JP2022044608A - Robot system, device manufacturing apparatus, and device manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a robot that can be accurately controlled, a robot system, a device manufacturing apparatus, a device manufacturing method using the same, and a teaching position adjustment method.

SOLUTION: The robot includes a robot arm portion and a robot hand portion rotatably connected to the robot arm portion. The robot hand portion is provided with a mark portion used to measure the rotation angle of the robot hand portion.

SELECTED DRAWING: Figure 3

COPYRIGHT: (C)2022,JPO&INPIT

Description

The present invention relates to a robot.

In recent years, in the production line of an organic EL display device, which has been in the limelight as a flat panel display device, a robot in which a hand is connected to an articulated arm having a link structure is used to process at least one of a substrate and a mask in a processing chamber (for example). , Film formation chamber), pass chamber, buffer chamber, mask stock chamber, etc.

When the robot is first installed on the production line, when the robot arm or robot hand is replaced for maintenance, the transfer operation is performed to allow such a robot to transfer the substrate or mask to the correct target position. Before the start, teaching work is performed to teach the starting point and procedure (transport trajectory) of the transfer operation of the robot.

The teaching method of the robot includes a method in which the operator directly teaches the standby position or the transfer position of the board or mask while directly moving the robot hand, and a position in which the operator operates the robot by the operation panel and becomes the starting point of the transfer operation. Is generally known as a method of sequentially specifying.

Information on the standby position and the transfer position of the robot hand taught by the teaching operation is stored in the control means of the robot, and during the actual transfer operation, the robot performs the transfer operation according to the stored standby position and the transfer position information. conduct.

Normally, the operator manually teaches about the standby position of the robot hand and the transport position where the board and the mask are delivered. That is, since the worker manually performs the teaching work while visually confirming the movement of the robot, the worker is required to have a high degree of skill and the teaching work takes time.

Japanese Unexamined Patent Publication No. 2008-251968

In the technique described in Patent Document 1, the positions of the robot hand portion in the robot in the X direction and the Y direction are measured, but the control of the robot cannot be performed accurately.

The present invention is for solving such a problem, and provides a robot, a robot system, a device manufacturing apparatus capable of accurate control, a device manufacturing method using the robot, a teaching position adjustment method, a program, and a storage medium. The purpose is to provide.

The robot according to the first aspect of the present invention includes a robot arm portion and a robot hand portion rotatably connected to the robot arm portion, and the robot hand portion measures the rotation angle of the robot hand portion. A mark portion used for the robot is provided.

The robot system according to the second aspect of the present invention includes a robot including a robot arm unit, a robot hand unit rotatably connected to the robot arm unit, and a control unit for controlling the operation of the robot. A mark portion used for measuring the rotation angle of the robot hand portion is installed in the robot hand portion.

The device manufacturing apparatus according to the third aspect of the present invention is a device manufacturing apparatus including a plurality of chambers and a robot for transporting an object to be transported from one of the plurality of chambers to another chamber. The robot includes a robot arm portion and a robot hand portion rotatably connected to the robot arm portion and provided with a mark portion, and the device manufacturing apparatus is a control unit that controls the operation of the robot. Further includes a detection means for detecting the mark portion provided on the robot hand portion, and the control unit is for installing the robot hand portion at any predetermined position in the plurality of chambers. By detecting the mark unit using the detection means in a controlled state, information on the rotation angle of the robot hand unit is acquired, and the control unit obtains the information on the rotation angle, and the plurality of control units are based on the information on the rotation angle. Correct the transport position of the object to be transported to the chamber.

The device manufacturing method according to the fourth aspect of the present invention is a robot that conveys a substrate used for manufacturing the device, and is a robot arm portion and a robot hand portion connected to the robot arm portion and provided with a mark portion. Using a robot including The robot hand is in a state where the step of storing the first information regarding the position of the robot hand unit measured by detecting the above is stored in the storage unit and the control for installing the robot hand unit in the predetermined position is performed. The step of rediscovering the mark portion of the unit and measuring the position of the robot hand unit again, the first information stored in the storage unit, and the second measured position of the robot hand unit again. Based on the information, the robot hand in the rotation angle direction with the rotation axis as the first direction, the second direction intersecting the first direction, the first direction and the third direction intersecting the second direction, respectively. When the misalignment amount in at least one of the first direction, the second direction, and the rotation angle direction exceeds a predetermined threshold value for the corresponding direction in the step of measuring the misalignment amount of the portion. , A step of correcting the plurality of teaching positions based on the amount of misalignment in the relevant direction.

A device manufacturing method according to a fifth aspect of the present invention, which is a robot that conveys a substrate used for manufacturing the device, and is a robot hand connected to the robot arm portion and the robot arm portion and provided with a mark portion. Using a robot that includes a part and
A step of storing a plurality of teaching positions including a plurality of transfer positions to which the substrate should be conveyed in a storage unit of a control unit, and a step of storing the plurality of teaching positions.
A step of measuring the rotation angle of the robot hand portion by detecting the mark portion provided on the robot hand portion by a measuring means with the robot hand portion installed at a predetermined position.
A step of correcting at least two of the information regarding the plurality of teaching positions stored in the storage unit based on the measured information including the information regarding the rotation angle of the robot hand unit is included.

The teaching position adjusting method according to the sixth aspect of the present invention is a teaching position adjusting method in a robot system including a robot including a robot hand portion provided with a mark portion and a control unit for controlling the operation of the robot. A step of storing a plurality of teaching positions of the robot in the storage unit of the control unit, including a plurality of transfer positions to be transported, and the mark of the robot hand unit installed at a predetermined position. A step of storing the first information regarding the position of the robot hand unit, which was measured by detecting the unit, in the storage unit, and a control for the control unit to install the robot hand unit in the predetermined position were performed. In the state, the step of rediscovering the mark portion of the robot hand portion and measuring the position of the robot hand portion again, the first information, and the second information regarding the measured position of the robot hand portion again. Based on the above, the robot hand unit in the rotation angle direction with the rotation axis as the first direction, the second direction intersecting the first direction, the first direction and the third direction intersecting the second direction, respectively. When the amount of misalignment exceeds a predetermined threshold for the relevant direction in at least one of the steps of measuring the amount of misalignment and the first direction, the second direction, and the rotation angle direction, the relevant direction. Includes a step of correcting the plurality of teaching positions based on the amount of misalignment in the above.

The teaching position adjusting method according to the seventh aspect of the present invention is a teaching position adjusting method in a robot system including a robot including a robot hand portion provided with a mark portion and a control unit for controlling the operation of the robot. hand,
A step of storing a plurality of teaching positions of the robot in a storage unit of the control unit, including a plurality of transport positions to which the transported object should be transported.
A step of detecting the mark portion provided on the robot hand portion by a measuring means and measuring the rotation angle of the robot hand portion with the robot hand portion installed at a predetermined position.
A step of correcting at least two of the information regarding the plurality of teaching positions stored in the storage unit based on the measured information including the information regarding the rotation angle of the robot hand unit is included.

The program according to the eighth aspect of the present invention is a program for causing a computer to execute the teaching position adjusting method described above.

The storage medium according to the ninth aspect of the present invention is a computer-readable storage medium in which the program described above is stored.

According to the present invention, it is possible to control the robot with high accuracy by measuring the rotation angle of the robot hand portion.

FIG. 1 is a schematic diagram of a part of a production line of an organic EL display device. FIG. 2 is a schematic diagram of the robot system of the present invention. FIG. 3 is a schematic diagram of a robot system for adjusting the teaching position of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. However, the following examples illustrate the preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations. Further, in the following description, the scope of the present invention shall be limited to the hardware configuration and software configuration of the apparatus, the processing flow, the manufacturing conditions, the size, the material, the shape, etc., unless otherwise specified. It is not intended to be.

<Electronic device manufacturing line>
FIG. 1 is a plan view schematically showing a part of the configuration of an electronic device manufacturing line (device manufacturing apparatus).

The production line of FIG. 1 is used, for example, for manufacturing a display panel of an organic EL display device for a smartphone. In the case of a display panel for a smartphone, for example, after forming an organic EL film on a full-size (about 1500 mm × about 1850 mm) or half-cut size (about 1500 mm × about 925 mm) substrate, the substrate is cut out to form a plurality of substrates. Make a small size panel.

As shown in FIG. 1, the film formation cluster 1 of the production line of the organic EL display device generally has a plurality of film formation chambers 11 in which a process (for example, film formation) is performed on the substrate 10 as the first conveyed object. It also includes a plurality of mask stock chambers 12 (second transport body storage chambers) in which masks as a second transport body before and after use are stored, and a transport chamber 13 arranged in the center thereof.

In the transport chamber 13, a robot 14 that transports the substrate 10 between the plurality of film forming chambers 11 and transports the mask between the film forming chamber 11 and the mask stock chamber 12 is installed. The robot 14 is, for example, a robot having a structure in which a robot hand for holding a substrate 10 is attached to an articulated arm. The structure of the robot 14 of this embodiment will be described in detail with reference to FIG. In this embodiment, an example in which the robot 14 is a transfer robot for transporting a substrate or a mask will be described, but the present invention is not limited to this, and can be applied to other robots.

A film forming apparatus (also referred to as a vapor deposition apparatus) is installed in each film forming chamber 11. In the film forming apparatus, the vapor deposition material stored in the evaporation source is heated and evaporated by the heater and vapor-deposited on the substrate via the mask. A series of film formation processes such as transfer of the substrate 10 to and from the robot 14, adjustment (alignment) of the relative position between the substrate 10 and the mask, fixing of the substrate 10 on the mask, and film formation (deposited film) are automatically performed by the film forming apparatus. Is done. The film forming apparatus may be a dual stage type having two stages. In the dual stage type film forming apparatus, while the film is formed on the substrate 10 carried into one stage, the alignment is performed with the other substrates 10 carried into the other stage.

In the mask stock chamber 12, a new mask used in the film forming process in the film forming chamber 11 and a used mask are separately stored in two cassettes. The robot 14 transfers the used mask from the film forming chamber 11 to the cassette of the mask stock chamber 12, and transfers a new mask stored in another cassette of the mask stock chamber 12 to the film forming chamber 11.

The film formation cluster 1 on the production line of the organic EL display device includes a pass chamber 15 for transporting the substrate 10 from the upstream side in the flow direction of the substrate 10 to the film formation cluster 1, and the film formation process in the film formation cluster 1. A buffer chamber 16 for passing the completed substrate 10 to another film forming cluster on the downstream side is connected. The robot 14 in the transport chamber 13 receives the substrate 10 from the pass chamber 15 on the upstream side and transports the substrate 10 to one of the film formation chambers 11 in the film formation cluster 1. Further, the robot 14 receives the substrate 10 for which the film forming process in the film forming cluster 1 has been completed from one of the plurality of film forming chambers 11 and conveys it to the buffer chamber 16 connected to the downstream side.

In this way, the robot 14 transports the transported object such as the substrate and the mask between the various chambers arranged around the transport chamber 13.

Although the film forming cluster 1 of the present invention has been described with reference to FIG. 1, the film forming cluster 1 of the present invention is not limited to this, and may have other types of chambers, and the arrangement between the chambers may be different. It may change.

Hereinafter, the configuration of the robot system including the robot 14 will be described.

<Robot system>
FIG. 2 schematically shows the structure of a robot system including the robot 14.

In the following description, an XYZ coordinate system having a direction parallel to the rotation axis of the connection portion between the robot arm portion and the robot hand portion of the robot 14 as the Z axis is used. When the direction of the Z axis is the third direction, one of the direction of the X axis and the direction of the Y axis perpendicular to the direction is the first direction, and the other direction is the second direction. Further, the rotation angle centered on the Z-axis direction is indicated by θ, and the rotation direction centered on the Z-axis direction is defined as the rotation angle direction.

The robot system of this embodiment includes a robot 14 and a control unit 25 for controlling the operation of the robot 14.

The robot 14 has a base portion 21 installed on the bottom surface of the transport chamber 13, a shaft portion 22 extending from the base portion 21 in the vertical direction or the Z-axis direction (third direction) and movable in the Z-axis direction, and a shaft. A robot arm portion 23 rotatably connected to the portion 22 is included. In FIG. 2A, it is shown that the robot 14 has one robot arm unit 23, but the robot 14 may also have two or more robot arm units 23. As a result, the transfer efficiency of the substrate 10 and the mask can be improved, and the process time can be shortened.

The robot arm portion 23 may adopt a structure in which a plurality of arms are rotatably connected to each other via a joint portion. For example, the robot arm portion 23 has a structure including a first arm 231 having one end rotatably connected to the shaft portion 22 and a second arm 232 having one end rotatably connected to the other end of the first arm 231. Can be adopted. FIG. 2A shows a structure in which two arms are rotatably connected to each other through a joint portion, but the present invention is not limited to this, and the two arms slide relative to each other in the longitudinal direction of the arms. It can also have a structure that can be dynamically displaced and expanded and contracted. Further, although the structure in which the first arm 231 is rotatably connected to the shaft portion 22 is shown, the present invention is not limited to this, and the first arm 231 is fixedly connected to the shaft portion 22 instead. A structure in which the shaft portion 22 itself rotates can also be adopted.

