JP2021515887A - 容量性圧力センサを用いる圧力検出 - Google Patents

容量性圧力センサを用いる圧力検出 Download PDF

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Publication number
JP2021515887A
JP2021515887A JP2020544889A JP2020544889A JP2021515887A JP 2021515887 A JP2021515887 A JP 2021515887A JP 2020544889 A JP2020544889 A JP 2020544889A JP 2020544889 A JP2020544889 A JP 2020544889A JP 2021515887 A JP2021515887 A JP 2021515887A
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Japan
Prior art keywords
pressure sensor
capacitive pressure
electrode
membrane
capacitive
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JP2020544889A
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English (en)
Japanese (ja)
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JPWO2019166263A5 (https=
JP2021515887A5 (https=
Inventor
ペーター ダークセン
ペーター ダークセン
ルーディガー ギーンター マウゾック
ルーディガー ギーンター マウゾック
ペトルス ヘンリクス マリア タイマーマンス
ペトルス ヘンリクス マリア タイマーマンス
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Koninklijke Philips NV
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Koninklijke Philips NV
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Publication of JP2021515887A publication Critical patent/JP2021515887A/ja
Publication of JPWO2019166263A5 publication Critical patent/JPWO2019166263A5/ja
Publication of JP2021515887A5 publication Critical patent/JP2021515887A5/ja
Pending legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021—Measuring pressure in heart or blood vessels
    • A61B5/0215—Measuring pressure in heart or blood vessels by means inserted into the body
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021—Measuring pressure in heart or blood vessels
    • A61B5/0215—Measuring pressure in heart or blood vessels by means inserted into the body
    • A61B5/02158—Measuring pressure in heart or blood vessels by means inserted into the body provided with two or more sensor elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6843—Monitoring or controlling sensor contact pressure
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A61B5/6852—Catheters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0247—Pressure sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04—Arrangements of multiple sensors of the same type
    • A61B2562/043—Arrangements of multiple sensors of the same type in a linear array
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Cardiology (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physiology (AREA)
  • Vascular Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Media Introduction/Drainage Providing Device (AREA)
JP2020544889A 2018-02-28 2019-02-19 容量性圧力センサを用いる圧力検出 Pending JP2021515887A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18159049.8A EP3533386A1 (en) 2018-02-28 2018-02-28 Pressure sensing with capacitive pressure sensor
EP18159049.8 2018-02-28
PCT/EP2019/054009 WO2019166263A1 (en) 2018-02-28 2019-02-19 Pressure sensing with capacitive pressure sensor

Publications (3)

Publication Number Publication Date
JP2021515887A true JP2021515887A (ja) 2021-06-24
JPWO2019166263A5 JPWO2019166263A5 (https=) 2022-02-22
JP2021515887A5 JP2021515887A5 (https=) 2022-02-22

Family

ID=61569050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020544889A Pending JP2021515887A (ja) 2018-02-28 2019-02-19 容量性圧力センサを用いる圧力検出

Country Status (5)

Country Link
US (1) US20200397321A1 (https=)
EP (2) EP3533386A1 (https=)
JP (1) JP2021515887A (https=)
CN (1) CN111787850A (https=)
WO (1) WO2019166263A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7383869B2 (ja) * 2020-02-13 2023-11-21 シャープ株式会社 タッチパネル及び表示装置
US20240255362A1 (en) * 2021-05-27 2024-08-01 The University Of Chicago Strain-insensitive soft pressure sensor and method of measuring pressure
CN114323403A (zh) * 2021-12-14 2022-04-12 上海交通大学 实现在体压力传感器长期性能稳定的方法
CN114910196A (zh) * 2022-04-22 2022-08-16 西安交通大学 微米尺度的平面电容式压力传感器制备方法
CN117782377A (zh) * 2022-09-22 2024-03-29 北京京东方技术开发有限公司 压力传感器及其制作方法、电子设备
CN118414534A (zh) 2022-11-15 2024-07-30 京东方科技集团股份有限公司 压力传感器及其制备方法、电子装置
CN116086656A (zh) * 2022-12-08 2023-05-09 北京大学 电容式压力传感器
US20240350016A1 (en) * 2023-04-18 2024-10-24 Bard Access Systems, Inc. System and Method for Placement of a Central Catheter Tip
WO2025158310A1 (en) * 2024-01-24 2025-07-31 Medtronic, Inc. Pressure sensor assembly and implantable medical device including same

Citations (13)

