 112 from the branch pores 111c2 of the substrate 111 flows into the surface in contact with the substrate 111 and ejects from the roll-shaped peripheral surface 112a.

Therefore, a gas blowing portion that blows gas toward the thin film continuous body is formed on the roll-shaped peripheral surface 112a of the porous material 112.

In addition, it can be said that the air supply through passage 111c is in communication with the gas blowing portion.

<4. Absence of seams>

Next, based on FIGS. 3, 4C, and 6A to 6B, the joint member 120 constituting the turn bar 100 for thin film transport will be described.

FIG. 6A is a left side view of the joint member shown in FIG. 2, and FIG. 6B is a cross-sectional view taken along VIB-VIB in FIG. 6A.

The joint member 120 is an annular member as shown in FIG. 3 and is interpolated into the thin film support member 110 along the Z direction as shown in FIG. 4C and the like.

And, on the cross section of this joint member 120, there is a concave seat portion 121 for the sealing member on which the O-ring 160 is mounted, a bolt insertion hole (fastening insertion hole portion) 122, and a long bolt ( It has a screw hole (screw hole portion) 123 that is threaded with the screw part of 142).

As shown in Fig. 6A, the seat portion 121 for the sealing member is circular in a side view, and is formed on both end surfaces of the joint member 120 as shown in Fig. 6B.

In addition, at the center of the sealing member seat portion 121, a ventilation through hole (ventilation through hole portion) 121a is formed, which extends in the Z direction, which is the axial direction, and penetrates the joint member 120.

The ventilation through-hole 121a communicates with the air supply passage 111c of the thin film support member 110, as shown in FIG. 3 .

The center of this ventilation through-hole 121a coincides with the center of the sealing member seat portion 121.

In addition, the diameter of the ventilation through-hole 121a is smaller than the outer diameter of the sealing member seat 121, as shown in FIG. 6A.

Accordingly, the seat portion 121 for the sealing member is formed with a seat surface 121b that comes into contact with the O-ring 160.

As shown in FIG. 6B, the bolt insertion hole 122 extends in the Z direction and penetrates the joint member 120, and the short bolt 141, which is a hexagonal hole mounting bolt, is freely inserted.

That is, the bolt insertion hole 122 freely inserts the large-diameter portion 122a, which has a larger diameter than the outer diameter of the head of the short bolt 141, which accommodates the head of the short bolt 141, and the threaded portion of the short bolt 141. The small diameter portion 122b is formed with a larger diameter than the outer diameter of the threaded portion of the short bolt 141 and smaller than the outer diameter of the head portion of the long bolt 142.

The center of this large-diameter portion 122a coincides with the center of the small-diameter portion 122b.

The center of the ventilation through-hole 121a formed in this way, the center of the bolt insertion hole 122, and the center of the screw hole 123 are arranged on the same circumference.

In addition, the bolt insertion hole 122 and the screw hole 123 are arranged at equal intervals in the cross section of the joint member 120, respectively, as shown in FIG. 6A.

<5. Absence of occlusion>

Next, based on FIGS. 3 to 4C, the blocking member 130 constituting the turn bar 100 for thin film transport will be described.

The blocking member 130 is a member disposed at the end opening of the thin film support member 110, and includes a left blocking member 130L that is the left end of the turn bar 100 for thin film transport, and a turn bar for thin film transport ( It is composed of a right blocking member 130R that becomes the right end of 100).

The left blocking member 130L and the right blocking member 130R are both formed of a disk-shaped flange portion 131 and a gripping portion 132 protruding in the Z direction from the vicinity of the center of the flange portion 131. .

The diameter of the flange portion 131 is substantially equal to the outer diameter of the flange seat portion 111a of the thin film support member 110, as shown in FIGS. 4A to 4C.

