CN114647073B - 光学系统和平面分光设备 - Google Patents

光学系统和平面分光设备 Download PDF

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Publication number
CN114647073B
CN114647073B CN202111525655.7A CN202111525655A CN114647073B CN 114647073 B CN114647073 B CN 114647073B CN 202111525655 A CN202111525655 A CN 202111525655A CN 114647073 B CN114647073 B CN 114647073B
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CN
China
Prior art keywords
reflecting
light beam
reflecting portion
optical system
curved mirror
Prior art date
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Active
Application number
CN202111525655.7A
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English (en)
Chinese (zh)
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CN114647073A (zh
Inventor
助川隆
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Canon Inc
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Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN114647073A publication Critical patent/CN114647073A/zh
Application granted granted Critical
Publication of CN114647073B publication Critical patent/CN114647073B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CN202111525655.7A 2020-12-17 2021-12-14 光学系统和平面分光设备 Active CN114647073B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-209578 2020-12-17
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置

Publications (2)

Publication Number Publication Date
CN114647073A CN114647073A (zh) 2022-06-21
CN114647073B true CN114647073B (zh) 2025-06-13

Family

ID=78827839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111525655.7A Active CN114647073B (zh) 2020-12-17 2021-12-14 光学系统和平面分光设备

Country Status (4)

Country Link
US (1) US11880025B2 (enExample)
EP (1) EP4016016A1 (enExample)
JP (3) JP2022096461A (enExample)
CN (1) CN114647073B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025526519A (ja) * 2022-07-21 2025-08-14 ハイ－スペクトラル・エルエルシー 同時３ｄハイパースペクトルイメージングのための光学コンポーネントおよびシステム
US20260147145A1 (en) 2024-11-27 2026-05-28 Canon Kabushiki Kaisha Optical component, optical element, and manufacturing method of optical component

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JPS5136090B1 (enExample) * 1971-04-17 1976-10-06
JPH0782117B2 (ja) * 1989-02-23 1995-09-06 オリンパス光学工業株式会社 反射型結像光学系
JPH03189602A (ja) * 1989-12-20 1991-08-19 Nippon Telegr & Teleph Corp <Ntt> 光ビーム制御装置
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems
US20040057049A1 (en) * 2002-09-20 2004-03-25 Applied Photonics Worldwide, Inc. Micromechanical monochromator with integrated slit aperture for microspectrometers in the UV, visible and infrared range
JP4287794B2 (ja) * 2004-06-30 2009-07-01 株式会社フォトロン 多画面分光撮影装置
JP2006350023A (ja) * 2005-06-16 2006-12-28 Fujitsu Ltd 可変分散補償器
JP4839845B2 (ja) * 2006-01-13 2011-12-21 横河電機株式会社 分光装置
JP2009000708A (ja) 2007-06-20 2009-01-08 Nikon Corp 光照射装置と、これを具備するレーザ加工装置
KR101515663B1 (ko) * 2007-10-26 2015-04-27 칼 짜이스 에스엠티 게엠베하 결상 광학 시스템 및 이러한 유형의 결상 광학 시스템을 갖는 마이크로리소그래피용 투영 노광 장치
JP2009141154A (ja) * 2007-12-06 2009-06-25 Canon Inc 走査露光装置及びデバイス製造方法
JP2010008487A (ja) * 2008-06-24 2010-01-14 Fujitsu Ltd 光モジュールおよび分散補償装置
TWI408356B (zh) * 2008-09-02 2013-09-11 Ind Tech Res Inst 反射式散射儀
JP5483955B2 (ja) * 2009-08-20 2014-05-07 キヤノン株式会社 照明光学系および投射型表示装置
AU2010302915B2 (en) * 2009-10-01 2015-06-25 Tornado Spectral Systems Inc. Optical slicer for improving the spectral resolution of a dispersive spectrograph
US9529083B2 (en) * 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP2012098050A (ja) * 2010-10-29 2012-05-24 Mitaka Koki Co Ltd モニター可能な分光計測装置
JP2012237647A (ja) 2011-05-11 2012-12-06 Univ Of Tokyo 多焦点共焦点ラマン分光顕微鏡
TWI573650B (zh) * 2011-12-16 2017-03-11 應用材料股份有限公司 輻射源及用於結合同調光束的光束組合器
KR102491749B1 (ko) * 2015-03-01 2023-01-25 아카이브 코퍼레이션 파노라마 입체 이미징 시스템
CN109328026B (zh) * 2016-06-17 2021-03-19 奥林巴斯株式会社 物镜光学系统以及具备物镜光学系统的内窥镜装置
US10185133B1 (en) * 2017-09-15 2019-01-22 Raytheon Company Reflective triplet foreoptics for multi-channel double-pass dispersive spectrometers
DE112018005597B4 (de) * 2017-11-30 2023-07-06 Agilent Technologies, Inc. Polychromatorsysteme
CN110989182A (zh) * 2019-11-29 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种合束光源装置

Also Published As

Publication number Publication date
JP7868214B2 (ja) 2026-06-01
JP2022096461A (ja) 2022-06-29
EP4016016A1 (en) 2022-06-22
US20220196997A1 (en) 2022-06-23
US11880025B2 (en) 2024-01-23
JP2026124867A (ja) 2026-07-31
JP2025083525A (ja) 2025-05-30
CN114647073A (zh) 2022-06-21

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