JP2022044033A5 - - Google Patents
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- JP2022044033A5 JP2022044033A5 JP2021144037A JP2021144037A JP2022044033A5 JP 2022044033 A5 JP2022044033 A5 JP 2022044033A5 JP 2021144037 A JP2021144037 A JP 2021144037A JP 2021144037 A JP2021144037 A JP 2021144037A JP 2022044033 A5 JP2022044033 A5 JP 2022044033A5
- Authority
- JP
- Japan
- Prior art keywords
- profile
- curved
- contour
- substrate body
- partially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 238000007704 wet chemistry method Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025088177A JP2025124754A (ja) | 2020-09-04 | 2025-05-27 | 基板本体の表面をパターニングする方法および基板本体 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20194675.3A EP3964323A1 (de) | 2020-09-04 | 2020-09-04 | Verfahren zum oberflächenstrukturieren eines substratkörpers und substratkörper |
| EP20194675 | 2020-09-04 | ||
| EP21159715 | 2021-02-26 | ||
| EP21159715 | 2021-02-26 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025088177A Division JP2025124754A (ja) | 2020-09-04 | 2025-05-27 | 基板本体の表面をパターニングする方法および基板本体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022044033A JP2022044033A (ja) | 2022-03-16 |
| JP2022044033A5 true JP2022044033A5 (https=) | 2024-11-06 |
Family
ID=77640510
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021144037A Pending JP2022044033A (ja) | 2020-09-04 | 2021-09-03 | 基板本体の表面をパターニングする方法および基板本体 |
| JP2025088177A Pending JP2025124754A (ja) | 2020-09-04 | 2025-05-27 | 基板本体の表面をパターニングする方法および基板本体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025088177A Pending JP2025124754A (ja) | 2020-09-04 | 2025-05-27 | 基板本体の表面をパターニングする方法および基板本体 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US12486197B2 (https=) |
| EP (1) | EP3964324A1 (https=) |
| JP (2) | JP2022044033A (https=) |
| KR (1) | KR102823457B1 (https=) |
| CN (1) | CN114141606A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210141570A (ko) | 2019-03-21 | 2021-11-23 | 코닝 인코포레이티드 | 환형 볼텍스 레이저 빔을 사용하는 유리-기반 물체에 마이크로-홀을 형성하기 위한 시스템 및 방법 |
| WO2021003018A1 (en) | 2019-07-01 | 2021-01-07 | Corning Incorporated | Method of laser processing of transparent workpieces using curved quasi-non-diffracting laser beams |
| US12434331B2 (en) | 2020-09-11 | 2025-10-07 | Corning Incorporated | Laser forming non-square edges in transparent workpieces using modified airy beams |
| US12006245B2 (en) * | 2020-09-11 | 2024-06-11 | Corning Incorporated | Laser forming non-square edges in transparent workpieces using low intensity airy beams |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919607A (en) * | 1995-10-26 | 1999-07-06 | Brown University Research Foundation | Photo-encoded selective etching for glass based microtechnology applications |
| CN1287442C (zh) * | 2002-07-30 | 2006-11-29 | 新浪潮研究公司 | 利用固态uv激光器对蓝宝石衬底划线 |
| JP2005219960A (ja) * | 2004-02-05 | 2005-08-18 | Nishiyama Stainless Chem Kk | ガラスの切断分離方法、フラットパネルディスプレイ用ガラス基板、フラットパネルディスプレイ |
| EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
| US10226837B2 (en) * | 2013-03-15 | 2019-03-12 | Nlight, Inc. | Thermal processing with line beams |
| JP6383977B2 (ja) * | 2014-06-27 | 2018-09-05 | Ａｇｃ株式会社 | ガラス基板の切断方法 |
| US9757815B2 (en) * | 2014-07-21 | 2017-09-12 | Rofin-Sinar Technologies Inc. | Method and apparatus for performing laser curved filamentation within transparent materials |
| EP3854513B1 (de) | 2014-11-19 | 2024-01-03 | TRUMPF Laser- und Systemtechnik GmbH | System zur asymmetrischen optischen strahlformung |
| DE102014116957A1 (de) | 2014-11-19 | 2016-05-19 | Trumpf Laser- Und Systemtechnik Gmbh | Optisches System zur Strahlformung |
| DE102014226649A1 (de) * | 2014-12-19 | 2016-06-23 | Universität Ulm | Verfahren zur Herstellung eines mit Nanodrähten strukturierten Substrats, hergestelltes Substrat und Verwendung des Substrats |
| US10494290B2 (en) * | 2016-01-14 | 2019-12-03 | Corning Incorporated | Dual-airy-beam systems and methods for processing glass substrates |
| JP2018070429A (ja) * | 2016-11-02 | 2018-05-10 | ウシオ電機株式会社 | 穴あき基板の製造方法、微細構造体の製造方法、およびレーザ改質装置 |
| JP2020531392A (ja) * | 2017-08-25 | 2020-11-05 | コーニング インコーポレイテッド | アフォーカルビーム調整アセンブリを用いて透明被加工物をレーザ加工するための装置及び方法 |
| US20190119150A1 (en) * | 2017-10-20 | 2019-04-25 | Corning Incorporated | Methods for laser processing transparent workpieces using pulsed laser beam focal lines and chemical etching solutions |
| JP6938021B2 (ja) * | 2017-10-31 | 2021-09-22 | 株式会社ブイ・テクノロジー | レーザリフトオフによる加工方法及び平坦化治具 |
| JP2019108255A (ja) * | 2017-12-20 | 2019-07-04 | 株式会社Ｎｓｃ | ガラス基板製造方法 |
| JP6695318B2 (ja) * | 2017-12-27 | 2020-05-20 | Hoya株式会社 | 円盤状ガラス基板の製造方法、薄板ガラス基板の製造方法、導光板の製造方法及び円盤状ガラス基板 |
| JP7259845B2 (ja) * | 2018-03-26 | 2023-04-18 | Ａｇｃ株式会社 | 拡散素子、照明モジュールおよび非球面レンズの加工方法 |
| DE102018110211A1 (de) * | 2018-04-27 | 2019-10-31 | Schott Ag | Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material |
| WO2021076432A1 (en) * | 2019-10-14 | 2021-04-22 | Corning Incorporated | Foldable apparatus and methods of making |
| KR102728003B1 (ko) * | 2019-11-14 | 2024-11-12 | 삼성디스플레이 주식회사 | 폴더블 유리 기판, 및 이를 포함하는 폴더블 표시 장치 |
-
2021
- 2021-09-03 US US17/466,688 patent/US12486197B2/en active Active
- 2021-09-03 EP EP21194903.7A patent/EP3964324A1/de active Pending
- 2021-09-03 JP JP2021144037A patent/JP2022044033A/ja active Pending
- 2021-09-03 KR KR1020210117522A patent/KR102823457B1/ko active Active
- 2021-09-06 CN CN202111037013.2A patent/CN114141606A/zh active Pending
-
2025
- 2025-05-27 JP JP2025088177A patent/JP2025124754A/ja active Pending
- 2025-10-29 US US19/372,493 patent/US20260055023A1/en active Pending
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