JP2011081367A - Device for guiding power transmitting member, and substrate processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To guide a cable or the like to follow a moving body with reduced vibration and little dust. <P>SOLUTION: A cable 56 is connected at one end to an X coarse movement stage 23X that moves in an X-axis direction along a horizontal plane, and is connected at the other end to a fixed member 66 disposed outside the movement range of the X coarse movement stage 23X. The cable 56 is fixed to a link mechanism 60 along the link mechanism 60 including four links 68, 70, 72 and 74 connected in series. When the X coarse movement stage 23X moves, the cable 56 is guided in a Z axis direction associating with deformation of the link mechanism 60, and thereby, a release amount of the cable 56 viewed from the fixed member 66 side is adjusted, suppressing sliding of the cable 56 on another member and simultaneously suppressing generation of vibration. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a power transmission member guide device and a substrate processing apparatus, and more specifically, a power used for transmission of power between a moving body that moves within a predetermined range within a predetermined two-dimensional plane and an external device. The present invention relates to a force transmission member guide device that guides a transmission member, and a substrate processing apparatus that includes the force transmission member guide device and performs processing on a substrate placed on a moving body.

  Conventionally, in a lithography process for manufacturing an electronic device (microdevice) such as a liquid crystal display element, a semiconductor element (such as an integrated circuit), a mask or reticle (hereinafter collectively referred to as “mask”), a glass plate or a wafer (hereinafter referred to as “mask”). And a step of transferring a fine pattern formed on the mask onto the substrate via the projection optical system while moving the substrate in a synchronized manner along a predetermined scanning direction (scanning direction). A scanning projection exposure apparatus (a so-called scanning stepper (also called a scanner)) or the like is used.

  This type of exposure apparatus includes a substrate stage device that holds the substrate and guides the substrate in the scanning direction. The substrate stage device includes a cable for supplying various powers such as power from the outside. It is connected. As the substrate stage apparatus moves, the cable is guided in a predetermined direction by the cable guide apparatus so as to follow the substrate stage apparatus. Conventionally, as a cable guide device, one using a chain link mechanism in which a plurality of link members are connected is known (for example, see Patent Document 1).

  However, in the cable guide device described in Patent Document 1, since the cable is arranged along each chain link, when the cable is deformed along with the deformation of the chain link mechanism, the cable and the chain link slide. There was a risk of vibration and dust generation.

  In the above-described exposure apparatus, when such vibration occurs, the accuracy of the substrate position control is lowered, and if dust is generated on the mask or the substrate due to dust generation, transfer defects are caused.

International Publication No. 2002/086349

  The present invention has been made under the circumstances described above. From the first viewpoint, a moving body that moves along a two-dimensional plane in a predetermined range in a plane parallel to the predetermined two-dimensional plane, and an external A fixed portion to which a part of a flexible force transmission member that forms a transmission path of a force to be transmitted between the apparatus and the device; a portion of the force transmission member that is fixed to the fixing portion; Holding one or a plurality of locations in the middle of the part connected to the moving body, and guiding the holding position in the same direction as the moving direction of the moving body when the moving body moves And a guide unit for guiding in a direction intersecting the two-dimensional plane.

  Here, utility means any energy, substance, etc. (for example, electric power, electric signal, pressurized gas, vacuum suction force, refrigerant) used in a moving body or an external device. This means that the above-mentioned power is exchanged between the body and an external device (power supply, transmission / reception of electric signals, supply and recovery of refrigerant, etc.). In this specification, the term “utility” is used in this sense.

  According to this, when the moving body moves along a predetermined two-dimensional plane, the guide unit guides one or more places of the finite-length force transmission member in the same direction as the moving body, By guiding in a direction crossing the moving direction of the moving body, the flexible force transmission member is bent. Thereby, the feeding amount seen from the fixed part side of the power transmission member can be adjusted while avoiding sliding between the power transmission member and the other members. Therefore, generation of vibration and dust generation when guiding the power transmission member are prevented.

  According to a second aspect of the present invention, the movable body includes: a force transmission member guide device according to the present invention, wherein the movable body is a stage on which the substrate is placed; and a substrate processing unit that performs processing on the substrate. The processing unit is a substrate processing apparatus located above the moving range of the stage.

It is a figure which shows schematic structure of the liquid crystal exposure apparatus of 1st Embodiment. It is a figure which shows typically the cable guide apparatus which the liquid-crystal exposure apparatus of FIG. 1 has. It is a top view which shows the structure of a cable guide apparatus. It is a side view which shows the structure of a cable guide apparatus. It is a figure which shows the relationship between the opening angle of the link pair which consists of an adjacent link, and the cable fixed to the roller provided in the connection part of this link pair. 6A to 6C are diagrams for explaining the operation of the cable guide device. It is a side view which shows the structure of the cable guide apparatus which concerns on 2nd Embodiment. It is a side view which shows schematic structure of the liquid-crystal exposure apparatus which concerns on 3rd Embodiment. 9A and 9B are diagrams for explaining the operation of the cable guide device included in the liquid crystal exposure apparatus of FIG. It is a side view which shows schematic structure of the liquid crystal exposure apparatus which concerns on 4th Embodiment. It is a side view which shows schematic structure of the liquid-crystal exposure apparatus which concerns on 5th Embodiment. It is a side view which shows schematic structure of the liquid crystal exposure apparatus which concerns on 6th Embodiment. FIGS. 13A and 13B are diagrams for explaining the operation of the cable guide device included in the liquid crystal exposure apparatus according to the seventh embodiment. FIG. 14A to FIG. 14C are diagrams for explaining the operation of the cable guide device according to the eighth embodiment. It is a top view which shows the cable guide apparatus which concerns on the modification of 8th Embodiment. FIGS. 16A and 16B are views for explaining the operation of the cable guide device included in the substrate stage device according to the ninth embodiment. It is a side view which shows schematic structure of the cable guide apparatus which concerns on the modification of 2nd Embodiment. FIG. 18A to FIG. 18C are diagrams for explaining the operation of the cable guide device according to the modification of the first embodiment. It is a figure which shows the substrate stage apparatus which concerns on 10th Embodiment. It is the sectional view on the AA line of FIG. It is the figure which looked at the substrate stage device of Drawing 19 from the -X side. It is a figure which shows the substrate stage apparatus which concerns on 11th Embodiment. It is the BB sectional view taken on the line of FIG. It is the figure which looked at the substrate stage device of Drawing 22 from the -X side. FIG. 25A to FIG. 25C are diagrams for explaining the configuration and operation of the cable guide device according to the twelfth embodiment. FIG. 26A and FIG. 26B are diagrams showing a modification of the link pair opening prevention device.

<< First Embodiment >>
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 6C.

  FIG. 1 shows a schematic configuration of a liquid crystal exposure apparatus 10 according to the first embodiment. The liquid crystal exposure apparatus 10 is a so-called step-and-scan type projection exposure apparatus that uses a rectangular (rectangular) glass substrate P (hereinafter simply referred to as a substrate P) used for a display panel of a liquid crystal display device as an exposure object. It is a scanner.

  The liquid crystal exposure apparatus 10 includes an illumination system IOP, a mask stage MST for holding a mask M, a projection optical system PL, a body BD on which the mask stage MST and the projection optical system PL are mounted, and a substrate stage apparatus PST for holding a substrate P. , And their control system. In the following, the direction in which the mask M and the substrate P are relatively scanned with respect to the projection optical system PL at the time of exposure is defined as the X-axis direction, and the directions orthogonal to this in the horizontal plane are the Y-axis direction, X-axis, and Y-axis. The direction orthogonal to the Z-axis direction will be described, and the rotation (tilt) directions around the X-axis, Y-axis, and Z-axis will be described as the θx, θy, and θz directions, respectively.

  The illumination system IOP is configured similarly to the illumination system disclosed in, for example, US Pat. No. 6,552,775. That is, the illumination system IOP emits light emitted from a light source (not shown) (for example, a mercury lamp) through exposure mirrors (not shown), dichroic mirrors, shutters, wavelength selection filters, various lenses, and the like. Irradiation light) is applied to the mask M as IL. As the illumination light IL, for example, light such as i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or the combined light of the i-line, g-line, and h-line is used. Further, the wavelength of the illumination light IL can be appropriately switched by a wavelength selection filter, for example, according to the required resolution.

  A mask M having a circuit pattern or the like formed on its pattern surface (the lower surface in FIG. 1) is fixed to the mask stage MST by, for example, vacuum suction (or electrostatic suction). The mask stage MST is levitated and supported in a non-contact state, for example, via an air bearing (not shown) on a pair of mask stage guides 35 fixed to the upper surface of a lens barrel base plate 31 that is a part of a body BD described later. ing. The mask stage MST is driven with a predetermined stroke in the scanning direction (X-axis direction) on the pair of mask stage guides 35 by a mask stage drive system (not shown) including a linear motor, for example, And are slightly driven appropriately in the θz direction. Position information (including rotation information in the θz direction) of the mask stage MST in the XY plane is measured by a mask interferometer system including a laser interferometer 91.

  Projection optical system PL is supported by lens barrel surface plate 31 below mask stage MST in FIG. The projection optical system PL of this embodiment has the same configuration as the projection optical system disclosed in, for example, US Pat. No. 6,552,775. That is, the projection optical system PL has a plurality of optical systems including lens modules and the like, and the plurality of optical systems are arranged in a so-called staggered pattern along the Y-axis direction (also referred to as a multi-lens projection optical system). ) As each of the plurality of optical systems, for example, a bilateral telecentric equal magnification system that forms an erect image is used. The aforementioned illumination system IOP is configured to irradiate the mask M with a plurality of illumination lights IL corresponding to the plurality of optical systems. Therefore, a plurality of illumination areas of the illumination light IL arranged in a staggered pattern are formed on the mask M, and arranged in a staggered pattern on the substrate P corresponding to each of the plurality of optical systems. Irradiation areas for a plurality of illumination lights IL are formed. In the liquid crystal exposure apparatus 10, the projection optical system PL including a plurality of optical systems arranged in a staggered manner has a Y axis direction as a longitudinal direction by combining a plurality of irradiation regions formed on the substrate P. It functions in the same way as a projection optical system having a single rectangular image field.

  For this reason, when the illumination area on the mask M is illuminated by the illumination light IL from the illumination system IOP, the illumination light IL that has passed through the mask M causes the circuit of the mask M in the illumination area to pass through the projection optical system PL. Irradiation region of illumination light IL conjugate to an illumination region on a substrate P on which a resist (sensitive agent) is coated, on which a projection image (partial upright image) of a pattern is arranged on the image plane side of projection optical system PL It is formed in (exposure area). Then, by synchronous driving of the mask stage MST and the substrate stage apparatus PST, the mask M is moved relative to the illumination area (illumination light IL) in the scanning direction (X-axis direction), and at the exposure area (illumination light IL). On the other hand, when the substrate P is relatively moved in the scanning direction (X-axis direction), scanning exposure of one shot area (partition area) on the substrate P is performed, and a pattern of the mask M (mask pattern) is formed in the shot area. Is transcribed. That is, in this embodiment, the pattern of the mask M is generated on the substrate P by the illumination system IOP and the projection optical system PL, and the pattern is formed on the substrate P by exposure of the sensitive layer (resist layer) on the substrate P by the illumination light IL. Is formed.

  The body BD includes a substrate stage base 33 and a lens barrel base plate 31 supported horizontally via a pair of support members 32 arranged on the substrate stage base 33. The substrate stage gantry 33 is supported by a plurality of vibration isolation mechanisms 34 installed on the floor surface F, and the body BD is vibrationally separated from the floor surface F.

  The substrate stage apparatus PST includes a surface plate 12 fixed on a substrate stage mount 33, a pair of base frames 14 fixed on a floor surface F, and an X coarse movement stage 23X mounted on the pair of base frames 14. And a Y coarse movement stage 23Y mounted on the X coarse movement stage 23X and constituting an XY two-dimensional stage device together with the X coarse movement stage 23X, and a fine movement stage disposed on the + Z side (above) of the Y coarse movement stage 23Y. 21, a weight cancellation device 26 that supports the weight of fine movement stage 21 on surface plate 12, and a cable 56 (see FIG. 2) that is connected to X coarse movement stage 23 </ b> X and a power supply device (not shown). And a guide device 100 (see FIG. 2).

  The surface plate 12 is made of a rectangular plate-like member (for example, viewed from the + Z side) formed of a stone material, and the upper surface thereof is finished with extremely high flatness.

  One of the pair of base frames 14 is disposed on the + Y side of the surface plate 12, and the other is disposed on the −Y side of the surface plate 12. Each of the pair of base frames 14 is made of a member whose longitudinal direction is the X-axis direction, and is fixed to the floor surface F in a state of straddling the substrate stage mount 33. Although not shown in FIG. 1, the pair of base frames 14 includes a plurality of X linear guide members for linearly guiding the X coarse movement stage 23X in the X-axis direction, and an X driving the X coarse movement stage 23X. An X stator (for example, a magnet unit) constituting the linear motor is included.

