JP2022025428A - 基板処理装置および基板搬送方法 - Google Patents
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Abstract
【解決手段】基板処理装置100の第2搬送機構23は、第1非共用ハンドH_Fと、第2非共用ハンドH_Sと、M個の共用ハンドH_1~H_Mとを備える。1搬送サイクルにおいて、M個の共用ハンドH_1~H_Mは、処理前の基板Wと処理後の基板Wとを異なるタイミングで支持する。1搬送サイクルにおいて、第1非共用ハンドH_Fは、処理前の基板Wのみを支持する。1搬送サイクルにおいて、第2非共用ハンドH_Sは、処理後の基板Wのみを支持する。第2搬送機構23が基板載置部29からN枚の基板Wを受け取った状態において、第2非共用ハンドH_Sは基板Wを支持しておらず、M個の共用ハンドH_1~H_Mおよび第1非共用ハンドH_Fは基板Wを支持している。
【選択図】図13
Description
9…第1ハンド
21、21A、21B、21_1~21_N…処理ユニット
23、23L、23U…第2搬送機構(搬送機構)
25、HA~HD、H_F、H_S、H_1~H-M
…第2ハンド(ハンド、第1非共用ハンド、第2非共用ハンド、共用ハンド)
29、29L、29U…基板載置部
100…基板処理装置
200…制御部
Claims (14)
- 複数枚の基板が載置される基板載置部と、
各々が前記基板を処理する複数個の処理ユニットと、
前記基板載置部と前記処理ユニットとの間で前記基板を搬送する搬送機構と
を備え、
1搬送サイクルにおいて、前記搬送機構は、前記基板載置部から前記処理ユニットによる処理前のN(Nは2以上の整数)枚の前記基板を受け取って、前記N枚の基板を前記複数個の処理ユニットのうちのN個の処理ユニットに搬入するとともに、前記N個の処理ユニットによる処理後のN枚の前記基板を前記N個の処理ユニットから搬出して、前記N枚の基板を前記基板載置部に渡し、
前記搬送機構は、各々が前記基板を支持する複数個のハンドを備え、
前記複数個のハンドは、第1非共用ハンドと、第2非共用ハンドと、前記第1非共用ハンドと前記第2非共用ハンドとの間に配置されるM(Mは1以上の整数)個の共用ハンドとを含み、
前記第1非共用ハンドと前記M個の共用ハンドと前記第2非共用ハンドとは、前記第1非共用ハンドから前記第2非共用ハンドまで上下方向に沿って連続して配置され、
前記1搬送サイクルにおいて、前記M個の共用ハンドは、前記処理ユニットによる処理前の前記基板と処理後の前記基板とを異なるタイミングで支持し、
前記1搬送サイクルにおいて、前記第1非共用ハンドは、前記処理ユニットによる処理前の前記基板のみを支持し、
前記1搬送サイクルにおいて、前記第2非共用ハンドは、前記処理ユニットによる処理後の前記基板のみを支持し、
前記搬送機構が前記基板載置部から前記N枚の基板を受け取った状態において、前記第2非共用ハンドは前記基板を支持しておらず、前記M個の共用ハンドおよび前記第1非共用ハンドは前記基板を支持している、基板処理装置。 - 前記1搬送サイクルにおいて、前記M個の共用ハンドおよび前記第1非共用ハンドは、前記基板載置部から前記基板を受け取り、
前記1搬送サイクルにおいて、前記第2非共用ハンドは、前記処理ユニットから処理後の前記基板を搬出し、
前記1搬送サイクルにおいて、前記M個の共用ハンドのうち前記第2非共用ハンドに隣接する共用ハンドは、前記第2非共用ハンドによって前記基板が搬出された前記処理ユニットに、処理前の前記基板を搬入し、
前記1搬送サイクルにおいて、前記第2非共用ハンドに隣接する前記共用ハンドは、前記共用ハンドによって処理前の前記基板が搬入された前記処理ユニットと異なる前記処理ユニットから、処理後の前記基板を搬出する、請求項1に記載の基板処理装置。 - 前記M個の共用ハンドと前記第1非共用ハンドと前記第2非共用ハンドとの合計個数は、N+1個、であり、
M=N-1である、請求項1または請求項2に記載の基板処理装置。 - 前記複数個のハンドの総数は、2N個である、請求項3に記載の基板処理装置。
- N=2、である請求項4に記載の基板処理装置。
- 前記搬送機構を制御する制御部をさらに備え、
前記搬送機構は、前記制御部の制御を受けて、第1基板搬送モードおよび第2基板搬送モードのいずれかのモードで動作し、
