JP2022048479A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2022048479A5 JP2022048479A5 JP2020154315A JP2020154315A JP2022048479A5 JP 2022048479 A5 JP2022048479 A5 JP 2022048479A5 JP 2020154315 A JP2020154315 A JP 2020154315A JP 2020154315 A JP2020154315 A JP 2020154315A JP 2022048479 A5 JP2022048479 A5 JP 2022048479A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum chamber
- intake port
- opening
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000002098 selective ion monitoring Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000002552 multiple reaction monitoring Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 238000002540 product ion scan Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004885 tandem mass spectrometry Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020154315A JP7396237B2 (ja) | 2020-09-15 | 2020-09-15 | 質量分析装置 |
| US17/345,080 US11651946B2 (en) | 2020-09-15 | 2021-06-11 | Mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020154315A JP7396237B2 (ja) | 2020-09-15 | 2020-09-15 | 質量分析装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022048479A JP2022048479A (ja) | 2022-03-28 |
| JP2022048479A5 true JP2022048479A5 (enExample) | 2022-12-26 |
| JP7396237B2 JP7396237B2 (ja) | 2023-12-12 |
Family
ID=80625805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020154315A Active JP7396237B2 (ja) | 2020-09-15 | 2020-09-15 | 質量分析装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US11651946B2 (enExample) |
| JP (1) | JP7396237B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12633510B2 (en) * | 2021-07-30 | 2026-05-19 | Shimadzu Corporation | Mass spectrometer |
| CN117117772A (zh) * | 2023-08-01 | 2023-11-24 | 中元汇吉生物技术股份有限公司 | 质谱仪保护系统、方法及质谱仪 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3133016B2 (ja) * | 1997-05-20 | 2001-02-05 | セイコーインスツルメンツ株式会社 | 誘導結合プラズマ質量分析装置 |
| JP6087056B2 (ja) | 2012-01-06 | 2017-03-01 | アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． | 誘導結合プラズマｍｓ／ｍｓ型質量分析装置 |
| GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
| US9368335B1 (en) | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
| JP6436236B2 (ja) | 2015-07-13 | 2018-12-12 | 株式会社島津製作所 | シャッター |
| JP7047936B2 (ja) | 2018-11-29 | 2022-04-05 | 株式会社島津製作所 | 質量分析装置 |
-
2020
- 2020-09-15 JP JP2020154315A patent/JP7396237B2/ja active Active
-
2021
- 2021-06-11 US US17/345,080 patent/US11651946B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6087056B2 (ja) | 誘導結合プラズマｍｓ／ｍｓ型質量分析装置 | |
| US8716658B2 (en) | Mass spectrometer system | |
| US11434913B2 (en) | Multiple port vacuum pump system | |
| CN100529414C (zh) | 泵送设备 | |
| EP2553267B1 (en) | Vacuum pumping system | |
| KR100884115B1 (ko) | 진공하에서 물체를 가공하기 위한 다중 챔버 장치, 상기 장치를 진공화하기 위한 방법 및 상기 방법을 위한 진공화 시스템 | |
| JP7396237B2 (ja) | 質量分析装置 | |
| JP5640089B2 (ja) | 真空システム | |
| US9368335B1 (en) | Mass spectrometer | |
| US20150060691A1 (en) | Semiconductor process pumping arrangements | |
| CN111542699B (zh) | 多级真空泵和差异化地抽吸多个真空室的方法 | |
| CN110821852A (zh) | 用于质谱仪的涡轮分子泵 | |
| CN113738615A (zh) | 具有多个容积式真空泵的真空泵送系统和用于运行真空泵送系统的方法 | |
| US12424429B2 (en) | Ducting gas of mass spectrometer | |
| CN223941782U (zh) | 质谱仪 | |
| JP2007502387A (ja) | 液体リングガスポンプ | |
| GB2574649A (en) | Twin shaft vacuum pumps, vacuum pump systems and a method of pumping | |
| HK1075070B (en) | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |