JP5199012B2 - Chuck roll - Google Patents

Description

It is an invention about a cylindrical chuck roll that adsorbs and conveys a continuous strip-like thin plate (hereinafter simply referred to as “web”) of several μm to 1 mm made of organic matter or metal, and particularly high temperature (upper limit is 50 ° C. to It can withstand use at about 300 ° C.).

Adsorption rolls for adsorbing and transporting webs have traditionally been equipped with a number of through-holes for adsorption on the surface of a metal roll. "Type" was mainstream.
This through-hole type has weaknesses, and it absorbs only through the through-hole part and does not adsorb the part that does not hit the through-hole, so there are scratches around the outline of the through-hole of the web, and the web can be distorted. There are things to do. This problem is slightly improved by increasing the number of through holes and reducing the diameter, but it is not perfect and the price of the roll at that time becomes very expensive.

For this purpose, it has been proposed that a porous body made of ceramics, plastic, metal, or the like is provided on the surface layer of a roll and the web is adsorbed on the entire surface of the porous body by sucking gas from the inside of the cylinder. Therefore, by increasing the surface accuracy, it is possible to suppress web damage and distortion, which is one of the problems, to some extent.
When used at a high temperature, it is required that the members do not peel or break due to thermal expansion of each member forming the chuck roll.

JP 2002-255423 A JP 2004-142936 A Japanese Patent Application No. 2008-137804

The technique described in the cited document 1 describes that uniform adsorption is performed by providing a porous vent (4) in the outermost layer and providing a through hole (11) having a larger eye in the innermost layer. The size of the air hole is 20 to 125 mesh, and when the web is thin and easily deformed, the transfer of the mesh shape may be a problem. As for heat, although it is described that the roll member is integrated by utilizing thermal expansion in the manufacturing process, the temperature change at the time of use is not considered, and the temperature rises from room temperature. There is no suggestion of whether or not it is suitable for use in a harsh environment. Considering that shrink fitting is performed by raising the temperature, it is natural that it cannot be used due to changes in temperature.

The technique described in the cited document 2 is a suction roll whose outer peripheral surface is made of a porous material and shields a portion that does not contact the web. By shielding, it is designed to eliminate leakage from a portion not in contact with the workpiece and increase the attractive force. This suction roll has no problem with respect to the suction force, and the material of the cylindrical porous body 20 is not specified, but it is described as part of the invention that a porous sintered plastic sheet is pasted on the surface. Although details of the plastic sheet are unknown, it is not sufficient in terms of maintaining a certain surface roughness and flatness. Also, under conditions where the temperature changes during use, the thermal expansion of each member is different, so that destruction, delamination, and deformation occur between the members, making it difficult to use at room temperature.

The technique described in the cited document 3 includes side plates 40 and 41 having vent holes (openings 31) to the outside on both end sides of the cylindrical porous body 26, and the support 22 is removed from the cylindrical porous body 26. It is a structure of a suction roll that allows gas to enter and exit from the opening. In addition, a mechanism for discharging dust and chemicals attached to the cylindrical porous body 26 to the outside in order to prevent clogging is provided. This technique is also not described regarding the temperature change during use, and is not considered in view of the structure. If this suction roll is used in an application where the temperature change is large, the support frame and the suction roll main body, the cylindrical porous body, the side plate, the gear-like support, etc. are destroyed, peeled off or deformed due to thermal expansion. It becomes difficult to use it at room temperature.

In the conventional techniques described above, use in an environment in which temperature changes occur becomes difficult as the temperature goes away from normal temperature, and breakage, peeling, and web quality deterioration occur. Examples of applications in which the temperature deviates from the normal temperature include drying, fixing, solidifying, and heat treatment of the drug applied to the web.

An object of the present invention is to obtain a chuck roll having the following characteristics.
(Ii) A chuck roll that can be attracted and transported in a good condition without causing breakage, peeling or distortion between the members of the chuck roll even when there is a temperature change during use.
(B) A chuck roll that can be sucked and transported while maintaining the web very well in terms of surface roughness and distortion.
(Ha) Chuck roll with low manufacturing costs.

