JP2022053034A - Transport device - Google Patents

Abstract

To provide a transport device capable of suppressing damage to a long member such as a power cable whose one end is connected to a holding device.SOLUTION: A transport device 10 provided with a holding device 20 that is arranged in a containment chamber provided with a processing device that performs predetermined processing on a substrate S and that reciprocates in one direction while holding an object to be held includes a belt 60 having a bending region 63, and a first support region 64 and a second support region 65 adjacent to the bending region and facing each other. Long members 41a and 41b such as power cables are arranged along the belt. The belt moves the position of the bending region along one direction by moving the first support region and the second support region in relatively opposite directions in one direction while maintaining a predetermined bending shape.SELECTED DRAWING: Figure 2

Description

The present invention relates to a transport device used in a processing device that performs a predetermined process on a substrate in a semiconductor manufacturing process or a flat panel display manufacturing process.

The ion implantation apparatus disclosed in Patent Document 1 is known as a processing apparatus used in a semiconductor manufacturing process or a flat panel display manufacturing process to perform a predetermined treatment on a substrate. The ion implantation device of Patent Document 1 includes a substrate holding portion for holding a substrate and a substrate transporting mechanism for moving the substrate holding portion in the horizontal direction. This ion implantation device has a configuration in which the substrate held by the substrate holding portion crosses the ion beam while the substrate holding portion is conveyed in the horizontal direction, so that the substrate is irradiated with the ion beam.

The ion implanter of Patent Document 1 further includes a resin pipe through which a refrigerant for cooling the substrate flows, a power cable for supplying electric power to the substrate transfer mechanism, and a signal line for control. All of these resin pipes, power cables, and signal lines have one end connected to the board holding part and are housed in a bellows-shaped cable guide, and the movement of the board transport mechanism within a predetermined range. It is configured to move according to. However, the resin pipe, the power cable, and the signal line are all housed in the cable guide in a bent state as a whole, and can move freely in the cable guide.

Further, Patent Document 2 discloses a film forming apparatus for forming a thin film on a substrate. The film forming apparatus of Patent Document 2 forms a thin film on a substrate by heating and evaporating or sublimating the film forming material, and includes a film forming source including a container for accommodating the film forming material. This film forming apparatus is equipped with a transport mechanism for reciprocating the film forming source between the maintenance position and the film forming position, and the film forming source includes a power line or the like that supplies power to a heater included in the film forming source. It is connected.

JP-A-2014-165283 JP 2016-14174

In the ion implanter of Patent Document 1, a flexible long member such as a resin pipe, a power cable, or a signal line could move freely in the cable guide. Therefore, while the substrate holding portion is conveyed, there is a concern that these long members move following the holding portion and come into contact with each other or come into contact with the inner surface of the cable guide. In addition, there is a concern that resin pipes, power cables, and signal lines may be deformed or bent more than expected. In this way, repeated contact and friction with other components, and repeated deformation and bending larger than expected may damage these long members.
Further, even in a film forming apparatus such as Patent Document 2, if a long member such as a power cable is arranged in a bent state so as to follow the movement of the film forming source, the same problem as the ion implantation apparatus of Patent Document 1 is solved. Occur.

The present invention solves the above-mentioned problems, and is a long member having one end connected to a holding device in a transport device including a holding device that reciprocates in one direction while holding an object to be held. It is an object of the present invention to provide a transport device capable of suppressing damage to the surface.

The transport device of the present invention is a transport device provided with a holding device that is arranged in a storage chamber provided with a processing device that performs a predetermined treatment on a substrate and that reciprocates in one direction while holding an object to be held. A long member having one end connected to the holding device and having flexibility, a bending region bent into a predetermined bending shape, adjacent to the bending region, and facing each other along the one direction. A belt having a first support region and a second support region formed so as to perform a portion thereof, and a belt fixed to the belt in the first support region and reciprocating. A first fixing member for operating the belt in accordance with the above, and the one end side of the partial region so as to reach the second support region from the first support region via the bending region. The belt is fixed to the belt in a state of being sequentially arranged along the belt, and the belt relatively opposes the first support region and the second support region in the one direction while maintaining the bent shape. By moving in the direction, the position of the bending region is configured to move along the one direction.