  The X coarse movement stage 23X is composed of a frame-like member having a rectangular outer shape in plan view, and has a long hole-like opening (not shown) with the Y-axis direction as the longitudinal direction at the center thereof. A pair of X sliders 54 formed in an inverted U shape in the YZ section are fixed to the lower surface of the X coarse movement stage 23X. Although not shown in FIG. 1, each of the pair of X sliders 54 is together with a slide member slidably engaged with an X linear guide member (not shown) of the base frame 14 and the above-described X stator. An X mover (for example, a coil unit) constituting the X linear motor is included. The X coarse movement stage 23X is linearly driven with a predetermined stroke in the X-axis direction on the pair of base frames 14 by an X coarse movement stage drive system including an X linear motor. A pair of Y linear guide members 28 (the -X side Y linear guide member is arranged with respect to the + X side Y linear guide member) are arranged on the upper surface of the X coarse movement stage 23X so as to be separated from each other in the X axis direction. (Overlapping on the back side of the page) is fixed. Although not shown in each drawing, a Y stator (for example, a coil unit) constituting a Y linear motor for driving the Y coarse movement stage 23Y is fixed to the upper surface of the X coarse movement stage 23X.

  The Y coarse movement stage 23Y is composed of a frame-like member having a rectangular outer shape in a plan view whose dimension in the Y-axis direction is shorter than that of the X coarse movement stage 23X, and has an opening (not shown) at the center thereof. ing. A plurality of sliders 29 formed in an inverted U-shaped XZ cross section are fixed to the lower surface of the Y coarse movement stage 23Y so as to be slidably engaged with the Y linear guide member 28. Although not shown in FIG. 1, a Y mover (for example, a magnet unit) that constitutes a Y linear motor is fixed to the lower surface of the Y coarse movement stage 23Y together with the Y stator described above. The Y coarse movement stage 23Y is driven with a predetermined stroke in the Y axis direction on the X coarse movement stage 23X by a Y coarse movement stage drive system including a Y linear motor. Position information of the X coarse movement stage 23X and the Y coarse movement stage 23Y is measured by a linear encoder system (not shown). Note that the drive system for driving the X coarse movement stage 23X and the Y coarse movement stage 23Y in the X-axis direction and the Y-axis direction, respectively, may be another system such as a drive system using a feed screw or a belt drive system. .

  The fine movement stage 21 is made of a plate-like (or rectangular parallelepiped) member having a substantially square shape in plan view, and holds the substrate P on its upper surface via the substrate holder PH. The substrate holder PH has, for example, a vacuum suction device (or electrostatic suction device) (not shown) and holds the substrate P on the upper surface thereof.

  A Y movable mirror (bar mirror) 22Y having a reflecting surface perpendicular to the Y axis is fixed to the side surface on the −Y side of fine movement stage 21 via mirror base 24Y. Although not shown in FIG. 1, an X movable mirror having a reflecting surface orthogonal to the X axis is fixed to the −X side surface of fine movement stage 21. The positional information in the XY plane of the fine movement stage 21 is, for example, a resolution of about 0.5 to 1 nm by a laser interferometer system that irradiates each of the Y moving mirror 22Y and the X moving mirror with a measurement beam and receives the reflected light. Always detected. In practice, the laser interferometer system includes an X laser interferometer and a Y laser interferometer corresponding to the Y moving mirror 22Y and the X moving mirror, respectively. In FIG. Only a total of 92 is shown.

  The fine movement stage 21 includes a voice (not shown) fixed to the Y coarse movement stage 23Y, for example (not shown) and a mover (not shown) fixed to the fine movement stage 21 (eg, a magnet unit). A fine movement stage drive system including a coil motor finely drives the Y coarse movement stage 23Y in directions of six degrees of freedom (X-axis, Y-axis, Z-axis, θx, θy, and θz directions). As a result, the fine movement stage 21 can move (coarse movement) with a long stroke in the XY two-axis direction with respect to the projection optical system PL, and can move minutely (fine movement) in the direction of six degrees of freedom. The voice coil motor includes an X voice coil motor that generates a driving force in the X-axis direction, a Y voice coil motor that generates a driving force in the Y-axis direction, and a Z voice coil motor that generates a driving force in the Z-axis direction. However, a plurality of them (in particular, Z voice coil motors are provided at three or more places not on the same straight line).

  The weight cancellation device 26 is a columnar member extending in the Z-axis direction that supports the fine movement stage 21 on the surface plate 12, and is also referred to as a core column. The weight cancellation device 26 is inserted into the opening of the X coarse movement stage 23X and the opening of the Y coarse movement stage 23Y. The weight canceling device 26 generates a force in the + Z direction, thereby reducing the weight of the system including the fine movement stage 21 (specifically, the system including the fine movement stage 21, the substrate holder PH, the substrate P, and the like) -Z direction) force) is canceled, thereby reducing the load on a plurality of voice coil motors (not shown) constituting the fine movement stage drive system. The weight canceling device 26 is levitated and supported on the surface plate 12 by a static gas bearing (not shown) such as an air bearing. The weight cancellation device 26 is mechanically connected to the Y coarse movement stage 23Y via a coupling device (not shown) including a leaf spring (also referred to as a flexure device), and integrally with the Y coarse movement stage 23Y, Move in the X-axis direction and the Y-axis direction. A leveling device 27 is disposed between the weight cancellation device 26 and the fine movement stage 21. The fine movement stage 21 is supported with respect to the weight cancellation device 26 via the leveling device 27 in a tiltable (swingable) state in the θx direction and the θy direction. The configurations of the weight cancellation device 26, the leveling device 27, the flexure device, and the like are disclosed in, for example, International Publication No. 2008/129762.

  As shown in FIG. 2, the cable guide device 100 has a cable 56 having one end connected to the X coarse movement stage 23X and the other end connected to a power supply (not shown) when the X coarse movement stage 23X moves. This is a device for guiding so as not to contact other members (for example, the surface plate 12). As shown in FIG. 3, the cable 56 is formed in a long band shape as a whole by fusing a plurality of cables. In the present embodiment, a bundle of cables including the plurality of cables is referred to as a cable 56 for convenience.

  As shown in FIG. 2, the cable guide device 100 includes a link mechanism 60 including a plurality (four in the present embodiment) of links 68, 70, 72, 74 connected in series. Hereinafter, for convenience of description, the four links are referred to as a first link 68, a second link 70, a third link 72, and a fourth link 74 in order from the X coarse movement stage 23X side. The first link 68 is connected to a bearing member 62 fixed to the X coarse movement stage 23X, and the fourth link 74 is a predetermined fixing member 66 (for example, the floor surface F or the body BD (FIG. 1). It is connected to the bearing member 64 fixed to the member fixed to the reference). The first link 68 and the bearing member 62, the fourth link 74 and the bearing member 64, and two adjacent links among the four links are connected by a shaft member 93 that extends parallel to the Y axis. The shaft member 93 can be relatively rotated around the axis.

  As shown in FIG. 3, the bearing member 62 is formed of a substantially U-shaped member in plan view (viewed from above) with an opening on the −X side, and has a pair of opposed surface portions parallel to the XZ plane. The bearing member 64 is formed of a substantially U-shaped member in plan view with an opening on the + X side, and has a pair of opposed surface portions parallel to the XZ plane.

  Each of the first and third links 68 and 72 is substantially the same member, and each of the second and fourth links 70 and 74 is also substantially the same member. Therefore, the configuration of the first link 68 and the second link 70 will be described below. As shown in FIG. 3, the first link 68 includes a link main body 86 a made up of a pair of rectangular (rectangular) plate-like members arranged to face each other at a predetermined interval in the Y-axis direction. Here, the longitudinal direction of the pair of plate members constituting the link body 86 a is parallel to the longitudinal direction of the first link 68. Each of the pair of plate-like members constituting the link main body 86a is connected by a pair of connecting members 87 parallel to the Y axis. Further, linear guide members 84 parallel to the plate-like members are fixed to opposing surfaces (inner side surfaces) of the pair of plate-like members constituting the link body 86a.

  The first link 68 has a pair of slide portions 82a on one side and the other side in the longitudinal direction of the link body 86a. The pair of slide portions 82a is composed of a pair of plate-like members that are opposed to each other at a predetermined interval in the Y-axis direction. Each of the pair of slide portions 82a includes a slider 88 that is slidably engaged with a linear guide member 84 fixed to the link main body 86a, and is slidable along the linear guide member 84 with respect to the link main body 86a. It has become. Therefore, the first link 68 can be expanded and contracted in the longitudinal direction with a predetermined stroke.

  Similar to the first link 68, the second link 70 includes a link main body 86b made of a pair of rectangular (rectangular) plate-like members arranged to face each other at a predetermined interval in the Y-axis direction. The second link 70 includes the length and the amount of expansion / contraction, except that the linear guide member 84 is fixed to the outer surfaces of the pair of plate-like members constituting the link body 86b. It has the same configuration and function. That is, the second link 70 includes a link main body 86b and a pair of slide portions 82b that can slide with respect to the link main body 86b. In addition, since the slide part 82a of the 1st and 3rd links 68 and 72 is inserted between a pair of plate-shaped members which comprise the slide part 82b of the 2nd and 4th links 70 and 74, The second and fourth links 70 and 74 are formed so as to be somewhat wider (larger dimensions in the Y-axis direction) than the first and third links 68 and 72.

  2 and 4, the cable guide device 100 rotatably supports a shaft member 93 that connects the second link 70 and the third link 72, and linearly moves in the X-axis direction. The supporting member 102 is provided. The support member 102 has a slider 101 including a plurality of rolling elements. The slider 101 is slidably engaged with an X linear guide member 103 extending in the X-axis direction via the rolling element, and is movable only in the X-axis direction (Y-axis and Z-axis). Does not move in the direction).

  Here, as shown in FIG. 2, the shaft members 93 supported by the bearing members 62 and 64 and the support member 102 are arranged at substantially the same Z position. Accordingly, when the X coarse movement stage 23X is positioned in the vicinity of the end portion on the −X side on the surface plate 12, as shown in FIG. 6A, the first link 68, the second link 70, Each of the link pair consisting of the third link 72 and the fourth link 74 is bent in an inverted V shape in a side view as viewed from the Y-axis direction. Further, the link pair including the second link 70 and the third link 72 is bent in a V shape when viewed from the side as viewed from the Y-axis direction. When the X coarse movement stage 23X is positioned in the vicinity of the + X side end on the surface plate 12, the angle between the adjacent links opens, and the link mechanism 60 is substantially linearly parallel to the X axis as a whole. It extends in a shape.

  Here, as shown in FIG. 2, the link mechanism 60 has an opening angle of a link pair composed of two adjacent links, or an opening angle between the bearing members 62, 64 and the link, which is a predetermined angle less than 180 degrees. In the embodiment, the opening prevention device 80 is limited to, for example, about 150 °. When the opening angle of the link pair reaches a predetermined angle, the other link comes into contact with one of the two links forming the link pair (or the support member) and rotates in the opening direction. Limit. Therefore, as shown in FIG. 2, for example, the first link 68 and the second link 70 are reversed V-shaped in a side view even when the first link 68 and the second link 70 are opened to the maximum by the action of the opening preventing device 80. The shape of the shape is maintained.

  As shown in FIG. 3, each of the plurality of shaft members 93 supports a roller 90 in a rotatable manner. The plurality of rollers 90 are respectively disposed between a pair of opposing surfaces of the bearing members 62 and 64 or between a pair of plate members constituting the slide portions 82a and 82b.

  The cable 56 passes between a pair of opposed surfaces of the bearing members 62 and 64 and between a pair of plate-like members constituting the link main bodies 86a and 86b and the slide portions 82a and 82b. The cable 90 is fixed to the outer peripheral surface of the roller 90 via a cable pressing member 57. Further, the middle portion of the cable 56 in the longitudinal direction is also fixed to the connecting member 87 via the cable pressing member 57. Accordingly, in the cable guide device 100, the cable 56 is bent in a W shape in a side view (see FIG. 6A) or extended in a substantially straight line according to the deformation of the link mechanism 60 (see FIG. 6C). ))).

  Here, as shown in FIG. 4, the cable 56 includes a coupling portion between the bearing member 62 and the first link 68, a coupling portion between the second link 70 and the third link 72, and a fourth link. The roller 90 provided at each of the connecting portions between the roller 74 and the bearing member 64 is fixed to the outer peripheral surface of the roller 90 through the −Z side of the roller 90. In addition, the cable 56 has a roller 90 provided at each of the connecting portion between the first link 68 and the second link 70 and the connecting portion between the third link 72 and the fourth link 74. The roller 90 passes through the + Z side and is fixed to the outer peripheral surface of the roller 90. Accordingly, as shown in FIG. 6A, the cable 56 is bent with a small curvature even when the adjacent link is closed, and thus the cable 56 is prevented from being locally bent.

  Here, as described above, each of the first to fourth links 68, 70, 72, 74 can be expanded and contracted with a predetermined stroke in the longitudinal direction. Then, in each of the first to fourth links 68, 70, 72, 74, the X coarse movement stage 23X moves in the + X direction (from the position shown in FIG. 6A to the position shown in FIG. 6C). The longitudinal dimension becomes longer, and the longitudinal dimension becomes shorter as the X coarse movement stage 23X moves in the -X direction. The reason and operation will be described below.