The present invention according to claim 1 is a chuck roll that sucks and conveys a thin plate-like web at the outer periphery of the roll, and at least the following members (1) to (4) from the center of the roll toward the surface layer: The roll end face has the following (5) and (6), and at least one member of the following (1), (5) and (6) passes to the following (3) via the following (2) It is a chuck roll having a vent passage communicating from the inside of the cylinder and controlling the pressure in the chuck roll with an external gas control device.

In addition, about (1)-(6) which are the main members of this invention demonstrated below, in a specification, it expresses as it is (1)-(6) as it is except one part.

Each explanation is added about (1)-(6).

(1) As shown in the schematic diagram of FIG. 2, the central axis is a central axis 1 that transmits a driving force for rotating the chuck roll from external power to the entire chuck roll, and is used for joining with the following (5). A central axis having a portion 2. Specifically, (1) is rotated by power driven by a motor or a prime mover. Since it becomes the center of rotation, it is desirable to use a material having a Young's modulus of 200 GPa or more, such as tool steel, which has less deformation such as deflection as its length increases. Further, when it is desired to reduce the deflection, a ceramic having a Young's modulus of 350 GPa or more is preferable. The roundness is preferably within 5 μm. It is also possible to provide an external gas control device and an air passage that transmits to (4) via (2) and (3), for example, from the end A.

(2) The intermediate support is a substantially cylindrical member provided on the inner diameter side in accordance with the outer diameter of (1), and has an air passage communicating with the external gas control device. This is an intermediate support body having a structure communicating with the air passage, joined and fixed to (5) below, and not joined to (1). A conceptual diagram of this member is shown in FIG.
The intermediate support is located between the cylindrical shapes (3), (4), and (1) and supports (3) and (4), but communicates with an external gas control device to perform the control of (4). It has a structure to do. The material can be metal, ceramics, cemented carbide, hard organic matter, or the like. At the time of selection, the condition is that the shape is maintained even at the maximum use temperature of the chuck roll and no chemical reaction occurs.
Gas pressure increase / decrease controlled by an external gas control device is transmitted to the surface layer portion (4) through the gas communication portion to (3) of the intermediate support. Further, this intermediate porous body is not joined to the outer diameter portion of the central axis (1), is fitted to the extent that it can move, and is supported by (5) and (6). Therefore, even when the positional relationship with (1) is changed from room temperature due to thermal expansion or the like, it is independent of (1) in the length direction of the roll, so it is expected when both are joined together. There is no fear of peeling or breaking.

(3) The dense cylinder is a cylinder that joins the outer diameter of (2) with the inner diameter of (4), and can communicate with the external gas control device through (2) to (4) at least. It is a dense cylinder with a simple air passage.
The inner surface of the dense cylinder is integrally joined to the outer shape of the intermediate support in (2) above, and grooves and holes that enable the gas flow provided in (2) are provided, and gas is provided on the front and back of the cylinder. It is a dense cylinder with a communication part for communicating.
One of the roles of the dense cylinder is to maintain the shape during production and use of (4). For example, as in the case of (2) intermediate support shown in FIGS. 1 and 8, if the structure is such that (4) the surface layer part is supported by a part of the outer shape, (4) deflection during manufacture and use of the surface layer part Therefore, a part that is easily deformed in a perfect circle shape or the roll length direction and a part that is not so are generated. For this reason, it is difficult to maintain surface accuracy. Thus, by bonding with (4), one of the roles is to suppress the deformation of (4). Another role of the dense cylinder is (4) a role as a vent to the surface layer side. From the device that controls the flow of gas to (2) before the surface layer part, it can be secured by taking a sufficient size of the vent hole, but (4) introduction to the surface layer part should have a vent hole in the entire surface layer part as much as possible. It's better to spread. This is because (4) in the case where a vent hole is provided only in a part of the surface layer portion, (4) is porous and less gas flow, so it is difficult to adsorb the entire surface to the same extent. It is.
Considering the above two roles, this dense cylinder has a groove with a width of 1 to several mm on the outer periphery of the cylinder, and the pressure of the gas communicated with (2) from the groove is directly applied to (4). Come to work. An example of this is shown in FIG. Of course, a constant gas flow can be achieved, and (4) if the surface layer portion has a shape that does not deform, the pattern is provided with a portion that does not adhere in parallel to the diameter or length direction, a portion that does not adhere, a lattice shape, or many cylinders The shape may be a shape in contact with the surface layer portion or a meander shape, as long as the adsorbing force can be secured and the adhesion cannot be removed.

