CN101878444B - 波束成形设备 - Google Patents
波束成形设备 Download PDFInfo
- Publication number
- CN101878444B CN101878444B CN2008801180470A CN200880118047A CN101878444B CN 101878444 B CN101878444 B CN 101878444B CN 2008801180470 A CN2008801180470 A CN 2008801180470A CN 200880118047 A CN200880118047 A CN 200880118047A CN 101878444 B CN101878444 B CN 101878444B
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- wave beam
- laser beam
- diffraction
- equipment
- power factor
- Prior art date
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- 238000009826 distribution Methods 0.000 claims abstract description 75
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 241001270131 Agaricus moelleri Species 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract 4
- 238000009792 diffusion process Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 10
- 230000010355 oscillation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Lenses (AREA)
- Lasers (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007057868.9A DE102007057868B4 (de) | 2007-11-29 | 2007-11-29 | Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung |
DE102007057868.9 | 2007-11-29 | ||
PCT/EP2008/009677 WO2009068192A1 (de) | 2007-11-29 | 2008-11-15 | Vorrichtung zur strahlformung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101878444A CN101878444A (zh) | 2010-11-03 |
CN101878444B true CN101878444B (zh) | 2013-08-07 |
Family
ID=40361468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008801180470A Active CN101878444B (zh) | 2007-11-29 | 2008-11-15 | 波束成形设备 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8270084B2 (zh) |
EP (1) | EP2217961A1 (zh) |
JP (1) | JP5395804B2 (zh) |
KR (1) | KR101547714B1 (zh) |
CN (1) | CN101878444B (zh) |
DE (1) | DE102007057868B4 (zh) |
IL (1) | IL205858A (zh) |
WO (1) | WO2009068192A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
DE102010045620B4 (de) * | 2010-09-17 | 2016-09-01 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene |
DE102010053781B4 (de) * | 2010-12-08 | 2018-03-01 | LIMO GmbH | Vorrichtung zur Umwandlung von Laserstrahlung in Laserstrahlung mit einem M-Profil |
KR101257827B1 (ko) * | 2012-09-20 | 2013-04-29 | (주)프로비전 | 라인형 레이저 빔 형성 장치 및 이를 이용한 터치 패널 제조 방법 |
DE102013102599A1 (de) | 2013-03-14 | 2014-09-18 | Limo Patentverwaltung Gmbh & Co. Kg | Beleuchtungsvorrichtung |
JP6787135B2 (ja) * | 2015-02-05 | 2020-11-18 | ソニー株式会社 | 照射光学系およびプロジェクタ |
WO2018202270A1 (en) * | 2017-05-04 | 2018-11-08 | Nkt Photonics A/S | Light system for supplying light |
DE102017115964B4 (de) | 2017-07-14 | 2020-04-02 | LIMO GmbH | Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung einer Laserstrahlung |
DE102017126453A1 (de) * | 2017-11-10 | 2019-05-16 | Amphos GmbH | Verfahren zur Laserverstärkung |
DE102018200078B4 (de) * | 2018-01-04 | 2020-07-02 | Innovavent Gmbh | Optisches System und Verfahren zum Erzeugen einer Beleuchtungslinie |
CN109143594A (zh) * | 2018-09-18 | 2019-01-04 | 深圳市深视智能科技有限公司 | 一种像差控制的线激光能量匀化系统 |
EP3712686A1 (en) | 2019-03-18 | 2020-09-23 | LIMO Display GmbH | Device for generating a linear intensity distribution in a working plane |
WO2021004661A1 (en) * | 2019-07-08 | 2021-01-14 | Limo Display Gmbh | Transformation device for laser radiation |
WO2021069441A1 (de) * | 2019-10-07 | 2021-04-15 | LIMO GmbH | Laservorrichtung zur erzeugung von laserstrahlung sowie 3d-druck-vorrichtung mit einer derartigen laservorrichtung |
CN111198444A (zh) * | 2020-02-20 | 2020-05-26 | 上海鲲游光电科技有限公司 | 增维摄像装置及其光发射组件和应用 |
CN111665581B (zh) * | 2020-05-12 | 2021-10-12 | 杭州驭光光电科技有限公司 | 光学器件、包括其的投射装置及直线投射方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6471372B1 (en) * | 1998-10-30 | 2002-10-29 | Vitalij Lissotschenko | Assembly and device for optical beam transformation |
CN1611969A (zh) * | 2003-10-30 | 2005-05-04 | 翰兹-利索兹切科专利管理有限公司及两合公司 | 用于进行光束变换的结构和装置 |
EP1708008A1 (en) * | 2005-04-01 | 2006-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer and laser irradition apparatus |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02161411A (ja) * | 1988-12-14 | 1990-06-21 | Mitsubishi Electric Corp | レーザ加工ヘッド |
TW305063B (zh) * | 1995-02-02 | 1997-05-11 | Handotai Energy Kenkyusho Kk | |
DE19520187C1 (de) | 1995-06-01 | 1996-09-12 | Microlas Lasersystem Gmbh | Optik zum Herstellen einer scharfen Beleuchtungslinie aus einem Laserstrahl |
US6524977B1 (en) * | 1995-07-25 | 2003-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus |
JP3917231B2 (ja) | 1996-02-06 | 2007-05-23 | 株式会社半導体エネルギー研究所 | レーザー照射装置およびレーザー照射方法 |
DE69921739T2 (de) * | 1998-07-03 | 2005-11-03 | Fuji Photo Film Co., Ltd., Minami-Ashigara | Bildaufzeichnungsgerät |
TW444247B (en) * | 1999-01-29 | 2001-07-01 | Toshiba Corp | Laser beam irradiating device, manufacture of non-single crystal semiconductor film, and manufacture of liquid crystal display device |
GB9922576D0 (en) * | 1999-09-24 | 1999-11-24 | Koninkl Philips Electronics Nv | Laser system |
EP1215523A3 (de) * | 2000-12-16 | 2004-05-26 | Hentze-Lissotschenko Patentverwaltungs GmbH & Co.KG | Bestrahlungssystem mit Strahltransformation für die Erzeugung modulierter Strahlung |
TW558861B (en) * | 2001-06-15 | 2003-10-21 | Semiconductor Energy Lab | Laser irradiation stage, laser irradiation optical system, laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device |
JP2004093837A (ja) * | 2002-08-30 | 2004-03-25 | Sumitomo Heavy Ind Ltd | 均一化レーザビーム照射装置 |
US6991003B2 (en) * | 2003-07-28 | 2006-01-31 | M.Braun, Inc. | System and method for automatically purifying solvents |
US7930757B2 (en) | 2003-10-31 | 2011-04-19 | Adobe Systems Incorporated | Offline access in a document control system |
DE102004034253A1 (de) | 2004-07-14 | 2006-02-09 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Vorrichtung für die Beleuchtung einer Fläche |
KR20070090246A (ko) * | 2004-12-22 | 2007-09-05 | 칼 짜이스 레이저 옵틱스 게엠베하 | 선형 빔을 형성하기 위한 광 조명 시스템 |
JP4817356B2 (ja) | 2005-03-15 | 2011-11-16 | ナノフォトン株式会社 | 光学顕微鏡 |
JP4865382B2 (ja) * | 2005-04-01 | 2012-02-01 | 株式会社半導体エネルギー研究所 | ビームホモジナイザ及びレーザ照射装置 |
TW200741883A (en) | 2006-04-21 | 2007-11-01 | Zeiss Carl Laser Optics Gmbh | Apparatus for laser annealing of large substrates and method for laser annealing for large substrates |
DE102006018504A1 (de) * | 2006-04-21 | 2007-10-25 | Carl Zeiss Laser Optics Gmbh | Anordnung zum Herstellen einer randscharfen Beleuchtungslinie sowie Anordnung zum Erhöhen der Asymmetrie des Strahlparameterproduktes |
-
2007
- 2007-11-29 DE DE102007057868.9A patent/DE102007057868B4/de active Active
-
2008
- 2008-11-15 JP JP2010535267A patent/JP5395804B2/ja active Active
- 2008-11-15 KR KR1020107010546A patent/KR101547714B1/ko active IP Right Grant
- 2008-11-15 WO PCT/EP2008/009677 patent/WO2009068192A1/de active Application Filing
- 2008-11-15 US US12/745,600 patent/US8270084B2/en active Active
- 2008-11-15 EP EP08855151A patent/EP2217961A1/de not_active Withdrawn
- 2008-11-15 CN CN2008801180470A patent/CN101878444B/zh active Active
-
2010
- 2010-05-20 IL IL205858A patent/IL205858A/en active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6471372B1 (en) * | 1998-10-30 | 2002-10-29 | Vitalij Lissotschenko | Assembly and device for optical beam transformation |
CN1611969A (zh) * | 2003-10-30 | 2005-05-04 | 翰兹-利索兹切科专利管理有限公司及两合公司 | 用于进行光束变换的结构和装置 |
EP1708008A1 (en) * | 2005-04-01 | 2006-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer and laser irradition apparatus |
Also Published As
Publication number | Publication date |
---|---|
US8270084B2 (en) | 2012-09-18 |
DE102007057868B4 (de) | 2020-02-20 |
IL205858A (en) | 2014-08-31 |
JP2011505020A (ja) | 2011-02-17 |
EP2217961A1 (de) | 2010-08-18 |
US20100309559A1 (en) | 2010-12-09 |
IL205858A0 (en) | 2010-11-30 |
KR101547714B1 (ko) | 2015-09-04 |
WO2009068192A1 (de) | 2009-06-04 |
JP5395804B2 (ja) | 2014-01-22 |
KR20100087006A (ko) | 2010-08-02 |
CN101878444A (zh) | 2010-11-03 |
DE102007057868A1 (de) | 2009-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Borussia Dortmund Applicant after: LIMO PATENTVERWALTUNG GmbH & Co.KG Address before: German Guy Sten Green Applicant before: LIMO PATENTVERWALTUNG GmbH & Co.KG |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Borussia Dortmund Patentee after: LIMO LLC Address before: Borussia Dortmund Patentee before: LIMO Holdings Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180309 Address after: Borussia Dortmund Patentee after: LIMO Holdings Ltd. Address before: Borussia Dortmund Patentee before: LIMO PATENTVERWALTUNG GmbH & Co.KG |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200323 Address after: Borussia Dortmund Patentee after: Torchlight Germany Co.,Ltd. Address before: Borussia Dortmund Patentee before: LIMO LLC |
|
TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: Borussia Dortmund Patentee after: Limo display Ltd. Address before: Borussia Dortmund Patentee before: Torchlight Germany Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder |