JP2022007385A - 蓋部材の製造方法 - Google Patents
蓋部材の製造方法 Download PDFInfo
- Publication number
- JP2022007385A JP2022007385A JP2020110321A JP2020110321A JP2022007385A JP 2022007385 A JP2022007385 A JP 2022007385A JP 2020110321 A JP2020110321 A JP 2020110321A JP 2020110321 A JP2020110321 A JP 2020110321A JP 2022007385 A JP2022007385 A JP 2022007385A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- lid member
- substrate
- main body
- bonding material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 109
- 239000002184 metal Substances 0.000 claims abstract description 109
- 239000000463 material Substances 0.000 claims abstract description 55
- 239000002245 particle Substances 0.000 claims abstract description 34
- 239000002923 metal particle Substances 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 66
- 238000000034 method Methods 0.000 claims description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 13
- 229910015363 Au—Sn Inorganic materials 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 69
- 238000001816 cooling Methods 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 10
- 238000005304 joining Methods 0.000 description 10
- 239000002344 surface layer Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
- H01L23/08—Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Led Device Packages (AREA)
Abstract
Description
7 本体部
7a 第一主面
8 金属層
9 接合部
S2 金属層形成工程
S3 接合部形成工程
Claims (4)
- パッケージの基体を覆う蓋部材を製造する方法であって、
前記蓋部材は、本体部を備え、
金属粒子を含む金属系接合材を前記本体部の表面に塗布する塗布工程と、
前記金属系接合材に熱処理を施す熱処理工程と、を備え、
前記金属粒子の粒子径D10が5μm以上、粒子径D90が50μm以下であることを特徴とする蓋部材の製造方法。 - 前記金属粒子は、Au-Sn合金を含む請求項1に記載の蓋部材の製造方法。
- 前記塗布工程の前に、前記本体部の前記表面に金属層を形成する金属層形成工程を備え、
前記塗布工程では、前記金属層に重なるように前記金属系接合材を塗布する請求項1又は2に記載の蓋部材の製造方法。 - 前記本体部は、石英又は石英ガラスにより構成される請求項1から3のいずれか一項に記載の蓋部材の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020110321A JP7473877B2 (ja) | 2020-06-26 | 2020-06-26 | 蓋部材の製造方法 |
CN202180037875.7A CN115668482A (zh) | 2020-06-26 | 2021-06-16 | 盖构件的制造方法 |
KR1020227033333A KR20230028210A (ko) | 2020-06-26 | 2021-06-16 | 덮개 부재의 제조 방법 |
PCT/JP2021/022926 WO2021261356A1 (ja) | 2020-06-26 | 2021-06-16 | 蓋部材の製造方法 |
TW110122927A TW202201662A (zh) | 2020-06-26 | 2021-06-23 | 蓋構件之製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020110321A JP7473877B2 (ja) | 2020-06-26 | 2020-06-26 | 蓋部材の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022007385A true JP2022007385A (ja) | 2022-01-13 |
JP7473877B2 JP7473877B2 (ja) | 2024-04-24 |
Family
ID=79281317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020110321A Active JP7473877B2 (ja) | 2020-06-26 | 2020-06-26 | 蓋部材の製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7473877B2 (ja) |
KR (1) | KR20230028210A (ja) |
CN (1) | CN115668482A (ja) |
TW (1) | TW202201662A (ja) |
WO (1) | WO2021261356A1 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017154329A1 (ja) | 2016-03-07 | 2017-09-14 | 株式会社村田製作所 | 接合体の製造方法及び接合材料 |
CN109475983B (zh) | 2016-08-02 | 2024-01-26 | 株式会社弘辉 | 焊膏用助焊剂和焊膏 |
JP6294417B2 (ja) | 2016-09-01 | 2018-03-14 | 日機装株式会社 | 光半導体装置および光半導体装置の製造方法 |
-
2020
- 2020-06-26 JP JP2020110321A patent/JP7473877B2/ja active Active
-
2021
- 2021-06-16 WO PCT/JP2021/022926 patent/WO2021261356A1/ja active Application Filing
- 2021-06-16 KR KR1020227033333A patent/KR20230028210A/ko unknown
- 2021-06-16 CN CN202180037875.7A patent/CN115668482A/zh active Pending
- 2021-06-23 TW TW110122927A patent/TW202201662A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN115668482A (zh) | 2023-01-31 |
JP7473877B2 (ja) | 2024-04-24 |
TW202201662A (zh) | 2022-01-01 |
KR20230028210A (ko) | 2023-02-28 |
WO2021261356A1 (ja) | 2021-12-30 |
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