(4) The surface layer portion is a surface layer portion in the circumferential direction of the chuck roll, and is bonded to the outer diameter of (3), and adsorbs and holds the web on this surface, and is a ceramic having a continuous outermost diameter. It is the surface layer part which consists of a porous body. Adhesion with (3) is performed with an adhesive applied only to the outermost part of (3) (not applied to the groove 9). It should be noted that the end of (3) corresponding to both ends of the roll is always a part to be bonded to prevent leakage. Ceramics should be mainly of a type that is relatively easily available and has established manufacturing techniques, such as aluminum oxide, silicon oxide, zirconium oxide, silicon nitride, silicon carbide, titanium carbide, and tungsten carbide. In addition, it is possible to select one that does not worry about corrosion in the use atmosphere. For example, when used at 100 ° C. or higher in an air atmosphere, it is suitable to use oxide ceramics because carbides and nitride ceramics have a risk of surface oxidation.
Further, the surface roughness should be small, but if the pore diameter is reduced in order to reduce the surface roughness, the adsorptive power decreases. If the adsorptive power is sufficient, an average pore size of 0.2 to 2 μm is desirable because the shape of the surface layer portion is difficult to be transferred to the web. Usually, if there is no adsorbate on the entire surface of the porous body, it cannot be adsorbed due to leakage from other parts, but if the average pore diameter is in the above range, there is no adsorbate on the entire surface of the porous body. “Partial adsorption” is also possible. This is because leakage from other parts is much smaller than the capacity of the gas control device. In the present invention, it is considered that the material in this range is used as (4). For this reason, the example of the present invention includes a leak from a portion of the outer peripheral surface of (4) that is not attracted. Is not specifically considered.

(5) The end face member 1 is joined to the above (1) with an inner diameter, and is a ring-shaped dense material provided on one end face of the above members (2), (3), (4) at the same time, It is an end surface member which seals a roll one end surface. (5) The end surface member 1 is joined to the above (1), and at the same time, in a ring shape made of a dense material provided on one end surface of the above members (2), (3) and (4), It is an end surface member that seals one end surface of the chuck roll. A schematic diagram is shown in FIG. The left figure of FIG. 6 is the figure seen from the edge part of a roll, and the right side is the figure seen from the center direction of the roll. Since the porous body of (4) has a gas leak in the direction of the end face of the cylinder, a member for sealing the end face is required on the end face. The material is not particularly limited as long as it can be sealed, and even if it is made of metal, ceramic or organic material, it can be appropriately sealed. By the action of this member, (4) adsorption and release of the surface layer portion by an external gas control device can be followed. Further, the end face member 1 is joined to (1) at the inner diameter. In the same figure, the case where it has the blind hole 32 opened in order to bolt both is shown. By this bonding, the entire chuck roll can be rotated simultaneously by rotating (1).
Further, when the gas between (4) and the web is controlled through (2) by an external gas control device, an air passage 31 penetrating this member is provided. (See Figure 9)

