JP2022046096A - 実行装置及び実行方法 - Google Patents
実行装置及び実行方法 Download PDFInfo
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- JP2022046096A JP2022046096A JP2020151966A JP2020151966A JP2022046096A JP 2022046096 A JP2022046096 A JP 2022046096A JP 2020151966 A JP2020151966 A JP 2020151966A JP 2020151966 A JP2020151966 A JP 2020151966A JP 2022046096 A JP2022046096 A JP 2022046096A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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Abstract
Description
Claims (14)
- 半導体製造装置に設けられた搬送装置に搬送されて、所定の動作を実行する実行装置であって、
前記所定の動作を実行するための動作装置と、
前記実行装置に加わる加速度を計測可能な加速度センサと、
前記加速度センサによって計測される前記加速度が基準範囲内の値になってからの経過時間を計測し、前記加速度が前記基準範囲内の値のまま所定時間経過した場合に、前記実行装置が前記半導体製造装置の載置台に載置されたと判定して、前記所定の動作を前記動作装置に実行させる、演算装置と、を備える、実行装置。 - 前記演算装置は、前記経過時間の計測開始から前記所定時間内に前記加速度が前記基準範囲を超えた場合に、前記経過時間の計測を停止、且つ初期状態に戻す、請求項1に記載の実行装置。
- 前記加速度センサは、
水平方向に沿った第1方向における第1の加速度を計測可能な第1加速度センサと、
水平方向に沿った前記第1方向と直交する第2方向における第2の加速度を計測可能な第2加速度センサと、を含み、
前記加速度は、前記第1の加速度と前記第2の加速度との合成値である、請求項1又は請求項2に記載の実行装置。 - 前記演算装置によって前記動作装置が所定の動作を実行した後に、前記加速度が前記基準範囲を超えた場合には、前記演算装置は、前記実行装置が前記半導体製造装置の載置台から搬出されたと判定して、前記所定の動作を前記動作装置に停止させる、請求項1~3のいずれか一項に記載の実行装置。
- 前記基準範囲は-0.005m/s2から0.005m/s2の間の範囲である、請求項1~4のいずれか一項に記載の実行装置。
- 前記所定時間は60s以上である、請求項1~5のいずれか一項に記載の実行装置。
- 前記所定の動作は、静電容量の測定である、請求項1~6のいずれか一項に記載の実行装置。
- 半導体製造装置に設けられた搬送装置に搬送される実行装置に、所定の動作を実行させる実行方法であって、
実行装置に加わる加速度を計測し、計測された加速度が基準範囲内の値になってからの経過時間を計測する工程と、
前記経過時間の計測開始から前記加速度が前記基準範囲を超えないまま所定時間経過した場合に、前記実行装置が前記半導体製造装置の載置台に載置されたと判定して、前記所定の動作を実行させる工程と、を備える、実行方法。 - 前記経過時間の計測開始から前記所定時間内に前記加速度が前記基準範囲を超えた場合に、前記経過時間の計測を停止、且つ初期状態に戻す工程をさらに含む、請求項8に記載の実行方法。
- 前記加速度は、水平方向に沿った第1方向における第1の加速度と、水平方向に沿った前記第1方向と直交する第2方向における第2の加速度と、の合成値である、請求項8又は請求項9に記載の実行方法。
- 前記実行装置が所定の動作を実行した後に、前記加速度が前記基準範囲を超えた場合には、前記実行装置が前記半導体製造装置の載置台から搬出されたと判定して、前記所定の動作を停止させる工程をさらに含む、請求項8~請求項10のいずれか一項に記載の実行方法。
- 前記基準範囲は、-0.005m/s2から0.005m/s2の間の範囲である、請求項8~請求項11のいずれか一項に記載の実行方法。
- 前記所定時間は60s以上である、請求項8~請求項12のいずれか一項に記載の実行方法。
- 前記所定の動作は、静電容量の測定である、請求項8~請求項13のいずれか一項に記載の実行方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2020151966A JP7530779B2 (ja) | 2020-09-10 | 2020-09-10 | 実行装置及び実行方法 |
TW110132801A TW202225710A (zh) | 2020-09-10 | 2021-09-03 | 執行裝置及執行方法 |
KR1020210119711A KR20220034004A (ko) | 2020-09-10 | 2021-09-08 | 실행 장치 및 실행 방법 |
US17/469,513 US11933826B2 (en) | 2020-09-10 | 2021-09-08 | Execution device and execution method |
CN202111048364.3A CN114167142A (zh) | 2020-09-10 | 2021-09-08 | 执行装置及执行方法 |
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JP7530779B2 JP7530779B2 (ja) | 2024-08-08 |
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US (1) | US11933826B2 (ja) |
JP (1) | JP7530779B2 (ja) |
KR (1) | KR20220034004A (ja) |
CN (1) | CN114167142A (ja) |
TW (1) | TW202225710A (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4607848B2 (ja) * | 2006-10-27 | 2011-01-05 | 東京エレクトロン株式会社 | 基板処理装置、基板受け渡し位置の調整方法及び記憶媒体 |
JP2009054993A (ja) * | 2007-08-02 | 2009-03-12 | Tokyo Electron Ltd | 位置検出用治具 |
WO2016176293A1 (en) | 2015-04-27 | 2016-11-03 | Virtual Fluid Monitoring Services LLC | Systems, apparatuses, and methods for fluid analysis and monitoring |
US11569138B2 (en) | 2015-06-16 | 2023-01-31 | Kla Corporation | System and method for monitoring parameters of a semiconductor factory automation system |
JP6586394B2 (ja) | 2016-03-28 | 2019-10-02 | 東京エレクトロン株式会社 | 静電容量を表すデータを取得する方法 |
JP7186571B2 (ja) | 2018-10-10 | 2022-12-09 | 日本電産サンキョー株式会社 | ロボットの動作完了時刻の判定装置及び判定方法 |
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- 2020-09-10 JP JP2020151966A patent/JP7530779B2/ja active Active
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- 2021-09-03 TW TW110132801A patent/TW202225710A/zh unknown
- 2021-09-08 CN CN202111048364.3A patent/CN114167142A/zh active Pending
- 2021-09-08 KR KR1020210119711A patent/KR20220034004A/ko active Search and Examination
- 2021-09-08 US US17/469,513 patent/US11933826B2/en active Active
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US11933826B2 (en) | 2024-03-19 |
CN114167142A (zh) | 2022-03-11 |
JP7530779B2 (ja) | 2024-08-08 |
US20220074981A1 (en) | 2022-03-10 |
KR20220034004A (ko) | 2022-03-17 |
TW202225710A (zh) | 2022-07-01 |
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