JP2021516963A - 電気的に動作可能な吸入器用ヒーターを製造するための方法 - Google Patents
電気的に動作可能な吸入器用ヒーターを製造するための方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/1686—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed involving vaporisation of the material to be sprayed or of an atomising-fluid-generating product
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
- A24F40/46—Shape or structure of electric heating means
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/70—Manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0884—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being aligned
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/345—Arrangements for heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
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- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/10—Devices using liquid inhalable precursors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/022—Heaters specially adapted for heating gaseous material
- H05B2203/024—Heaters using beehive flow through structures
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
- Micromachines (AREA)
Abstract
Description
2 領域
3 縁領域
4 電気接点
5 半導体材料
6 絶縁層
7 ポリシリコン
8 微細流路
9 電気接点
10 吸入器、電子たばこ
11 ハウジング
14 蓄電部
15 電子制御機構部
16 基幹部
17 消耗ユニット、カートリッジ
18 液体タンク
19 芯組織
20 気化器ユニット
24 空気流出口
29 コントローラ
30 空気通路
31 空気流入口
32 マウスエンド
34 気流
35 芯層、接触領域、接触層
36 芯層
50 液体
60 ヒーター、気化本体
61 流入面
62 微細流路、液体流路
63 半導体基板
64 流出面
65 加熱要素
66 通流制御装置
67 貫通開口部
68 流出口、開口部、スリット、貫通孔
69 通流制御層
70 絶縁層
71 小孔、加熱電圧源
72 電極、抵抗測定装置、測定装置
74 EW電圧源
75 電極
76 流出開口部
79 供給口
80 中央ウェブ
81 横延在部
82 狭窄部
83 拡張部
84 電極
85 発熱体、加熱構造体
86 流路
87 導電部
Claims (15)
- 吸入器、特に電子たばこ製品用の電子式に作動可能な、特に液体を気化させるための、特に扁平なヒーターを製造するための方法において、
複数の流路内の液体が、半導体材料を通流可能であるように、特に金属を含まない半導体材料が、ほぼプレート状に提供され、これらの流路が、当該プレート状の半導体材料の面のほぼ法線の方向にこの半導体材料中に形成されることを特徴とする方法。 - 主にシリコンが、半導体材料として使用され、特にポリシリコンが使用されることを特徴とする請求項1に記載の方法。
- 前記半導体材料の少なくとも特定の領域の導電率が、ドーピングによって改善されていることを特徴とする請求項1又は2に記載の方法。
- 前記半導体材料は、特に燐を使用してnドーピングされていることを特徴とする請求項3に記載の方法。
- 少なくとも1つの被覆部が、前記半導体材料の少なくとも片側で前記半導体材料の少なくとも特定の領域に被覆されることを特徴とする請求項1〜4のいずれか1項に記載の方法。
- 被覆部は、金属製であることを特徴とする請求項5に記載の方法。
- 複数の電気接点が、特に金属被覆部を使用して前記半導体材料に設けられることを特徴とする請求項1〜6のいずれか1項、特に請求項6に記載の方法。
- 前記半導体材料の少なくとも特定の領域が酸化されることを特徴とする請求項1〜7のいずれか1項に記載の方法。
- 前記複数の流路は、特に乾式エッチングによって前記半導体材料中に形成されることを特徴とする請求項1〜8のいずれか1項に記載の方法。
- 主に反応性イオンエッチング(RIE)が使用されることを特徴とする請求項9に記載の方法。
- 前記複数の流路は、前記半導体材料の両面を起点として通流可能に形成されることを特徴とする請求項1〜10、特に請求項9又は10に記載の方法。
- 複数の加熱要素が、1つのウェハ上に形成され、特にその後に、個々のヒーター又は一群のヒーターが、特にいわゆるダイとしてこのウェハから取り出されることを特徴とする請求項1〜11のいずれか1項に記載の方法。
- 前記ヒーターは、主にベアダイ(いわゆる「ベアチップ」)として再利用されることを特徴とする請求項9に記載の方法。
- 吸入器、特に電子たばこ製品用の加熱要素、特にヒーターにおいて、
請求項1〜13のいずれか1項に記載の方法にしたがって製造されていることを特徴とする吸入器。 - 請求項1〜13のいずれか1項、特に請求項12に記載の方法にしたがって製造又は準備されている複数の加熱要素として適した複数の要素を有することを特徴とする半導体材料から成るウェハ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018105220.0 | 2018-03-07 | ||