A robot hand portion 24 is rotatably provided at the other end of the second arm 232. The robot hand unit 24 has a structure on which a substrate and a mask can be placed. Although not shown in FIG. 2, the robot hand portion 24 stably supports the substrate in the longitudinal direction of the robot hand portion 24 (direction from the connection portion with the robot arm toward the free end portion of the robot hand portion). ) Can have a plurality of supports extending in a direction intersecting with the). It is preferable to apply a fluorine coating or the like to the substrate or the mask mounting surface of the robot hand portion 24 in order to prevent damage to the substrate 10. Further, in order to prevent the substrate 10 from moving or falling on the robot hand portion 24 during transportation, a holding means such as a gripping mechanism may be included.

The robot 14 of the present embodiment having such a structure has a rotation angle of the first arm 231 around the shaft portion 22, an angle between the first arm 231 and the second arm 232, and the second arm 232 and the robot. By adjusting the angle between the hand portion 24 and the height of the shaft portion 22, linear movement, rotational movement, and combined movement of the substrate or mask mounted on the robot hand portion 24 can be performed. And the substrate or mask can be moved to any desired position on the XYZ coordinate system.

The robot hand unit 24 of the robot 14 of the present embodiment has a mark unit 241 used for measuring the rotation angle of the robot hand unit 24 at a predetermined position (for example, the origin position described later) or the amount of misalignment in the rotation angle direction. Is formed. The specific configuration and function of the mark portion 241 will be described later with reference to FIG.

The robot system of this embodiment includes a control unit 25 that controls the operation of the robot 14. The control unit 25 is composed of a computer having a processor, a memory, a storage, an I / O, and the like. For example, the control unit 25 is configured to control the robot 14 by executing a storage unit 251 in which a program for controlling the transport operation of the robot 14 is stored and a program stored in the storage unit 251. Includes processor 252. As the computer, a general-purpose personal computer may be used, or an embedded computer or a PLC (programmable logical controller) may be used. Alternatively, a part or all of the functions of the control unit 25 may be configured by a circuit such as an ASIC or FPGA. In the present embodiment, it is described that the control unit 25 is provided separately from the robot 14, but the present invention is not limited to this, and the robot 14 may have the control unit 25.

The storage unit 251 stores information on a plurality of teaching positions (standby position and transfer position) for controlling the transfer operation of the robot 14. The control unit 25 controls the robot hand unit 24 so that it can move to the corresponding position based on the information regarding the teaching position stored in the storage unit 251.

As shown in FIG. 2B, the robot 14 has a first arm drive unit 2311 for rotating the shaft of the first arm 231 and a second arm drive unit 2321 for rotating the shaft of the second arm 232. A robot hand drive unit 242 for rotating the shaft of the robot hand unit 24 and an elevating drive unit 221 for vertically driving the shaft unit 22 are provided.

These drive units include a servomotor (not shown) and a power transmission mechanism (not shown), respectively. Rotational power is transmitted from the servomotor to the shaft of the first arm 231, the shaft of the second arm 232, and the shaft of the robot hand portion 24 via the power transmission mechanism, whereby the first arm 231 and the second arm 232 and the robot are transmitted. The hand portions 24 rotate respectively.

The elevating drive unit 221 is installed on the base unit 21 of the robot 14 and is configured by a ball screw mechanism including a rotary motor. For example, the elevating drive unit 221 includes a screw shaft, a ball nut configured to be screwed with the screw shaft, and a rotary motor configured to rotate the screw shaft. In this case, the shaft portion 22 is fixed to the ball nut and is moved up and down together with the ball nut as the screw shaft rotates.

The control unit 25 acquires information on the angular position of the first arm 231, the angular position of the second arm 232, the angular position of the robot hand unit 24, and the height of the shaft unit 22 from these drive units, respectively. The drive unit can be feedback controlled. As a result, the robot hand unit 24 can be moved to the teaching position with high accuracy.

<Teaching of robots>
As described with reference to FIG. 1, the robot 14 conveys the substrate 10 between the plurality of film forming chambers 11 in the film forming cluster 1 and the pass chamber 15 or the buffer chamber 16.

A case where the substrate 10 is conveyed from the pass chamber 15 to the first film forming chamber 11a by the robot 14 will be described as an example. Before the transfer, the robot arm portion 23 of the robot 14 is in a contracted state (that is, a state in which the joint of the robot arm portion 23 is bent so that the angle between the first arm 231 and the second arm 232 is reduced). The robot hand unit 24 is located in the first standby position with its free end facing the pass chamber 15. Then, from this state, the robot arm unit 23 extends toward the carry-out position on the substrate stage in the pass chamber 15 (this position becomes the teaching position with respect to the pass chamber), and the substrate stage provided in the pass chamber 15 is provided. Receive the upper board 10. After that, the robot arm unit 23 contracts again, so that the robot hand unit 24 returns to the above-mentioned first standby position.

Next, the robot arm portion 23 turns around the shaft portion 22, and the free end portion of the robot hand portion 24 moves to the second standby position (which becomes another teaching position) facing the first film forming chamber 11a. .. By extending the robot arm unit 23 in this state, the robot hand unit 24 moves to the substrate carrying position (teaching position with respect to the first film forming chamber) into the first film forming chamber 11a, so that the substrate becomes the first film forming. It is carried into the room 11a. After that, the robot hand unit 24 returns to the second standby position.

Such a transfer operation in carrying in and out of the substrate is repeated until all the film forming processes are completed in the film forming cluster 1 and the corresponding substrate is delivered to the buffer chamber 16 on the downstream side of the flow of the substrate. In order to enable the smooth transfer operation by the robot 14, information on the standby position in the film formation cluster 1 and the carry-in position and carry-out position of the substrate 10 is stored in the control unit 25 as the teaching position information. It is stored in the part 251.

The work of teaching the robot 14 the position information (for example, the X, Y, Z, θ coordinate values of the position) regarding the teaching position (the work of measuring the position and storing it in the storage unit 251 of the control unit 25). This is called teaching work, and is performed by an operator when the robot 14 is installed in the film forming cluster 1 or when the robot arm unit 23 or the robot hand unit 24 is removed or replaced for maintenance.

In the teaching work, the operator moves the robot hand portion 24 to each teaching position while moving the robot 14 little by little through the operation panel, and the rotation angle of the first arm 231 around the shaft portion 22 at the teaching position. , The teaching based on the information regarding the rotation angle between the first arm 231 and the second arm 232, the rotation angle between the second arm 232 and the robot hand portion 24, and the position of the shaft portion 22 in the Z-axis direction. This is performed by calculating the coordinate values of the positions and storing them in the control unit 25. At this time, each rotation angle value and the like are determined by the drive unit 2311 of the shaft of the first arm 231, the drive unit 2321 of the shaft of the second arm 232, the drive unit 242 of the shaft of the robot hand unit 24, and the elevating drive unit of the shaft unit 22. Obtained from 221.

