JP7396237B2 - 質量分析装置 - Google Patents

質量分析装置 Download PDF

Info

Publication number
JP7396237B2
JP7396237B2 JP2020154315A JP2020154315A JP7396237B2 JP 7396237 B2 JP7396237 B2 JP 7396237B2 JP 2020154315 A JP2020154315 A JP 2020154315A JP 2020154315 A JP2020154315 A JP 2020154315A JP 7396237 B2 JP7396237 B2 JP 7396237B2
Authority
JP
Japan
Prior art keywords
chamber
vacuum chamber
intake port
exhaust
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020154315A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022048479A5 (enExample
JP2022048479A (ja
Inventor
祐介 坂越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2020154315A priority Critical patent/JP7396237B2/ja
Priority to US17/345,080 priority patent/US11651946B2/en
Publication of JP2022048479A publication Critical patent/JP2022048479A/ja
Publication of JP2022048479A5 publication Critical patent/JP2022048479A5/ja
Application granted granted Critical
Publication of JP7396237B2 publication Critical patent/JP7396237B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/422—Two-dimensional RF ion traps
    • H01J49/4225—Multipole linear ion traps, e.g. quadrupoles, hexapoles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2020154315A 2020-09-15 2020-09-15 質量分析装置 Active JP7396237B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020154315A JP7396237B2 (ja) 2020-09-15 2020-09-15 質量分析装置
US17/345,080 US11651946B2 (en) 2020-09-15 2021-06-11 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020154315A JP7396237B2 (ja) 2020-09-15 2020-09-15 質量分析装置

Publications (3)

Publication Number Publication Date
JP2022048479A JP2022048479A (ja) 2022-03-28
JP2022048479A5 JP2022048479A5 (enExample) 2022-12-26
JP7396237B2 true JP7396237B2 (ja) 2023-12-12

Family

ID=80625805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020154315A Active JP7396237B2 (ja) 2020-09-15 2020-09-15 質量分析装置

Country Status (2)

Country Link
US (1) US11651946B2 (enExample)
JP (1) JP7396237B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12633510B2 (en) * 2021-07-30 2026-05-19 Shimadzu Corporation Mass spectrometer
CN117117772A (zh) * 2023-08-01 2023-11-24 中元汇吉生物技术股份有限公司 质谱仪保护系统、方法及质谱仪

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013143196A (ja) 2012-01-06 2013-07-22 Agilent Technologies Inc 誘導結合プラズマｍｓ／ｍｓ型質量分析装置
US20150056060A1 (en) 2013-08-20 2015-02-26 Thermo Fisher Scientific (Bremen) Gmbh Multiple Port Vacuum Pump System
US9368335B1 (en) 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
WO2017010163A1 (ja) 2015-07-13 2017-01-19 株式会社島津製作所 シャッター
WO2020110264A1 (ja) 2018-11-29 2020-06-04 株式会社島津製作所 質量分析装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3133016B2 (ja) * 1997-05-20 2001-02-05 セイコーインスツルメンツ株式会社 誘導結合プラズマ質量分析装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013143196A (ja) 2012-01-06 2013-07-22 Agilent Technologies Inc 誘導結合プラズマｍｓ／ｍｓ型質量分析装置
US20150056060A1 (en) 2013-08-20 2015-02-26 Thermo Fisher Scientific (Bremen) Gmbh Multiple Port Vacuum Pump System
US9368335B1 (en) 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
WO2017010163A1 (ja) 2015-07-13 2017-01-19 株式会社島津製作所 シャッター
WO2020110264A1 (ja) 2018-11-29 2020-06-04 株式会社島津製作所 質量分析装置

Also Published As

Publication number Publication date
US11651946B2 (en) 2023-05-16
JP2022048479A (ja) 2022-03-28
US20220084807A1 (en) 2022-03-17

Similar Documents

Publication Publication Date Title
US11017990B2 (en) Compact mass spectrometer
US10978288B2 (en) Compact mass spectrometer
US11434913B2 (en) Multiple port vacuum pump system
JP6087056B2 (ja) 誘導結合プラズマｍｓ／ｍｓ型質量分析装置
US8481923B1 (en) Atmospheric pressure plasma mass spectrometer
US10354847B2 (en) Compact mass spectrometer
JP2001273869A (ja) 質量分析装置
US20160111266A1 (en) Compact Mass Spectrometer
GB2520787A (en) Compact mass spectrometer
US11651946B2 (en) Mass spectrometer
JP2022048479A5 (enExample)
EP2715774B1 (en) Ion inlet for a mass spectrometer
US9368335B1 (en) Mass spectrometer
WO2023007820A1 (ja) 質量分析装置
US12424429B2 (en) Ducting gas of mass spectrometer
JPS594828B2 (ja) 化学イオン化質量分析装置
CN119170484A (zh) 一种用于质谱仪的可分别调压多级真空系统及应用
GB2520785A (en) Compact mass spectrometer

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221216

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221216

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231031

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231113

R151 Written notification of patent or utility model registration

Ref document number: 7396237

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151