JP2021510933A - 受動電気デバイスを形成する方法、インダクタ構造体および受動電気デバイス - Google Patents
受動電気デバイスを形成する方法、インダクタ構造体および受動電気デバイス Download PDFInfo
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- JP2021510933A JP2021510933A JP2020538134A JP2020538134A JP2021510933A JP 2021510933 A JP2021510933 A JP 2021510933A JP 2020538134 A JP2020538134 A JP 2020538134A JP 2020538134 A JP2020538134 A JP 2020538134A JP 2021510933 A JP2021510933 A JP 2021510933A
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- H—ELECTRICITY
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- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/184—Components including terminals inserted in holes through the printed circuit board and connected to printed contacts on the walls of the holes or at the edges thereof or protruding over or into the holes
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Abstract
Description
Cu(II)(chel)+2HCHO+40H−→Cu0+2HCOO−+(chel)=+2H20+H2
Claims (20)
- 受動電気デバイスを形成する方法であって、
プリント回路基板を貫通して延びるビアの側壁の上に光反応層を付着させることと、
受動電子デバイス幾何形状を設けるように構成されたマスクを有するライト・パイプを前記ビア内に前記ビアの深さ全体に挿入することと、
前記ビアの前記側壁上に前記受動電子デバイス幾何形状を有するパターンを設けるように、前記ライト・パイプによって供給される放射に前記光反応層を露光させることと
を含む、方法。 - 前記ビアの前記側壁の上に前記光反応層を付着させる前に、前記ビアの前記側壁上に導電材料が存在し、前記光反応層を露光させることが、前記導電材料のうちの除去される部分を露出させる受動電子デバイス幾何形状を有する第1のエッチ・マスクを設ける、請求項1に記載の方法。
- 前記第1のエッチ・マスクによって露出させた前記導電材料の前記部分をエッチングすることをさらに含み、前記導電材料の残りの部分が前記ビア内に受動電子デバイスの導電フィーチャを形成する、請求項2に記載の方法。
- 前記ライト・パイプ上の前記マスクは、前記ビアの深さ全体に挿入される前記ライト・パイプの全長に沿って延びる第1のコイル幾何形状を有し、受動電子デバイスは第1のコイル・インダクタ構造体である、請求項1に記載の方法。
- 前記第1のコイル・インダクタ構造体を形成した後で、前記ビア内に第1の誘電体充填材を付着させることをさらに含む、請求項4に記載の方法。
- 前記第1のコイル・インダクタ構造体の実質的に中心に配置された前記誘電体充填材内に強磁性コアを形成することをさらに含む、請求項5に記載の方法。
- 前記第1の誘電体充填材内に開口部を形成することと、
前記第1の誘電体充填材の側壁上に導電層を形成することと、
前記導電層上にフォトレジスト層を形成することと、
前記開口部内にマスクされたライト・パイプを挿入することであって、前記マスクされたライト・パイプは、第2のコイル幾何形状の幾何形状を有する第2のエッチ・マスクにフォトレジスト・マスクをパターン形成する放射に前記フォトレジスト層を露光させる、前記挿入することと、
前記第2のエッチ・マスクによって露出させた前記導電層の部分をエッチングすることであって、前記導電層の残りの部分が、前記ビア内の前記受動電子デバイスの第2のコイル構造を形成する、前記エッチングすることと
をさらに含む、請求項5に記載の方法。 - 前記ビアの対向し合う側に電極を形成することをさらに含み、各電極が前記ビア内に存在する受動電子デバイスの導電フィーチャと電気的に連絡している、請求項1に記載の方法。
- 前記第1のエッチ・マスクによって露出させた前記導電材料の前記部分を前記エッチングすることは、前記ビアの実質的に対向し合う側壁上に2つの分離した導電電極を形成する前記導電材料の残りの部分を形成する、請求項3に記載の方法。
- 前記受動電子デバイスが抵抗器となるように前記2つの分離した導電電極の間の残りの開口部を充填する抵抗素子を形成することをさらに含む、請求項9に記載の方法。
- 前記受動電子デバイスがキャパシタとなるように前記2つの分離した導電電極の間の残りの開口部を充填するノード誘電体を形成することをさらに含む、請求項9に記載の方法。
- プリント回路基板を貫通して延びるビアであって、前記ビアの幅がマイクロスケールである、前記ビアと、
