JP2022060309A5 - - Google Patents

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Publication number
JP2022060309A5
JP2022060309A5 JP2022018253A JP2022018253A JP2022060309A5 JP 2022060309 A5 JP2022060309 A5 JP 2022060309A5 JP 2022018253 A JP2022018253 A JP 2022018253A JP 2022018253 A JP2022018253 A JP 2022018253A JP 2022060309 A5 JP2022060309 A5 JP 2022060309A5
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JP
Japan
Prior art keywords
plasma
light source
lasers
source according
plasma light
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JP2022018253A
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English (en)
Japanese (ja)
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JP7645831B2 (ja
JP2022060309A (ja
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Priority claimed from US15/280,073 external-priority patent/US10244613B2/en
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JP2022018253A 2015-10-04 2022-02-08 照明源及びプラズマ光源 Active JP7645831B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201562236904P 2015-10-04 2015-10-04
US62/236,904 2015-10-04
US15/280,073 US10244613B2 (en) 2015-10-04 2016-09-29 System and method for electrodeless plasma ignition in laser-sustained plasma light source
US15/280,073 2016-09-29
JP2018517290A JP7023223B2 (ja) 2015-10-04 2016-09-30 レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源
PCT/US2016/054733 WO2017062274A1 (en) 2015-10-04 2016-09-30 System and method for electrodeless plasma ignition in laser-sustained plasma light source

Related Parent Applications (1)

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JP2018517290A Division JP7023223B2 (ja) 2015-10-04 2016-09-30 レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源

Publications (3)

Publication Number Publication Date
JP2022060309A JP2022060309A (ja) 2022-04-14
JP2022060309A5 true JP2022060309A5 (cg-RX-API-DMAC7.html) 2022-06-06
JP7645831B2 JP7645831B2 (ja) 2025-03-14

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JP2018517290A Active JP7023223B2 (ja) 2015-10-04 2016-09-30 レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源
JP2022018253A Active JP7645831B2 (ja) 2015-10-04 2022-02-08 照明源及びプラズマ光源

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JP2018517290A Active JP7023223B2 (ja) 2015-10-04 2016-09-30 レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源

Country Status (6)

Country Link
US (1) US10244613B2 (cg-RX-API-DMAC7.html)
JP (2) JP7023223B2 (cg-RX-API-DMAC7.html)
CN (1) CN108140538B (cg-RX-API-DMAC7.html)
DE (1) DE112016004526T5 (cg-RX-API-DMAC7.html)
TW (1) TWI703611B (cg-RX-API-DMAC7.html)
WO (1) WO2017062274A1 (cg-RX-API-DMAC7.html)

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