JP2022119371A5 - - Google Patents
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- JP2022119371A5 JP2022119371A5 JP2021016443A JP2021016443A JP2022119371A5 JP 2022119371 A5 JP2022119371 A5 JP 2022119371A5 JP 2021016443 A JP2021016443 A JP 2021016443A JP 2021016443 A JP2021016443 A JP 2021016443A JP 2022119371 A5 JP2022119371 A5 JP 2022119371A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- timing
- processing apparatus
- information
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 37
- 230000010365 information processing Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000003672 processing method Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000004806 packaging method and process Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021016443A JP2022119371A (ja) | 2021-02-04 | 2021-02-04 | 情報処理装置、情報処理方法、及び物品の製造方法 |
| KR1020220007583A KR20220112674A (ko) | 2021-02-04 | 2022-01-19 | 정보 처리장치, 정보 처리방법, 물품 제조 시스템 및 물품의 제조방법 |
| TW111102372A TW202232346A (zh) | 2021-02-04 | 2022-01-20 | 資訊處理裝置、資訊處理方法、物品製造系統及物品製造方法 |
| CN202210113176.2A CN114859665A (zh) | 2021-02-04 | 2022-01-30 | 信息处理装置、信息处理方法、物品制造系统和方法 |
| US17/590,687 US12362209B2 (en) | 2021-02-04 | 2022-02-01 | Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021016443A JP2022119371A (ja) | 2021-02-04 | 2021-02-04 | 情報処理装置、情報処理方法、及び物品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022119371A JP2022119371A (ja) | 2022-08-17 |
| JP2022119371A5 true JP2022119371A5 (cg-RX-API-DMAC7.html) | 2024-01-26 |
Family
ID=82612868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021016443A Pending JP2022119371A (ja) | 2021-02-04 | 2021-02-04 | 情報処理装置、情報処理方法、及び物品の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12362209B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2022119371A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20220112674A (cg-RX-API-DMAC7.html) |
| CN (1) | CN114859665A (cg-RX-API-DMAC7.html) |
| TW (1) | TW202232346A (cg-RX-API-DMAC7.html) |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4128339B2 (ja) * | 2001-03-05 | 2008-07-30 | 株式会社日立製作所 | 試料処理装置用プロセスモニタ及び試料の製造方法 |
| JP2004198148A (ja) * | 2002-12-16 | 2004-07-15 | Omron Corp | 品質データのモニタリング方法及び装置 |
| SG121141A1 (en) | 2004-09-14 | 2006-04-26 | Asml Masktools Bv | A method for performing full-chip manufacturing reliability checking and correction |
| JP4653715B2 (ja) * | 2006-10-13 | 2011-03-16 | 新日本製鐵株式会社 | プラント操業支援装置、プラント操業支援方法、コンピュータプログラム及び記憶媒体 |
| JP2009170612A (ja) * | 2008-01-15 | 2009-07-30 | Canon Inc | 情報処理装置、情報処理方法、処理システムおよびコンピュータプログラム |
| US8329479B2 (en) * | 2008-04-18 | 2012-12-11 | Hitachi Kokusai Electrical Inc. | Information managing method, information managing apparatus and substrate processing system |
| JP2009271585A (ja) * | 2008-04-30 | 2009-11-19 | Dainippon Screen Mfg Co Ltd | グラフ表示装置、グラフ表示方法及びグラフ表示プログラム |
| JP2009283580A (ja) * | 2008-05-21 | 2009-12-03 | Renesas Technology Corp | 半導体装置の生産管理システム |
| JP5771426B2 (ja) * | 2011-03-29 | 2015-08-26 | 東京エレクトロン株式会社 | 情報処理装置、処理システム、処理方法、及びプログラム |
| US10295993B2 (en) * | 2011-09-01 | 2019-05-21 | Kla-Tencor Corporation | Method and system for detecting and correcting problematic advanced process control parameters |
| US20150253762A1 (en) * | 2012-09-26 | 2015-09-10 | Hitachi Kokusai Electric Inc. | Integrated management system, management device, method of displaying information for substrate processing apparatus, and recording medium |
| TWI627588B (zh) * | 2015-04-23 | 2018-06-21 | Screen Holdings Co,. Ltd. | 檢查裝置及基板處理裝置 |
| CN110770663B (zh) * | 2017-06-26 | 2024-01-19 | 株式会社东芝 | 可视化系统 |
| JP6693979B2 (ja) * | 2018-01-30 | 2020-05-13 | ファナック株式会社 | 表示装置及び工作機械 |
| EP3726316B1 (en) * | 2019-04-17 | 2022-06-29 | ABB Schweiz AG | Controlling technical equipment through quality indicators using parameterized batch-run monitoring |
| JP2020184167A (ja) * | 2019-05-07 | 2020-11-12 | Ｎｅｃソリューションイノベータ株式会社 | 酒造分析装置、酒造分析方法、プログラム、および記録媒体 |
| JP7580263B2 (ja) * | 2020-12-18 | 2024-11-11 | 東京エレクトロン株式会社 | 表示装置、表示方法、及び記憶媒体 |
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2021
- 2021-02-04 JP JP2021016443A patent/JP2022119371A/ja active Pending
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2022
- 2022-01-19 KR KR1020220007583A patent/KR20220112674A/ko active Pending
- 2022-01-20 TW TW111102372A patent/TW202232346A/zh unknown
- 2022-01-30 CN CN202210113176.2A patent/CN114859665A/zh not_active Withdrawn
- 2022-02-01 US US17/590,687 patent/US12362209B2/en active Active