According to this configuration, when the holding device moves in one direction, the first fixing member follows the holding device and moves in one direction. At the same time, since the first fixing member is fixed to the first support region of the belt, the belt operates to move the first support region in one direction. Further, since the long member is fixed to the belt, the long member operates following the belt. That is, the long member follows the movement of the holding device in one direction via the first fixing member and the belt.
At this time, a part of the region of the long member is fixed along the belt from the first support region to the second support region via the bending region, and the belt maintains a predetermined bending shape. At the same time, by moving the first support region and the second support region in relatively opposite directions in one direction, the position of the bending region is moved along one direction. Therefore, the long member is bent in the shape defined by the bending shape of the belt, and the respective regions supported by the first support region and the second support region are moved in relatively opposite directions in one direction. And follow the movement of the holding device.
That is, in the transport device of the present invention, since the long member is made to follow the movement of the holding device while maintaining the shape defined by the belt, the long member may move irregularly unlike the conventional case. However, damage caused by repeated contact and friction with other components is suppressed.
Further, since the long member is bent in the shape defined by the belt, the deformation or bending larger than expected does not occur. That is, damage to the long member due to repeated deformation and bending larger than expected is suppressed.

Further, the transport device of the present invention may be further provided with a second fixing member for fixing the belt and the accommodation chamber in the second support region.

According to this configuration, since the belt is fixed to the accommodation chamber at the position fixed by the second fixing member, the belt can operate only in conjunction with the operation of the first fixing member. Therefore, it becomes easy to specify the operation of the belt, and the configuration of the transport device can be simplified.

Further, in the transport device of the present invention, the first fixing member is further fixed to the holding device so as to operate integrally with the holding device, and the long member has the one end portion and the first support region. It may be configured to be fixed to the first fixing member with the region supported by the first fixing member.

According to this configuration, since the first fixing member is further fixed to the holding device so as to operate integrally with the holding device, the belt can be operated integrally with the holding device. also,
The elongated member is fixed to the first fixing member between one end and a region supported by the first support region of the belt. Therefore, irregular movement and bending of the long member are restricted between one end and the area supported by the first support region of the belt, and damage to the long member is suppressed.

Further, the transport device of the present invention may include a plurality of the long members, and each of the long members may be fixed to the belt in a state of being separated from each other.

According to this configuration, since the plurality of long members are fixed to the belt in a state of being separated from each other, the plurality of long members may come into contact with each other even when the plurality of long members are provided. No damage due to contact or friction is suppressed.

Further, in the transport device of the present invention, the long member is fixed to the belt via a plurality of belt fixing members fixed to the belt in a state where the long members are arranged apart from each other along the belt. Among the plurality of belt fixing members, the first belt fixing member arranged at the position closest to the one end portion of the long member is always located in the first support region during the reciprocating movement, and the plurality of belt fixing members are always located in the first support region. Of the belt fixing members of the above, the second belt fixing member arranged at the position farthest from the one end portion of the long member is configured to be always located in the second support region during the reciprocating movement. May be good.

According to this configuration, the first belt fixing member and the second belt fixing member are always located in the first support region and the second support region, respectively, while the holding device makes a reciprocating movement. Therefore, the long member is more reliably maintained in a fixed state along the belt so as to reach the second support region from the first support region through the bending region, so that the operation of the long member can be performed. It can be specified more reliably. That is, damage to the long member can be suppressed more reliably.

According to the transport device of the present invention, in a transport device provided with a holding device that reciprocates in one direction while holding an object to be held, damage to a long member having one end connected to the holding device is suppressed. can.

The plan view which shows the ion implantation apparatus using the transfer apparatus in one Embodiment of this invention. The perspective view which shows the substrate processing apparatus in the same embodiment. The side view which shows the substrate processing apparatus in the same embodiment. Schematic rear view showing the substrate processing apparatus at the start position of the same embodiment. The schematic rear view which shows the substrate processing apparatus at the reaching position to the same embodiment.

The transport device of the present invention is used in a semiconductor manufacturing process or a flat panel display manufacturing process, and is arranged and used inside a processing device that performs a predetermined process on a substrate. Examples of the processing apparatus include, but are not limited to, an ion implantation apparatus and a film forming apparatus.
First, the configuration of the transport device 10 according to the embodiment of the present invention will be described. As shown in FIG. 1, the transport device 10 in the present embodiment is arranged in the processing chamber 101 of the ion implantation device 100, and the ion beam IB introduced in the processing chamber 101 which is the accommodation chamber in the present invention is used as a substrate S. Is to convey the substrate S so as to cross.