  As described above, in the cable guide device 100, the cable 56 is fixed to the outer peripheral surface of the roller 90 and the connecting member 87 (see FIG. 3). Accordingly, if the longitudinal dimension of each link does not change, the cable 56 between the fixed portion with respect to the roller 90 and the fixed portion with respect to the connecting member 87 bends as the link opening angle increases. This will be specifically described below with reference to FIG. In FIG. 5, symbols R <b> 1 and R <b> 2 schematically indicate a pair of adjacent links (link pairs). As shown in FIG. 5, when the link pair is opened, the links R1 and R2 open to the shaft member 93 at the center (fulcrum), whereas the cable 56 opens the cable pressing member 57 to the center (fulcrum). Accordingly, when the cable 56 is fixed to the links R1 and R2 when the opening angle of the links R1 and R2 is the angle α (see the white circles in FIG. 5), when the links R1 and R2 are opened to the angle β, the cable 56 The excess part (bending W) of the predetermined length W occurs on one side and the other side of the cable pressing member 57, respectively. Therefore, in the cable guide device 100 of the present embodiment, each of the first to fourth links 68, 70, 72, 74 extends in the longitudinal direction thereof as the opening angle of the link pair increases, so that the bending W To absorb.

  That is, in the state shown in FIG. 6A where the angle formed by the link pair is small, each of the first to fourth links 68, 70, 72, 74 has a minimum length. Then, when the X coarse movement stage 23X moves in the + direction, as shown in FIGS. 6B and 6C, the link mechanism 60 is generally parallel to the X-axis direction. Each of the first to fourth links 68, 70, 72, 74 constituting the link mechanism 60 is pulled and extended by the X coarse movement stage 23X. Here, each of the first to fourth links 68, 70, 72, 74 has a stopper device (not shown), and when being stretched by being pulled by the X coarse movement stage 23X, the link main body 86a and a pair of slides. The portion 82a (or the link main body 86b and the pair of slide portions 82b) is not separated. However, normally, each of the first to fourth links 68, 70, 72, 74 is caused by the cable 56 fixed by the cable pressing member 57 being fully extended before reaching the maximum extension defined by the stopper device. Elongation is limited. Therefore, the occurrence of vibration due to the operation of the stopper device is prevented.

  When the X coarse movement stage 23 </ b> X moves in the −X direction, the first to fourth links 68, 70, 72, and 74 constituting the link mechanism 60 are connected to the cable 56, contrary to the above. Shrinks due to tension. In the link mechanism of this embodiment, each of the first to fourth links 68, 70, 72, 74 is passively pulled by the X coarse movement stage 23X (or by the tension of the cable 56). However, the present invention is not limited to this, and an actuator may be provided for each link to control the amount of expansion / contraction.

  Further, in the link mechanism 60, as shown in FIG. 3, among the plurality of shaft members 93, disk-shaped disk members 99 are disposed at both ends of the shaft member 93 that connects the links to each other. And is fixed coaxially. In FIG. 4, the disk member 99 fixed to the −Y side end of the shaft member 93 is hidden behind the + Y side disk member 99. In FIG. 2, the disk member is not shown from the viewpoint of avoiding the complexity of the drawing.

  In the cable guide device 100, a tension spring 104 is installed between the bearing member 62 and the slide portion 82 a of the first link 68. A plurality of tension springs including the tension spring 104, which will be described below, are provided on the + Y side and the −Y side of each link constituting the link mechanism 60, but in FIG. Only the tension spring is illustrated, and the tension spring on the -Y side is hidden behind the paper surface. A tension spring 118 is also installed on the bearing member 64 and the slide portion 82 a of the fourth link 74.

  Further, of the first link 68, the slide part 82 a on the side connected to the second link 70, and the disc fixed to the shaft member 93 that connects the first link 68 and the second link 70. A tension spring 106 is also installed on the member 99. Similarly, tension springs 108, 110, 112, 114, and 116 are installed on the second to third links 70, 72, 74 and the disc member 99, respectively. Each disk member 99 has a spring hook member that holds one end of the tension spring, but the spring hook member is arranged at a position different from the axis of the shaft member 93.

  The tension springs 106 to 116 urge each adjacent link in a closing direction. The tension spring 104 urges the first link 68 around the shaft member 93 in a direction parallel to the Z axis, and the tension spring 118 forces the fourth link 74 around the shaft member 93 in parallel with the Z axis. It is energizing in the direction to become. That is, the link mechanism 60 is urged to a generally contracted state shown in FIG. 6A by the plurality of tension springs 104 to 118, and when the X coarse movement stage 23X moves in the + X direction, The link mechanism 60 is deformed against the urging force of the plurality of tension springs 104 to 118.

  Here, among the plurality of tension springs, the tension spring 118 installed on the fourth link 74 and the bearing member 64 is set to have a larger tensile force than the other tension springs 104 to 116. In this specification, the pulling force means a force (biasing force in the closing direction) by a spring for bringing adjacent links (or links and bearing members) closer to each other. In this embodiment, the tension force is set by appropriately setting the spring constant of the tension spring, and the tension spring 118 is set to have a larger spring constant than the other tension springs 104 to 116. However, the magnitude of the pulling force may be set as appropriate depending on, for example, the mounting position of the spring, without depending on the spring constant.

  Therefore, in the cable guide device 100 of the present embodiment, as shown in FIGS. 6A and 6B, the X coarse movement stage 23X is the end on the −X side on the surface plate 12 (see FIG. 2). When the link mechanism 60 moves in the + X direction from the vicinity of the portion, the tension springs 104 to 110 are first extended, and the first link 68 and the second link 70 are opened. At this time, since the force in the + X direction does not act on the third link 72 until the opening angle between the second link 70 and the third link 72 exceeds 90 °, the third link 72, and The posture of the fourth link 74 does not change.

  When the X coarse movement stage 23X further moves to the + X side from the state shown in FIG. 6B, the action of the above-described opening preventing device 80 (see FIG. 2) (or the cable fixed by the cable pressing member 57). 56), the change in the posture of the link pair composed of the first link 68 and the second link 70 is limited (becomes fully open). Then, when the change in posture of the link pair composed of the first link 68 and the second link 70 is restricted, the X coarse movement stage 23X further moves to the + X side, as shown in FIG. 6C. As described above, the third link 72 and the fourth link 74 are opened against the urging force of the tension springs 112 to 118.

  That is, in the cable guide device 100 of the present embodiment, when the X coarse movement stage 23X moves in the + X direction from the vicinity of the −X side end on the surface plate 12 (when the X coarse movement stage 23X moves away from the fixing member 66), The posture of the link pair composed of the pair of links (first and second links 68, 70) on the side close to the moving stage 23X is lowered in advance, and then the pair of links on the side far from the X coarse moving stage 23X. The posture of the link pair composed of (third and fourth links 72, 74) is lowered.

  Contrary to the above case, when the X coarse movement stage 23X moves in the −X direction from the vicinity of the + X side end on the surface plate 12, the X coarse movement stage 23X is preceded by the action of the tension spring 118. The posture of the link pair consisting of a pair of links (third and fourth links 72, 74) on the side farther from the moving stage 23X becomes higher, and thereafter, a pair of links on the side closer to the X coarse movement stage 23X (first And the posture of the link pair composed of the second links 68 and 70) is increased. In the link mechanism 60 of the present embodiment, when the X coarse movement stage 23X moves in the −X direction, the tension spring is used to increase the posture of the link pair far from the X coarse movement stage 23X in advance. The pulling force by 118 is set to be larger than the pulling forces by the other pulling springs 104 to 116, but the present invention is not limited to this. good.

  Here, the link pair composed of the first link 68 and the second link 70, and the link pair composed of the third link 72 and the fourth link 74, respectively, of the locking device 80 (see FIG. 2). Due to the action (or the action of restricting the length (tension) of the cable 56 fixed by the cable pressing member 57), the Z position is the highest in the most open state (extend in the X-axis direction). The lengths of the links 68 to 74 are set so that the portion (the cable pressing member 57) is below the lowermost surface of the projection optical system PL (see FIG. 1) (see FIG. 2).

  In the liquid crystal exposure apparatus 10 (see FIG. 1) configured as described above, the mask M is loaded onto the mask stage MST by the mask loader (not shown) and is not shown under the control of the control apparatus (not shown). The substrate P is loaded onto the substrate stage device PST by the substrate loader. Thereafter, the control device performs alignment measurement using an alignment detection system (not shown), and after the alignment measurement is completed, a step-and-scan exposure operation is performed. Since this exposure operation is the same as the conventional step-and-scan method, its description is omitted.

  As described above, according to the cable guide device 100 included in the liquid crystal exposure apparatus 10 of the present embodiment, the link mechanism 60 and the plurality of links 68 constituting the link mechanism 60 are accompanied with the movement of the X coarse movement stage 23X. Since the cable 56 held by ~ 74 is deformed (deformed in a zigzag shape in a side view), the feeding amount of the cable 56 as viewed from the fixing member 66 side is adjusted. For example, the cable 56 hangs down due to its own weight. There is no risk of sliding with other members (for example, the surface plate 12). Therefore, the cable 56 can be guided by following the X coarse movement stage 23X with low dust generation and low vibration. In addition, the link mechanism 60 includes a plurality of links 68 to 74 configured by combining a plurality of plate-like members and a plurality of shaft members 93, so that the configuration is simple and lightweight. It is also excellent in maintainability.

  In addition, the length of the cable 56 in a state where the link mechanism 60 is fully extended (a state where the four links 68 to 74 are substantially flat) is substantially the same as the distance between the fixing member 66 and the X coarse movement stage 23X. Therefore, the total length of the cable 56 can be shortened as compared with a cable guide device configured to make a U-turn of a conventional cable.

  Moreover, since the cable 56 is fixed to the outer peripheral surface of the roller 90 provided in the connection part of the adjacent link, ie, the movable part of the link mechanism 60, the attitude | position of the links 68-74 which the link mechanism 60 comprises changes. Even if the link pair opens and closes, the movable part of the link mechanism 60 and the cable 56 do not slide. Accordingly, generation of dust and vibration is suppressed.

  Moreover, since the length of each link 68-74 changes passively according to the change of the attitude | position of the link mechanism 60, sliding (sliding contact) with the surplus part of the cable 56 and the links 68-74 is suppressed. The

  Further, when the X coarse movement stage 23X moves in the + X direction from the vicinity of the −X side end on the surface plate 12, a pair of links (first and second links) on the side close to the X coarse movement stage 23X. 68, 70), the Z position of the lens barrel base plate 31 (see FIG. 1) can be lowered.

<< Second Embodiment >>
Next, a liquid crystal exposure apparatus according to a second embodiment will be described. Since the liquid crystal exposure apparatus of the second embodiment is different from the first embodiment only in the configuration of the cable guide device, only the configuration of the cable guide device will be described below. FIG. 7 shows a side view of the cable guide device 200 according to the second embodiment viewed from the + Y side. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first embodiment are given to those having the same configuration as in the first embodiment, and description thereof is omitted.

  In the link mechanism 202 included in the cable guide device 200 according to the second embodiment, the first to fourth links 204, 206, 208, and 210 are integrally formed so as not to expand and contract in the longitudinal direction. It has become.

  In addition, the first and third links 204 and 208 each have an end (upper end) on the longitudinal direction −X side so that the longitudinal direction forms a predetermined angle (for example, about 45 °) with the longitudinal direction of the link. In addition, an auxiliary link 122 made of an elongated plate-like member to which one end (the end on the + Z side) in the longitudinal direction is fixed is provided. Note that the dimension in the longitudinal direction of each auxiliary link 122 is set to be shorter than the dimension in the longitudinal direction of the links 204 and 208 (for example, about several tenths).

  The link mechanism 202 includes a tension spring 108 that biases the first link 204 and the second link 206 in the closing direction, and a tension spring 116 that biases the third link 208 and the fourth link 210 in the closing direction. And a tension spring 118 that urges the fourth link 210 around the shaft member 93 in a direction parallel to the Z-axis. One end of the tension spring 108 is connected to the −Z side end of the auxiliary link 122 of the first link 204, and the other end is connected to the longitudinal center of the second link 206. Similarly, the tension spring 116 has one end connected to the auxiliary link 122 and the other end connected to the fourth link 210. The pulling force by the pulling spring 116 and the pulling force by the pulling spring 118 are set to be approximately equal (not necessarily equal). Further, the pulling force by the pulling spring 108 is set smaller (weaker) than the pulling force by each of the pulling springs 116 and 118. Moreover, the pulling force by each tension spring can be appropriately set depending on, for example, the spring constant of each tension spring or the mounting position.

  Accordingly, the link mechanism 202 of the second embodiment is also similar to the first embodiment when the X coarse movement stage 23X moves in the + X direction from the vicinity of the −X side end on the surface plate 12. Indicates that the posture of the link pair consisting of a pair of links (first and second links 204, 206) on the side close to the X coarse movement stage 23X is lowered first, and then the side far from the X coarse movement stage 23X. The posture of the link pair comprising the pair of links (the third and fourth links 208 and 210) is lowered. In addition, when the X coarse movement stage 23X moves in the −X direction from the vicinity of the + X side end on the surface plate 12, contrary to the above description, a pair on the side far from the X coarse movement stage 23X is preceded. The posture of the link pair consisting of the second link (the third and fourth links 208 and 210) becomes higher, and then a pair of links (the first and second links 204 and 206 on the side close to the X coarse movement stage 23X). The posture of the link pair consisting of

  Here, the first to fourth links 204 to 210 have cable linear guide devices 220 having the same configuration. Hereinafter, the cable linear guide device 220 provided in the first link 204 will be described. The cable linear guide device 220 includes a member extending in parallel with the first link 204, and a linear guide member 131 fixed to the upper surface of the first link 204 and slidably engages with the linear guide member 131. A slider 124 and a cable pressing member 57 provided integrally with the slider 124 are included.

