JP2021530860A - 光学配置とレーザシステム - Google Patents
光学配置とレーザシステム Download PDFInfo
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- JP2021530860A JP2021530860A JP2020569087A JP2020569087A JP2021530860A JP 2021530860 A JP2021530860 A JP 2021530860A JP 2020569087 A JP2020569087 A JP 2020569087A JP 2020569087 A JP2020569087 A JP 2020569087A JP 2021530860 A JP2021530860 A JP 2021530860A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 224
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- 238000005859 coupling reaction Methods 0.000 claims description 12
- 238000002407 reforming Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
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- 230000005540 biological transmission Effects 0.000 claims description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0911—Anamorphotic systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (16)
- 少なくとも2つのレーザ光源(12a〜12f)からのレーザビーム(14f)をビームウェスト(46)を有する結合ビーム(18)に変換するための光学配置(16)であって、
少なくとも2つの別個の光学チャネル(22a〜22c)がレーザビーム(14a〜14c)のために設けられるように設計された光ビーム案内システム(20)を備え、
各光学チャネル(22a〜22c)は、関連する光学チャネル(22a〜22c)のチャネル出力ビーム(38a〜38c)を出射するための光学終端手段(36a〜36c)を備え、
光学チャネル(22a〜22c)のうちのただ1つに関連付けられた少なくとも1つの偏向体(42a〜42c)が設けられ、ここで前記偏向体(42a〜42c)は、関連する光学チャネル(22a〜22c)のチャネル出力ビーム(38a〜38c)のみが捕捉され、捕捉されたチャネル出力ビーム(38a〜38c)のみが焦点領域(44)の方向に偏向されるように設計されている
光学配置(16)。 - 高々1つの偏向体(42a〜42c)が、1つの光学チャネル(22a〜22c)に関連している、請求項1に記載の光学配置(16)。
- 1つの偏向体(42a〜42c)が光学チャネル(22a〜22c)毎に設けられている請求項1又は請求項2に記載の光学配置(16)。
- 前記光学チャネル(22a、22c)の光終端手段(36a、36c)を通って出る前記チャネル出力ビーム(38a、38c)が、前記焦点領域(44)の方向を指さない伝搬方向を有するときにのみ、偏向体(42a〜42c)が、光学チャネル(22a〜22c)に関連付けられる請求項1又は請求項2に記載の光配列(16)。
- 前記光ビーム案内システム(20)は、前記光学チャネル(22a〜22c)から出射する前記チャネル出力ビーム(38a〜38c)が全て、共通の主方向(40)に平行な伝搬方向を有するように設計されている請求項1〜4のいずれか1項に記載の光学配置(16)。
- 前記偏向体(42a〜42c)は、光伝送システムとして設計され、前記捕捉されたチャネル出力ビーム(38a〜38c)は、光入射面(48)を介して前記偏向体(42a〜42c)内に放射され、光出射面(50)を介して前記偏向体(42a〜42c)から出射する請求項1〜5のいずれか1項に記載の光学装置(16)。
- 前記光入射面(48)は、前記光出射面(50)に対して斜めに延びている請求項1〜6のいずれか1項に記載の光学配置(16)。
- 前記偏向体(42a〜42c)は、前記レーザビームに対して透明な材料からモノリシックに形成されている請求項1〜7のいずれか1項に記載の光学配置(16)。
- 前記偏向体(42a〜42c)は、捕捉されたチャネル出力ビーム(38a〜38c)の発散が、前記偏向体(42a〜42c)によって偏向される前後で変わらないように設計されていることを特徴とする請求項1〜8のいずれか1項に記載の光学配置(16)。
- 前記偏向体(42a〜42c)は、光プリズムとして設計されている請求項1〜9のいずれか1項に記載の光学配置(16)。
- 前記偏向体(42a〜42c)は、光反射システムとして設計されている請求項1〜10の何れか1項に記載の光学配置(16)。
- ビーム経路に配置されるレンズ手段(52)がビームウェスト(46)に続いて、又は前記ビームウェスト(46)の内部に設けられている請求項1〜11のいずれか1項に記載の光学配置(16)。
- 前記レンズ手段は、少なくとも一方の側に焦点面(54)又は焦点線を有するコリメータレンズ(52)として設計され、前記コリメータレンズ(52)は、前記焦点面(54)又は焦点線が前記焦点領域(44)を通って延びるように配置される請求項1〜12のいずれか1項に記載の光学配置(16)。