(6) The end face member 2 is an end face member on the side facing the end face described in (5) above, and is a ring-shaped dense body, which is bonded to the (2), (3) and (4). When the roll end face is sealed and the lengths of (1) and (2) change relatively due to thermal expansion, following (2) and (3) only in the length direction of the chuck roll ( It is an end face member having a structure that moves relative to 1) and maintains a sealed state. An example of the structure is shown in FIG. In this figure, (2) and (6) are examples in which a through hole 41 for bolting is provided.
It is not a problem if the chuck roll is used only at room temperature, but when it is handled at a temperature higher than room temperature, it is necessary to consider thermal expansion due to temperature. The application for increasing the temperature is typically applied to drying, fixing, solidifying, etc. of the coating agent applied to the web, and the temperature may be as high as 300 ° C. If the chuck roll members are all made of the same material, this temperature change will not be a problem. However, when there are multiple materials such as ceramics, iron, stainless steel, and organic matter, the thermal expansion between the members due to thermal expansion in the length direction of the roll. The difference becomes a problem. Since the length in the radial direction is limited, there is little problem as long as the diameter is not very large.
As an example, the surface layer portion is a silicon carbide ceramic having a thermal expansion coefficient of 4 × 10 ⁻⁶ (K ⁻¹ ), the central axis is 13 × 10 ⁻⁶ (K ⁻¹ ) stainless steel, and the length is 2000 mm. Consider a chuck roll whose temperature is increased to 200 ° C. The difference in thermal expansion coefficient between them is 9 × 10 ⁻⁶ (K ⁻¹ ), and the temperature change is 175 (K) from room temperature (25 ° C.). In this case, the difference in elongation due to thermal expansion is 3.15 mm, which is a value where peeling and destruction occur reliably when both (1) and (2) are firmly joined. The chuck roll of the present invention is not constrained by using (6) on one end face, even when the relative lengths of the central axis (1) and the porous intermediate (2) are changed. No peeling or destruction occurs.

  By manufacturing the chuck roll with the members shown in (1) to (6) described above, the chuck surface can be uniformly sucked, can be used without problems even when there is a temperature change during use, and is low in cost. A chuck roll that can be manufactured can be obtained.

In the second aspect of the present invention, the structure described in (6), which is relatively moved from (1) and maintains a sealed state, is provided in a portion closer to the roll end than (6). The chuck roll according to claim 1, wherein the chuck roll has a structure movable by expansion and contraction of an elastic body. This schematic diagram is shown in FIG. As described above, since (1) and (2) are not joined to each other, when viewed from (1) to (2), there is no restriction in the length direction. However, a gap between (1) and (6) must be avoided. As a countermeasure against this, it is desirable to have a structure in which (6) is pressed in the direction of (5) with a constant pressure. The simplest and least expensive method is to press (6) toward the center of the chuck roll using an elastic body (51 in FIG. 1) provided on the end side of the chuck roll from (6). Since the elastic body expands and contracts due to temperature changes, (1) and (2) can be relatively moved in the length direction of the roll within the range of expansion and contraction. The elastic body is not particularly limited, but a heat resistant resin such as silicon rubber or PTFE that can be used even at high temperatures is preferable. The elastic body also functions to more reliably seal the contact portion between (1) and (6).

As for this invention of Claims 3-5, (2), (3), (4) respectively consists of a plurality of members having the same shape in at least the radial direction, and their end portions are in the length direction of the roll. The chuck roll according to claim 1, wherein the chuck roll has a structure integrated by bonding. Regarding (4), not only adhesion but also cylindrical porous ceramics can be brought into close contact with each other without any gap.
The advantage of using a plurality is the ease of manufacturing and the low manufacturing cost. Taking ceramics as an example, in order to produce a long cylindrical object, a raw material powder is obtained by a cold isostatic press or rubber press to obtain a cylindrical green body, which is subjected to intermediate processing, degreased and fired. It is necessary to process the length, inner diameter, and outer diameter later. Since the required sintered body is large, the rate of occurrence of press cracks, cracks during intermediate processing, cracks and chips during handling, degreasing cracks, sintered cracks, and the like increases. Further, when degreasing and sintering, it is necessary to slow down or lengthen the temperature raising rate and the holding rate, so that much time and electricity are required for sintering. On the other hand, if it is a plurality of short cylindrical members, pressing can be performed accurately with a die press, and intermediate processing can be easily performed with a lathe on the outer shape and inner diameter. Degreasing and sintering do not require a particularly long time, and since the sintered body is small, there are very few cracks. After sintering, the thickness may be determined using a surface grinder or a double-side grinder, and the inner diameter and outer shape may be adjusted after bonding and integration.
In both cases, the obtained product can be used in the same manner. However, it is very advantageous to use a plurality of rings for the cost, time, difficulty, pressing device, processing device, and the like.
Each cylindrical body may have a plurality of the same thickness, or may have a plurality of thickness types.