  The cable 56 is fixed to the slider 124 of each cable linear guide device 220 via the cable pressing member 57, and is held by the link mechanism 202 so as to be along the upper surface of each of the first to fourth links 204 to 210. ing.

  Here, in the cable guide device 200, unlike the first embodiment, the cable 56 is not fixed to the roller 90, and the cable 56 is previously provided with a predetermined amount of bending above the roller 90. ing.

  In the cable guide device 200 according to the second embodiment configured as described above, when the pair of links are opened from the folded state, like the first and second links 204 and 206 shown in FIG. When the pair of sliders 124 move away from each other (see the arrows in FIG. 7), the curvature of the pair of adjacent links and the curvature of the cable 56 described in the first embodiment with reference to FIG. The excess part of the cable 56 resulting from the difference is absorbed. Accordingly, rubbing contact between the cable 56 and the links 204 to 210 is suppressed.

<< Third Embodiment >>
Next, a cable guide device according to a third embodiment will be described. FIG. 8 shows a side view of the liquid crystal exposure apparatus 301 according to the third embodiment viewed from the + Y side. In FIG. 8, the illumination system IOP, the projection optical system PL, the mask stage MST, and the like are not shown. The cable guide device 300 according to the third embodiment drives the support member 102 using a part of the X linear motor that drives the X coarse movement stage 23X in the X-axis direction, as compared with the first embodiment. And the link mechanism does not have a tension spring. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first and second embodiments are given to those having the same configurations as those in the first and second embodiments, and the description thereof is omitted. Is omitted. In the third embodiment, the bearing members 62 and 64 that support the first link 68 and the fourth link 74, respectively, are members that open to the + Z side, unlike the first embodiment. However, since the function is the same as that of the first embodiment, description will be made using the same reference numerals.

  In the liquid crystal exposure apparatus 301 according to the third embodiment, an X linear guide 52 (the X linear guide 52 on the −Y side is not shown) extending in the X axis direction is fixed to each of the upper surface and both side surfaces of the base frame 14. Yes. As described in the first embodiment, a pair of base frames 14 are provided at predetermined intervals in the Y-axis direction. However, in FIG. 8, the base frame 14 on the −Y side is hidden behind the base frame 14 on the + Y side. Further, a pair of slides that slidably engage with X linear guides 52 fixed on both side surfaces of the base frame 14 are respectively provided on a pair of opposed surfaces of the X slider 54 fixed on the lower surface of the X coarse movement stage 23X. The member 135 is fixed at a predetermined interval in the X-axis direction (the slide member 135 that engages with the −Y side X linear guide 52 is not shown). A pair of slide members 139 slidably engaged with an X linear guide 52 fixed to the upper surface of the base frame 14 are fixed to the lower surface of the X coarse movement stage 23X at predetermined intervals in the X-axis direction. That is, the slide member 139 is fixed to the four corners of the lower surface of the X coarse movement stage 23X. Since the X coarse movement stage 23X and the X slider 54 are integrated, the slide member 139 may be fixed to the X slider 54.

  In addition, a stator (for example, a magnet unit) 55 of an X linear motor extending in the X-axis direction is fixed to both side surfaces of the base frame 14. A mover (for example, a coil unit) 59 of an X linear motor is fixed to a pair of opposed surfaces of the X slider 54 so as to face the stator 55. The mover 59 is electrically connected to a power supply device (not shown) via a cable 56, and the power supply device is controlled by a control device (not shown). That is, the control device supplies power to the mover 59 via the power supply device, and controls the position of the X coarse movement stage 23X in the X-axis direction.

  Further, an X slider 134 made of a member having a substantially U-shaped cross section as viewed from the + X direction is fixed to the lower end of the support member 102 included in the cable guide device 300. Between the pair of opposed surfaces of the X slider 134, the + Y side base frame 14 is inserted. In addition, a slide member 137 that is slidably engaged with the X linear guide 52 fixed to both side surfaces of the base frame 14 is fixed to each of the pair of opposing surfaces of the X slider 134. A slide member 137 that is slidably engaged with the X linear guide 52 fixed to the upper surface of the base frame 14 is fixed to the + Z side surface of the inner wall surface of the X slider 134. As a result, the X slider 134 can slide in the X-axis direction along each X linear guide 52.

  A movable element (for example, a coil unit) 136 is provided on each of the pair of opposing surfaces of the X slider 134 so as to face the stator 55 (the movable element 136 on the -Y side is not shown). The mover 136 constitutes an X linear motor that drives the X slider 134 in the X-axis direction together with the stator 55. The mover 136 is electrically connected to the aforementioned power supply device via the cable 56, and the X linear motor is controlled by the aforementioned control device connected to the power supply device. That is, the position of the support member 102 in the X-axis direction is controlled by the control device. The cable 56 that electrically connects the movable element 136 of the X slider 134 and the power supply device is held by the third and fourth links 72 and 74.

  The base frame 14 is provided with an X linear scale 141 extending in the X-axis direction. A head 143 that constitutes an X linear encoder together with the X linear scale 141 is fixed to the X slider 54 so as to face the X linear scale 141. A head 145 that constitutes an X linear encoder together with the X linear scale 141 is also fixed to the X slider 134 so as to face the X linear scale 141. The outputs of the heads 143 and 145 are supplied to the control device. Since the positioning accuracy of the X slider 134 (that is, the support member 102) may be rough compared to the X slider 54 (that is, the X coarse movement stage 23X), the X slider 134 is not necessarily limited to the same measurement system (linear). There is no need to use an encoder system), and for example, the position may be controlled based on the output of a measurement system using a Hall element and a magnetic plate.

  Next, an example of the operation of the cable guide device 300 according to the third embodiment will be described. From the state in which the X coarse movement stage 23X shown in FIG. 8 is located at the end of −X of the movement range and the link mechanism is completely closed, the control device starts the X coarse movement stage 23X shown in FIG. 9A. Until the first link 68 and the second link 70 are fully opened by driving in a direction away from the fixed member 66 (+ X direction) (the distance between the X coarse movement stage 23X and the support member 102 is predetermined). When the distance L is reached, the support member 102 is stopped (see FIG. 9A). Therefore, until the distance between the X coarse movement stage 23X and the support member 102 reaches the predetermined distance L, only the first and second links 68 and 70 guide the cable 56 by changing the posture thereof. To do.

  When the X coarse movement stage 23X is further driven in the + X direction from the position shown in FIG. 9A (the state in which the first and second links 68 and 70 are fully opened), The motor is controlled to move the support member 102 in the + X direction at the same speed as the X coarse movement stage 23X (see the arrow in FIG. 9A). Therefore, when the distance between the X coarse movement stage 23X and the support member 102 is equal to or greater than the predetermined distance L, the postures of the first and second links 68 and 70 are not changed when they are fully opened. The third and fourth links 72 and 74 guide the cable 56 by changing their postures (see FIG. 9B).

  Further, from the state where the X coarse movement stage 23X is located at the + X side end of the movement range shown in FIG. 9B, the X coarse movement stage 23X is driven in the direction approaching the fixed member 66 (−X direction). In doing so, the control device first controls the X linear motor to move the support member 102 in the −X direction at the same speed as the X coarse movement stage 23X. As a result, only the third and fourth links 72 and 74 are closed, and the first and second links 68 and 70 are maintained in the fully opened state. Then, when the third and fourth links 72 and 74 are completely closed (when the distance between the support member 102 and the fixing member 66 reaches the predetermined distance S shown in FIG. 8), the support member 102 is stopped. Thereafter, as the X coarse movement stage 23X moves in the −X direction, the first and second links 68 and 70 are closed (see FIG. 8).

  According to the third embodiment described above, the X linear motor that drives the support member 102 uses the stator 55 of the X linear motor that drives the X coarse movement stage 23X. The number of parts of the apparatus can be reduced and the configuration can be simplified.

<< Fourth Embodiment >>
Next, a cable guide device according to a fourth embodiment will be described. FIG. 10 shows a side view of the liquid crystal exposure apparatus 401 according to the fourth embodiment viewed from the + Y side. The cable guide device 400 according to the fourth embodiment includes the link mechanisms 60 on the + X side and the −X side with respect to the X coarse movement stage 23X. That is, two (two systems) cables 56 are connected to the X coarse movement stage 23X. As in the third embodiment, the X coarse movement stage 23X is on the pair of base frames 14 (the base frame 14 on the -Y side is hidden behind the base frame 14 on the + Y side). It is mounted on.

  The pair of link mechanisms 60 have the same configuration as the link mechanism (see FIGS. 2 to 6) of the first embodiment. However, in the first embodiment, it has been described that the support member 102 is slidably mounted on the X linear guide member 103 (see FIG. 2) extending in the X-axis direction. The support members 102 of the pair of link mechanisms 60 are slidably engaged with an X linear guide 52 fixed to the upper surface of the base frame 14 via a slider 105. That is, in this embodiment, the X linear guide 52 for linearly guiding the X coarse movement stage 23X in the X-axis direction is used as a linear guide member that linearly guides the pair of support members 102 in the X-axis direction. Thereby, since a dedicated guide for guiding the movement of the support member 102 is not required, the number of parts can be reduced, and the configuration of the entire cable guide device 400 can be simplified.

  Further, according to the cable guide device 400 according to the fourth embodiment, the cable 56 is connected to the X coarse movement stage 23X from the two directions of the + X side and the −X side. Compared to the system, the number of cables 56 can be reduced, and the link mechanism 60 can be simplified. Further, since the tension of the cable 56 can be applied equally to the X coarse movement stage 23X from each of the + X direction and the −X direction, the position control of the X coarse movement stage 23X becomes easy.

<< Fifth Embodiment >>
Next, a cable guide device according to a fifth embodiment will be described. For the sake of simplification of description and convenience of illustration, the same reference numerals as those of the first to fourth embodiments are given to those having the same configurations as those of the first to fourth embodiments, and the description thereof is omitted. Is omitted. FIG. 11 shows a side view of the liquid crystal exposure apparatus 501 according to the fifth embodiment viewed from the + Y side.

  Compared with the first embodiment, the cable guide device 500 according to the fifth embodiment is provided with an additional link of the link mechanism 502 and a support member that supports a connecting portion of adjacent links. The point is different.

  In the link mechanism 502 of the fifth embodiment, the bearing member 62 and the first link 68 are connected by a fifth link 77. The longitudinal dimension of the fifth link 77 is approximately half of the longitudinal dimension of each of the first to fourth links 68, 70, 72, 74. Similar to the first to fourth links 68, 70, 72 and 74, the fifth link 77 is extendable in the longitudinal direction. Although not shown in FIG. 11, the fifth link 77 and the bearing member 62 are urged around the shaft member 93 in a direction parallel to the Z axis. A tension spring is installed, and a tension spring that urges the first link 68 and the fifth link 77 in a closing direction is installed between the first link 68 and the fifth link 77.

  The link mechanism 502 includes a fifth link 77 and a third link in addition to a support member 102a (hereinafter referred to as a first support member) that supports a connecting portion between the second link 70 and the third link 72. The second support member 102 b that supports the connecting portion with the first link 68 is provided. The first and second support members 102 a and 102 b are slidably mounted on an X linear guide member 142 (that is, a common guide member) extending in the X-axis direction via a slider 105. The X linear guide member 142 is installed on the floor surface F via the gantry 147. Since the operation of the cable guide device 500 of the fifth embodiment is substantially the same as that of the cable guide device 100 of the first embodiment, the description thereof is omitted. In the fifth embodiment, the link mechanism 502 has five links, and two support members (support members 102a and 102b) for supporting the link connecting portion are provided. The number of support members is not limited to this. In this case, if the cable length is the same and the number of links is large, the length of each link can be shortened, and the dimension in the height direction of the cable guide device can be reduced.

<< Sixth Embodiment >>
Next, a cable guide device according to a sixth embodiment will be described. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to fifth embodiments are given to those having the same configuration as those in the first to fifth embodiments, and the description thereof is omitted. Is omitted. FIG. 12 shows a side view of the liquid crystal exposure apparatus 601 according to the sixth embodiment viewed from the + Y side.

  In the cable guide device 600 according to the sixth embodiment, the cable 56 is connected to each of the + X side and the −X side of the X coarse movement stage 23X, as in the fourth embodiment. Also, the link mechanism 60 is provided on each of the + X side and the −X side of the X coarse movement stage 23X. However, in the fourth embodiment (see FIG. 10), the support member 102 of the link mechanism 60 is mounted on the X linear guide member common to the X coarse movement stage 23X. However, in the sixth embodiment, Similar to the fifth embodiment, the support member 102 is slidably mounted on a dedicated X linear guide member 142. In this embodiment, a pair of X linear guide members 142 are provided corresponding to the support members 102 of the pair of link mechanisms 60, but the pair of X linear guide members may be integrated.

<< Seventh Embodiment >>
Next, a cable guide device according to a seventh embodiment will be described. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to sixth embodiments are given to those having the same configuration as those in the first to sixth embodiments, and the description thereof is omitted. Is omitted. FIG. 13 shows a side view of the liquid crystal exposure apparatus 701 according to the seventh embodiment viewed from the + Y side. The cable guide device 700 according to the seventh embodiment bends the cable 56 in the Z-axis direction using the expansion / contraction mechanisms 138 and 140 that expand and contract in the Z-axis direction (vertical direction).

