JP2022069786A - チャック装置 - Google Patents
チャック装置 Download PDFInfo
- Publication number
- JP2022069786A JP2022069786A JP2020178636A JP2020178636A JP2022069786A JP 2022069786 A JP2022069786 A JP 2022069786A JP 2020178636 A JP2020178636 A JP 2020178636A JP 2020178636 A JP2020178636 A JP 2020178636A JP 2022069786 A JP2022069786 A JP 2022069786A
- Authority
- JP
- Japan
- Prior art keywords
- suction pad
- hole
- chuck device
- back surface
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims abstract description 14
- 238000001179 sorption measurement Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 description 20
- 239000000919 ceramic Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000002923 metal particle Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020178636A JP2022069786A (ja) | 2020-10-26 | 2020-10-26 | チャック装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020178636A JP2022069786A (ja) | 2020-10-26 | 2020-10-26 | チャック装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022069786A true JP2022069786A (ja) | 2022-05-12 |
| JP2022069786A5 JP2022069786A5 (https=) | 2023-10-20 |
Family
ID=81534222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020178636A Pending JP2022069786A (ja) | 2020-10-26 | 2020-10-26 | チャック装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022069786A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119361516A (zh) * | 2024-12-24 | 2025-01-24 | 福建金石能源有限公司 | 一种衬底转移方法以及太阳能电池制造方法 |
-
2020
- 2020-10-26 JP JP2020178636A patent/JP2022069786A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119361516A (zh) * | 2024-12-24 | 2025-01-24 | 福建金石能源有限公司 | 一种衬底转移方法以及太阳能电池制造方法 |
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