Although not particularly described in the above description, since (2), (3) and (4) are bonded, it is preferable that the difference between the three thermal expansion coefficients is as small as possible. For this purpose, it is most suitable to manufacture the three with the same material. For example, a dense silicon carbide sintered body is used for (2) and (3), and a silicon carbide porous body having a porosity of 20% is used for (4). When this is difficult, for example, it is preferable to use two or three kinds of materials having a difference in thermal expansion coefficient within 1 × 10 ⁻⁶ (K ⁻¹ ).

In the present invention, the following problems can be solved.
(Ii) Even when there is a temperature change during use, the chuck roll can be adsorbed and transported in a good state without being broken, peeled off or distorted.
(B) The web can be adsorbed and conveyed while maintaining a very good surface roughness and strain.
(Ha) The manufacturing cost is kept low.

The chuck roll of the present invention can be obtained as follows.
First, select the material to be used in (4) according to the usage environment. Important factors are porosity, average pore diameter, heat resistance, chemical reactivity, thermal expansion coefficient, and the like. Appropriate materials are selected according to these applications. Ceramics are suitable as the material of the porous body, and as oxide-based aluminum oxide, silicon oxide, zirconium oxide, iron oxide, magnesium oxide, nitrides are silicon nitride, aluminum nitride, sialon, titanium nitride, carbides It is preferable to select from materials that are easily available, such as silicon carbide, titanium carbide, tungsten carbide, and chromium carbide.

  Compared with materials other than ceramics, the ceramics are suitable for chuck rolls in terms of characteristics such as high wear resistance, low atmosphere and reactivity with the web, and high Young's modulus.

Next, the materials (2) and (3) are selected. (2) The selection criteria of (3) are that the thermal expansion coefficient is close to (4) and that the strength and Young's modulus are sufficiently high. If the coefficient of thermal expansion is not the same as or close to (4), when the temperature rises during use, the lengthwise dimensions of (2) and (3), (3) and (4) will be separated, and both will peel off , Easy to destroy. The difference in thermal expansion coefficient is ideally 0, but there is no problem if it is 1 × 10 ⁻⁶ (K ⁻¹ ) or less. Further, although it depends on the size of the chuck roll, the strength is preferably 300 MPa or more and the Young's modulus of 200 GPa or more as a three-point bending strength. If it is less than this, there is a possibility that deformation or destruction will occur due to the finishing process after (4) and joining, or due to stress during actual use. (4) is ceramics, but the materials of (2) and (3) are not limited to ceramics as long as they have the characteristics described above, and iron-based metals, alloys between metals, and cemented carbides are also available. Even if the thermal expansion coefficient matches (4), it can be used.

The central axis of (1) is preferably made of a material having a small deformation with a Young's modulus of 200 GPa or more, desirably 350 GPa or more. Moreover, although the shape is the column shape which a base fits with (2), the location which can be joined with the member of (5) is also provided. For example, a member that can be bolted with (5) may be provided on the outer peripheral part by welding or the like, or only that part may have a large diameter structure and can be fixed by bolting or welding (see 2 in FIG. 2). Show). The shape is basically cylindrical, but as shown in FIG. 8, a gas can be exchanged with (2) by providing a vent hole 61 communicating with an external gas control device in the cylinder. Further, as long as the strength can be ensured, it is not limited to a columnar shape, and a cylindrical structure can be used.