The ion implantation device 100 in the present embodiment is a device used in the manufacturing process of a flat panel display such as a liquid crystal display or an organic EL display to perform an ion implantation process on the substrate S, and the substrate S in the present embodiment is rectangular. It is a shaped glass substrate.
The transport device 10 may be used in the semiconductor manufacturing process. In this case, the substrate S is a semiconductor wafer. Further, the accommodation chamber in the present invention refers to a component of a processing device that defines a space in which the transfer device 10 is accommodated. For example, the transport device 10 is not limited to being arranged in the processing chamber 101, and may be housed in a transport chamber or a load lock chamber provided in a processing device such as an ion implantation device. In this case, the transport chamber or load lock chamber in which the transport device 10 is arranged is the accommodation chamber in the present invention. Further, when the transport device 10 is arranged so as to straddle the transport chamber and the processing chamber, the accommodation chamber in the present invention refers to a configuration including the transport chamber and the processing chamber.

As shown in FIG. 1, the transfer device 10 in the present embodiment reciprocates between the holding device 20 that holds the substrate S, which is the object to be held in the present invention, and the holding device 20 in the processing chamber 101 in one direction D. The transfer device 30 is provided. The transfer mechanism 30 is configured to transfer the holding device 20 from the starting position P1 to the reaching position P2, and then transfer the holding device 20 from the reaching position P2 to the starting position P1 again. In other words, the holding device 20 is configured to perform reciprocating movement along one direction D by being transferred by the transfer device 30.
The object to be retained in the present invention is not limited to the substrate S. For example, in the film forming apparatus in Patent Document 2, the film forming source accommodating the film forming material is configured to be able to reciprocate in one direction along the rail while being held by the conveying device. In this case, it can be considered that the film-forming source is the object to be held in the present invention, and the transport device that holds the film-forming source is the holding device in the present invention.

As shown in FIG. 2, the holding device 20 includes a holder 21 for holding the substrate S and a support member 22 for supporting the holder 21. The holder 21 has an overall comb shape and is provided with shafts 23 at both ends in the width direction. Further, the support member 22 has a U-shape (U-shape) that opens upward, and rotatably supports the shaft 23. Further, a motor 25 for rotating the shaft 23 is arranged inside the support member 22. That is, the holder 21 is rotatably supported by the support member 22 via the shaft 23, and is configured to rotate around the shaft 23 by transmitting the power of the motor 25. The holding device 20 is configured to be able to hold the board S in an appropriate position or posture by rotating the holder 21 when the board S is transferred to the outside or when the direction of the ion beam IB with respect to the board S is changed. There is.

Further, the holding device 20 includes a slider 24 joined to the support member 22 below the support member 22. The slider 24 is connected to a guide rail 31 of a transfer device 30 described later.

As shown in FIG. 3, the transfer device 30 includes a guide rail 31 and a linear motion mechanism (not shown) that linearly moves the slider 24 connected to the guide rail 31 along the guide rail 31. The linear motion mechanism transmits power from a drive source such as a motor (not shown) to the slider 24, and linearly reciprocates the slider 24 along the guide rail 31. Further, as shown in FIG. 1, the guide rail 31 is arranged in parallel with the one direction D. That is, the holding device 20 has a configuration in which the slider 24 can move along the unidirectional D by moving on the guide rail 31.

As shown in FIG. 1, in the ion implantation apparatus 100 of the present embodiment, the ion beam IB is introduced from the outside into the processing chamber 101. The transfer device 10 is configured such that the substrate S crosses the ion beam IB while the holding device 20 holding the substrate S is transported in one direction D from the start position P1 to the arrival position P2 by the transfer device 30. There is. That is, the substrate S is exposed to the ion beam IB and ion-implanted by crossing the ion beam IB while being held by the holding device 20.

As shown in FIG. 2, the transport device 10 in the present embodiment further includes two flexible long members 40a and 40b. The long member 40a in the present embodiment is a cooling pipe through which cooling water for cooling the motor 25 or the support member 22 flows, and the long member 40b is a power cable for supplying electric power to the motor 25.
The types and uses of the long members 40a and 40b described above are examples, and the types and uses of the long members in the present invention are not limited.