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JPH08320268A (ja) * 1995-05-26 1996-12-03 Omron Corp 静電容量型センサ
JP2001099734A (ja) * 1999-09-30 2001-04-13 Hitachi Ltd 半導体容量式圧力センサ
JP2002250665A (ja) * 2001-02-23 2002-09-06 Omron Corp 静電容量式センサ及びその製造方法
JP2002267560A (ja) * 2001-03-13 2002-09-18 Anelva Corp 圧力センサの製造方法
JP2011167021A (ja) * 2010-02-14 2011-08-25 Canon Inc 静電容量型電気機械変換装置
US20120133005A1 (en) * 2009-07-02 2012-05-31 Nxp B.V. Collapsed mode capacitive sensor
WO2014103334A1 (ja) * 2012-12-28 2014-07-03 コニカミノルタ株式会社 超音波振動子セル、超音波プローブ、及び超音波振動子セルの制御方法
JP2014200089A (ja) * 2007-12-14 2014-10-23 コーニンクレッカ フィリップス エヌ ヴェ 輪郭成形基板を含む崩壊モードで動作可能なｃＭＵＴ
JP2014533907A (ja) * 2011-11-17 2014-12-15 コーニンクレッカ フィリップス エヌ ヴェ 円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル
JP2015525344A (ja) * 2012-06-28 2015-09-03 インテル コーポレイション 空気圧力センサを有する半導体パッケージ
JP2016540392A (ja) * 2013-09-24 2016-12-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Ｃｍｕｔデバイス製造方法、ｃｍｕｔデバイス、及び装置
US20170023426A1 (en) * 2014-04-04 2017-01-26 Ando Lars Feyh Membrane-Based Sensor and Method for Robust Manufacture of a Membrane-Based Sensor
WO2017036827A1 (en) * 2015-09-03 2017-03-09 Koninklijke Philips N.V. Ic die, probe and ultrasound system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050121734A1 (en) * 2003-11-07 2005-06-09 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US8118748B2 (en) * 2005-04-28 2012-02-21 Medtronic, Inc. Implantable capacitive pressure sensor system and method
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
EP2150791B1 (en) * 2007-04-23 2016-03-16 Given Imaging (Los Angeles) LLC Suspended membrane pressure sensing array
CN101815933A (zh) * 2007-08-27 2010-08-25 皇家飞利浦电子股份有限公司 压力传感器、包括压力传感器的传感器探头、包括传感器探头的医疗设备、以及制造传感器探头的方法
US8704538B2 (en) * 2010-07-01 2014-04-22 Mks Instruments, Inc. Capacitance sensors
EP3134003B1 (en) * 2014-04-23 2020-08-12 Koninklijke Philips N.V. Catheter with integrated controller for imaging and pressure sensing
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08320268A (ja) * 1995-05-26 1996-12-03 Omron Corp 静電容量型センサ
JP2001099734A (ja) * 1999-09-30 2001-04-13 Hitachi Ltd 半導体容量式圧力センサ
JP2002250665A (ja) * 2001-02-23 2002-09-06 Omron Corp 静電容量式センサ及びその製造方法
JP2002267560A (ja) * 2001-03-13 2002-09-18 Anelva Corp 圧力センサの製造方法
JP2014200089A (ja) * 2007-12-14 2014-10-23 コーニンクレッカ フィリップス エヌ ヴェ 輪郭成形基板を含む崩壊モードで動作可能なｃＭＵＴ
US20120133005A1 (en) * 2009-07-02 2012-05-31 Nxp B.V. Collapsed mode capacitive sensor
JP2011167021A (ja) * 2010-02-14 2011-08-25 Canon Inc 静電容量型電気機械変換装置
JP2014533907A (ja) * 2011-11-17 2014-12-15 コーニンクレッカ フィリップス エヌ ヴェ 円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル
JP2015525344A (ja) * 2012-06-28 2015-09-03 インテル コーポレイション 空気圧力センサを有する半導体パッケージ
WO2014103334A1 (ja) * 2012-12-28 2014-07-03 コニカミノルタ株式会社 超音波振動子セル、超音波プローブ、及び超音波振動子セルの制御方法
JP2016540392A (ja) * 2013-09-24 2016-12-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Ｃｍｕｔデバイス製造方法、ｃｍｕｔデバイス、及び装置
US20170023426A1 (en) * 2014-04-04 2017-01-26 Ando Lars Feyh Membrane-Based Sensor and Method for Robust Manufacture of a Membrane-Based Sensor
WO2017036827A1 (en) * 2015-09-03 2017-03-09 Koninklijke Philips N.V. Ic die, probe and ultrasound system

Also Published As

Publication number Publication date
EP3758581A1 (en) 2021-01-06
EP3533386A1 (en) 2019-09-04
CN111787850A (zh) 2020-10-16
EP3758581B1 (en) 2023-12-20
US20200397321A1 (en) 2020-12-24
WO2019166263A1 (en) 2019-09-06

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