  The end face member 1 of (5) has a ring shape in which the inner diameter is joined to (1), and is joined and fixed to (1) at one end face. The other end face is joined to (2), (3) and (4) to fix them. This end face member 1 has a role of preventing leakage in the end face direction from the contact faces of (1) and (2) and (4). For this, it is preferable to select a dense material which has a ring shape and does not significantly change its shape retention and heat characteristics. In addition, since the length direction of the ring is not a significant distance, there is little need to consider the coefficient of thermal expansion. This material may be selected from various iron materials, stainless steel, ceramic materials, cemented carbide, high temperature resistant resin such as PTFE, and the like.

(6) is a ring-shaped member that is fitted so that the inner diameter side is movable in the length direction of the central axis and the roll, and one side of the end face is a ring-shaped member that is coupled to (2), (3), and (4). One end face side is joined and bonded to (2), (3) and (4). This end face member 2 has a role of preventing leakage in the end face direction from (4). It is preferable to select a dense material which has a ring shape and whose shape characteristics are remarkably changed. In addition, since the length direction of the ring is not a significant distance, there is little need to consider the coefficient of thermal expansion. What applies to the material may be selected from various iron materials, stainless steel, ceramic materials, cemented carbide, high temperature resistant resin such as PTFE, and the like.

  (2) For (3) and (4), the separately made parts are bonded together to make the length a desired length. Each dimension in the radial direction is opened in advance so as to leave a bonding allowance. For this, grinding of the end face that determines the length and processing with a cylindrical grinder and an internal grinder for determining the inner and outer shapes are performed. The inner diameter side of (2) is fitted to the outer shape of (1) so as to be movable with no gap.

On the other hand, (1) and (5) are joined together. Next, (1) is inserted into the joined body of (2), (3), and (4) so that the end face is in contact with (5). In this state, the joined bodies (2), (3), and (4) are fixed at their end faces and integrated with (5). This method may be bonding, or may be a method in which a screw thread is cut in advance and integrated with a bolt or the like, as long as the end face does not leak. Moreover, when it is set as the structure which an external gas control apparatus communicates with (2), the hole (31 of FIG. 6) for that purpose can be made beforehand in (5), or a hole can be made after an assembly. Next, the other end face of the joined body of (2), (3) and (4) is joined to (6). As long as the end face does not leak, any method can be used.

After finishing the assembly, (1) to (6) are finished with a cylindrical grinder. The chuck roll of the present invention can be obtained by grinding the outer periphery of (4) and finishing it to desired dimensions and surface roughness.

Hereinafter, the present invention will be described in more detail with reference to examples.

The material of each member of (1)-(6) was selected as follows.
(1) SUS430 stainless steel (2) Dense alumina (3-point bending strength 500 MPa, Young's modulus 380 GPa)
(3) Dense alumina (3-point bending strength 500 MPa, Young's modulus 380 GPa)
(4) Porous alumina (porosity 25%, average pore diameter 1 μm)
(5) SUS430 stainless steel (6) SUS430 stainless steel Moreover, the thermal expansion coefficient of said (1) (5) (6) is 13 * 10 <^-6> (K <^-1> ),
(2) The coefficient of thermal expansion is 7 × 10 ⁻⁶ (K ⁻¹ ) in (3) and (4).

  In (1), the flange 2 in FIG. 2 used for joining with (5) was formed by welding. A hole in the longitudinal direction was made in the flange 2 and the tap 3 was cut. In addition, the central portion of the shaft has an air passage communicating with an external gas control device (61 in FIG. 8).

  (2) is a diagram using three cylindrical dense alumina, the inner diameter is matched to the outer diameter of (1), leaving 10 mm from the both end faces of the cylinder from the outer diameter side, and the remaining central part is a vent passage The shape of the counterbore 63 in FIG. A schematic diagram is shown in FIG. A communication hole 6 extending from (1) communicating with the external gas control device is provided on the inner communication side in contact with (1). A communication portion 62 as shown in FIGS. 1 and 3 is provided on the end surface portion so that the gas communicates with the adjacent cylindrical dense porous alumina.

  For (3), five rings having the same outer diameter and inner diameter were integrated by bonding, and the end face and the inner diameter side were ground and finished. One of these is shown in FIG. A through hole 8 was formed so as to communicate with the part of the counterbore (2). Furthermore, grooves 9 having a pitch of 3 mm were cut on the outer diameter surface so as to be striped in the roll length direction except for the end portions.