前記第1基板搬送モードは、前記2N個のハンドのうち前記N+1個のハンドが、前記M個の共用ハンド、前記第1非共用ハンド、および、前記第2非共用ハンドとして使用されるモードであり、
前記第2基板搬送モードは、前記2N個のハンドのうち、N個のハンドが前記処理ユニットによる処理前の前記基板のみを支持するために使用されるとともに、他のN個のハンドが前記処理ユニットによる処理後の前記基板のみを支持するために使用されるモードである、請求項4または請求項5に記載の基板処理装置。 - 前記複数個のハンドの総数は、N+1個である、請求項3に記載の基板処理装置。
- 複数枚の基板が載置される基板載置部と前記基板を処理する複数個の処理ユニットとの間で前記基板を搬送する搬送機構によって実行される基板搬送方法であって、
1搬送サイクルにおいて、前記基板載置部から前記処理ユニットによる処理前のN(Nは2以上の整数)枚の前記基板を受け取って、前記N枚の基板を前記複数個の処理ユニットのうちのN個の処理ユニットに搬入するとともに、前記N個の処理ユニットによる処理後のN枚の前記基板を前記N個の処理ユニットから搬出して、前記N枚の基板を前記基板載置部に渡す工程を含み、
前記搬送機構は、各々が前記基板を支持する複数個のハンドを備え、
前記複数個のハンドは、第1非共用ハンドと、第2非共用ハンドと、前記第1非共用ハンドと前記第2非共用ハンドとの間に配置されるM(Mは1以上の整数)個の共用ハンドとを含み、
前記第1非共用ハンドと前記M個の共用ハンドと前記第2非共用ハンドとは、前記第1非共用ハンドから前記第2非共用ハンドまで上下方向に沿って連続して配置され、
前記N枚の基板を前記基板載置部に渡す前記工程では、
前記1搬送サイクルにおいて、前記M個の共用ハンドは、前記処理ユニットによる処理前の前記基板と処理後の前記基板とを異なるタイミングで支持し、
前記1搬送サイクルにおいて、前記第1非共用ハンドは、前記処理ユニットによる処理前の前記基板のみを支持し、
前記1搬送サイクルにおいて、前記第2非共用ハンドは、前記処理ユニットによる処理後の前記基板のみを支持し、
前記搬送機構が前記基板載置部から前記N枚の基板を受け取った状態において、前記第2非共用ハンドは前記基板を支持しておらず、前記M個の共用ハンドおよび前記第1非共用ハンドは前記基板を支持している、基板搬送方法。 - 前記N枚の基板を前記基板載置部に渡す前記工程では、
前記1搬送サイクルにおいて、前記M個の共用ハンドおよび前記第1非共用ハンドは、前記基板載置部から前記基板を受け取り、
前記1搬送サイクルにおいて、前記第2非共用ハンドは、前記処理ユニットから処理後の前記基板を搬出し、
前記1搬送サイクルにおいて、前記M個の共用ハンドのうち前記第2非共用ハンドに隣接する共用ハンドは、前記第2非共用ハンドによって前記基板が搬出された前記処理ユニットに、処理前の前記基板を搬入し、
前記1搬送サイクルにおいて、前記第2非共用ハンドに隣接する前記共用ハンドは、前記共用ハンドによって処理前の前記基板が搬入された前記処理ユニットと異なる前記処理ユニットから、処理後の前記基板を搬出する、請求項8に記載の基板搬送方法。 - 前記M個の共用ハンドと前記第1非共用ハンドと前記第2非共用ハンドとの合計個数は、N+1個、であり、
M=N-1である、請求項8または請求項9に記載の基板搬送方法。 - 前記複数個のハンドの総数は、2N個である、請求項10に記載の基板搬送方法。
- N=2、である、請求項11に記載の基板搬送方法。
- 前記搬送機構は、第1基板搬送モードおよび第2基板搬送モードのいずれかのモードで動作し、
前記第1基板搬送モードは、前記2N個のハンドのうち前記N+1個のハンドが、前記M個の共用ハンド、前記第1非共用ハンド、および、前記第2非共用ハンドとして使用されるモードであり、
前記第2基板搬送モードは、前記2N個のハンドのうち、N個のハンドが前記処理ユニットによる処理前の前記基板のみを支持するために使用されるとともに、他のN個のハンドが前記処理ユニットによる処理後の前記基板のみを支持するために使用されるモードである、請求項11または請求項12に記載の基板搬送方法。 - 前記複数個のハンドの総数は、N+1個である、請求項10に記載の基板搬送方法。
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