- 各光学チャネル(22a〜22c)内の光ビーム誘導系(20)は、ビーム形成のための望遠鏡(32)を含み、光学終端手段(36a〜36c)は、各光学チャネル(22a〜22c)内の望遠鏡(32)の構成要素である請求項1〜13のいずれか1項に記載の光学装置(16)。
- 望遠鏡(32)がアナモルフィック望遠鏡として設計されていることを特徴とする請求項1〜14のいずれか1項に記載の光学配置(16)。
- 直線ビーム断面を有する有用な光分布(L)を生成するためのレーザシステム(10)であって、
少なくとも2つのレーザ光源(12a〜12f)であって各レーザ光源(12a〜12f)が少なくとも1つのレーザビーム(14a〜14f)を放射するように設計されているレーザ光源(12a〜12f)と、
前記レーザ光源(12a〜12f)のレーザビーム(14a〜14f)が結合ビーム(18)に変換されるように配置された請求項1〜15のいずれか1項に記載の光学配置(16)と、
結合ビーム(18)から線強度プロファイルを形成するための光学的再形成システム(26)であって、前記結合ビーム(18)のビームウェスト(46)の後方のビーム経路に配置される光学的再形成システム(26)と、
を備えるレーザシステム(10)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018115102.0 | 2018-06-22 | ||
DE102018115102.0A DE102018115102A1 (de) | 2018-06-22 | 2018-06-22 | Optische Anordnung und Lasersystem |
PCT/EP2019/064582 WO2019243043A1 (de) | 2018-06-22 | 2019-06-05 | Optische anordnung und lasersystem |
Publications (2)
Publication Number | Publication Date |
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JP2021530860A true JP2021530860A (ja) | 2021-11-11 |
JP7431756B2 JP7431756B2 (ja) | 2024-02-15 |
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JP2020569087A Active JP7431756B2 (ja) | 2018-06-22 | 2019-06-05 | 光学配置とレーザシステム |
Country Status (7)
Country | Link |
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US (1) | US20210103156A1 (ja) |
JP (1) | JP7431756B2 (ja) |
KR (1) | KR20210022040A (ja) |
CN (1) | CN112313559B (ja) |
DE (1) | DE102018115102A1 (ja) |
TW (1) | TWI743493B (ja) |
WO (1) | WO2019243043A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113991406B (zh) * | 2021-10-27 | 2022-07-15 | 光惠(上海)激光科技有限公司 | 一种高功率光纤激光器 |
CN114594610B (zh) * | 2022-03-31 | 2023-10-27 | 青岛海信激光显示股份有限公司 | 投影光源及投影设备 |
Citations (5)
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JPH0679920A (ja) * | 1992-06-03 | 1994-03-22 | Eastman Kodak Co | 多重ダイオードレーザを使用する印刷システム |
US5475415A (en) * | 1992-06-03 | 1995-12-12 | Eastman Kodak Company | Optical head and printing system forming interleaved output laser light beams |
JP2008071798A (ja) * | 2006-09-12 | 2008-03-27 | Sharp Corp | レーザ光源装置 |
JP2008524662A (ja) * | 2004-12-22 | 2008-07-10 | カール・ツアイス・レーザー・オプティクス・ゲーエムベーハー | 線ビームを生成するための光学照射系 |
WO2018019674A1 (de) * | 2016-07-25 | 2018-02-01 | Trumpf Laser Gmbh | Optische anordnung mit scheibenförmigem laseraktiven medium |
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US5513201A (en) * | 1993-04-30 | 1996-04-30 | Nippon Steel Corporation | Optical path rotating device used with linear array laser diode and laser apparatus applied therewith |
JP3098200B2 (ja) * | 1996-12-27 | 2000-10-16 | 昭和オプトロニクス株式会社 | レーザビームの補正方法及び装置 |
