JP2021517353A5 - - Google Patents

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JP2021517353A5
JP2021517353A5 JP2020545695A JP2020545695A JP2021517353A5 JP 2021517353 A5 JP2021517353 A5 JP 2021517353A5 JP 2020545695 A JP2020545695 A JP 2020545695A JP 2020545695 A JP2020545695 A JP 2020545695A JP 2021517353 A5 JP2021517353 A5 JP 2021517353A5
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JP
Japan
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spectral characteristic
pulse
light beam
discrete
characteristic adjuster
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JP2020545695A
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Japanese (ja)
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JP7044894B2 (ja
JP2021517353A (ja
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Priority claimed from PCT/US2019/020415 external-priority patent/WO2019190700A1/en
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JP2020545695A 2018-03-30 2019-03-01 パルス光ビームのスペクトル特性選択及びパルスタイミング制御 Active JP7044894B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862650896P 2018-03-30 2018-03-30
US62/650,896 2018-03-30
US201862663308P 2018-04-27 2018-04-27
US62/663,308 2018-04-27
PCT/US2019/020415 WO2019190700A1 (en) 2018-03-30 2019-03-01 Spectral feature selection and pulse timing control of a pulsed light beam

Publications (3)

Publication Number Publication Date
JP2021517353A JP2021517353A (ja) 2021-07-15
JP2021517353A5 true JP2021517353A5 (https=) 2021-08-26
JP7044894B2 JP7044894B2 (ja) 2022-03-30

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JP2020545695A Active JP7044894B2 (ja) 2018-03-30 2019-03-01 パルス光ビームのスペクトル特性選択及びパルスタイミング制御

Country Status (6)

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US (2) US11526083B2 (https=)
JP (1) JP7044894B2 (https=)
KR (2) KR102389918B1 (https=)
CN (2) CN111937256B (https=)
TW (1) TWI703411B (https=)
WO (1) WO2019190700A1 (https=)

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WO2020236648A1 (en) 2019-05-22 2020-11-26 Cymer, Llc Control system for a plurality of deep ultraviolet optical oscillators
US12586978B2 (en) 2019-05-22 2026-03-24 Cymer, Llc Apparatus for and method of generating multiple laser beams
KR102628796B1 (ko) 2019-07-23 2024-01-23 사이머 엘엘씨 반복률 편차에 의해 유도된 파장 오차를 보상하는 방법
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JP7411097B2 (ja) * 2020-03-23 2024-01-10 サイマー リミテッド ライアビリティ カンパニー パルス光ビームの予測制御
JP7515001B2 (ja) 2020-08-18 2024-07-11 サイマー リミテッド ライアビリティ カンパニー 予測的に較正をスケジュール設定する装置及び方法
KR20230120660A (ko) * 2020-12-16 2023-08-17 사이머 엘엘씨 엑시머 레이저의 파장을 그 반복 주파수의 함수로서변조하는 장치 및 방법

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