Such teaching work is usually performed by the operator manually operating the operation panel and turning or expanding / contracting at least one of the robot arm portion 23 and the robot hand portion 24 of the robot 14, but each teaching position. It is also possible to guide the robot hand unit 24 to a target position by using the guide unit installed in the robot and obtain the position information. Further, the teaching work can be performed by a method in which the sensor recognizes the sign provided on the robot hand unit 24 that has moved to the target position and obtains the coordinate value of the teaching position.

Further, when the relative relationship between the chambers is constant, for example, the teaching position (the loading position and the loading position of the substrate) in each chamber is located at substantially the same distance from the shaft portion 22 of the robot 14. In the case (that is, when the robot 14 is arranged on an arc centered on the robot 14), the teaching work for other chambers (teaching position) is quickly performed by utilizing the relative positional relationship between these chambers. You can also.
Further, the teaching work is generally performed in a state where the substrate 10 is not placed on the robot hand unit 24, but the teaching operation can also be performed in a state where the substrate 10 is placed on the robot hand unit 24. This makes it possible to perform accurate teaching that matches the actual transportation situation.

<Robot system for adjusting the teaching position>
Hereinafter, a robot system for adjusting a teaching position (standby position and transport position) according to the present invention will be described with reference to FIG.

After the initial installation of the robot 14 or the maintenance of the robot arm unit 23 and the robot hand unit 24, when the board or the mask is actually transported using the robot 14, the robot arm unit 23 and the robot hand unit 24 May collide with other parts of the production line. For example, in the process of transporting the substrate 10 or the mask into each chamber by the robot 14 in the film forming cluster 1, the robot hand unit 24 or the like causes the film forming chamber 11, the pass chamber 15, the buffer chamber 16 and the like to the substrate holder or the substrate stage. Alternatively, it may collide with the substrate support. It is also conceivable that the mask may collide with the mask storage cassette in the mask stock chamber 12 or the mask support portion in the cassette.

When a mechanical impact is applied to the robot hand portion 24, the robot arm portion 23, or the like, the robot hand portion 24 and the robot arm portion 23 themselves may be deformed, and the joint portion between them may also be deformed.

Even if a collision does not occur, the robot hand portion 24 itself may be deformed by the weight of the substrate 10 due to the increase in size of the substrate, or the joint portion may be deformed by the load continuously applied to the joint portion of the robot 14. As a result, it is conceivable that the moving position of the robot hand 24 will be different from that at the time of the first teaching.

In this case, the control unit 25 issues a command for moving the robot hand unit 24 to the teaching position based on the information about the teaching position stored in the storage unit 251. The robot hand unit 24 does not move to the teaching position, but moves to a position deviated from the teaching position. That is, even if the substrate 10 held by the robot hand 24 is moved to the teaching position (standby position and transport position) stored in the control unit 25, the substrate does not move to the position assumed at the time of teaching, but X. , Y, Z, will move to a position shifted in the θ direction. Due to such misalignment, the possibility of collision with other devices on the production line in the process of transporting the substrate or mask is further increased. In addition, problems may occur in the processing of the substrate (for example, film formation).

In particular, unlike a semiconductor substrate having a circular substrate shape, in the case of a rectangular substrate used for an organic EL display, the displacement of the substrate in the rotation angle direction (θ direction) about the Z axis is large. Since it has a great influence on the film forming process in the film forming cluster 1, if the position of the robot hand portion 24 or the like occurs in the rotation angle direction due to the collision of the robot 14, it is necessary to adjust it.

In the conventional technique, the robot hand portion 24 or the like is displaced due to the collision of the robot 14 or the like, and the transfer operation of the robot 14 is different from the position taught at the time of teaching, or a different trajectory. If it was determined that the teaching work was performed in the above, the teaching work was performed again for all the teaching positions (standby position and transfer position such as carry-in position and carry-out position) in the film forming cluster 1.

However, in the production line of the organic EL display device, the teaching position of the robot 14 is the position where the substrate and the mask are placed in the processing chamber (deposition chamber) arranged around the transport chamber in which the robot 14 is installed, and the mask stock. Since it includes many positions such as a position where the mask before and after use is stored in the chamber 12, a position where the substrate is handed over in the pass chamber 15 and the buffer chamber 16.
Teaching work for each position takes a considerable amount of time.

Moreover, the robot 14 may have two robot arms 23 so that more transfer operations can be performed per unit time, and each teaching position is taught separately in an open air state and a vacuum state. In a large production line, dozens of teaching operations were required, and the teaching operations took dozens of hours, during which time the production line had to be stopped.

Therefore, in the present invention, when the position of the robot 14, particularly the robot hand portion 24, is displaced due to the collision of the robot 14, re-teaching is performed for all the teaching positions in the film forming cluster 1. The robot hand unit 24 at a predetermined position (in this embodiment, this is referred to as an origin position, and the origin position may be, for example, a transfer position of a substrate or a mask in a specific chamber) instead of performing the work. A method is adopted in which the amount of misalignment is measured and the position information of a plurality of other teaching positions is corrected based on this. As a result, the teaching work for a plurality of other teaching positions can be omitted, and the time required for the re-teaching work can be shortened.

As shown in FIG. 3, the robot system 30 of the present invention used for this includes a robot 14, a control unit 25, and a detection means 31.

The robot hand unit 24 of the robot 14 is provided with a mark unit 241 used for measuring the rotation angle of the robot hand unit 24 or the amount of misalignment in the rotation angle direction of the robot hand unit 24. The rotation angle referred to here is a rotation angle centered on a virtual axis parallel to the Z axis and penetrating the robot hand portion 24.

The mark portion 241 has a longitudinal direction (robot arm portion 23) of the robot hand portion 24 so that the amount of misalignment in the rotation angle or the rotation angle direction (θ direction) about the virtual axis penetrating the robot hand portion 24 can be measured. Includes a plurality of marks arranged along the direction from the connection portion with the robot hand portion 24 toward the free end portion of the robot hand portion 24). FIG. 3A illustrates a configuration in which the mark portion 241 has two marks (first mark and second mark), but the present invention is not limited to this, and has three or more marks. May be good. Further, the present invention is not limited to the configuration in which a plurality of marks are arranged on a straight line along the longitudinal direction of the robot hand portion 24, and the displacement between the plurality of marks is a component along the longitudinal direction of the robot hand portion 24. You just have to have. However, in this case, since image processing by the detection means 31, which will be described later, may become more complicated, it is preferable that the plurality of marks are arranged on a straight line along the longitudinal direction of the robot hand portion 24.

