JP2022038715A - スピンドルユニットおよび加工装置 - Google Patents
スピンドルユニットおよび加工装置 Download PDFInfo
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- JP2022038715A JP2022038715A JP2020143348A JP2020143348A JP2022038715A JP 2022038715 A JP2022038715 A JP 2022038715A JP 2020143348 A JP2020143348 A JP 2020143348A JP 2020143348 A JP2020143348 A JP 2020143348A JP 2022038715 A JP2022038715 A JP 2022038715A
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- spindle
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- 238000000034 method Methods 0.000 claims description 8
- 238000009530 blood pressure measurement Methods 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000003566 sealing material Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/02—Driving main working members
- B23Q5/04—Driving main working members rotary shafts, e.g. working-spindles
- B23Q5/10—Driving main working members rotary shafts, e.g. working-spindles driven essentially by electrical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C17/00—Sliding-contact bearings for exclusively rotary movement
- F16C17/04—Sliding-contact bearings for exclusively rotary movement for axial load only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2233/00—Monitoring condition, e.g. temperature, load, vibration
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Turning (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
また、本スピンドルユニットでは、調整部により、研削加工の際にスラスト隙間を通常の距離となるように狭めることができる。したがって、スピンドルユニットに、高剛性のスラストベアリングを形成することができる。
基台10の上面側には、開口部13が設けられている。そして、開口部13内には、保持手段としてのチャックテーブル31が配置されている。チャックテーブル31は、ウェーハ100を保持する保持面32を備えている。
調整部120は、スピンドルハウジング71のスラスト凹部95内に設けられている。スラスト凹部95および調整部120は、スピンドルハウジング71の環状部91に、スピンドル72の第1円板部81および第2円板部82に対向するように形成されている。
この可動部表面124には、第1円板部81(第2円板部82)の表面である円板部表面83が対向している。この円板部表面83は、スピンドル72の軸方向に直交する方向のスピンドル72の外側面の一例である。
なお、予め所定の圧力値を設定した設定値を備え、アイドリング開始時に圧力測定部116によって測定されるエア圧力が設定値になるようスラスト隙間301の距離を調整してもよい。
なお、電圧制御部141は、圧電アクチュエータ121に供給する直流電力の電圧を各々制御し、スピンドルハウジング71の環状部91の上面に形成されるスラストベアリングのスラスト隙間301の距離と下面に形成されるスラストベアリングのスラスト隙間301の距離とを均一にする。
調整部150は、スピンドル72のスラスト凹部151内に設けられている。スラスト凹部151および調整部150は、スピンドル72の第1円板部81および第2円板部82に、スピンドルハウジング71の環状部91に対向するように形成されている。
なお、第1接点146と第2接点145との接点構造は、たとえば、直流モータの接点構造と同様であってよい。
31:チャックテーブル、32:保持面、
50:研削送り手段、78:スピンドルユニット、
70:研削手段、71:スピンドルハウジング、74:ホイールマウント、
75:研削ホイール、76:ホイール基台、77:研削砥石、
72:スピンドル、81:第1円板部、82:第2円板部、
83:円板部表面、84:ラジアル側面、
73:回転モータ、85:ロータ、86:ステータ、
87:冷却ジャケット、88:冷却水路、
91:環状部、92:環状部表面、
93:ラジアル側エア噴出口、
95:スラスト凹部、96:底面、97:側面、
110:エア供給源、111:エア供給路、
115:圧力素子、116:圧力測定部、
120:調整部、121:圧電アクチュエータ、125:シール材、
122:可動部、124:可動部表面、123:スラスト側エア噴出口、
130:研削水源、131:研削水導入路、132:研削水路、
140:直流電源、141:電圧制御部、142:電力線、143:電力線、
145:第2接点、146:第1接点、
150:調整部、151:スラスト凹部、152:底面、153:側面、
300:ラジアル隙間、301:スラスト隙間
Claims (4)
- 先端に加工具を装着するスピンドルと、該スピンドルを回転可能にエアによって非接触で支持するスラストベアリングおよびラジアルベアリングを含むスピンドルハウジングと、を備えるスピンドルユニットであって、
該スラストベアリングは、
該スピンドルの軸方向に直交する方向の該スピンドルの外側面と、該スピンドルハウジングの内側面との隙間にエアを供給するエア供給部と、
該スピンドルの外側面に垂直な方向における該隙間の距離を調整可能な調整部と、
を備えるスピンドルユニット。 - 該調整部は、
該スピンドルに配置され、該スラストベアリングを形成する該スピンドルの外側面を該スピンドルの軸方向に移動させる圧電アクチュエータを備える、
請求項1記載のスピンドルユニット。 - 該調整部は、
該スピンドルハウジングに配置され、該スラストベアリングを形成する該スピンドルハウジングの内側面を該スピンドルの軸方向に移動させる圧電アクチュエータを備える、
請求項1記載のスピンドルユニット。 - 加工具を先端に装着したスピンドルが回転可能に支持されている請求項2または3記載のスピンドルユニットと、被加工物を保持する保持手段とを備え、該スピンドルを回転させて、被加工物を該加工具によって加工する加工装置であって、
該スラストベアリングが形成されている該隙間のエア圧力を測定する圧力測定部と、
該圧力測定部が測定した圧力値が予め設定された値になるように該隙間の距離を調整するために、該圧電アクチュエータに供給する直流電力の電圧を制御する電圧制御部と、
を備える加工装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020143348A JP7507636B2 (ja) | 2020-08-27 | スピンドルユニットおよび加工装置 | |
KR1020210099290A KR20220027756A (ko) | 2020-08-27 | 2021-07-28 | 스핀들 유닛 및 가공 장치 |
US17/398,425 US20220063055A1 (en) | 2020-08-27 | 2021-08-10 | Spindle unit and processing apparatus |
CN202110953028.7A CN114102308A (zh) | 2020-08-27 | 2021-08-19 | 主轴单元和加工装置 |
TW110131291A TW202209469A (zh) | 2020-08-27 | 2021-08-24 | 主軸單元及加工裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020143348A JP7507636B2 (ja) | 2020-08-27 | スピンドルユニットおよび加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022038715A true JP2022038715A (ja) | 2022-03-10 |
JP7507636B2 JP7507636B2 (ja) | 2024-06-28 |
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Also Published As
Publication number | Publication date |
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CN114102308A (zh) | 2022-03-01 |
KR20220027756A (ko) | 2022-03-08 |
US20220063055A1 (en) | 2022-03-03 |
TW202209469A (zh) | 2022-03-01 |
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