  As shown in FIG. 13A, the cable guide device 700 of the seventh embodiment includes first and second expansion mechanisms 138 and 140 that expand and contract in the Z-axis direction (vertical direction), and a first expansion and contraction. An X slider 134 that supports the mechanism 138 and is movable in parallel to the X axis, and an X slider 144 that supports the second telescopic mechanism 140 and is movable in the X axis direction are provided. The first and second expansion / contraction mechanisms 138 and 140 are arranged at a predetermined interval in the X-axis direction from the X coarse movement stage 23X side to the fixed member 66 side. Since the first and second extension mechanisms 138 and 140 are substantially the same, the first extension mechanism 138 will be described below.

  The first expansion / contraction mechanism 138 includes an X-shaped X link 146 in which two links having the same length in the longitudinal direction are rotatably connected to each other by an axis parallel to the Y axis at the center in the longitudinal direction. There are a plurality of (three in this embodiment). Further, the X link 146 on the most + Z side has an inverted V shape in which two links having the same longitudinal dimension are connected to each other at one end in the longitudinal direction by means of an axis parallel to the Y axis. V-links 148 are connected. The three X links 146 and the V link 148 are connected in series in the Z-axis direction and function in the same manner as a so-called pantograph.

  In addition, an actuator (not shown) is connected to the X link 146 on the most −Z side of the first expansion / contraction mechanism 138. The actuator is driven in a direction to approach and separate the −Z side ends of the two links of the most −Z side X link 146. Thereby, the first expansion / contraction mechanism 138 expands and contracts in the Z-axis direction. The actuator is controlled by a control device (not shown).

  The first expansion / contraction mechanism 138 is supported by the X slider 134. The X slider 134 is the same as the X slider 134 (see FIGS. 8 and 9) described in the third embodiment, and is driven in the X axis direction along the base frame 14 by the X linear motor. It has become. The second expansion / contraction mechanism 140 is also mounted on the X slider 144 having the same configuration as the X slider 134 and is driven in the X-axis direction independently of the first expansion / contraction mechanism 138.

  Rollers 90 are rotatably supported at the connecting portions of the V links 148 of the first and second expansion and contraction mechanisms 138 and 140, respectively. The cable 56 is provided on the outer peripheral surface of the roller 90 pivotally supported by the bearing members 62 and 64 and the roller 90 pivotally supported by the first and second expansion / contraction mechanisms 138 and 140 via the cable pressing members 57 respectively. It is fixed.

  Here, in a state in which the expansion and contraction mechanisms 138 and 140 are most extended in the Z-axis direction, the upper ends of the expansion and contraction mechanisms 138 and 140 are higher than the lens barrel base plate 31. On the other hand, in a state where the expansion / contraction mechanisms 138 and 140 are most contracted in the Z-axis direction, the position where each cable 56 is fixed is lower than the lower surface of the projection optical system PL (the cable attachment member 153 of the X coarse movement stage 23X). The same height).

  Next, an example of the operation of the cable guide device 700 according to the seventh embodiment will be described. When the X coarse movement stage 23X is positioned at the −X side end of the movement range, the expansion / contraction mechanisms 138 and 140 are positioned at the −X side ends of the respective movement ranges and are positioned closest to each other. The expansion / contraction mechanisms 138 and 140 are in the most extended state in the Z-axis direction, and the cable 56 is provided between the X coarse movement stage 23X and the first expansion / contraction mechanism 138 and between the expansion / contraction mechanisms 138 and 140. Is greatly bent.

  Then, as shown in FIG. 13A, at the same time as the X coarse movement stage 23X is driven in the + X direction, the control device moves the first expansion / contraction mechanism 138 at a speed slower than the speed of the X coarse movement stage 23X ( For example, the first expansion / contraction mechanism 138 is gradually contracted in the −Z direction while moving in the + X direction at ½ of the speed of the X coarse movement stage 23X.

  Further, when the X coarse movement stage 23X further moves in the + X direction from the state shown in FIG. 13A and the first expansion / contraction mechanism 138 is fully contracted (the X coarse movement stage 23X and the first expansion / contraction mechanism 138 When the distance is substantially equal to the length of the cable 56 installed between them, the control device controls the speed of the first telescopic mechanism 138 to be the same as the speed of the X coarse movement stage 23X, and The second telescopic mechanism 140 is moved in the + X direction at a speed slower than the speed of the X coarse movement stage 23X (for example, 1/2 of the speed of the X coarse movement stage 23X), while the second telescopic mechanism 140 is − Shrink gradually in the Z direction.

  Then, when the X coarse movement stage 23X (and the first and second expansion / contraction mechanisms 138 and 140) further move in the + X direction and the second expansion / contraction mechanism 140 is fully contracted (the interval between the expansion / contraction mechanisms 138 and 140 is reduced). When approximately equal to the length of the cable 56 installed therebetween, the control device makes the speed of the second expansion / contraction mechanism 140 the same as the speed of the X coarse movement stage 23X. When the X coarse movement stage 23X reaches the + X side end of the movement range, the control device stops the X coarse movement stage 23X and the first and second expansion / contraction mechanisms 138 and 140 (see FIG. 13B). ). In this state, the cable 56 is substantially horizontal as shown in FIG.

  On the other hand, from the state in which the X coarse movement stage 23X is positioned at the + X side end of the movement range and the both expansion / contraction mechanisms 138 and 140 are fully contracted (see FIG. 13B), the X coarse movement stage 23X is changed to -X. When driving in the direction, the control device moves the first expansion / contraction mechanism 138 in the −X direction at the same speed as the X coarse movement stage 23X (however, do not extend the first expansion / contraction mechanism 138 in the + Z direction). ), While moving the second expansion / contraction mechanism 140 in the + X direction at a speed slower than the speed of the X coarse movement stage 23X (for example, 1/2 the speed of the X coarse movement stage 23X), 140 is gradually extended in the + Z direction.

  When the X coarse movement stage 23X and the expansion / contraction mechanisms 138 and 140 further move in the + X direction, the second expansion / contraction mechanism 140 extends in the + Z direction and reaches the −X side end of the movement range. The control device stops the second expansion / contraction mechanism 140 and makes the speed of the first expansion / contraction mechanism 138 slower than the speed of the X coarse movement stage 23X (for example, 1/2 of the speed of the X coarse movement stage 23X). At the same time, the first telescopic mechanism 138 is gradually extended in the + Z direction (see FIG. 13A). When the X coarse movement stage 23X and the first expansion / contraction mechanism 138 further move in the −X direction, the first expansion / contraction mechanism 138 extends in the + Z direction and reaches the −X side end of the movement range. At this time, the control device stops the first telescopic mechanism 138. Thereafter, when the X coarse movement stage 23X further moves in the −X direction and reaches the −X side end of the movement range, the control device stops the X coarse movement stage 23X.

  According to the cable guide device 700 of the present embodiment, the cable 56 is guided and bent in the Z-axis direction according to the position of the X coarse movement stage 23 </ b> X, thereby controlling the feeding amount of the cable 56 viewed from the fixing member 66. To do. Accordingly, although the cable 56 is in a state where it hangs down due to its own weight, its Z position is always controlled, so that there is a risk of sliding with other members (for example, the surface plate 12, the base frame 14 (see FIG. 2), etc.). Absent. Therefore, the cable 56 can be guided by following the X coarse movement stage 23X with low dust generation and low vibration.

  Further, before the first expansion / contraction mechanism 138 moves in the + X direction and reaches the lower side of the lens barrel base plate 31, the height of the upper end of the first expansion / contraction mechanism 138 is made lower than the projection optical system PL. Therefore, the first telescopic mechanism 138 can be reliably passed under the lens barrel base plate 31.

<< Eighth Embodiment >>
Next, a cable guide device according to an eighth embodiment will be described. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to seventh embodiments are attached to the components having the same configurations as those in the first to seventh embodiments, and the description thereof is omitted. Is omitted. FIG. 14A shows a side view of the cable guide device according to the eighth embodiment viewed from the + Y side. The substrate stage apparatus PST8 according to the eighth embodiment is different from the first embodiment in that it includes an XY stage 166 having both functions of the X coarse movement stage 23X and the Y coarse movement stage 23Y.

  The XY stage 166 is formed of a rectangular box-shaped member as viewed from the + Z direction. For example, the XY stage 166 is formed on the surface plate 12 in the X-axis direction and on the surface plate 12 by a flat motor as disclosed in US 2003/0085676. Driven in the Y-axis direction (and / or the θz direction).

  A cable guide device 800 according to the eighth embodiment includes a link mechanism 60 including four (four sections) links similar to those in the first embodiment. Of the four links, the bearing member 62 that pivotally supports the link (first link) closest to the XY stage 166 is rotatably supported by a shaft member 167 provided on the XY stage 166 and parallel to the Z axis. Has been. Of the four links, the bearing member 64 that pivotally supports the link (fourth link) closest to the fixing member 66 is rotatably supported by a shaft member 168 provided in the fixing member 66 and parallel to the Z axis. Has been.

  Further, an air bearing 172 which is a kind of non-contact bearing is fixed to the lower end of the support member 102. The air bearing 172 ejects high-pressure air onto the upper surface of the surface plate 12 to float the support member 102 on the surface plate 12 with a predetermined clearance (see FIGS. 14A to 14C). .

  Therefore, since the link mechanism 60 is rotatable about an axis parallel to the Z axis with respect to each of the XY stage 166 and the fixing member 66, the XY stage 166 is not only in the X axis direction but also in the Y axis direction. Even if it moves, it can follow the movement of the XY stage 166 and change its direction.

  When the number of cables 56 is large, as shown in FIG. 15, a plurality of cables 56 are connected to the XY stage 166 and the power supply device through different paths (four paths in FIG. 15). One link mechanism 60 may be provided for each cable 56. In the cable guide device 850 shown in FIG. 15, the link mechanisms 60 extend in the direction in which the diagonal line of the XY stage 166 extends (in an X shape in plan view).

<< Ninth embodiment >>
Next, a cable guide device according to a ninth embodiment will be described. For the sake of simplification of description and convenience of illustration, the same reference numerals as those of the first to eighth embodiments are given to those having the same configuration as those of the first to eighth embodiments, and the description thereof is omitted. Is omitted. FIG. 16A shows a plan view of the substrate stage apparatus PST9 according to the ninth embodiment viewed from the + Z side.

  The substrate stage apparatus PST9 has X linear guide members 904 extending in the X-axis direction on the + Y side and the −Y side on the surface plate 12, respectively. A Y linear guide member 906 extending in the Y-axis direction is installed on the pair of X linear guide members 904. The Y linear guide member 906 is installed so as to be movable in the X-axis direction with respect to the pair of X linear guide members 904, and is driven with a predetermined stroke in the X-axis direction by an X linear motor (not shown). In the substrate stage apparatus PST9, a substrate (not shown) is placed on the upper surface of a substrate table 902 made of a rectangular parallelepiped member. The substrate table 902 has a through hole (not shown) penetrating parallel to the Y axis on the side surface, and a Y linear guide member 906 is inserted into the through hole. The substrate table 902 is driven in the Y-axis direction along the Y linear guide member 906 by a Y linear motor (not shown).

  Further, the link mechanism 960 including a four-node link having a configuration in which the link mechanism 60 (see FIG. 2 and the like) of the first embodiment of the ninth embodiment is rotated by 90 ° around the X axis. A plurality of (for example, four). The four link mechanisms 960 extend in the direction in which the diagonal line of the substrate table 902 extends (in an X shape in plan view). That is, in the cable guide devices according to the first to eighth embodiments, the cable 56 is guided in the Z-axis direction at a plurality of intermediate portions according to the position of the stage device (in a W shape in a side view). On the other hand, in the cable guide device 900 of this embodiment, a plurality of intermediate portions of the cable 56 are guided in a direction parallel to the horizontal plane according to the position of the substrate table 902 (W-shaped in plan view). Bend to the shape).

  In the cable guide device 900, as in the eighth embodiment, the link mechanism 960 is supported by the substrate table 902 and the fixing member 66 so as to be relatively rotatable about an axis parallel to the Z axis. Yes. Accordingly, an example will be described with reference to FIGS. 16A and 16B. When the substrate table 902 is located at the center of the surface plate 12, as shown in FIG. The mechanism 960 extends radially (X-shape in plan view) around the substrate table 902. On the other hand, as shown in FIG. 16B, when the substrate table 902 is positioned in the −X side and + Y side regions on the surface plate 12, two links on the −X side of the surface plate 12 are linked. The links of the mechanisms 960 are closed and the overall length is shortened, and the two link mechanisms 960 on the + X side of the surface plate 12 are opened and the entire length is increased. Further, the two link mechanisms 960 on the −X side of the surface plate 12 rotate clockwise when viewed from the + Z direction, and the two link mechanisms 960 on the + X side of the surface plate 12 respectively rotate to the left when viewed from the + Z direction. Rotate around.

  In the cable guide device 900, in the four link mechanisms 960, for example, at the connection portion between the second link and the third link when viewed from the board table 902, the surface plate 12 is provided in the same manner as in the eighth embodiment. An air bearing (not shown) having a bearing surface opposite to is attached. Note that the air bearing may be attached to other places, for example, the link itself, or a plurality of air bearings may be attached to each link mechanism 960.

  Since the cable guide device 900 according to the ninth embodiment can deform the link mechanism 60 along a plane parallel to the XY plane, for example, a space for arranging the link mechanism 60 is related to the Z-axis direction. This is particularly effective when it is narrow (the height is limited).