In the present embodiment, the mark of the mark portion 241 is a + character sign formed on the robot hand portion 24, but the present invention is not limited to this, and a mark of any other shape may be used.

Further, as another embodiment, as shown in FIG. 3B, the mark portion of the present invention is a linear mark extending along the longitudinal direction of the robot hand portion 24 (the linear mark in FIG. 3B). 2412).

As described above, the plurality of marks arranged as the mark portion 241 along the longitudinal direction of the robot hand portion 24 (that is, the direction from the connecting portion with the second arm 232 toward the free end portion of the robot hand portion 24). Alternatively, by using a linear mark extending in the longitudinal direction of the robot hand portion 24, not only the amount of misalignment of the robot hand portion 24 in the X-axis direction and the Y-axis direction but also the virtual axis penetrating the robot hand portion 24 is centered. The amount of misalignment in the rotation angle or the rotation angle direction can also be measured. At this time, the rotation angle of the robot hand unit 24 centered on the virtual axis penetrating the robot hand unit 24 is such that a line segment connecting a plurality of marks (first mark and second mark) or a linear mark is relative to the virtual reference line. It is measured by the angle formed by the robot. The virtual reference line referred to here is a straight line virtually set for the robot, and the virtual reference line is a straight line orthogonal to the virtual axis. Typically, there is no misalignment at the origin position (predetermined position), and a straight line including a line segment or a linear mark connecting a plurality of marks (first mark and second mark) of the robot hand unit 24 in an ideal state. However, it becomes a virtual reference line.

Although FIG. 3 shows a configuration in which the robot hand portion 24 is composed of one finger, the robot hand portion 24 may be composed of bifurcated fingers, and in this case, the mark portion 241 is attached to either of the two fingers. It will be provided.

The detection means 31 of the robot system 30 of the present invention detects the mark portion 241 of the robot hand portion 24 in the X-axis direction, the Y-axis direction, and the rotation angle direction about the virtual axis penetrating the robot hand portion 24. The amount of misalignment of the robot hand unit 24 in the above can be measured.

The detection means 31 has a position corresponding to the mark portion 241 at the origin position so that the mark portion 241 can be detected while the robot hand portion 24 is installed at the origin position (for example, the substrate carry-out position in the pass chamber 15). Will be installed in. For example, when the origin position is the substrate carry-out position of the pass chamber 15, the detection means 31 is installed at a position below the substrate stage of the pass chamber 15 so that the mark portion 241 can be detected. As will be described later, when an imaging camera (imaging means) is used as the detecting means 31, a transparent window may be provided on the bottom surface of the pass chamber 15 and the imaging camera may be installed outside the transparent window. The invention is not limited to this, and an image pickup camera may be installed in the pass chamber 15.

For example, when the mark portion 241 includes a plurality of individual marks, the detection means 31 is preferably a plurality of imaging cameras 311 capable of photographing the individual marks and detecting the positions of the individual marks. The present invention is not limited to this, and any other means may be used as long as the position of the individual mark can be detected.

In this way, the mark unit 241 is composed of a plurality of individual marks arranged along the longitudinal direction of the robot hand unit 24, and the detection means 31 is composed of a plurality of cameras capable of measuring the positions of these individual marks. , The rotation angle and the misalignment amount of the robot hand 24, particularly the misalignment amount in the rotation angle direction can be measured.

That is, before the robot 14 is displaced due to a collision or the like (for example, immediately after the first teaching work), the robot hand unit 24 is installed at the origin position, and each mark of the mark unit 241 is installed by the detecting means 31. By detecting, it is possible to obtain information (reference position information, first information) regarding the position of the robot hand unit 24 when the robot hand unit 24 is installed at the origin position. In particular, in the present invention, since the mark portion 241 includes a plurality of marks arranged along the longitudinal direction of the robot hand portion 24, the position (rotation) in the rotation angle direction about the virtual axis penetrating the robot hand portion 24. Angle) can be measured. Therefore, the reference position information includes at least information regarding the position of the robot hand 24 in the X-axis direction, the Y-axis direction, and the rotation angle direction about the virtual axis penetrating the robot hand portion 24. These reference position information is stored in the storage unit 251 of the control unit 25. Information regarding the position of the robot hand 24 in the Z-axis direction can be measured by a separate laser sensor or an imaging camera provided below the robot hand 24 at a distance from the robot hand 24.

After that, when the position shift occurs due to the collision of the robot 14, the robot hand unit 24 is controlled to be installed at the origin position again (even if such control is performed, the deformation occurs due to the collision or the like). The robot hand unit 24 cannot move to the origin position before the collision), and by detecting each mark of the mark unit 241 again by the detecting means 31, the position information of a plurality of marks after the collision is acquired. .. Based on the position information of the plurality of marks reacquired in this way, the position information of the robot hand unit 24 is reacquired, and the reacquired position information (second information) of the robot hand unit 24 is stored in the storage unit 251. By comparing with the stored reference position information, the positional deviation of the robot hand unit 24 in the X-axis direction, the Y-axis direction, and the rotation angle direction around the virtual axis penetrating the robot hand unit 24 before and after the collision. The quantity (ΔX, ΔY, Δθ) is obtained. Similarly, the amount of misalignment (ΔZ) in the Z-axis direction of the robot hand 24 is also compared with the reference position information in the Z-axis direction stored in advance in the storage unit 251 and the information regarding the position in the Z-axis direction after the collision. You can get it by doing.

That is, in the present invention, the position of the mark portion 241 of the robot hand portion 24 is detected by the detecting means 31 before the position shift occurs in the robot hand portion 24, and the reference position of the robot hand portion 24 is calculated. Is stored in advance in the control unit 25. Then, when the position shift occurs due to the collision of the robot hand portion 24 or the like, the detection means 31 detects the displaced position of the mark portion 241 again after controlling for installing the robot hand portion 24 at the origin position again. By doing so, the displaced position of the robot hand unit 24 is calculated, and the position deviation amount (ΔX, ΔY, Δθ) of the robot hand unit 24 is calculated based on the difference between the calculated position and the reference position.

On the other hand, instead of the method of specifying the position of the mark by installing a plurality of detection means 31 so as to correspond to the plurality of marks and detecting the mark by each of the detection means 31, one detection means 31, for example. It is also possible to obtain image data by shooting a plurality of marks with an imaging camera having a field of view capable of shooting a plurality of marks, and then obtain information on the position of each mark through image processing.

Such a method of detecting the position of the mark portion 241 can also be applied to the case where the mark portion 241 is a linear mark 2412 extending along the longitudinal direction of the robot hand portion 24.

For example, as shown in FIG. 3B, a camera 312 having a relatively wide viewing angle is installed as a detecting means 31 below the teaching position of the pass chamber 15 which is the origin position.