  In (4), two rings having the same outer diameter and inner diameter were integrated by bonding and the end surfaces and inner and outer circumferences were ground. The inner diameter was finished to be about 10 μm larger than the outer diameter of (3) as the bonding allowance, and the allowance was left on the outer diameter side.

  (5) has the same inner diameter as that of (1), and the outer diameter is the outer diameter of the chuck roll. Further, a plurality of other blind holes were provided, and taps were cut therein, and bolted and adhered firmly to the flange portion 2 of (1).

  In (6), the other end face provided with (5) can be fixed with an adhesive and a bolt. In addition, a silicon rubber disk-shaped plate (51 in FIG. 1) is placed in the direction of the roll end, and is sandwiched between the fixed auxiliary tool 52 that is movable in the length direction of the roll provided in (1). I did it.

  First, (2) and (3) were integrated by bonding (1) to (5). Next, the integrated (2) (3) and (4) were bonded and integrated. On the outer peripheral side of (3), an adhesive was applied only to the outermost portion except the groove 9.

Next, after joining (1) and (5), the flange 2 and the tap part (31 in FIG. 6) were firmly bolted. Subsequently, (1) was inserted into the integrated inner diameters of (2), (3) and (4). Further, (5) was fitted to the other end portion side of (1), and integrated with the end surfaces of (2), (3), and (4) by bonding. Then, a silicon rubber disk 51 was brought into close contact with the end side from (6) and fixed by the fixing auxiliary tool 52 provided in advance in (1).

Finally, the integrated chuck roll was applied to a cylindrical grinder, and (4) was finished to a desired outer diameter. Finishing was performed with a # 200 grindstone, and the surface roughness of the finished surface was an arithmetic average roughness Ra of 0.6 μm and a maximum height Ry of 3.3 μm.

As shown in the conceptual diagram of FIG. 10, the obtained chuck roll was fixed on a support base by bearings (not shown) so that it could be rotated by power 71. In addition, a leak tape was used for the through hole provided in (1), and a joint was connected thereto and connected to an external gas control device 72.

The chuck roll thus completed was used for transporting a 20 μm thick copper foil web 74, 75 coated with about 50 μm of sol-like carbon with a solvent added by a coating tool 73. It should be noted that the environment is an air atmosphere, and the webs 74 and 75 and the chuck roll 70 are used in a dryer maintained at a temperature of 200 ° C. in order to dry and fix the carbon in a short time.

  The chuck roll and other parts were installed before operating the dryer, and after confirming that the chuck roll had no abnormality, the temperature was raised to 200 ° C. as described above. With the conveyance by the chuck roll, the PTFE sheet as the web was conveyed by the chuck roll during the drying of the carbon as the coating agent. The operation was continued for 5 hours, and after cooling, the chuck roll and web were checked.

  As a result, as for the chuck roll, there was no peeling, breakage, scratch or the like at all locations including the outer diameter surface of (4), and it was in a state completely unchanged from before use. (1) should have expanded more than (2) due to the temperature rise to 200 ° C, but (1), (2) and (3) are only joined via (4). There are no problems such as peeling or cracking because they do not restrain each other in the length direction. In the case of (4) in contact with the web, there was no welding of the web or coating agent, nor any wear or discoloration.

Regarding the treated web, the surface of the copper foil web and the carbon coating part was examined, but there was no suction mark by the chuck, the coating agent was uniformly dried, and there was no problem at all. .

