JP2021527813A5 - - Google Patents

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Publication number
JP2021527813A5
JP2021527813A5 JP2020570693A JP2020570693A JP2021527813A5 JP 2021527813 A5 JP2021527813 A5 JP 2021527813A5 JP 2020570693 A JP2020570693 A JP 2020570693A JP 2020570693 A JP2020570693 A JP 2020570693A JP 2021527813 A5 JP2021527813 A5 JP 2021527813A5
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JP
Japan
Prior art keywords
sample
inspection system
scattered signals
depth
defects
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JP2020570693A
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English (en)
Japanese (ja)
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JP2021527813A (ja
JP7236473B2 (ja
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Priority claimed from US16/165,742 external-priority patent/US10732130B2/en
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Publication of JP2021527813A publication Critical patent/JP2021527813A/ja
Publication of JP2021527813A5 publication Critical patent/JP2021527813A5/ja
Application granted granted Critical
Publication of JP7236473B2 publication Critical patent/JP7236473B2/ja
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JP2020570693A 2018-06-19 2019-06-11 多重散乱信号に基づく埋設粒子深度値域分類 Active JP7236473B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862687123P 2018-06-19 2018-06-19
US62/687,123 2018-06-19
US16/165,742 US10732130B2 (en) 2018-06-19 2018-10-19 Embedded particle depth binning based on multiple scattering signals
US16/165,742 2018-10-19
PCT/US2019/036432 WO2019245785A1 (en) 2018-06-19 2019-06-11 Embedded particle depth binning based on multiple scattering signals

Publications (3)

Publication Number Publication Date
JP2021527813A JP2021527813A (ja) 2021-10-14
JP2021527813A5 true JP2021527813A5 (https=) 2022-06-16
JP7236473B2 JP7236473B2 (ja) 2023-03-09

Family

ID=68840629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020570693A Active JP7236473B2 (ja) 2018-06-19 2019-06-11 多重散乱信号に基づく埋設粒子深度値域分類

Country Status (8)

Country Link
US (1) US10732130B2 (https=)
JP (1) JP7236473B2 (https=)
KR (1) KR102495449B1 (https=)
CN (1) CN112219113B (https=)
IL (1) IL279286B2 (https=)
SG (1) SG11202012061QA (https=)
TW (1) TWI785253B (https=)
WO (1) WO2019245785A1 (https=)

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US10732130B2 (en) * 2018-06-19 2020-08-04 Kla-Tencor Corporation Embedded particle depth binning based on multiple scattering signals
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WO2023023701A1 (en) * 2021-08-24 2023-03-02 Mark Andrew Fraser Handcart
TWI839846B (zh) 2022-09-15 2024-04-21 華洋精機股份有限公司 可用來判斷透明膜表面的瑕疵位於膜表或膜背的檢測方法及檢測系統
US12092966B2 (en) 2022-11-23 2024-09-17 Kla Corporation Device feature specific edge placement error (EPE)

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