After the robot hand unit 24 is installed at the origin position, a captured image of the linear mark can be obtained by photographing the linear mark 2412 formed on the robot hand unit 24 with the camera 312 which is the detecting means 31. The obtained captured image is subjected to image processing by an image processing unit (not shown) of the control unit 25 or an image processing unit provided separately from the control unit 25, and the X-axis direction of the robot hand unit 24. The positions in the Y-axis direction and the rotation angle direction are calculated. The calculated position information is stored in the storage unit 251 of the control unit 25 as the information of the reference position of the robot hand unit 24.

If the robot hand unit 24 is misaligned due to a collision or the like, the camera 312 takes a picture of the linear mark 2412 of the robot hand unit 24 after controlling the robot hand unit 24 to be installed at the origin position again. Image processing of the captured image is performed, and the position of the robot hand unit 24 is remeasured. Based on the information about the remeasured position of the robot hand unit 24 and the information about the reference position stored in advance in the memory unit 251 in the X-axis direction, the Y-axis direction, and the rotation angle direction of the robot hand unit 24. The amount of misalignment (ΔX, ΔY, Δθ) is calculated. As a result, the amount of misalignment of the robot hand portion 24 before and after the collision can be obtained.

In this way, when the image of the mark portion 241 (image of a plurality of marks, image of linear marks) obtained by one camera 312 is image-processed to calculate the amount of misalignment, the camera 312
The field of view of is determined the adjustable range of the teaching position, which will be described later. That is, by using the camera 312 having a wide field of view, the adjustable range of the transport position can be widened.

In this embodiment, among the plurality of teaching positions in the film forming cluster 1, the substrate carry-out position of the pass chamber 15 is set as the origin position for measuring the amount of misalignment of the robot hand unit 24. This is usually the position where the transfer position of the pass chamber 15 is the farthest from the shaft portion 22 of the robot 14 among the many teaching positions in the film forming cluster 1 (that is, the robot arm portion 23 and the robot hand portion 24). Is the position corresponding to the most extended state), and the position where the amount of misalignment due to the collision of the robot hand portion 24 is the largest. Further, in the case of the pass chamber 15, unlike the film forming chamber 11 in which the evaporation source is installed in the lower part of the chamber, there is an advantage that the detection means 31 can be easily installed in the lower part of the substrate stage.

However, the origin position of the present invention is not limited to the substrate carry-out position of the pass chamber 15, and may be a transport position in another chamber (for example, a film forming chamber, a buffer chamber, a mask stock chamber), and may be a transport chamber. It may be any one of the positions (for example, the standby position in the transport chamber). By setting the origin position to any one of the plurality of standby positions in the transport chamber, the detection means 31 can be more easily installed. Further, the origin position of the present invention may be a third position other than the teaching position of the film forming cluster 1.

As described above, according to the present invention, a plurality of marks formed along the longitudinal direction of the robot hand portion or linear marks extending along the longitudinal direction of the robot hand portion are detected on the robot hand portion by detecting means such as a camera. By detecting with, the amount of misalignment at a predetermined position of the robot hand portion (particularly, the amount of misalignment in the rotation angle direction about the virtual axis penetrating the robot hand portion 24) caused by the collision of the robot hand portion or the like is detected. It is measured, and based on the measured position shift amount, the information regarding at least two transfer positions among the information regarding the other plurality of teaching positions (standby position and transfer position) of the transfer operation is corrected. As a result, the device can be restarted only by confirming the teaching position without performing the re-teaching work for a plurality of other teaching positions, and the time required for the re-teaching can be significantly shortened.

<Teaching position adjustment method and device manufacturing method>
Hereinafter, a method of adjusting a plurality of other teaching positions in the film forming cluster 1 based on the amount of displacement of the robot hand unit 24 at the origin position, and a device such as an organic EL display device are manufactured using the method. I will explain how to do it.

First, a plurality of teaching positions (transport position and standby position) to which the substrate 10 should be conveyed are taught to the robot 14. That is, the position information of the plurality of transport positions and the standby positions is stored in the storage unit 251 of the control unit 25 as the teaching position information (S1).

The robot hand portion 24 of the robot 14 is installed at the origin position, which is one of the plurality of teaching positions (S2). Then, the mark unit 241 of the robot hand unit 24 is detected by the detection means 31, and the position information of the robot hand unit 24 calculated based on the detection result is controlled as the reference position information (first information) of the robot hand unit 24. It is stored in the storage unit 251 of the unit 25 (S3).

After that, when the robot hand unit 24 is displaced due to deformation caused by deformation of the robot 14 due to a collision with another part of the film forming cluster 1 during the transport process, the robot hand is used to measure the amount of the displacement. Control is performed to re-install the unit 24 at the origin position (S4). That is, the information on the origin position is input to the drive unit of the robot 14. However, the robot hand unit 24 cannot move to the origin position before the collision due to deformation caused by the collision or the like, and moves to a position deviated from the origin position before the collision. The position of the robot hand unit 24 that has moved to a position deviated from the origin position before the collision is measured again by the detection means 31 detecting the mark unit 241 of the robot hand unit 24 (S5).

The control unit 25 determines the amount of misalignment of the robot hand unit 24 before and after the collision from the information regarding the remeasured position of the robot hand unit 24 and the information regarding the reference position stored in advance in the storage unit 251 of the control unit 25. Is calculated. According to the configuration of the present invention, not only the amount of misalignment in the X-axis direction (first direction) and the Y-axis direction (second direction) but also the amount of misalignment in the θ direction (rotational angle direction) can be measured. Similarly, the amount of misalignment of the robot hand 24 in the Z-axis direction is also measured.

The control unit 25 compares the measured displacement amount with a predetermined threshold value set in advance for each of the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction. If it is determined that the amount of misalignment in any of the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction exceeds a predetermined threshold value in the corresponding direction, the control unit 25 will perform the misalignment in that direction. Based on the quantity, the information regarding at least two transport positions among the position information for the plurality of teaching positions stored in the storage unit 251 is corrected.

For example, the position deviation amount in the corresponding direction calculated by the control unit 25 is added to or subtracted from the position information in the corresponding direction of another teaching position to correct the position information of the corresponding teaching position.

If the position information for all the teaching positions is corrected, the robot 14 is operated based on the corrected teaching positions, and the robot hand unit 24 is corrected to the teaching position to cause the other part of the film forming cluster 1. Check if you can move to the target position properly without collision. If it is confirmed that the robot 14 can perform the transfer operation to the plurality of teaching positions without any problem, the transfer of the substrate and the mask by the robot 14 is restarted.