It is a figure which shows the typical structure of the chuck | zipper roll of this invention. It is a schematic diagram of the central axis (1) which is a component of the present invention. It is a schematic diagram of the intermediate | middle support body (2) which is a component of this invention. It is a schematic diagram of the dense cylinder (3) which is a component of the present invention. It is a schematic diagram of the surface layer part (4) which is a component of this invention. It is a schematic diagram of the end surface member 1 (5) which is a component of this invention. It is a schematic diagram of the end surface member 2 (6) which is a component of the present invention. It is a figure which shows another example of implementation of the chuck | zipper roll of this invention. It is a figure which shows another example of implementation of the chuck | zipper roll of this invention. An example in which the chuck roll of the present invention is used in a web conveyance process is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Center shaft 2 Collar part 3 joined with end surface member 1 Bolt hole 4 for joining with end surface member 1 Intermediate support body 6 Air passage 7 for communicating with a central axis Dense cylindrical body 8 Communicating with an intermediate support body Ventilation hole 9 Groove 13 Bonded portion 20 with dense cylinder Surface layer portion 21 Single cylinder 23 before bonding Bonded portion 30 between cylinders End face member 1
31 Aeration passage 32 leading from the end face member 1 to the intermediate support body A blind bolt hole 40 for joining the end face member 1 and the central shaft 2 end face member 2
41 Bolt hole 50 for integrating with intermediate porous body 51 Schematic diagram of chuck roll of the present invention 51 Elastic body 52 Fixing aid 55 Communication passage 56 with external gas control device Intermediate support body and air passage 61 of dense cylinder Communication passage vent hole 62 with external gas control device Ventilation passage 63 between intermediate supports Support passage of intermediate support, counterbore part 70 Chuck roll 71 External power 72 External gas control device 73 Application tool 74 Web (before application) )
75 Web (after application)
76 Direction of web travel

Claims (5)

A chuck roll that sucks and conveys a thin plate-like web at the outer periphery of the roll, and has at least the following members (1) to (4) from the center of the roll to the surface layer. (5) It has (6), and communicates with at least one member of the following (1), (5), and (6) from the inside of the cylinder to the following (4) via the following (2) and (3) A chuck roll having a vent passage for controlling the pressure in the chuck roll with an external gas control device.
(1) Central axis: A cylindrical central axis that transmits a driving force for rotating the chuck roll from external power to the entire chuck roll, and a central axis having a portion for joining with the following (5).
(2) Intermediate support: a substantially cylindrical member whose inner diameter side is provided in accordance with the outer diameter of (1), and has an air passage communicating with an external gas control device, and the air passage is the following (3) The intermediate support body which has a structure communicating with the air passage, is bonded and fixed to the following (5), and is not bonded to the above (1).
(3) Dense cylinder: The inner diameter is joined to the outer diameter of (2), the outer diameter is a cylinder to which (4) is bonded, and at least through (2) to (4) with the external gas control device A dense cylinder with an air passage that allows communication.
(4) Surface layer portion: A surface layer portion in the circumferential direction of the chuck roll, which is a surface layer portion made of a ceramic porous body bonded to the outer periphery of (3) and adsorbing and holding the web on the outer peripheral surface.
(5) End surface member 1: A ring-shaped dense member which is joined to (1) and is provided on one end surface of the members (2), (3) and (4) at the same time, and a chuck roll An end face member that seals one end face.
(6) End face member 2: An end face member on the side facing the end face described in (5) above, which is a ring-shaped dense body, and is chucked by joining with (2), (3), (4). When the roll end face is sealed and the length in the longitudinal direction of the rolls (1) and (2), (3), (4) changes relatively due to thermal expansion, (2), (3) And an end face member having a structure that keeps a sealed state by moving relatively from (1) in the length direction of the chuck roll following (4). The structure described in (6) above, in which the structure that moves relative to (1) and maintains a sealed state is movable by expansion and contraction of an elastic body provided in a portion closer to the chuck roll end than (6) The chuck roll according to claim 1, wherein 3. The structure according to claim 1, wherein (2) is composed of a plurality of members having the same shape in at least the radial direction, and the end portions thereof are bonded and integrated in the length direction of the roll. Chuck roll. The chuck roll according to any one of claims 1 to 3, wherein (3) has a structure in which a plurality of cylinders are formed and their end portions are bonded and integrated in the length direction of the roll. The said (4) consists of a some cylinder, It is the structure which adhere | attached and integrated those edge parts in the length direction of the roll, or has adhered closely without gap. Chuck roll.

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