<< Tenth Embodiment >>
Next, a tenth embodiment will be described with reference to FIGS. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to ninth embodiments are attached to the components having the same configurations as those in the first to ninth embodiments, and the description thereof is omitted. Is omitted. The substrate stage apparatus PSTb according to the tenth embodiment is substantially the same except for the substrate stage apparatus PST and the cable guide apparatus 100 (see FIG. 2) according to the first embodiment shown in FIG. That is, as shown in FIG. 19, the substrate stage apparatus PSTb is an X coarse movement stage that moves with a long stroke in the X-axis direction on a surface plate 12 and a pair of base frames 14 (one base frame 14 is not shown). Fine movement stage 21 mounted on 23X, X coarse movement stage 23X and arranged above Y coarse movement stage 23Y, Y coarse movement stage 23Y which constitutes a gantry-type XY two-axis stage device together with X coarse movement stage 23X, fine movement A weight canceling device 26 for canceling the weight of the stage 21 and the like, a cable guide device 100b, and the like are provided.

  The substrate stage device PSTb will be described in detail. As shown in FIG. 19, the base frame 14 includes a main body portion 14a made of a plate-like member parallel to the XZ plane extending in the X-axis direction, and both longitudinal end portions of the main body portion 14a. And two leg portions 14b that support the vicinity from below. A plurality of adjusters 14c are provided at the lower end portion of the leg portion 14b so that the Z position of the main body portion 14a can be adjusted. As can be seen from FIG. 20, stators 55, which are elements of the X linear motor, are fixed to both side surfaces of the main body portion 14 a. The stator 55 has a magnet unit including a plurality of permanent magnets arranged at predetermined intervals in the X-axis direction. Further, an X linear guide 52 that is an element of a mechanical uniaxial guide device is fixed to the upper end surface and both side surfaces (below the stator 55) of the main body portion 14a (in FIG. 19, in FIG. 19, the main body portion). The X linear guide 52 fixed to the side surface on the -Y side of 14a is not shown).

  As shown in FIG. 20, the X coarse movement stage 23X has a pair of Y beams 23Xa and a pair of connecting members 23Xb for connecting the vicinity of both ends of the pair of Y beams 23Xa. The part is formed. An X slider 54 (see FIGS. 19 and 21) is fixed to the lower surface of each of the pair of connecting members 23Xb.

  As shown in FIG. 21, the X slider 54 is formed of a member having an inverted U-shaped YZ cross section, and a movable element 59 that constitutes an X linear motor is fixed to each of a pair of opposing surfaces together with a stationary element 55. An X slider 58 that is slidably engaged with the X linear guide 52 is fixed to each of the pair of opposing surfaces of the X slider 54 and the ceiling surface. As shown in FIG. 20, a pair of Y linear guide members 28 are fixed to the upper surfaces of the pair of Y beams 23Xa. A Y stator 41 is fixed on the upper surface of each of the pair of Y beams 23 </ b> Xa and in a region between the pair of Y linear guide members 28. The Y stator 41 has a magnet unit including a plurality of permanent magnets arranged at predetermined intervals in the Y-axis direction.

  The Y coarse movement stage 23Y is composed of a plate-like member having a substantially square shape in plan view, and an opening is formed at the center thereof. As shown in FIG. 19, a pair of Y movers 42 facing the Y stator 41 with a predetermined clearance are fixed to the lower surface of the Y coarse movement stage 23Y. The Y mover 42 includes a coil unit (not shown), and constitutes a Y linear motor for driving the Y coarse movement stage 23Y with a predetermined stroke in the Y axis direction together with the Y stator 41 described above. A plurality of Y sliders 29 that are slidably engaged with the Y linear guide member 28 are fixed to the lower surface of the Y coarse movement stage 23Y. The Y coarse movement stage 23Y is restricted in relative movement in the X-axis direction with respect to the X coarse movement stage 23X by the action of the Y linear guide member 28 and the Y slider 29, and the X coarse movement stage 23X is integrated with the X axis. Move in the direction.

  The fine movement stage 21 is composed of a plate-like (or box-shaped) member having a substantially square shape in plan view, and a substrate P (not shown in FIG. 19; see FIG. 1) is sucked onto the upper surface of the fine movement stage 21 via a substrate holder PH, for example. Adsorption is held by electrostatic adsorption).

  The fine movement stage 21 includes a plurality of voice coil motors (or linear motors, not shown in FIG. 21) including a stator fixed to the Y coarse movement stage 23Y and a movable element fixed to the fine movement stage 21. The drive system slightly drives the Y coarse movement stage 23Y in the three degrees of freedom direction (X axis, Y axis, θz direction). As the plurality of voice coil motors, there are a plurality of X voice coil motors 20X that finely drive the fine movement stage 21 in the X-axis direction, and a plurality of Y voice coil motors (not shown) that finely drive the fine movement stage 21 in the Y-axis direction. Including. In FIG. 19, a plurality of X voice coil motors 20X overlap in the depth direction of the drawing. The fine movement stage 21 is synchronously driven (driven at the same speed in the same direction as the Y coarse movement stage 23Y) by using the X voice coil motor 20X and / or the Y voice coil motor. It moves with a predetermined stroke in the X-axis direction and / or the Y-axis direction together with the Y coarse movement stage 23Y (induced to the Y coarse movement stage 23Y). The fine movement stage drive system has a plurality of Z voice coil motors (not shown) for finely driving the fine movement stage 21 in the three degrees of freedom in the θx, θy, and Z-axis directions. The plurality of Z voice coil motors are disposed at locations corresponding to the four corners of fine movement stage 21, for example. The configuration of the fine movement stage drive system including a plurality of voice coil motors is disclosed in, for example, US Patent Application Publication No. 2010/0018950.

  The positional information (including the amount of rotation in the θz direction) of fine movement stage 21 in the XY plane includes X moving mirror 22X fixed to fine movement stage 21 via mirror base 24X, and fine movement stage 21 via mirror base 24Y. It is obtained by a laser interferometer system using a fixed Y moving mirror 22Y (see FIG. 21). Further, positional information regarding the θx and θy of the fine movement stage 21 and the Z-axis direction is obtained by placing the arm member 44 on the casing 26a of the weight cancellation device 26 described later by a plurality of Z sensors 43 fixed to the lower surface of the fine movement stage 21. It is calculated | required using the target 45 fixed via. For example, the Z sensors 43 are arranged at least at three locations that are not on the same straight line. The configuration of the position measurement system of the fine movement stage 21 is disclosed in, for example, US Patent Application Publication No. 2010/0018950.

  As shown in FIG. 19, the weight cancellation device 26 is inserted into the opening of the Y coarse movement stage 23Y and the opening of the X coarse movement stage 23X. The weight cancellation device 26 includes a housing 26a, an air spring 26b, a Z slider 26d mounted on the air spring 26b via a plate 26c, and the like. The casing 26a is formed of a bottomed cylindrical member that opens to the + Z side. A plurality of air bearings (hereinafter referred to as base pads) 26e whose bearing surfaces oppose the upper surface of the surface plate 12 are attached to the lower surface of the housing 26a. The air spring 26b is accommodated in the housing 26a. Pressurized gas is supplied to the air spring 26b from the outside via a cable guide device 100b described later. The Z slider 26d is made of a cylindrical member that extends in the Z-axis direction, and is movable relative to the housing 26a in the Z-axis direction. An air bearing (not shown) having a bearing surface facing the + Z side is attached to the + Z side end of the Z slider 26d. Pressurized gas is supplied from the outside to the air bearings (not shown) attached to the + Z side ends of the base pad 26e and the Z slider 26d via a cable guide device 100b described later. A part of the plate 26c protrudes outside the casing 26a through an opening formed in the casing 26a. A plurality of stoppers 26f that are in contact with the plate 26c and define a movable range in the Z-axis direction of the plate 26c are fixed to the outer peripheral surface of the housing 26a.

  The weight canceling device 26 cancels (cancels) the weight of the system (the downward force in the gravity direction) of the system including the fine movement stage 21 via the Z slider 26d and the leveling device 27 by the upward force in the gravity direction generated by the air spring 26b. Thus, the load on the plurality of voice coil motors constituting the fine movement stage drive system described above is reduced.

  The weight cancellation device 26 is mechanically connected to the Y coarse movement stage 23Y via a plurality of coupling devices 25. The Z positions of the plurality of coupling devices 25 substantially coincide with the center of gravity position of the weight cancellation device 26 in the Z-axis direction. The coupling device 25 includes a thin steel plate having a thickness parallel to the XY plane, and is also referred to as a flexure device. The connecting device 25 connects the housing 26a of the weight canceling device 26 and the Y coarse movement stage 23Y on the + X side, -X side, + Y side, and -Y side of the weight canceling device 26 (in FIG. 19, -Y side coupling device 25 is not shown). Therefore, the weight cancellation device 26 is pulled by the Y coarse movement stage 23Y via any of the plurality of coupling devices 25, so that the Y coarse movement stage 23Y and the Y axis direction are integrated with the Y coarse movement stage 23Y. Move in the direction. At this time, a traction force acts on the weight cancellation device 26 in a plane parallel to the XY plane including the position of the center of gravity in the Z-axis direction, so that a moment around the axis perpendicular to the movement direction (pitching moment) does not act.

  The leveling device 27 supports the fine movement stage 21 so as to be tiltable (swingable in the θx and θy directions with respect to the XY plane). The leveling device 27 includes a base member 27a supported in a non-contact manner from below by the air bearing attached to the + Z side end of the Z slider 26d, and a recess formed in the upper surface of the base member 27a. And a spherical air bearing 27b into which the upper part is inserted into a recess formed in the lower surface of the stage 21. As an apparatus for supporting fine movement stage 21 so as to be swingable with respect to the XY plane, a pseudo spherical bearing using a plurality of air bearings as disclosed in, for example, US Patent Application Publication No. 2010/0018950. A device may be used, and an elastic hinge device may be used. The detailed configuration of the weight cancellation device 26, the coupling device 25, and the leveling device 27 is disclosed in, for example, US Patent Application Publication No. 2010/0018950.

  The fine movement stage 21 is fixed to the fine movement stage side stopper block 46a fixed to the lower surface of the fine movement stage 21 and the upper surface of the Y coarse movement stage 23Y, and the upper end thereof is predetermined to the lower end of the fine movement stage side stopper block 46a. A movable amount in the −Z direction with respect to the Y coarse movement stage 23Y is defined by the Z stopper device 46 including the Y coarse movement stage side stopper block 46b opposed to each other through the clearance. The fine movement stage 21 descends in the −Z direction when the supply of pressurized gas to the air spring 26 b is stopped, for example, during maintenance of the weight cancellation device 26, and is moved onto the Y coarse movement stage 23 Y by the action of the Z stopper device 46. Mounted in contact. The Z stopper device 46 is arranged at, for example, three places that are not on the same straight line.

  In the cable guide device 100b, an air bearing 48 is attached to the support member 102 in the same manner as in the eighth embodiment (see FIGS. 14A to 14C). Here, in the cable guide device 100b according to the tenth embodiment, as shown in FIG. 21, the support member 102 includes a base 51 made of a plate-like member extending in the Y-axis direction, and both ends of the upper surface of the base 51. And a bearing member 53 fixed in the vicinity of the portion. The air bearing 48 is attached in the vicinity of both ends in the longitudinal direction of the lower surface of the base 51. The air bearing 48 is attached to the pad member 48a for ejecting pressurized gas to the upper surface of the surface plate 12, and the pad member 48a is attached to the lower surface of the base 51 so as to be swingable at a slight angle in the θy direction and the θx direction. Ball joint 48b. In FIG. 21, from the viewpoint of avoiding complications of the drawing, illustration of the cable 56 and the members arranged on the −X side of the support member 102 in the cable guide device 100 b is omitted. In the cable guide device 100b according to the tenth embodiment, since the plurality of links 68 to 74 are arranged on the surface plate 12, the cable guide as disclosed in, for example, US Patent Application Publication No. 2003/0000198 is disclosed. Compared with the case where the apparatus is arranged on both sides of the surface plate 12, the substrate stage base 33 (see FIG. 21) can be shortened (the body BD can be narrowed), and the rigidity thereof can be improved.

  In the first embodiment, when the X coarse movement stage 23X moves in the direction away from the fixed member 66 (+ X direction), the link pair including the first link 68 and the second link 70 is The third link opens when the X coarse movement stage 23X moves in the direction approaching the fixed member 66 (the -X direction), and opens before the link pair including the third link 72 and the fourth link 74. A plurality of tension springs 104-118 are used to close the link pair consisting of 72 and the fourth link 74 before the link pair consisting of the first link 68 and the second link 70. However, the cable guide device 100b of the tenth embodiment is configured such that the plurality of links 68 to 74 operate using the weight W as described above.

  Specifically, as shown in FIG. 20, one end of the rope 36 is connected to the vicinity of both ends of the side surface on the −X side of the base 51 of the support member 102. As shown in FIG. 19, the other end of the rope 36 is connected to a fixing member 66. An intermediate portion of the rope 36 is wound around a fixed pulley 37 attached to the fixing member 66 at one end side, and is wound around a moving pulley 38 attached to the weight W at the other end side. The movable pulley 38 and the weight W are movable in the Z-axis direction via a Z linear guide device 39 including a Z linear guide 39a fixed to the fixing member 66 and a Z slider 39b fixed to the weight W (moving up and down) Possible).

