JP2022106694A - モジュラーマイクロ波プラズマ源 - Google Patents
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32201—Generating means
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
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- H01J37/3244—Gas supply means
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Abstract
Description
本出願は、2016年8月16日に出願された、「モジュラーマイクロ波プラズマ源(MODULAR MICROWAVE PLASMA SOURCE)」と題され、全ての目的のためにその全体が参考されることによって本明細書中に組み込まれる米国仮特許出願第15/283,695号の利益を主張する。
Claims (15)
- 電圧制御回路と、
電圧制御発振器であって、前記電圧制御回路からの出力電圧が前記電圧制御発振器における発振を駆動する、電圧制御発振器と、
前記電圧制御発振器に結合された固体マイクロ波増幅モジュールであって、前記電圧制御発振器からの出力を増幅する、固体マイクロ波増幅モジュールと、
前記固体マイクロ波増幅モジュールに結合されたアプリケータであって、誘電体共振器であるアプリケータと
を備えるモジュラーマイクロ波源。 - 前記固体マイクロ波増幅モジュールが、プレ増幅器、主電力増幅器、並びに前記プレ増幅器及び前記主電力増幅器に電気的に結合された電源を更に備える、請求項1に記載のモジュラーマイクロ波源。
- 前記マイクロ波増幅モジュールが位相シフタを更に備える、請求項2に記載のモジュラーマイクロ波源。
- 前記マイクロ波増幅モジュールが、前記主電力増幅器と前記アプリケータとの間の伝送経路に沿ったサーキュレータであって、前記アプリケータからの反射電力をダミー負荷まで伝送するサーキュレータ、及び前記ダミー負荷と前記電圧制御回路との間のフィードバックラインを更に備える、請求項2に記載のモジュラーマイクロ波源。
- 前記マイクロ波増幅モジュールがパルスモードで動作する、請求項2に記載のモジュラーマイクロ波源。
- 前記誘電体共振器が、
誘電体共振キャビティと、
前記誘電体共振キャビティの外側の側壁周囲に形成されたアプリケータハウジングと、
前記誘電体共振器の軸方向中心下に、かつ前記誘電体共振キャビティの中心に形成されたチャネル内に延びるモノポールと
を備える、請求項1に記載のモジュラーマイクロ波源。 - 前記モノポールに垂直な平面における前記誘電体共振キャビティの断面が、円形、長方形、又は対称的な多角形である、請求項6に記載のモジュラーマイクロ波源。
- 前記誘電体共振キャビティの断面が前記モノポールに垂直なすべての平面において同一ではない、請求項6に記載のモジュラーマイクロ波源。
- 前記モノポールに垂直な第1の平面における前記誘電体共振キャビティの第1の断面が対称的な多角形であり、前記モノポールに垂直な第2の平面における前記誘電体共振キャビティの第2の断面が円形である、請求項8に記載のモジュラーマイクロ波源。
- インピーダンス調整バックショートを更に備える、請求項6に記載のモジュラーマイクロ波源。
- 処理チャンバと、
前記処理チャンバに結合された複数のモジュラーマイクロ波源と
を備え、前記複数のモジュラーマイクロ波源が、
1つ又は複数の基板が処理される前記処理チャンバのチャックの反対側に位置決めされるアプリケータのアレイと、
マイクロ波増幅モジュールのアレイであって、各マイクロ波増幅モジュールが前記アプリケータのアレイ内の前記アプリケータのうちの異なる1つに結合される、マイクロ波増幅モジュールのアレイと
を備える、プラズマ処理ツール。 - 誘電体プレートが、前記処理チャンバの外壁の一部を形成し、前記アプリケータのアレイが、前記誘電体プレートに結合される、請求項11に記載のプラズマ処理ツール。
- 前記マイクロ波増幅モジュールの各々が独立して制御可能である、請求項11に記載のプラズマ処理ツール。
- 前記アプリケータ同士の間に位置決めされた複数のプラズマセンサを更に備える、請求項13に記載のプラズマ処理ツール。
- 前記アプリケータのアレイ内の前記アプリケータの各々が、対称的な多角形状の断面を有し、前記アプリケータのアレイ内の前記アプリケータが最密充填される、請求項11に記載のプラズマ処理ツール。
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JP2023135363A JP2023169163A (ja) | 2016-08-16 | 2023-08-23 | モジュラーマイクロ波プラズマ源 |
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US15/238,695 US10748745B2 (en) | 2016-08-16 | 2016-08-16 | Modular microwave plasma source |
US15/238,695 | 2016-08-16 | ||
PCT/US2017/013984 WO2018034690A1 (en) | 2016-08-16 | 2017-01-18 | Modular microwave plasma source |
JP2019508867A JP7045365B2 (ja) | 2016-08-16 | 2017-01-18 | モジュラーマイクロ波プラズマ源 |
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US (3) | US10748745B2 (ja) |
JP (3) | JP7045365B2 (ja) |
KR (1) | KR20190032621A (ja) |
CN (2) | CN113690125B (ja) |
TW (3) | TWI790538B (ja) |
WO (1) | WO2018034690A1 (ja) |
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US10707058B2 (en) * | 2017-04-11 | 2020-07-07 | Applied Materials, Inc. | Symmetric and irregular shaped plasmas using modular microwave sources |
JP6899693B2 (ja) * | 2017-04-14 | 2021-07-07 | 東京エレクトロン株式会社 | プラズマ処理装置及び制御方法 |
US11393661B2 (en) * | 2018-04-20 | 2022-07-19 | Applied Materials, Inc. | Remote modular high-frequency source |
US11081317B2 (en) * | 2018-04-20 | 2021-08-03 | Applied Materials, Inc. | Modular high-frequency source |
US10943768B2 (en) * | 2018-04-20 | 2021-03-09 | Applied Materials, Inc. | Modular high-frequency source with integrated gas distribution |
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