DE102018105220.0A DE102018105220A1 (de) | 2018-03-07 | 2018-03-07 | Verfahren zur Fertigung eines elektrisch betreibbaren Heizkörpers für einen Inhalator |
PCT/EP2019/053813 WO2019170394A1 (de) | 2018-03-07 | 2019-02-15 | Verfahren zur fertigung eines elektrisch betreibbaren heizkörpers für einen inhalator |
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JP2021516963A true JP2021516963A (ja) | 2021-07-15 |
JP7359776B2 JP7359776B2 (ja) | 2023-10-11 |
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JP2020546476A Active JP7359776B2 (ja) | 2018-03-07 | 2019-02-15 | 電気的に動作可能な吸入器用ヒーターを製造するための方法 |
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US (1) | US11958068B2 (ja) |
EP (1) | EP3762150B1 (ja) |
JP (1) | JP7359776B2 (ja) |
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CA (1) | CA3093073A1 (ja) |
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DE102019116728A1 (de) * | 2019-06-20 | 2020-12-24 | Hauni Maschinenbau Gmbh | Verdampferkartusche sowie Inhalator mit einer solchen Verdampferkartusche |
DE102019132109B4 (de) * | 2019-11-27 | 2021-07-29 | Hauni Maschinenbau Gmbh | Verfahren zum Herstellen von Dochtorgan-Heizorgan-Anordnungen als Verdampfereinheit zum Einsatz in einer Verdampferkartusche, Verdampfereinheit, Verdampferkartusche mit einer solchen Verdampfereinheit sowie Inhalator mit einer solchen Verdampferkartusche |
DE102019132766A1 (de) * | 2019-12-03 | 2021-06-10 | Hauni Maschinenbau Gmbh | Verdampfungsvorrichtung für einen elektronischen Inhalator, und Verfahren zur Herstellung einer Verdampfungsvorrichtung |
DE102019135177B4 (de) | 2019-12-19 | 2021-07-29 | Hauni Maschinenbau Gmbh | Verdampfereinheit, Verdampferbaugruppe sowie Verdampferkartusche als Bestandteil eines Inhalators, Inhalator mit einer solchen Verdampferkartusche sowie Verfahren zur Herstellung von Verdampfereinheiten |
CN215303052U (zh) * | 2021-01-11 | 2021-12-28 | 深圳麦克韦尔科技有限公司 | 雾化芯及电子雾化装置 |
DE102021114281A1 (de) * | 2021-06-02 | 2022-12-08 | Körber Technologies Gmbh | Verdampfungsvorrichtung für einen Inhalator |
WO2023285534A1 (en) | 2021-07-14 | 2023-01-19 | Jt International Sa | Aerosol generating device and method of generating an aerosol |
CN115746601B (zh) * | 2022-09-23 | 2023-06-20 | 深圳烟草工业有限责任公司 | 光敏石墨烯浆料及其制备方法及加热装置 |
GB202218992D0 (en) * | 2022-12-15 | 2023-02-01 | Nicoventures Holdings Ltd | Aerosol provision system |
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KR20200126413A (ko) | 2020-11-06 |
US20200397052A1 (en) | 2020-12-24 |
CA3093073A1 (en) | 2019-09-12 |
JP7359776B2 (ja) | 2023-10-11 |
CN111788006B (zh) | 2023-01-10 |
DE102018105220A1 (de) | 2019-09-12 |
EP3762150A1 (de) | 2021-01-13 |
WO2019170394A1 (de) | 2019-09-12 |
US11958068B2 (en) | 2024-04-16 |
EP3762150B1 (de) | 2024-08-28 |
CN111788006A (zh) | 2020-10-16 |
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