JP2022096461A5 - - Google Patents

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Publication number
JP2022096461A5
JP2022096461A5 JP2020209578A JP2020209578A JP2022096461A5 JP 2022096461 A5 JP2022096461 A5 JP 2022096461A5 JP 2020209578 A JP2020209578 A JP 2020209578A JP 2020209578 A JP2020209578 A JP 2020209578A JP 2022096461 A5 JP2022096461 A5 JP 2022096461A5
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JP
Japan
Prior art keywords
reflecting
optical system
section
light beam
light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020209578A
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English (en)
Japanese (ja)
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JP2022096461A (ja
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Publication date
Application filed filed Critical
Priority to JP2020209578A priority Critical patent/JP2022096461A/ja
Priority claimed from JP2020209578A external-priority patent/JP2022096461A/ja
Priority to US17/547,023 priority patent/US11880025B2/en
Priority to EP21213503.2A priority patent/EP4016016A1/en
Priority to CN202111525655.7A priority patent/CN114647073B/zh
Publication of JP2022096461A publication Critical patent/JP2022096461A/ja
Publication of JP2022096461A5 publication Critical patent/JP2022096461A5/ja
Priority to JP2025041446A priority patent/JP7868214B2/ja
Priority to JP2026083397A priority patent/JP2026124867A/ja
Pending legal-status Critical Current

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JP2020209578A 2020-12-17 2020-12-17 光学系及び面分光装置 Pending JP2022096461A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置
US17/547,023 US11880025B2 (en) 2020-12-17 2021-12-09 Optical system and plane spectroscopic device
EP21213503.2A EP4016016A1 (en) 2020-12-17 2021-12-09 Optical system and plane spectroscopic device
CN202111525655.7A CN114647073B (zh) 2020-12-17 2021-12-14 光学系统和平面分光设备
JP2025041446A JP7868214B2 (ja) 2020-12-17 2025-03-14 光学系及び面分光装置
JP2026083397A JP2026124867A (ja) 2020-12-17 2026-05-18 光学系及び面分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025041446A Division JP7868214B2 (ja) 2020-12-17 2025-03-14 光学系及び面分光装置

Publications (2)

Publication Number Publication Date
JP2022096461A JP2022096461A (ja) 2022-06-29
JP2022096461A5 true JP2022096461A5 (enExample) 2023-06-19

Family

ID=78827839

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2020209578A Pending JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置
JP2025041446A Active JP7868214B2 (ja) 2020-12-17 2025-03-14 光学系及び面分光装置
JP2026083397A Pending JP2026124867A (ja) 2020-12-17 2026-05-18 光学系及び面分光装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2025041446A Active JP7868214B2 (ja) 2020-12-17 2025-03-14 光学系及び面分光装置
JP2026083397A Pending JP2026124867A (ja) 2020-12-17 2026-05-18 光学系及び面分光装置

Country Status (4)

Country Link
US (1) US11880025B2 (enExample)
EP (1) EP4016016A1 (enExample)
JP (3) JP2022096461A (enExample)
CN (1) CN114647073B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025526519A (ja) * 2022-07-21 2025-08-14 ハイ－スペクトラル・エルエルシー 同時３ｄハイパースペクトルイメージングのための光学コンポーネントおよびシステム
US20260147145A1 (en) 2024-11-27 2026-05-28 Canon Kabushiki Kaisha Optical component, optical element, and manufacturing method of optical component

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JPH03189602A (ja) * 1989-12-20 1991-08-19 Nippon Telegr & Teleph Corp <Ntt> 光ビーム制御装置
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems
US20040057049A1 (en) * 2002-09-20 2004-03-25 Applied Photonics Worldwide, Inc. Micromechanical monochromator with integrated slit aperture for microspectrometers in the UV, visible and infrared range
JP4287794B2 (ja) * 2004-06-30 2009-07-01 株式会社フォトロン 多画面分光撮影装置
JP2006350023A (ja) * 2005-06-16 2006-12-28 Fujitsu Ltd 可変分散補償器
JP4839845B2 (ja) * 2006-01-13 2011-12-21 横河電機株式会社 分光装置
JP2009000708A (ja) 2007-06-20 2009-01-08 Nikon Corp 光照射装置と、これを具備するレーザ加工装置
KR101515663B1 (ko) * 2007-10-26 2015-04-27 칼 짜이스 에스엠티 게엠베하 결상 광학 시스템 및 이러한 유형의 결상 광학 시스템을 갖는 마이크로리소그래피용 투영 노광 장치
JP2009141154A (ja) * 2007-12-06 2009-06-25 Canon Inc 走査露光装置及びデバイス製造方法
JP2010008487A (ja) * 2008-06-24 2010-01-14 Fujitsu Ltd 光モジュールおよび分散補償装置
TWI408356B (zh) * 2008-09-02 2013-09-11 Ind Tech Res Inst 反射式散射儀
JP5483955B2 (ja) * 2009-08-20 2014-05-07 キヤノン株式会社 照明光学系および投射型表示装置
AU2010302915B2 (en) * 2009-10-01 2015-06-25 Tornado Spectral Systems Inc. Optical slicer for improving the spectral resolution of a dispersive spectrograph
US9529083B2 (en) * 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP2012098050A (ja) * 2010-10-29 2012-05-24 Mitaka Koki Co Ltd モニター可能な分光計測装置
JP2012237647A (ja) 2011-05-11 2012-12-06 Univ Of Tokyo 多焦点共焦点ラマン分光顕微鏡
TWI573650B (zh) * 2011-12-16 2017-03-11 應用材料股份有限公司 輻射源及用於結合同調光束的光束組合器
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US10185133B1 (en) * 2017-09-15 2019-01-22 Raytheon Company Reflective triplet foreoptics for multi-channel double-pass dispersive spectrometers
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CN110989182A (zh) * 2019-11-29 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种合束光源装置

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