One end portions 41a and 41b of the long members 40a and 40b are connected to the holding device 20, respectively.
The configuration in which the holding device 20 is connected to one end portions 41a, 41b of the long members 40a, 40b is connected to a component in which the one end portions 41a, 41b can move integrally with the holding device 20. Includes configuration. That is, the configuration in which the holding device 20 is connected to the one end portions 41a, 41b of the long members 40a, 40b includes all the configurations in which the one end portions 41a, 41b move following the holding device 20 as a result.

As shown in FIGS. 1 and 2, the transport device 10 includes two pulleys 50a and 50b and an annular belt 60 wound around the two pulleys 50a and 50b. As shown in FIGS. 4 and 5, the pulleys 50a and 50b are toothed pulleys having a plurality of pulley teeth 51a and 51b on their outer peripheral surfaces, respectively. Further, the belt 60 is composed of a toothed belt having a plurality of belt teeth 61 inside, and the pulleys 50a and 50b and the belt 60 are configured to operate in conjunction with each other by engaging the pulley teeth 51a and 1b with the belt teeth 61. Has been done.

As shown in FIG. 2, the belt 60 is adjacent to a bending region 63 bent into a predetermined bending shape along the pulley 50a, and is adjacent to the bending region 63 so as to face each other in the vertical direction along one direction D. It has a first support region 64 and a second support region 65 formed. A part of the long members 40a and 40b is arranged along the belt 60 sequentially from the one end portions 41a and 41b so as to reach the second support region 65 from the first support region 64 via the bending region 63. ing. Further, the long members 40a and 40b are both fixed to the belt 60 in a state of being separated by a predetermined interval in the width direction of the belt 60 by the five belt fixing members 66a to 66e described later.
The long members 40a and 40b may be fixed to the belt 60 in a state of being separated from each other in the thickness direction of the belt 60.

Further, the transport device 10 is fixed to the belt 60 in the first support region 64, and includes a first fixing member 70 for operating the belt 60 following the reciprocating movement of the holding device 20. The first fixing member 70 is also fixed to the holding device 20 and can operate integrally with the holding device 20. That is, the belt 60 and the holding device 20 are connected by the first fixing member 70, and the belt 60 operates so as to follow the reciprocating movement of the holding device 20 via the first fixing member 70.

Further, the transport device 10 further includes a second fixing member 72 for fixing the belt 60 and the processing chamber 101 in the second support region 65. More specifically, the second fixing member 72 fixes the belt 60 to the structure 102 included in the processing chamber 101.

As shown in FIG. 2, the first fixing member 70 has a support surface 71 that supports the long members 40a and 40b. A part of the long members 40a and 40b between one end portions 41a and 41b and the region supported by the first support region 64 is supported by the support surface 71, and the long members 40a and 40b are supported by a fixing member 73 such as a band. It is fixed to one fixing member 70.

As shown in FIGS. 2 and 3, the transport device 10 linearly moves the guide members 80a and 80b that rotatably support the pulleys 50a and 50b and the guide members 80a and 80b along one direction D. It is further equipped with a guide rail 81. The guide members 80a and 80b are connected by a plate-shaped connecting member 82, and the positional relationship between the pulleys 50a and 50b is fixed by the connecting member 82. Since the pulleys 50a and 50b can move along one direction D with the positional relationship fixed by the connecting member 82, the belt 60 operates without changing the overall shape wound around the pulleys 50a and 50b. Can be done.

As shown in FIG. 2, the long members 40a and 40b are fixed to the belt 60 by five belt fixing members 66a to 66e so that a part of the region is along the belt 60. The belt fixing members 66a to 66e are arranged apart from each other along the belt 60, and the belt fixing members 66a to 66e are all belts at the tooth bottom 62 formed between the adjacent belt teeth 61 of the belt 60, respectively. It is attached so as to sandwich the 60 in the thickness direction. Further, the belt fixing members 66a to 66f are fixed to the belt 60 in a state where the long members 40a and 40b are separated from each other by a predetermined distance in the width direction of the belt 60 and are separated from the belt 60 by a predetermined distance in the thickness direction of the belt 60. It is said that it can be configured.