As described above, according to the teaching position adjusting method of the present invention, instead of performing the teaching work for all of the plurality of teaching positions after the robot 14 collides with other parts of the film forming cluster 1. , Only the amount of misalignment of the robot hand unit 24 at the origin position is measured, and correction is performed for other teaching positions. As a result, the time required for the re-teaching work after the collision of the robot 14 can be significantly reduced.

In this embodiment, it has been described that when the robot hand portion 24 is displaced due to a collision or the like, the position of the mark portion 241 is remeasured after controlling for installing the robot hand portion 24 at the origin position. However, the present invention is not limited to this, and even if a collision or the like does not occur, after the robot 14 has been used for a certain period of time or more, after controlling for installing the robot hand unit 24 at the origin position, the robot hand The position of the unit 24 may be remeasured. As a result, it becomes possible to prevent the robot 14 from colliding with other parts of the film forming cluster 1 due to deformation of the joint portion or the like due to continuous use of the robot 14.

The above embodiment is merely an example of the present invention, and the present invention is not limited to the configuration of the above embodiment and may be appropriately modified within the scope of the present technical idea. Further, the present invention supplies a program (software) that realizes one or more functions of the above-described embodiment to a system or device via a network or various storage media, and one or more of the system or device in a computer. In a process in which a processor reads and executes a program, it may be composed of the program and a computer-readable storage medium for storing the program.

1: Film formation cluster 11: Film formation chamber (processing chamber)
12: Mask stock chamber 13: Transport chamber 14: Robot 15: Pass chamber 16: Buffer chamber 22: Shaft unit 23: Robot arm unit 24: Robot hand unit 25: Control unit 31: Detection means 241: Mark unit

The robot system according to the first aspect of the present invention is
A robot arm unit and a robot hand unit rotatably connected to the robot arm unit.
And, including robots,
A robot system including a control unit that controls the operation of the robot.
The control unit includes a storage unit that stores information regarding a plurality of teaching positions used for controlling the operation of the robot.
The control unit is among the information regarding the plurality of teaching positions stored in the storage unit based on the information regarding the position of the robot hand unit measured with the robot hand unit set at a predetermined position. Correct at least two of each.

The device manufacturing apparatus according to the second aspect of the present invention is
It comprises a plurality of chambers and the robot system for transporting an object to be transported from any one of the plurality of chambers to another chamber.

The device manufacturing method according to the third aspect of the present invention is
A device manufacturing method for manufacturing a device using the robot system.
A step of storing a plurality of teaching positions including a plurality of transfer positions to which the substrate should be conveyed in the storage unit, and
A step of storing the first information regarding the position of the robot hand unit, which is measured by detecting the mark portion of the robot hand unit installed at a predetermined position, in the storage unit.
A step of rediscovering the mark portion of the robot hand portion and measuring the position of the robot hand portion again while controlling the robot hand portion to be installed at the predetermined position.
Based on the first information stored in the storage unit and the second information regarding the position of the robot hand unit measured again, the first direction, the second direction intersecting the first direction, and the first direction. A step of measuring the amount of misalignment of the robot hand portion in the rotation angle direction with the direction and the third direction intersecting the second direction as the rotation axis.
When the amount of misalignment in at least one of the first direction, the second direction, and the angle of rotation direction exceeds a predetermined threshold for the relevant direction, the amount of misalignment in the relevant direction is based on the amount of misalignment. , The step of correcting the plurality of teaching positions, and the like.

The device manufacturing method according to the fourth aspect of the present invention is
A device manufacturing method for manufacturing a device using the robot system.
A robot that conveys a substrate used in the manufacture of the device, and is a robot arm unit.
Using a robot including a robot hand portion connected to the robot arm portion and provided with a mark portion.
A step of storing a plurality of teaching positions including a plurality of transfer positions to which the substrate should be conveyed in the storage unit, and a step of storing the plurality of teaching positions.
A step of measuring the rotation angle of the robot hand portion by detecting the mark portion provided on the robot hand portion by a measuring means with the robot hand portion installed at a predetermined position.
A step of correcting at least two of the information regarding the plurality of teaching positions stored in the storage unit based on the measured information including the information regarding the rotation angle of the robot hand unit is included.

Claims (34)