  In the cable guide device 100b, when the X coarse movement stage 23X is positioned at the −X side end of the movement range, the weight W is positioned at the −Z side end of the movement range. When the X coarse movement stage 23X moves to the + X side, the link pair formed by the first link 68 and the second link 70 is pulled by the X coarse movement stage 23X. At this time, a load in the −X direction due to the weight W acts on the support member 102 disposed between the second link 70 and the third link 72. Therefore, the link pair consisting of the first link 68 and the second link 70 is operated more reliably so that it opens before the link pair consisting of the third link 72 and the fourth link 74. Can do.

  On the other hand, when the X coarse movement stage 23X moves to the −X side from the position located at the + X side end of the movement range, the load in the −X direction due to the weight W acting on the support member 102 causes the first The link pair composed of the third link 72 and the fourth link 74 can be operated more reliably so as to be closed before the link pair composed of the first link 68 and the second link 70.

<< Eleventh Embodiment >>
Next, an eleventh embodiment will be described with reference to FIGS. For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to tenth embodiments are attached to the components having the same configurations as those in the first to tenth embodiments, and the description thereof is omitted. Is omitted. The substrate stage apparatus PSTc according to the eleventh embodiment is substantially the same as the substrate stage apparatus PSTb (see FIGS. 19 to 21) according to the tenth embodiment except for the cable guide apparatus 100c. Only the cable guide device 100c will be described. In FIG. 24, from the viewpoint of avoiding complications in the drawing, the illustration of the cable 56 and the members disposed on the −X side of the support member 102c in the cable guide device 100c is omitted.

  In the cable guide device 100b (see FIGS. 19 to 21) of the tenth embodiment, the support member 102 is levitated and supported on the surface plate 12 by the two air bearings 48, whereas the eleventh embodiment. In the cable guide device 100c according to FIG. 24, as shown in FIG. 24, the base 51c of the support member 102c is set to have a longer dimension in the longitudinal direction than the tenth embodiment. X sliders 58 are fixed via spacers 58a in the vicinity of both longitudinal ends of the lower surface of the base 51c. The X slider 58 includes a member having an inverted U-shaped YZ cross section, and is slidably engaged with the X linear guide 52 fixed to the upper surface of the main body 14a of the base frame 14 with low friction. In the eleventh embodiment, the support member 102c moves on the pair of base frames 14 without contact with the surface plate 12, so that the support member 102c is reliably guided straight in the X-axis direction. The configuration and operation of the device (including the weight W, the fixed pulley 37, the movable pulley 38, etc.) that applies a load in the −X direction to the support member 102c are the same as those in the tenth embodiment, so the description thereof will be given. Omitted. The cable guide device 100b according to the eleventh embodiment is simpler and more economical than the tenth embodiment because it does not require an air bearing and air bearing piping. Further, since the support member 102c moves on the pair of base frames 14, there is no fear that vibrations generated by the cable guide device 100b are transmitted to the surface plate 12, and the substrate P can be positioned with high accuracy.

<< Twelfth Embodiment >>
Next, a twelfth embodiment will be described based on FIGS. 25 (A) to 25 (C). For the sake of simplification of description and convenience of illustration, the same reference numerals as those in the first to eleventh embodiments are attached to the components having the same configurations as those in the first to eleventh embodiments, and the description thereof is omitted. Is omitted.

  In the cable guide device 100d, a load is applied to the support member 102c in the −X direction by the weight W as in the eleventh embodiment. In the twelfth embodiment, the load device including the weight W, the movable pulley 38, and the fixed pulley 37 has the same function as that of the eleventh embodiment except that the arrangement thereof is different. The same reference numerals as those of the embodiment are given and the description is omitted. The support member 102c is configured to be linearly guided in the X-axis direction on the X linear guide 52, but is levitated and supported on the surface plate via the air bearing as in the tenth embodiment. Also good. Further, the X linear guide 52 may not be fixed to the base frame 14 (see FIG. 24).

  The first movable pulley 16 is connected to the support member 102c via a connection member 102d and a rope 16a. One end of the rope 17 wound around the first movable pulley 16 is connected to an X slide member 18 described later. The other end of the rope 17 is connected to the second movable pulley 19. One end of the rope 15 wound around the second movable pulley 19 is connected to an X slide member 18 described later. The other end of the rope 15 is connected to the X coarse movement stage 23X. An X slider 94 that is slidably engaged with a fixed X linear guide 95 is attached to the X slide member 18 and is movable with a predetermined stroke in the X axis direction. Further, a stopper 97 that restricts the movement of the X slider 94 is disposed near the −X side end of the X linear guide 95. Note that, from the viewpoint of avoiding the complication of the drawings, the illustration of the cable 56 and the like guided by the cable guide device 100d is omitted in FIGS. 25 (B) and 25 (C).

  In the cable guide device 100d, as shown in FIG. 25 (B), when the X coarse movement stage 23X moves in the + X direction from the position located at the −X side end of the movement range, it is pulled by the rope 15 and is The two-moving pulley 19 moves in the + X direction at approximately half the speed of the X coarse movement stage 23X (ie, almost half the movement amount of the X coarse movement stage 23X). Further, when the second moving pulley 19 moves in the + X direction, the first moving pulley 16 is pulled by the rope 17 so that the first moving pulley 16 is approximately half the speed of the second moving pulley 19, that is, 1 / X of the X coarse movement stage 23X. It moves in the + X direction at a speed of 4 (almost ¼ of the movement amount of the X coarse movement stage 23X). As a result, the link pair composed of the first link 68 and the second link 70 opens prior to the link pair composed of the third link 72 and the fourth link 74 (however, the third link 72 And the fourth link 74 is also slightly opened). Therefore, when the X coarse movement stage 23 </ b> X moves in the direction away from the fixed member 66 (−X direction) through the plurality of links 68 to 74, the link pair composed of the first link 68 and the second link 70 is formed. It can be reliably operated to open before the link pair composed of the third link 72 and the fourth link 74.

  Further, the X slide member 18 is positioned and disposed at a position where it abuts the X coarse movement stage 23X when the opening angle of the link pair composed of the first link 68 and the second link 70 reaches a desired amount. ing. Therefore, after the opening angle of the link pair including the first link 68 and the second link 70 reaches a desired amount, the X slide member 18 is pressed against the X coarse movement stage 23X, and the X coarse movement stage 23X. And move in the + X direction. As a result, the X coarse movement stage 23X and the support member 102 move in the + X direction almost integrally. As described above, since the support member 102c is directly driven in the + X direction, the driving force is transmitted to the support member 102c more reliably than the case where the support member 102c is driven via the first link 68 and the second link 70. There is no possibility that 68-74 and support member 102c become vibration. Accordingly, the links 68 to 74 can be operated at high speed and the support member 102c can be moved at high speed. In addition, when the X coarse movement stage 23X shown in FIG. 25C moves in the −X direction from the position located at the + X side end of the movement range, the weight W (and a plurality of tension springs (not shown)). ) Causes the X coarse movement stage 23X and the support member 102 to move in the -X direction almost synchronously. As a result, the link pair composed of the third link 72 and the fourth link 74 is closed before the link pair composed of the first link 68 and the second link 70.

  The configurations of the cable guide devices according to the first to twelfth embodiments are merely examples, and the present invention is not limited thereto. For example, in each of the first to twelfth embodiments, as an example of the force transmission member, the cable 56 that supplies power from the power supply device to the moving body such as the X coarse movement stage 23X is the guide object. In addition to or in addition to this, for example, a tube (or hose) for transmitting a fluid such as a gas or a refrigerant between the moving body and the external device, a signal between the moving body and the external device A communication cable or the like for performing transmission / reception may be used as the guide object. In this case, the external device includes, for example, a communication device such as a control device, a cooling device, a vacuum device that generates a vacuum suction force for sucking and holding the substrate, and the like.

  In each of the first to fourth, sixth, eighth to twelfth embodiments, the number of links of the link mechanism is four sections. However, the number of links is not limited to this, and the number of links is appropriately increased or decreased. Also good. And you may increase / decrease the number of the supporting members which support the connection part of an adjacent link according to this. When the number of links is reduced (for example, when there are two or three links), only one portion of the cable 56 may be fixed to one link. In this case, the link mechanism is placed on a horizontal plane. It is also possible to adopt a configuration in which no support member is supported by the above. In the third embodiment, when the link and the support member are added, the mover of the X linear motor that moves the added support member may be added together.

  In each of the first to twelfth embodiments, the axis of each link of the link mechanism is provided in parallel to the Y axis or the Z axis, but the axis direction of the axis connecting the links is Not limited. In short, it is only necessary that the link mechanism can be guided in synchronization with the moving body, and the axial direction of the shaft connecting the links may be parallel to a direction inclined to the horizontal plane, for example.

  In the cable guide device of each embodiment except the second embodiment, the predetermined portion of the cable 56 is fixed to the outer peripheral surface of the roller made of a cylindrical member, but the member to which the cable 56 is fixed. Since it is only necessary to rotate (oscillate) around a rotation axis in a predetermined angle, θy direction or θz direction (it is only necessary to relieve the tension acting on the cable), a member having a shape other than the cylindrical shape may be used.

  Further, when the link does not expand and contract as in the second embodiment, a tension spring may be directly stretched between adjacent links. For example, in the link mechanism 248 shown in FIG. 17, a tension spring 119 is bridged between the second link 206 and the third link 252, and the second link 206 and the third link 252 are Is energized in the closing direction. Further, the tension spring 118 is also bridged over the fourth link 210 and the bearing member 64 (no spring is bridged over the first link 250). In FIG. 17, the illustration of the cable 56 and the like is omitted. Even in the link mechanism 248 of the present modification, the same action and effect as in the second embodiment can be obtained by making the tension force by the tension spring 118 larger than the tension force by the tension spring 119.

  In the link mechanism 60 of the first embodiment (see FIG. 4), when the X coarse movement stage 23X moves in the −X direction due to the difference in tensile force between the plurality of tension springs 104 to 118, the third mechanism The link pair consisting of the fourth and second links 72 and 74 is configured to be closed prior to the link pair consisting of the first and second links 68 and 70. You may make it operate. FIG. 18A shows a cable guide device 100a according to a modification of the first embodiment. In the cable guide device 100a, one end of the wire rope 150 is connected to the end portion of the support member 102 on the −X side. The wire rope 150 extends in the −X direction from the end portion on the −X side of the support member 102, and an intermediate portion in the longitudinal direction is bent to the + X side by being wound around a pulley 152 whose position is fixed. The end is connected to a fixing member 154 provided on the + X side of the X linear guide member 103 via a tension spring 156 (a tension coil spring). As shown in FIG. 18B, the X coarse movement stage 23X has the first and second links 68, 68 before the opening angle between the second link 70 and the third link 72 reaches 90 °. After pulling only 70 and the opening angle between the second link 70 and the third link 72 reaches 90 °, as shown in FIG. 18C, the tensile spring 156 resists the pulling force. By pulling the support member 102 with the wire rope 150, the third and fourth links 72 and 74 are opened. When the X coarse movement stage 23X moves in the −X direction from the position shown in FIG. 18C (position on the + X side of the movement range), the support member 102 is moved to the wire rope 150 by the action of the tension spring 156. As a result, the link pair including the third and fourth links 72 and 74 is closed prior to the link pair including the first and second links 68 and 70. The tension spring 156 only needs to be able to urge the support member 102 in the −X direction, and may be bridged between the fixing member 66 and the support member 102 without using the wire rope 150 and the pulley 152, for example.

  In each of the first to seventh embodiments, the guide member that guides the support member that supports the link connecting portion is a straight (uniaxial) guide member, but is not limited thereto, and is a curved guide member. Also good. In the first to sixth, eighth, and ninth embodiments, the lengths of the links that constitute the link mechanism may not be the same. For example, in the first embodiment, the lengths of the third and fourth links 72 and 74 may be longer or shorter than the lengths of the first and second links 68 and 70, respectively. . Further, in each of the first to sixth, eighth, and ninth embodiments, the plurality of links are urged in a predetermined direction by the tension spring, but the members that urge the links are not limited thereto. For example, you may provide a torsion spring (torsion spring) in the bearing part which pivotally supports a link.

  In the first, third, fourth, fifth, sixth, eighth to twelfth embodiments, the first to fourth links 68, 70, 72, and 74 are formed of three members. However, the present invention is not limited to this, and for example, each link may be configured by two or four or more members so that the link can be expanded and contracted in the longitudinal direction.

  In each of the third, fourth, fifth, sixth, eighth to twelfth embodiments, the link mechanism may be configured in the same manner as in the second embodiment.

  In the third embodiment, after the X coarse movement stage 23X is positioned at the −X side end of the movement range and starts moving in the + X direction, a pair of link pairs on the substrate stage side (the first link) The link mechanism is controlled so that the next link pair is opened after the pair is fully opened (when the opening angle reaches 150 °). However, the present invention is not limited to this, and the opening angle of the first link pair is, for example, , 90 °, 105 °, 120 °, 135 °, etc., the support member 102 may be moved in the + X direction so that the next link pair starts to open. In this case, if the speed of the support member 102 is made slower than the speed of the X coarse movement stage 23X, the next link pair can be opened while opening the first link pair.

  Moreover, in the said 7th Embodiment, although each expansion-contraction part is comprised by the some link, if it is an apparatus with which the dimension of the length direction, such as an air cylinder, changes, for example, as an expansion-contraction part Can be used.