In addition, the flange portion 131 includes a bolt insertion hole (bolt insertion hole portion) 131a that extends in the axial direction (Z direction) of the thin film transport turn bar 100 and allows the short bolt 141 to be freely inserted. , an air supply port mounting hole (air supply port mounting hole portion) 131b that is freely connected to the air supply port 170, and a ventilation hole (ventilation hole portion) 131c communicating with the hollow portion 111b of the thin film support member 110. ) is being formed.

Additionally, the position of the bolt insertion hole 131a is different from that of the left blocking member 130L and the right blocking member 130R.

The bolt insertion hole 131a penetrates the flange portion 131 in the axial direction, and a short bolt 141, which is a hexagonal hole mounting bolt, is freely inserted.

That is, the bolt insertion hole 131a is a large diameter portion larger than the outer diameter of the head of the short bolt 141 that accommodates the head of the short bolt 141, and a short bolt that freely inserts the threaded portion of the short bolt 141. It is formed with a smaller diameter than the outer diameter of the threaded portion of (141) and smaller than the outer diameter of the head of the short bolt (141).

The center of this large-diameter section coincides with the center of the small-diameter section.

The air supply port mounting hole 131b penetrates the flange portion 131 in the axial direction, has a female thread formed for threading with the air supply port 170, and has a taper toward the thin film support member 110. It is being formed.

Accordingly, the air supply port mounting hole 131b is reduced in diameter toward the thin film support member 110 side.

And, the center of the air supply port mounting hole 131b and the center of the bolt insertion hole 131a are arranged on the same circumference.

The ventilation hole portion 131c is provided near the grip portion 132 and penetrates the flange portion 131 in the axial direction.

And, the center of this ventilation hole portion 131c is the center of the flange portion 131 (i.e., the axial center of the thin film transport turn bar 100) O and the center of the air supply port mounting hole 131b. They are arranged on the same straight line.

The diameter of the gripping portion 132 is smaller than the diameter of the flange portion 131, as shown in FIGS. 4A and 4B.

<6. O-ring>

The thickness of the O-ring 160 is larger than the depth of the concave-shaped sealing member seat 121 provided on the joint member 120.

As a result, when the O-ring 160 is fastened to the thin film support member 110 and the joint member 120 with the fastening bolt 140, the O-ring 160 is distorted and the thin film support member 110 is damaged. The gap between the air supply passageway 111c and the ventilation through hole 121a of the joint member 120 can be sealed.

<7. Assembly of turn bar for thin film transport>

Next, based on FIG. 3, a method of assembling the turn bar 100 for thin film transport will be described.

To assemble the turn bar 100 for thin film transport, as shown in FIG. 3, the O-ring 160 is placed on the sealing member seat 121 of the joint member 120, and then the joint member 120 is assembled. is inserted into the concave-shaped flange seat 111a installed on the thin film support member 110.

Then, in a state where the ventilation through hole 121a of the joint member 120 and the through passage main body 111c1 of the air supply passage 111c of the thin film support member 110 are opposed to each other, the bolt of the joint member 120 Insert the left key 150 and the short bolt 141 into the insertion hole 122, screw the short bolt 141 and the threaded hole 111e of the thin film support member 110, and form a joint with the thin film support member 110. The member 120 is fastened.

At this time, by fastening the thin film support member 110 and the joint member 120 with the short bolt 141, the joint member 120 supports the thin film by the head of the short bolt 141 and the seat 150. An axial force (axial force) is generated by pressing firmly against the member 110, and the O-ring 160 is distorted by this axial force, causing air to escape from the gap between the thin film support member 110 and the joint member 120. is suppressed.

With the O-ring 160 placed on the sealing member seat 121 on the exposed side of the joint member 120, the joint member is placed on the concave flange seat 111a provided on the thin film support member 110. Insert (120).

Then, in a state where the through passage main body 111c1 of the air supply through passage 111c of the thin film support member 110 and the ventilation through hole 121a of the joint member 120 are opposed to each other, the thin film support member 110 The left metal 150 and the long bolt 142 are inserted into the bolt insertion hole 111d, the long bolt 142 and the threaded hole 123 of the joint member 120 are screwed together, and the thin film support member 110 and the joint are formed. The member 120 is fastened.