As shown in FIG. 2, when looking at the long members 40a and 40b among the five fixing members 66a to 66e, the fixings arranged at the positions closest to the one ends 41a and 41b of the long members 40a and 40b. The member 66a is the first belt fixing member in the present invention. Further, the fixing member 66e arranged at the position farthest from one end portions 41a and 41b of the long members 40a and 40b is the second belt fixing member in the present invention.

As shown in FIGS. 4 and 5, the fixing member 66a, which is the first belt fixing member, is arranged so as to always be located in the first support region 64 while the holding device 20 reciprocates. Further, the fixing member 66a, which is the second belt fixing member, is always arranged so as to be located in the second support region 65. In the present embodiment, since the belt 60 is fixed to the processing chamber 101 by the second fixing member 72 in the second support region 65, the fixing member 66a is fixed to the processing chamber 101 even when the holding device 20 reciprocates. It does not change its position with respect to.

As shown in FIGS. 1 and 3, in the transport device 10 of the present invention, the holding device 20 is located on the side facing the ion beam IB with respect to the rail 81, and the belt 60 is a holding device sandwiching the rail 81. It is arranged so as to be located on the opposite side of 20. Further, the transport device 10 includes a plate-shaped cover 90 arranged along one direction D between the rail 60 and the holding device 20. The cover 90 protects the belt 60, the long members 40a, 40b, etc. from the ion beam IB. The cover 90 is provided to protect the components of the transport device 10 located on the traveling direction side of the ion beam IB from the cover 90 while the holding device 20 reciprocates.
In addition, in FIG. 2, FIG. 3, FIG. 4 and FIG. 5, the cover 90 is not shown.

FIG. 4 shows a transfer device 10 in a state where the holding device 20 is located at the start position P1. Further, FIG. 5 shows a transport device 10 in a state where the holding device 20 is located at the arrival position P2. As shown in FIGS. 4 and 5, while the holding device 20 moves from the starting position P1 to the reaching position P2, the belt 60 maintains the bending shape defined by the pulley 50a while maintaining the first support region 64 and the first support region 64. By moving the two support regions 65 in relatively opposite directions with respect to the one direction D, the position of the bending region 63 is configured to move along the one direction D.
In the present embodiment, of the two regions of the belt 60 located between the pulleys 50a and 50b, the region located above is the first support region 64, and the region located below is the second support region 65. be.

More specifically, when the holding device 20 moves from the starting position P1 toward the reaching position P2 in one direction D, the first fixing member 70 follows the holding device 20 and moves in one direction D. At the same time, since the first fixing member 70 is fixed to the belt 60, the belt 60 follows the first fixing member 70 and operates to move the first support region 64 at the start position P1 in one direction D. Further, since the belt 60 is fixed to the processing chamber 101 by the second fixing member 72 in the second support region 65, at this time, the pulley 50a transfers the belt 60 from the first support region 64 side to the second support region 65. It works to get caught in the side. For example, as shown in FIG. 4, when the holding device 20 is located at the initial position P1, the belt fixing member 66d located on the first support region 64 is in a state where the holding device 20 is located at the reaching position P2. It is located on the first support area 65.
In this case, the distance that the pulley 50a moves in one direction D while the holding device 20 travels from the starting position P1 to the reaching position P2 is about half the distance that the holding device 20 moves in one direction D. ..
When the holding device 20 moves from the arrival position P2 to the start position P1, it is clear that the operation is the reverse of the above, so the description thereof will be omitted.

During this period, the long members 40a and 40b are fixed to the belt 60 by the belt fixing members 66a to 66e while being arranged along the belt 60, so that the long members 40a and 40b are held while maintaining the shape along the belt 60. It is possible to follow the movement of the device 20. More specifically, the region of the elongated members 40a and 40b fixed to the belt 60 is wound around the pulley 50a while maintaining a predetermined bending shape defined by the curvature of the belt 60 along the pulley 50a. Follow as you move. When viewed from the pulleys 50a and 50b, the long members 40a and 40b move around the pulleys 50a and 50b so as to rotate with the belt 60. That is, the long members 40a and 40b move the respective regions of the long members 40a and 40b supported by the first support region 64 and the second support region 65 in relatively opposite directions with respect to one direction D. Therefore, it follows the movement of the holding device 20.