  Moreover, in the said 7th Embodiment, although both the 1st and 2nd expansion-contraction mechanisms 138 and 140 can be expanded-contracted in a Z-axis direction, at least one of these is parallel to a XZ plane, for example, and Z It is good also as expansion-contraction in the direction which made the angle with respect to the axis | shaft.

  In each of the first to seventh and tenth to twelfth embodiments, the cable 56 and the cable guide device that guides the cable 56 are provided only in the X coarse movement stage 23X. Alternatively, in addition to this, a cable and a cable guide device for guiding the cable may be provided on the Y coarse movement stage 23Y.

  Further, in each of the first to twelfth embodiments, the moving body to which the cable is connected moves in one axis or two axes along the XY two-dimensional plane. Not limited to this, the XY two-dimensional plane and the one that can move with a long stroke in the direction intersecting the XY two-dimensional plane (for example, the Z-axis direction) may be used.

  The utility force transmission member guide device according to the present invention is used to guide a movable body other than the substrate stage device that holds the substrate, for example, a cable (not shown) connected to the mask stage MST shown in FIG. May be.

  In each of the tenth to twelfth embodiments, the weight W is used to apply a load in the −X direction to the support member 102. However, a load in the −X direction can be applied to the support member 102. If possible, for example, a tension spring having a small spring constant (for example, a Conston spring (registered trademark)) may be used.

  In each of the first to twelfth embodiments (except for the seventh embodiment), a mechanical stopper 80 (see FIG. 2) is used as a device that defines the maximum opening angle of adjacent links. However, instead of this, for example, a four-bar link mechanism as shown in FIG. 26 may be used. In FIG. 26, as an example, an opening preventing device 80a that defines an opening angle between the first link 68 and the bearing member 62 is shown. In the locking device 80a, the slide portion 82a of the first link 68 is supported by the bearing member 62 via the shaft member 93. A disc crank 998 is supported on the bearing member 62 via a shaft member 999. One end of a connecting plate 996 is supported on the disc crank 998 via a shaft member 997, and the other end of the connecting plate 996 is supported on the slide portion 82 a of the first link 68 via a shaft member 995. Yes. The disc crank 998 is inserted between a pair of opposed surfaces of a bracket 994 made of a member having an inverted U-shaped YZ section fixed to the X coarse movement stage 23X. A plurality of magnets 993 are respectively fixed to the disc crank 998 on the pair of opposing surfaces of the bracket 994 via a predetermined clearance. The disc crank 998 and the plurality of magnets 993 constitute an eddy current brake device, and generate an eddy current in the disc crank 998, thereby generating a braking force in the first link 68. In this case, the possibility of impact is less than that of the mechanical stopper 80 (stopper).

The illumination light used in the exposure apparatus is ultraviolet light such as ArF excimer laser light (wavelength 193 nm) and KrF excimer laser light (wavelength 248 nm), and vacuum ultraviolet light such as F ₂ laser light (wavelength 157 nm). May be. As the illumination light, for example, a single wavelength laser beam oscillated from a DFB semiconductor laser or a fiber laser is amplified by a fiber amplifier doped with, for example, erbium (or both erbium and ytterbium). In addition, harmonics converted into ultraviolet light using a nonlinear optical crystal may be used. A solid laser (wavelength: 355 nm, 266 nm) or the like may be used.

  In each of the first to twelfth embodiments, the case where the projection optical system PL is a multi-lens projection optical system including a plurality of optical systems has been described. Not limited to this, it may be one or more. The projection optical system is not limited to a multi-lens projection optical system, and may be a projection optical system using an Offner type large mirror.

  In each of the first to twelfth embodiments, the case where the projection optical system PL has a projection magnification of the same magnification has been described. However, the present invention is not limited to this, and the projection optical system includes an enlargement system and a reduction system. Either is fine.

  Further, the power transmission member guide device of the present invention can be applied to devices other than the exposure device, for example, an element manufacturing device provided with an ink jet type functional liquid application device. Further, the substrate processing apparatus having the utility force transmitting member guide apparatus of the present invention is not limited to the exposure apparatus, and may be a substrate inspection apparatus used for inspecting a substrate that is an exposure target of the exposure apparatus, for example.

  In each of the first to twelfth embodiments, the case where the present invention is applied to an exposure apparatus that involves a step-and-scan operation has been described. The present invention can also be applied to a repeat type exposure apparatus (so-called stepper) or a step-and-stitch type exposure apparatus. The present invention can also be applied to a proximity type exposure apparatus that does not use a projection optical system.

  Further, the use of the exposure apparatus is not limited to an exposure apparatus for liquid crystal that transfers a liquid crystal display element pattern onto a square glass plate. For example, an exposure apparatus for manufacturing a semiconductor, a thin film magnetic head, a micromachine, a DNA chip, etc. The present invention can also be widely applied to an exposure apparatus for manufacturing. Moreover, in order to manufacture not only microdevices such as semiconductor elements but also masks or reticles used in optical exposure apparatuses, EUV exposure apparatuses, X-ray exposure apparatuses, electron beam exposure apparatuses, etc., glass substrates, silicon wafers, etc. The present invention can also be applied to an exposure apparatus that transfers a circuit pattern. The object to be exposed is not limited to the glass plate, and may be another object such as a wafer, a ceramic substrate, a film member, or mask blanks.

  As described above, the power transmission guide device of the present invention is suitable for guiding a power transmission member that transmits power between a moving body and an external device along a predetermined two-dimensional plane. The substrate processing apparatus of the present invention is suitable for performing a predetermined process on a substrate.

  DESCRIPTION OF SYMBOLS 10 ... Liquid crystal exposure apparatus, 23X ... X coarse movement stage, 56 ... Cable, 60 ... Link mechanism, 62 ... Bearing member, 64 ... Bearing member, 66 ... Fixed member, 68 ... 1st link, 70 ... 2nd link 72 ... third link, 74 ... fourth link, 90 ... roller, 100 ... cable guide device, 102 ... support member, P ... substrate, PST ... substrate stage device.

Claims (30)

Flexible power transmission that forms a transmission path for power to be transmitted between a moving body that moves along a two-dimensional plane within a plane parallel to the two-dimensional plane and an external device A fixing part to which a part of the member is fixed;
When one or more portions of the intermediate region between the portion fixed to the fixing portion of the force transmission member and the portion connected to the moving body are held, and the moving body moves the holding portion And a guide part that guides in the direction intersecting the two-dimensional plane while guiding in the same direction as the moving direction of the moving body. The guide portion includes a plurality of links connected in series, and a link mechanism in which the link on one end side is connected to the moving body and the link on the other end side is connected to the fixed portion. Including
2. The power transmission member guide device according to claim 1, wherein the power transmission member is held by the link mechanism along each of the plurality of links, and is deformed along with the deformation of the link mechanism. Of the plurality of links, at least one of the connecting portions of a pair of adjacent links is provided with a rotating body,
The power transmission member guide device according to claim 2, wherein the power transmission member is fixed to the rotating body. The pair of links are connected by a shaft member,
The rotating body is a roller that is rotatable around an axis of the shaft member,
The power transmission member guide device according to claim 3, wherein the power transmission member is fixed to an outer peripheral surface of the roller.   The power transmission member guide device according to claim 4, wherein at least one of the pair of links connected by the connecting portion provided with the roller is extendable and contractible in a longitudinal direction of the link. The extendable link is provided in a first component member including one end in the longitudinal direction of the link, a second component member including the other end in the longitudinal direction, and an intermediate portion in the longitudinal direction, A third component that is relatively movable in the longitudinal direction with respect to each of the first and second components;
The power transmission member guide device according to claim 5, wherein a predetermined portion of the power transmission member is fixed to the third component member.   At least one of the pair of adjacent links among the plurality of links is provided with a holding member that is movable along a longitudinal direction of the link and that holds a predetermined portion of the force transmission member. 3. The power transmission member guide device according to 2.   The link angle formed by a pair of adjacent links among the plurality of links is provided with an opening angle limiter that limits the maximum opening angle to a predetermined angle of less than 180 °. The use force transmission member guide device according to the item.   The force transmission member guide device according to claim 8, wherein the angle limiting unit includes an eddy current brake device that applies a braking force to a link pair including the pair of adjacent links without contact. The link mechanism has at least three links;
A link pair comprising a pair of adjacent links opens when the moving body moves away from the fixed portion, starting from the one closest to the moving body, and when the moving body moves in a direction approaching the fixed portion The force transmission member guide device according to any one of claims 2 to 9, wherein the guide member is closed in order from a distance from the moving body. The link mechanism has a setting member that sets the opening / closing degree of at least two of the link pairs;
The power transmission member guide device according to claim 10, wherein the setting member is set such that the degree of opening and closing of the link pair is easier to open and harder to close as the link member closer to the moving body is provided. Each of the setting members is an elastic member that biases the link pair in a closing direction,
The force transmission member guide device according to claim 11, wherein the elastic member has a smaller elastic force as it is provided closer to the moving body in the link pair. The guide portion includes a support member that supports any one of the connecting portions of the adjacent links and is movable in parallel to the predetermined two-dimensional plane, and a drive device that moves the support member. ,
The power transmission member guide device according to claim 10, wherein the driving device moves the support member when a distance between the movable body and the support member reaches a predetermined distance. The guide portion includes a support member that supports any one of the connecting portions of the adjacent links and is movable in parallel to the predetermined two-dimensional plane, and a drive device that moves the support member. ,
The power transmission member guide according to claim 10, wherein the driving device drives the support member at a speed slower than ½ of the speed of the moving body when the moving body moves in a direction away from the fixed portion. apparatus. The guide portion includes a support member that supports any one of the connecting portions of the adjacent links and is movable in parallel to the predetermined two-dimensional plane, and a drive device that moves the support member. ,
The driving device drives the support member at a speed faster than a half of the speed of the moving body and slower than the speed of the moving body when the moving body moves in a direction approaching the fixed portion. The power transmission member guide device according to claim 10.   The utility transmission member guide device according to any one of claims 13 to 15, wherein the driving device generates a driving force that drives the support member by using a part of the moving body driving device that moves the moving body. . The drive device includes a first moving pulley to be pulled by the moving body, and a second moving pulley to be pulled by the first moving pulley provided on the support member,
The power transmission member guide device according to claim 14, wherein the first and second movable pulleys move integrally with the moving body in a state where the link pair close to the moving body has a predetermined opening angle. .   The guide portion supports any one of the connecting portions of the adjacent links and is movable in parallel to the predetermined two-dimensional plane, and the support member is moved in a direction approaching the fixing member. The force transmission member guide device according to claim 10, further comprising a biasing member that biases.   The force transmission member guide device according to claim 18, wherein the biasing device includes a spring or a weight. The guide unit includes a support member that supports any one of the connecting portions of the adjacent links and is movable in parallel to the predetermined two-dimensional plane.
The power transmission member guide device according to any one of claims 2 to 12, wherein the support member moves following the movement of the movable body.   The link mechanism is configured such that the link on the one end side is connected to the movable body so as to be rotatable about an axis perpendicular to the two-dimensional plane, and the link on the other end side is connected to the fixed portion with respect to the two-dimensional plane. The force transmission member guide device according to any one of claims 2 to 20, wherein the guide member is rotatably connected around an axis perpendicular to the guide line. The guide part supports an elastic part that can be expanded and contracted in a direction intersecting the moving direction of the moving body, and a support member that supports one end of the elastic part in the expansion and contraction direction and is movable in parallel to the predetermined two-dimensional plane. And comprising
The power transmission member guide device according to claim 1, wherein a predetermined portion of the power transmission member is fixed to the other end of the expansion / contraction portion in the expansion / contraction direction. The guide part has a rotating body at the other end in the extension / contraction direction of the extension / contraction part,
The use force transmission member guide device according to claim 22, wherein a predetermined portion of the use force transmission member is fixed to the rotating body.   A plurality of the extendable portions are provided between the movable body and the fixed portion so that the distance from the movable body is different. When the movable body moves away from the fixed member, the movable portion is close to the movable body. 24. The force transmission member guide device according to claim 22 or 23, wherein the force transmission member guide device contracts in order from a thing and extends in order from a thing far from the moving body when the moving body moves in a direction away from the fixed member. The guide unit has a driving device that independently drives each of the plurality of extendable parts in a direction parallel to the two-dimensional plane,
25. The force transmission member guide according to claim 24, wherein the driving device generates a driving force for driving the support member of each of the plurality of expansion / contraction portions using a part of the moving body driving device that moves the moving body. apparatus. The moving body driving device includes a first motor having a first mover provided on the moving body and a stator arranged in parallel to the predetermined two-dimensional plane,
The force transmission member guide device according to claim 16 or 25, wherein the driving device is a second motor having the stator and a second movable member provided on the support member.   27. The utility force transmission member guide device according to any one of claims 13 to 26, wherein the support member is guided along the two-dimensional plane by a moving body guide that guides the movement of the moving body. A plurality of the force transmission members are connected to the moving body and the external device through different paths,
28. The power transmission member guide device according to any one of claims 1 to 27, wherein a plurality of the guide portions are provided corresponding to the plurality of power transmission members. The force transmission member guide device according to any one of claims 1 to 28, wherein the moving body is a stage on which a substrate is placed.
A substrate processing unit for processing the substrate;
The substrate processing unit is a substrate processing apparatus positioned above the moving range of the stage. A weight canceling device for canceling the weight of the stage on a surface plate having a guide surface parallel to the two-dimensional plane;
30. The substrate processing apparatus according to claim 29, wherein the use force transmission member guide device is disposed above the guide surface.

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