前記ビアへの第1の開口部を始点とし、前記ビアの側壁上に連続して存在し、前記ビアの中心を取り囲み、前記ビアの前記第1の開口部とは反対側の前記ビアの第2の開口部まで延びる、導電材料の少なくとも1つのコイルと、
前記第1の開口部または前記第2の開口部において前記コイルの端部に接触して存在する電極と
を含む、インダクタ構造体。 - 前記ビアの前記少なくとも1つのコイルに占められていない残りの部分を充填する誘電体充填材をさらに含む、請求項12に記載のインダクタ構造体。
- 前記少なくとも1つのコイル内の実質的に中心に配置された強磁性コアが存在する、請求項13に記載のインダクタ構造体。
- 前記誘電体充填材を貫通して存在する開口部と、前記開口部の側壁上に存在する第2のコイルとをさらに含む、請求項13に記載のインダクタ構造体。
- 前記導電材料の前記少なくとも1つのコイルの側壁の実質的に中心部分の中心へのタップをさらに含み、中心への前記タップは前記プリント回路基板(PCB)内に実質的に密閉されて存在する、請求項12に記載のインダクタ構造体。
- プリント回路基板を貫通して延びるビアであって、前記ビアの幅がマイクロスケールである、前記ビアと、
互いに分離され、前記ビアの側壁の別々の部分上に存在する2つの導電電極であって、前記2つの導電電極のうちの少なくとも一方が前記ビアの高さの全体に沿って延びている、前記2つの導電電極と、
前記プリント回路基板(PCB)内に実質的に密封されて存在する、前記少なくとも2つの導電電極のうちの少なくとも一方の側壁の実質的に中心部分の中心へのタップと
を含む、受動電気デバイス。 - 前記受動電気デバイスが抵抗器となるように、少なくとも2つの導電電極と電気的に連絡する前記ビアのコアとして抵抗素子が存在する、請求項17に記載の受動電気デバイス。
- 前記抵抗素子は、プラチナと、ニッケルと、銅と、バルコ(鉄ニッケル合金)と、タングステンと、イリジウムと、これらの組合せとからなるグループから選択された組成を有する、請求項18に記載の受動電気デバイス。
- 前記受動電気デバイスがキャパシタとなるように、少なくとも2つの導電電極と電気的に連絡する前記ビアのコアとしてノード誘電体層が存在する、請求項17に記載の受動電気デバイス。
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US15/881,205 US10834828B2 (en) | 2018-01-26 | 2018-01-26 | Creating inductors, resistors, capacitors and other structures in printed circuit board vias with light pipe technology |
PCT/IB2019/050188 WO2019145806A1 (en) | 2018-01-26 | 2019-01-10 | Creating inductors, resistors, capacitors and other structures in printed circuit board vias with light pipe technology |
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US10798821B2 (en) * | 2016-04-02 | 2020-10-06 | Intel Corporation | Circuit board having a passive device inside a via |
US10834830B2 (en) * | 2019-02-13 | 2020-11-10 | International Business Machines Corporation | Creating in-via routing with a light pipe |
US11336251B2 (en) * | 2019-09-30 | 2022-05-17 | Qualcomm Incorporated | Device with 3D inductor and magnetic core in substrate |
CN114900973A (zh) * | 2022-06-28 | 2022-08-12 | 生益电子股份有限公司 | 一种塞槽件、pcb侧壁线路的制作方法及pcb |
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JP7167167B2 (ja) | 2022-11-08 |
CN111656873B (zh) | 2023-07-28 |
US20200396847A1 (en) | 2020-12-17 |
CN111656873A (zh) | 2020-09-11 |
EP3729918A1 (en) | 2020-10-28 |
EP3729918A4 (en) | 2021-03-03 |
CN116779319A (zh) | 2023-09-19 |
US20190239358A1 (en) | 2019-08-01 |
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US10834828B2 (en) | 2020-11-10 |
US11864327B2 (en) | 2024-01-02 |
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