At this time, by fastening the thin film support member 110 and the joint member 120 with the long bolt 142, the thin film support member 110 is jointed by the head of the long bolt 142 and the seat 150. An axial force is generated by pressing tightly against the member 120, and this axial force distorts the O-ring 160 and prevents air from escaping from the gap between the thin film support member 110 and the joint member 120.

In the above order, the thin film support member 110 and the joint member 120 are fastened to a predetermined length with the fastening bolts 140, and the end opening portion of the thin film support member 110 is closed with the blocking member 130.

At this time, with the air supply port mounting hole 131b of the blocking member 130 and the through passage main body 111c1 of the air supply passage 111c of the thin film support member 110 facing each other, the blocking member 130 Insert the left key 150 and the short bolt 141 into the bolt insertion hole 131a, and screw the short bolt 141 and the threaded hole 111e of the thin film support member 110 to form the thin film support member 110 and The blocking member 130 is fastened.

<8. Effects caused by the turn bar 100 for transporting thin films>

According to the turn bar 100 for transporting a thin film of the present embodiment described above, a plurality of thin film support members 110 formed on the roll-shaped peripheral surface 112a with a gas ejection portion for blowing out gas toward the thin film continuous body W, and the thin film By providing a joint member 120 that coaxially connects the support members 110 to each other and a fastening bolt 140 that is a fastening member for fastening the joint member 120 to the thin film support member 110, Not only is it possible to change the conveyance direction by supporting the thin film continuous body W in a non-contact floating state with a gas, but also by simply increasing or decreasing the number of the thin film support member 110 and the joint member 120, a turn bar for thin film transport ( The length of 100) can be easily adjusted, or the ejection amount of gas can be easily adjusted in the longitudinal direction of the thin film transport turn bar 100.

In addition, the thin film support member 110 is provided with an air supply passage 111c extending in the axial Z direction and communicating with the gas ejection portion, and a fastening bolt 140 extending in the Z direction. A bolt insertion hole 111d, which is a freely inserted fastening insertion hole, and a threaded hole 111e, which is a threaded hole part that is threaded with the fastening bolt 140, are formed and extend in the Z direction in the joint member 120. Fastening is performed by freely inserting the fastening bolt 140 by extending in the Z direction with the ventilation through-hole 121a, which is a ventilation through-hole part that communicates with the air supply passage portion 111c of the thin film support member 110. By forming the bolt insertion hole 122, which is the insertion hole portion for the fastening bolt 140, and the threaded hole 123, which is the threaded hole portion that is threaded with the fastening bolt 140, the fastening bolt 140 is connected to the thin film support member 110. It is inserted from the bolt insertion hole 111d and threaded with the threaded hole 123 of the joint member 120, so that the thin film support member 110 and the joint member 120 are freely fastened, and at the same time, the fastening bolt 140 is connected to the joint member ( Since the thin film support member 110 and the joint member 120 are freely coupled by inserting from the bolt insertion hole 122 of the thin film support member 110 and threaded together with the threaded hole 111e of the thin film support member 110, the peripheral surface of the roll is blocked. If a defect such as a defect or breakage occurs, the fastening bolt 140 is removed from the thin film support member 110 and the joint member 120 and the thin film transport turn bar 100 is dismantled to remove the defective thin film support member. Only (110) can be exchanged.

In addition, since the joint member 120 is interpolated into the thin film support member 110 along the Z direction, the thin film support member 110 is interpolated into the joint member 120 that does not support the thin film continuous body W. Compared to the turn bar 100 for transporting the thin film, the surface area of the thin film support member 110 that feeds the thin film continuous body W is increased, so the thin film continuous body W can be supported more uniformly in a non-contact floating state.