With the robot arm
A robot hand unit rotatably connected to the robot arm unit,
Including
The robot is characterized in that the robot hand portion is provided with a mark portion used for measuring the rotation angle of the robot hand portion. The robot according to claim 1, wherein the rotation angle is the rotation angle of the robot hand portion about a virtual axis penetrating the robot hand portion. The mark portion is the robot in a first direction intersecting the virtual axis, a second direction intersecting the virtual axis direction and the first direction, and a rotation angle direction centered on the virtual axis. The robot according to claim 2, wherein the robot is used for measuring the amount of misalignment of the hand portion. The mark portion includes a first mark and a second mark provided along a direction from a connecting portion of the robot hand portion with the robot arm portion toward the free end portion of the robot hand portion. The robot according to any one of claims 1 to 3. The robot according to claim 4, wherein the rotation angle is measured by an angle formed by a line segment connecting the first mark and the second mark with respect to a virtual reference line. 13. The robot according to any one of the items. The robot according to claim 6, wherein the rotation angle is measured by an angle formed by the linear mark with respect to a virtual reference line. The robot arm portion includes a first arm having one end rotatably provided, and a second arm having one end rotatably connected to the other end of the first arm. The robot according to any one of 7. A robot including a robot arm portion and a robot hand portion rotatably connected to the robot arm portion,
Including a control unit that controls the operation of the robot.
A robot system characterized in that a mark portion used for measuring the rotation angle of the robot hand portion is installed in the robot hand portion. The robot system according to claim 9, wherein the control unit includes a storage unit that stores information regarding a plurality of teaching positions used for controlling the operation of the robot. The control unit stores the first information regarding the position of the robot hand unit measured by using the mark unit in the storage unit with the robot hand unit installed at a predetermined position. The robot system according to claim 10. The control unit is measured again using the mark unit with the first information stored in the storage unit and the control unit controlling to install the robot hand unit at the predetermined position. Based on the second information regarding the position of the robot hand portion, the rotation angle direction about the virtual axis penetrating the robot hand portion, the first direction intersecting the virtual axis, and the virtual axis and the first first. The robot system according to claim 11, wherein the amount of misalignment in a second direction intersecting the direction is calculated. When the amount of the misalignment in at least one of the first direction, the second direction, and the angle of rotation direction exceeds a predetermined threshold value with respect to the relevant direction, the control unit may perform the misalignment in the relevant direction. The robot system according to claim 12, wherein the information regarding the plurality of teaching positions stored in the storage unit is corrected based on the amount. The control unit is based on information including information on the rotation angle of the robot hand unit measured by a measuring means for measuring the position of the robot hand unit with the robot hand unit installed at a predetermined position. The robot system according to claim 10, wherein at least two of the information regarding the plurality of teaching positions stored in the storage unit are corrected. The robot system according to claim 13, wherein the control unit controls the operation of the robot based on the corrected information regarding the plurality of teaching positions. The robot system according to any one of claims 11 to 15, wherein the predetermined position is any one of the plurality of teaching positions. The 16th aspect of the present invention, wherein the teaching position corresponding to the predetermined position is a position corresponding to the most extended state of the robot arm portion and the robot hand portion among the plurality of teaching positions. Robot system. The mark portion includes a first mark and a second mark provided along a direction from a connecting portion of the robot hand portion with the robot arm portion toward the free end portion of the robot hand portion. The robot system according to any one of claims 9 to 17. The mark portion is characterized by including a linear mark extending along a direction from a connecting portion of the robot hand portion with the robot arm portion toward a free end portion of the robot hand portion. The robot system according to any one of the items. The robot system according to any one of claims 9 to 19, further comprising a detection means for detecting the mark portion of the robot hand portion. A plurality of the detection means are arranged corresponding to the mark portion.
The robot system according to claim 20, wherein the control unit calculates the amount of misalignment of the robot hand unit based on the information obtained by detecting the mark unit by the plurality of detection means. The robot system according to claim 20 or 21, wherein the detection means includes two detection means. The robot system according to any one of claims 20 to 22, wherein the detection means is an image pickup means. The detection means includes an image pickup means arranged corresponding to the mark portion.
6. The robot system described. A device manufacturing apparatus including a plurality of chambers and a robot for transporting an object to be transported from one of the plurality of chambers to another chamber.
The robot includes a robot arm portion and a robot hand portion rotatably connected to the robot arm portion and provided with a mark portion.
The device manufacturing apparatus further includes a control unit for controlling the operation of the robot and a detection means for detecting the mark unit provided on the robot hand unit.
The control unit detects the mark unit using the detection means in a state where the robot hand unit is controlled to be installed at any predetermined position in the plurality of chambers, thereby detecting the robot hand unit. Get information about the rotation angle of the part,
The device manufacturing apparatus, wherein the control unit corrects the transport position of the transported object to the plurality of chambers based on the information regarding the rotation angle. The control unit includes a storage unit that stores information regarding the transfer position of the transported object in each of the plurality of chambers.
25. The device manufacturing equipment described in. The plurality of chambers are a processing chamber in which processing for the first transported body is performed, a second transported body storage chamber in which the second transported body is stored, and an upstream side in the flow direction of the first transported body. Includes a pass chamber and a buffer chamber on the downstream side in the flow direction.
25. The device manufacturing apparatus according to claim 25 or 26, wherein the predetermined position is a transport position in the path chamber. It ’s a device manufacturing method.
A robot that conveys a substrate used for manufacturing the device, and includes a robot arm portion and a robot hand portion connected to the robot arm portion and provided with a mark portion, is used.
A step of storing a plurality of teaching positions including a plurality of transfer positions to which the substrate should be transported in a storage unit of a control unit, and a step of storing the plurality of teaching positions.
A step of storing the first information regarding the position of the robot hand unit, which is measured by detecting the mark portion of the robot hand unit installed at a predetermined position, in the storage unit.
A step of rediscovering the mark portion of the robot hand portion and measuring the position of the robot hand portion again while controlling the robot hand portion to be installed at the predetermined position.
Based on the first information stored in the storage unit and the second information regarding the position of the robot hand unit measured again, the first direction, the second direction intersecting the first direction, and the first direction. A step of measuring the amount of misalignment of the robot hand portion in the rotation angle direction with the direction and the third direction intersecting the second direction as the rotation axis.
When the amount of misalignment in at least one of the first direction, the second direction, and the angle of rotation direction exceeds a predetermined threshold value for the relevant direction, the amount of misalignment is based on the amount of misalignment in the relevant direction. , A device manufacturing method comprising the step of correcting the plurality of teaching positions. It ’s a device manufacturing method.
A robot for transporting a substrate used for manufacturing the device, using a robot including a robot arm portion and a robot hand portion connected to the robot arm portion and provided with a mark portion.
A step of storing a plurality of teaching positions including a plurality of transfer positions to which the substrate should be transported in a storage unit of a control unit, and a step of storing the plurality of teaching positions.
A step of detecting the mark portion provided on the robot hand portion by a measuring means and measuring the rotation angle of the robot hand portion with the robot hand portion installed at a predetermined position.
A step of correcting at least two of the information regarding the plurality of teaching positions stored in the storage unit based on the measured information including the information regarding the rotation angle of the robot hand unit. A device manufacturing method characterized by. The device manufacturing method according to claim 28 or 29, wherein the predetermined position is any one of the plurality of teaching positions. A teaching position adjusting method in a robot system including a robot including a robot hand unit provided with a mark unit and a control unit for controlling the operation of the robot.
A step of storing a plurality of teaching positions of the robot in a storage unit of the control unit, including a plurality of transport positions to which the transported object should be transported.
A step of storing the first information regarding the position of the robot hand unit, which is measured by detecting the mark portion of the robot hand unit installed at a predetermined position, in the storage unit.
A step of rediscovering the mark portion of the robot hand unit and measuring the position of the robot hand unit again while the control unit controls to install the robot hand unit at the predetermined position. ,
Based on the first information and the second information regarding the position of the robot hand unit measured again, the first direction, the second direction intersecting the first direction, the first direction and the second direction, respectively. A step of measuring the amount of misalignment of the robot hand portion in the rotation angle direction with the intersecting third direction as the rotation axis, and
When the amount of misalignment in at least one of the first direction, the second direction, and the angle of rotation exceeds a predetermined threshold value for the relevant direction, the amount of misalignment in the relevant direction is based on the amount of misalignment. , A teaching position adjusting method comprising the step of correcting the plurality of teaching positions. A teaching position adjusting method in a robot system including a robot including a robot hand unit provided with a mark unit and a control unit for controlling the operation of the robot.
A step of storing a plurality of teaching positions of the robot in a storage unit of the control unit, including a plurality of transport positions to which the transported object should be transported.
A step of detecting the mark portion provided on the robot hand portion by a measuring means and measuring the rotation angle of the robot hand portion with the robot hand portion installed at a predetermined position.
A step of correcting at least two of the information regarding the plurality of teaching positions stored in the storage unit based on the measured information including the information regarding the rotation angle of the robot hand unit. Teaching position adjustment method characterized by. A program for causing a computer to execute the teaching position adjusting method according to claim 31 or 32. A computer-readable storage medium in which a program for causing a computer to execute the teaching position adjusting method according to claim 31 or 32 is stored.

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