JP2021515887A5 - - Google Patents
Info
- Publication number
- JP2021515887A5 JP2021515887A5 JP2020544889A JP2020544889A JP2021515887A5 JP 2021515887 A5 JP2021515887 A5 JP 2021515887A5 JP 2020544889 A JP2020544889 A JP 2020544889A JP 2020544889 A JP2020544889 A JP 2020544889A JP 2021515887 A5 JP2021515887 A5 JP 2021515887A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- steps include
- sensor
- rim
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18159049.8A EP3533386A1 (en) | 2018-02-28 | 2018-02-28 | Pressure sensing with capacitive pressure sensor |
| EP18159049.8 | 2018-02-28 | ||
| PCT/EP2019/054009 WO2019166263A1 (en) | 2018-02-28 | 2019-02-19 | Pressure sensing with capacitive pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2021515887A JP2021515887A (ja) | 2021-06-24 |
| JP2021515887A5 true JP2021515887A5 (https=) | 2022-02-22 |
Family
ID=61569050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020544889A Pending JP2021515887A (ja) | 2018-02-28 | 2019-02-19 | 容量性圧力センサを用いる圧力検出 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20200397321A1 (https=) |
| EP (2) | EP3533386A1 (https=) |
| JP (1) | JP2021515887A (https=) |
| CN (1) | CN111787850A (https=) |
| WO (1) | WO2019166263A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7383869B2 (ja) * | 2020-02-13 | 2023-11-21 | シャープ株式会社 | タッチパネル及び表示装置 |
| WO2022250939A1 (en) * | 2021-05-27 | 2022-12-01 | The University Of Chicago | Strain-insensitive soft pressure sensor and method of measuring pressure |
| CN114323403A (zh) * | 2021-12-14 | 2022-04-12 | 上海交通大学 | 实现在体压力传感器长期性能稳定的方法 |
| CN114910196A (zh) * | 2022-04-22 | 2022-08-16 | 西安交通大学 | 微米尺度的平面电容式压力传感器制备方法 |
| CN117782377A (zh) * | 2022-09-22 | 2024-03-29 | 北京京东方技术开发有限公司 | 压力传感器及其制作方法、电子设备 |
| US12540869B2 (en) | 2022-11-15 | 2026-02-03 | Beijing Boe Technology Development Co., Ltd. | Pressure sensor and method for manufacturing same, and electronic device |
| CN116086656A (zh) * | 2022-12-08 | 2023-05-09 | 北京大学 | 电容式压力传感器 |
| US20240350016A1 (en) * | 2023-04-18 | 2024-10-24 | Bard Access Systems, Inc. | System and Method for Placement of a Central Catheter Tip |
| WO2025158310A1 (en) * | 2024-01-24 | 2025-07-31 | Medtronic, Inc. | Pressure sensor assembly and implantable medical device including same |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3114570B2 (ja) * | 1995-05-26 | 2000-12-04 | オムロン株式会社 | 静電容量型圧力センサ |
| JP2001099734A (ja) * | 1999-09-30 | 2001-04-13 | Hitachi Ltd | 半導体容量式圧力センサ |
| JP2002250665A (ja) * | 2001-02-23 | 2002-09-06 | Omron Corp | 静電容量式センサ及びその製造方法 |
| JP2002267560A (ja) * | 2001-03-13 | 2002-09-18 | Anelva Corp | 圧力センサの製造方法 |
| US20050121734A1 (en) * | 2003-11-07 | 2005-06-09 | Georgia Tech Research Corporation | Combination catheter devices, methods, and systems |
| US8118748B2 (en) * | 2005-04-28 | 2012-02-21 | Medtronic, Inc. | Implantable capacitive pressure sensor system and method |
| ITRM20060238A1 (it) * | 2006-05-03 | 2007-11-04 | Esaote Spa | Trasduttore ultracustico capacitivo multipiano |
| EP2150791B1 (en) * | 2007-04-23 | 2016-03-16 | Given Imaging (Los Angeles) LLC | Suspended membrane pressure sensing array |
| EP2185904A2 (en) * | 2007-08-27 | 2010-05-19 | Koninklijke Philips Electronics N.V. | Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe |
| CN101896288B (zh) * | 2007-12-14 | 2013-03-27 | 皇家飞利浦电子股份有限公司 | 包括经成型衬底的可以塌陷模式工作的cmut |
| EP2269746B1 (en) * | 2009-07-02 | 2014-05-14 | Nxp B.V. | Collapsed mode capacitive sensor |
| JP5733898B2 (ja) | 2010-02-14 | 2015-06-10 | キヤノン株式会社 | 静電容量型電気機械変換装置 |
| US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
| CN103958079B (zh) * | 2011-11-17 | 2016-08-24 | 皇家飞利浦有限公司 | 具有环形塌陷区域的预塌陷电容式微机械换能器元件 |
| US9200973B2 (en) * | 2012-06-28 | 2015-12-01 | Intel Corporation | Semiconductor package with air pressure sensor |
| WO2014103334A1 (ja) * | 2012-12-28 | 2014-07-03 | コニカミノルタ株式会社 | 超音波振動子セル、超音波プローブ、及び超音波振動子セルの制御方法 |
| JP6416232B2 (ja) * | 2013-09-24 | 2018-10-31 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Ｃｍｕｔデバイス製造方法、ｃｍｕｔデバイス、及び装置 |
| EP3127158B1 (en) * | 2014-04-04 | 2019-06-12 | Robert Bosch GmbH | Membrane-based sensor and method for robust manufacture of a membrane-based sensor |
| US11311271B2 (en) * | 2014-04-23 | 2022-04-26 | Philips Image Guided Therapy Corporation | Catheter with integrated controller for imaging and pressure sensing |
| US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| EP3344401B1 (en) * | 2015-09-03 | 2022-04-06 | Koninklijke Philips N.V. | Ic die, probe and ultrasound system |
-
2018
- 2018-02-28 EP EP18159049.8A patent/EP3533386A1/en not_active Withdrawn
-
2019
- 2019-02-19 US US16/970,882 patent/US20200397321A1/en not_active Abandoned
- 2019-02-19 JP JP2020544889A patent/JP2021515887A/ja active Pending
- 2019-02-19 EP EP19706943.8A patent/EP3758581B1/en active Active
- 2019-02-19 WO PCT/EP2019/054009 patent/WO2019166263A1/en not_active Ceased
- 2019-02-19 CN CN201980015946.6A patent/CN111787850A/zh active Pending
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