In addition, the O-ring 160, which is a sealing member, is disposed between the thin film support member 110 and the joint member 120, thereby connecting the thin film support member 110 and the joint member 120 to the fastening bolt 140. ), the gap between the air supply passage 111c of the thin film support member 110 and the ventilation through hole 121a of the joint member 120 is sealed by the O-ring 160, thereby supporting the thin film. It is possible to prevent gas from escaping from the gap between the air supply passage 111c of the member 110 and the ventilation through hole 121a of the joint member 120.

In addition, the thin film support member 110 and the joint member 120 are fastened by inserting the fastening bolt 140 into the thin film support member 110 or the joint member 120 from one end side in the axial direction. Compared to the case where the turn bar 100 for thin film transport is assembled by inserting the bolt 140 into the thin film support member 110 or the joint member 120 from both sides in the axial direction, the assembly process of the turn bar 100 for thin film transport Because this is simplified, the turn bar 100 for thin film transport can be efficiently assembled or disassembled.

In addition, a concave sealing member seat portion 121 is formed on the cross section of the joint member 120, which is a concave sealing member seat portion having an outer diameter larger than the ventilation through hole 121a, and this sealing member seat portion 121 is formed. Since the depth of the seat portion 121 is smaller than the thickness of the O-ring 160, the thin film support member 110 and the joint member 120 are fastened with the sealing member placed on the sealing member seat portion 121. Since the gap between the air supply passage 111c of the thin film support member 110 and the ventilation through hole 121a of the joint member 120 is sealed simply by fastening with the bolt 140, the thin film support member 110 ) can be easily sealed between the air supply passageway 111c and the ventilation through hole 121a of the joint member 120.

In addition, the bolt insertion hole 111d and the screw hole 111e of the thin film support member 110 are respectively arranged at equal intervals in the cross section of the thin film support member 110, and the bolt insertion hole of the joint member 120 ( 122) and the screw hole 123 are arranged at equal intervals in the cross section of the joint member 120, so that the joint member 120 and the thin film support member 110 are fastened with the fastening bolt 140. Since the fastening force of the fastening bolt 140 acts almost equally in the main direction, it is not only possible to more reliably prevent gas from escaping from the contact surface between the joint member 120 and the thin film support member 110. , Distortion due to the fastening force by the fastening bolt 140 is less likely to occur in the thin film transport turn bar 100, the straightness of the thin film transport turn bar 100 is improved, and the thin film continuum W becomes more stable. It can be returned.

In addition, the bolt insertion hole 111d of the thin film support member 110 faces the screw hole 123 of the joint member 120, and the bolt insertion hole 122 of the joint member 120 faces the thin film support member 110. By opposing the screw hole 111e, the turn bar 100 for thin film transport can be formed simply by preparing one type of thin film support member 110 and one type of joint member 120, respectively.

<Variation example>

Above, the turn bar 100 for transporting thin films, which is an embodiment of the present invention, has been described. However, the turn bar 100 for transporting thin films of the present invention is not limited to the turn bar 100 for transporting thin films of the above-described embodiment.

For example, the gas ejection amount of each thin film support member may be the same, or may be different from each other in order to adjust the ejection amount in the longitudinal direction.

For example, in this embodiment, the porous material 112 is impregnated with resin, but the porous material does not need to be impregnated with resin.

Additionally, in order to prevent self-oscillation, the surface of the porous material may be blocked.

For example, the roll-shaped peripheral surface 112a of the porous material 112 may be impregnated with resin to prevent dust from flying from the surface.

Furthermore, it is desirable that both sides of the porous material 112 are sealed to prevent gases from escaping.

For example, in this embodiment, the threaded hole 123 of the joint member 120 has a bottom, but may penetrate the joint member 120.

For example, in this embodiment, the O-ring 160 is provided on the sealing member seat 121 of the joint member 120, but the O-ring 160 is provided on the thin film support member 110 side. It is okay to install a left part for the bag member.