Therefore, in the transport device 10 of the present embodiment, the long members 40a and 40b can be made to follow the movement of the holding device 20 while maintaining the shape defined by the belt 60. As a result, the long members 40a and 40b do not move irregularly, and damage due to repeated contact and friction with other components is suppressed. At the same time, since the long members 40a and 40b are fixed along the belt 60 to define the bending shape, the long members 40a and 40b do not undergo unexpectedly large bending, and the bending shape can be defined. As a result, damage to the long members 40a and 40b is suppressed.

Further, since the transport device 10 in the present embodiment includes the second fixing member 72 for fixing the belt 60 and the processing chamber 101 in the second support region 65, the belt 60 operates the first fixing member 70. It will be able to operate in conjunction with only. Therefore, it becomes easy to specify the operation of the belt 60, and the configuration of the transport device 10 can be simplified.

Further, since the long members 40a and 40b are also fixed by the fixing member 73 in the first fixing member 70, between the one end portions 41a and 41b and the region supported by the first support region 64 of the belt 60. Also, irregular movements and bending of the long members 40a and 40b are regulated, and damage to the long members 41a and 41b is suppressed.

Further, since the two long members 40a and 40b are fixed to the belt 60 in a state of being separated from each other by the belt fixing members 66a to 66e, the long members 40a and 40b do not come into contact with each other and come into contact with each other. Damage due to friction is suppressed.

Further, while the holding device 20 reciprocates, the fixing member 66a and the fixing member 66e are always located in the first support region 64 and the second support region 65, respectively. Therefore, the long members 40a and 40b are more reliably maintained in a fixed state along the belt 60 so as to reach the second support region 65 from the first support region 64 via the bending region 63. Therefore, the operation of the long members 40a and 40b can be more reliably defined. That is, damage to the long members 40a and 40b can be suppressed more reliably.

As described above, in the transport device 10 of the present embodiment, the pulleys 50a, 50b, the belt 60, etc. are arranged and sized appropriately in advance according to the long members 40a, 40b, so that the length is long. The bending and movement of the members 40a and 40b can be controlled. According to the transport device 10 in the present embodiment, unlike the conventional case, the long members 40a and 40b can follow the holding device 20 by bending and moving in advance, so that damage to the long members 40a and 40b is suppressed. It is a thing.

Further, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the spirit of the present invention.

S Board D One-way P1 Start position P2 Arrival position 100 Ion implantation device 101 Processing chamber 10 Transfer device 20 Holding device 30 Transfer device 31 Guide rails 40a, 40b Long members 41a, 41b One end 50a, 50b Pulley 60 Belt 63 Bending area 64 First support area 65 Second support area 66a to 66e Belt fixing member 70 First fixing member 71 Support surface 72 Second fixing member 73 Fixing member

The present invention solves the above-mentioned problems, and is a long length in which one end is connected to a holding device in a transport device including a holding device that reciprocates in one direction while holding an object to be held. It is an object of the present invention to provide a transport device capable of suppressing damage to a member.

The transport device of the present invention is arranged in a storage chamber provided with a processing device that performs a predetermined treatment on a substrate, and is a transport device including a holding device that reciprocates in one direction while holding an object to be held. A long member having one end connected to the holding device and having flexibility, a bending region bent into a predetermined bending shape, and adjacent to the bending region, and each other along the one direction. A belt having a first support region and a second support region formed so as to face each other, and a part of the long member is fixed to the belt, and the first support region fixed to the belt and reciprocating. A first fixing member for operating the belt in accordance with movement, and the one end portion of the partial region so as to reach the second support region from the first support region via the bending region. The belt is fixed to the belt in a state of being sequentially arranged along the belt from the side, and the belt keeps the bent shape and relatively the first support region and the second support region in the one direction. By moving in the opposite direction, the position of the bending region is configured to move along the one direction.

According to the transport device of the present invention, in a transport device provided with a holding device that reciprocates in one direction while holding an object to be held, damage to a long member having one end connected to the holding device is damaged. Can be suppressed.

As shown in FIG. 1, the transfer device 10 in the present embodiment reciprocates between the holding device 20 that holds the substrate S, which is the object to be held in the present invention, and the holding device 20 in the processing chamber 101 in one direction D. The transfer device 30 is provided. The transfer device 30 is configured to transfer the holding device 20 from the starting position P1 to the reaching position P2, and then transfer the holding device 20 from the reaching position P2 to the starting position P1 again. In other words, the holding device 20 is configured to perform reciprocating movement along one direction D by being transferred by the transfer device 30.
The object to be retained in the present invention is not limited to the substrate S. For example, in the film forming apparatus in Patent Document 2, the film forming source accommodating the film forming material is configured to be able to reciprocate in one direction along the rail while being held by the conveying device. In this case, it can be considered that the film-forming source is the object to be held in the present invention, and the transport device that holds the film-forming source is the holding device in the present invention.