JP2002239773A (ja) * | 2000-12-11 | 2002-08-28 | Matsushita Electric Ind Co Ltd | 半導体レーザー加工装置および半導体レーザー加工方法 |
JP3934536B2 (ja) * | 2001-11-30 | 2007-06-20 | 株式会社半導体エネルギー研究所 | レーザ照射装置およびレーザ照射方法、並びに半導体装置の作製方法 |
JP4226482B2 (ja) * | 2003-02-03 | 2009-02-18 | 富士フイルム株式会社 | レーザ光合波装置 |
DE102008027229B4 (de) | 2008-06-06 | 2016-06-30 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
DE102009010693A1 (de) * | 2009-02-26 | 2010-09-02 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Homogenisierung von Laserstrahlung |
PL217893B1 (pl) * | 2009-10-10 | 2014-08-29 | Inst Wysokich Ciśnień Polskiej Akademii Nauk | Sposób i urządzenie do wprowadzania do jednego światłowodu światła laserowego pochodzącego z co najmniej dwóch źródeł laserowych |
TWI573650B (zh) * | 2011-12-16 | 2017-03-11 | 應用材料股份有限公司 | 輻射源及用於結合同調光束的光束組合器 |
KR20170028943A (ko) * | 2014-07-14 | 2017-03-14 | 코닝 인코포레이티드 | 조정가능한 레이저 빔 촛점 라인을 사용하여 투명한 재료를 처리하는 방법 및 시스템 |
EP3491450B1 (en) | 2016-07-27 | 2024-02-28 | TRUMPF Laser GmbH | Laser line illumination |
-
2018
- 2018-06-22 DE DE102018115102.0A patent/DE102018115102A1/de active Granted
-
2019
- 2019-06-05 JP JP2020569087A patent/JP7431756B2/ja active Active
- 2019-06-05 WO PCT/EP2019/064582 patent/WO2019243043A1/de active Application Filing
- 2019-06-05 KR KR1020217000498A patent/KR20210022040A/ko not_active Application Discontinuation
- 2019-06-05 CN CN201980041245.XA patent/CN112313559B/zh active Active
- 2019-06-17 TW TW108120934A patent/TWI743493B/zh active
-
2020
- 2020-12-16 US US17/123,139 patent/US20210103156A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0679920A (ja) * | 1992-06-03 | 1994-03-22 | Eastman Kodak Co | 多重ダイオードレーザを使用する印刷システム |
US5475415A (en) * | 1992-06-03 | 1995-12-12 | Eastman Kodak Company | Optical head and printing system forming interleaved output laser light beams |
JP2008524662A (ja) * | 2004-12-22 | 2008-07-10 | カール・ツアイス・レーザー・オプティクス・ゲーエムベーハー | 線ビームを生成するための光学照射系 |
JP2008071798A (ja) * | 2006-09-12 | 2008-03-27 | Sharp Corp | レーザ光源装置 |
WO2018019674A1 (de) * | 2016-07-25 | 2018-02-01 | Trumpf Laser Gmbh | Optische anordnung mit scheibenförmigem laseraktiven medium |
Also Published As
Publication number | Publication date |
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US20210103156A1 (en) | 2021-04-08 |
JP7431756B2 (ja) | 2024-02-15 |
CN112313559A (zh) | 2021-02-02 |
TW202000355A (zh) | 2020-01-01 |
WO2019243043A1 (de) | 2019-12-26 |
DE102018115102A1 (de) | 2019-12-24 |
KR20210022040A (ko) | 2021-03-02 |
CN112313559B (zh) | 2024-05-03 |
TWI743493B (zh) | 2021-10-21 |
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