In addition, even in the case where the concave-shaped seat for the sealing member is provided on the side of the thin film support member 110, the seat for the sealing member has a larger diameter than the diameter of the air supply passage 111c of the thin film support member 110.

For example, in this embodiment, two types of fastening bolts 140, short bolts 141 and long bolts 142, are used, but the length of the joint member in the left and right directions, the position of the large diameter portion, and the joint member are different. You can use one type of bolt by adjusting the length in the left and right directions, the position of the large diameter part, and the thickness of the flange part of the blocking member.

10 … Transport device for thin films
11 … winder
12 … checker
100 … Turn bar for thin film transport
110 … thin film support member
111 … write
111a … Seat for concave flange
111b … hollow part
111c … Air supply passageway (air supply passageway part)
111c1 … through body
111c2 … fumarole
111d … Bolt insertion hole (insertion hole part for fastening)
111d1 … Daegyeongbu
111d2 … Blind people
111e... Screw hole (screw hole part)
112 … Porous material
112a... Surface around the roll
120 … Absence of seams
121 … Seat for concave bag member
121a … Through-hole for ventilation (through-hole part for ventilation)
121b … Left side
122 … Bolt insertion hole (insertion hole part for fastening)
122a … Daegyeongbu
122b... Blind people
123 … Screw hole (screw hole part)
130 … absence of occlusion
130L … Absence of left occlusion
130R… Absence of right occlusion
131 … flange part
131a … Bolt insertion hole (bolt insertion hole part)
131b … Air supply port mounting hole (air supply port mounting hole part)
131c... Ventilation hole (ventilation hole part)
132 … Gripping part
140 … Fastening bolt (fastening member)
141 … short bolt
142 … long bolt
150 … Left money
160 … O-ring (without bag)
170 … air supply port
W... thin film continuum
R … role
D … Diameter of left part for flange

Claims (6)

A plurality of thin film support members formed on the roll-shaped peripheral surface of a gas ejection portion for ejecting gas toward the thin film continuum, a joint member coaxially connecting the thin film support members to each other, and a fastening member for fastening the joint member to the thin film support member. It is a turn bar for transporting thin films that supports the thin film continuous body being transported in a non-contact floating state by gas and changes the transport direction,
The thin film support member includes an air supply through-pass portion that communicates with the gas blowing portion and extends in the axial direction, a fastening insertion hole portion that extends in the axial direction by inserting the fastening member, and a threaded hole portion that is threaded with the fastening member. To have,
The joint member includes a ventilation through-hole portion that communicates with the air supply passage portion of the thin film support member and extends in the axial direction, a fastening insertion hole portion that inserts the fastening member and extends in the axial direction, and the fastening member; A turn bar for conveying thin films, characterized by having a screw hole portion that threads together. According to paragraph 1,
A turn bar for conveying thin films, wherein the joint member is interpolated into the thin film support member along the axial direction. According to claim 1 or 2,
When the thin film support member and the joint member are fastened with the fastening member, a sealing member that seals a gap between the air supply passage portion of the thin film support member and the ventilation through hole portion of the joint member is provided with the joint member. A turn bar for transporting thin films, characterized in that it is disposed between the thin film support members. According to claim 1 or 3,
A turn bar for conveying thin films, wherein the thin film support member and the joint member are fastened by inserting the fastening member into the thin film support member or the joint member from one end side in the axial direction. According to any one of paragraphs 1 to 4,
The fastening insertion hole portion and the screw hole portion of the thin film support member are respectively arranged at equal intervals in the cross section of the thin film support member, and the fastening insertion hole portion and the screw hole portion of the joint member are A turn bar for transporting thin films, characterized in that they are arranged at equal intervals in the cross section. According to any one of claims 1 to 5,
The thin film support member and the joint member are annular,
A blocking member that closes the end opening portion of the thin film support member is arranged coaxially with the thin film support member,
A turn bar for conveying thin films, wherein the blocking member has a vent portion communicating with a hollow portion of the thin film support member.

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