As shown in FIGS. 1 and 3, in the transport device 10 of the present invention, the holding device 20 is located on the side facing the ion beam IB with respect to the rail 81, and the belt 60 is a holding device sandwiching the rail 81. It is arranged so as to be located on the opposite side of 20. Further, the transport device 10 includes a plate-shaped cover 90 arranged along one direction D between the rail 81 and the holding device 20. The cover 90 protects the belt 60, the long members 40a, 40b, etc. from the ion beam IB. The cover 90 is provided to protect the components of the transport device 10 located on the traveling direction side of the ion beam IB from the cover 90 while the holding device 20 reciprocates.
In addition, in FIG. 2, FIG. 3, FIG. 4, and FIG. 5, the cover 90 is not shown.

More specifically, when the holding device 20 moves from the starting position P1 toward the reaching position P2 in one direction D, the first fixing member 70 follows the holding device 20 and moves in one direction D. At the same time, since the first fixing member 70 is fixed to the belt 60, the belt 60 follows the first fixing member 70 and operates to move the first support region 64 at the start position P1 in one direction D. Further, since the belt 60 is fixed to the processing chamber 101 by the second fixing member 72 in the second support region 65, at this time, the pulley 50a transfers the belt 60 from the first support region 64 side to the second support region 65. It works to get caught in the side. For example, as shown in FIG. 4, when the holding device 20 is located at the start position P1, the belt fixing member 66d located on the first support region 64 is in a state where the holding device 20 is located at the reaching position P2. It is located on the second support area 65.
In this case, the distance that the pulley 50a moves in one direction D while the holding device 20 travels from the starting position P1 to the reaching position P2 is about half the distance that the holding device 20 moves in one direction D. ..
When the holding device 20 moves from the arrival position P2 to the start position P1, it is clear that the operation is the reverse of the above, so the description thereof will be omitted.

Further, since the long members 40a and 40b are also fixed by the fixing member 73 in the first fixing member 70, between the one end portions 41a and 41b and the region supported by the first support region 64 of the belt 60. Also, irregular movements and bending of the long members 40a and 40b are regulated, and damage to the long members 40a and 40b is suppressed.

Claims (5)

It is a transport device provided with a holding device that is arranged in a storage room provided with a processing device that performs a predetermined treatment on a substrate and that performs a reciprocating motion in one direction while holding an object to be held.
A long member whose one end is connected to the holding device and has flexibility,
The long member has a bending region bent into a predetermined bending shape, and a first support region and a second support region which are adjacent to the bending region and are formed so as to face each other along the one direction. With a belt where a part of the area is fixed,
A first fixing member, which is fixed to the belt in the first support region and operates the belt in accordance with the reciprocating movement, is provided.
The partial region is fixed to the belt in a state of being sequentially arranged along the belt from the one end side so as to reach the second support region from the first support region through the bending region.
The belt moves the first support region and the second support region in relatively opposite directions with respect to the one direction while maintaining the bending shape, so that the position of the bending region is along the one direction. A transport device that is configured to operate to move. The transport device according to claim 1, further comprising a second fixing member for fixing the belt and the accommodation chamber in the second support region. The first fixing member is further fixed to the holding device so as to operate integrally with the holding device.
The transport device according to claim 1 or 2, wherein the long member is fixed to the first fixing member between one end and a region supported by the first support region. The transport device according to any one of claims 1 to 3, further comprising a plurality of the long members, each of which is fixed to the belt in a state of being separated from each other. The long member is fixed to the belt via a plurality of belt fixing members fixed to the belt in a state of being arranged apart from each other along the belt.
Among the plurality of belt fixing members, the first belt fixing member arranged at the position closest to the one end portion of the long member is always located in the first support region during the reciprocating movement.
Among the plurality of belt fixing members, the second belt fixing member arranged at the position farthest from the one end portion of the long member is configured to be always located in the second support region during the reciprocating movement. The transport device according to any one of claims 1 to 4.

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