JP2021502474A - 可動シールドキャリアを有する装置 - Google Patents
可動シールドキャリアを有する装置 Download PDFInfo
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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Abstract
Description
当該方法は、真空チャンバ内に設けられた堆積源を後方位置にもってくることと、真空チャンバのバルブ10を開くこととを含み得る。
さらに、当該方法は、マスクシールドの第1の部分を真空チャンバの外にスライドさせることと、マスクシールドの第1の部分から第1のシールドを取り外すことと、マスクシールドの第2の部分を真空チャンバの外にスライドさせることと、マスクシールドの第2の部分から第2のシールドを取り外すこととを含み得る。
Claims (16)
- 真空処理装置であって、
真空チャンバ、
前記真空チャンバ内に設けられた堆積源、及び
第1のトラックアレンジメントであって、
基板を真空チャンバの中に搬送するように適合された第1の搬送トラックと、
マスクを真空チャンバの中に搬送するように適合された第2の搬送トラックと、
前記マスクの汚染を低減するために、マスクシールドを前記堆積源と前記マスクとの間で搬送するように適合された第3の搬送トラックと
を備えた第1のトラックアレンジメント
を備えている真空処理装置。 - 前記第3の搬送トラックが、前記マスクシールドを前記真空チャンバの外に搬送するように適合されている、請求項1に記載の真空処理装置。
- 前記第3の搬送トラックが、上方部分及び下方部分を有する、請求項2に記載の真空処理装置。
- 前記第3の搬送トラックが、前記真空チャンバの内側に下方部分及び上方部分を有し、前記真空チャンバの外側に下方部分及び上方部分を有する、請求項1から3のいずれか一項に記載の真空処理装置。
- 前記真空チャンバの外側の前記第3のトラックの前記上方部分が可動である、請求項1から4のいずれか一項に記載の真空処理装置。
- 前記マスクシールドが、第2の部分から分離可能な少なくとも第1の部分を有する、請求項1から5のいずれか一項に記載の真空処理装置。
- 前記第3の搬送トラックが、前記マスクシールドを前記マスクに対して位置合わせするように構成されている、請求項1から6のいずれか一項に記載の真空処理装置。
- 真空処理装置内のトラックアレンジメントであって、
基板を前記真空処理装置の真空チャンバ内にて搬送するための第1の搬送トラック、
マスクを前記真空処理装置の前記真空チャンバ内にて搬送するための第2の搬送トラック、及び
マスクシールドを前記真空処理装置の前記真空チャンバ内にて搬送するための第3の搬送トラック
を備えているトラックアレンジメント。 - 前記第3の搬送トラックが、前記マスクシールドを前記真空チャンバの内部から前記真空チャンバの外部へと搬送するように適合されている、請求項8に記載のトラックアレンジメント。
- 前記第3の搬送トラックが、前記マスクシールドを前記真空チャンバの内部の堆積源と前記マスクとの間で移動させるように構成されている、請求項8又は9に記載のトラックアレンジメント。
- 前記第3の搬送トラックは、前記マスクシールドが前記マスクを少なくとも部分的に遮蔽してマスクキャリアの汚染を低減するように、前記マスクシールドを前記マスクに対して位置合わせするように構成されている、請求項8から10のいずれか一項に記載のトラックアレンジメント。
- マスクシールドを搬送するための前記第3の搬送トラックが、前記マスクシールドをx方向、y方向、及びz方向に移動させるように適合された位置合わせシステムを備えている、請求項8から11のいずれか一項に記載のトラックアレンジメント。
- シールドフレームを備えた真空処理装置の搬送トラック上に配置されたマスクシールドであって、前記シールドフレームが、マスクキャリア及び/又はマスクフレームの側部を覆う少なくとも1つのシートメタルシールド備え、前記マスクキャリアの端部を覆う側部シールドを備えている、マスクシールド。
- 前記マスクシールドが、前記真空処理装置内の真空チャンバ内でマスクに対して位置合わせされるように構成されている、請求項13に記載のマスクシールド。
- 前記マスクシールドを少なくとも部分的に前記真空チャンバの外側に移動させることができるように、前記マスクシールド及び前記搬送トラックが構成されている、請求項14に記載のマスクシールド。
- 真空処理装置のためのマスクシールドを交換する方法であって、
真空チャンバ内に設けられた堆積源を後方位置にもってくることと、
前記真空チャンバのバルブを開くことと、
前記マスクシールドの第1の部分を前記真空チャンバの外にスライドさせることと、
前記マスクシールドの前記第1の部分から第1のシールドを取り外すことと、
前記マスクシールドの第2の部分を前記真空チャンバの外にスライドさせることと、
前記マスクシールドの前記第2の部分から第2のシールドを取り外すことと
を含む、方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/EP2018/070601 WO2020025101A1 (en) | 2018-07-30 | 2018-07-30 | Apparatus with movable shield carrier |
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JP2021502474A true JP2021502474A (ja) | 2021-01-28 |
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ID=63077867
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Application Number | Title | Priority Date | Filing Date |
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JP2020503993A Pending JP2021502474A (ja) | 2018-07-30 | 2018-07-30 | 可動シールドキャリアを有する装置 |
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JP (1) | JP2021502474A (ja) |
KR (1) | KR20200014726A (ja) |
CN (1) | CN110972483A (ja) |
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WO2022002385A1 (en) * | 2020-07-01 | 2022-01-06 | Applied Materials, Inc. | Apparatus for moving a substrate, deposition apparatus, and processing system |
WO2024003603A1 (en) * | 2022-07-01 | 2024-01-04 | Applied Materials, Inc. | Substrate processing system for processing of a plurality of substrates and method of processing a substrate in an in-line substrate processing system |
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DE102010000447A1 (de) * | 2010-02-17 | 2011-08-18 | Aixtron Ag, 52134 | Beschichtungsvorrichtung sowie Verfahren zum Betrieb einer Beschichtungsvorrichtung mit einer Schirmplatte |
JP2013163837A (ja) * | 2012-02-09 | 2013-08-22 | Canon Tokki Corp | 蒸着装置並びに蒸着装置を用いた成膜方法 |
KR20140019579A (ko) * | 2012-08-06 | 2014-02-17 | 삼성디스플레이 주식회사 | 증착 장치 |
KR20140053625A (ko) * | 2012-10-26 | 2014-05-08 | 삼성디스플레이 주식회사 | 유기물 증착 장치 |
EP3102715A1 (en) * | 2014-02-04 | 2016-12-14 | Applied Materials, Inc. | Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus with an evaporation source for organic materials, and method for operating an evaporation source for organic material |
US10837111B2 (en) * | 2015-01-12 | 2020-11-17 | Applied Materials, Inc. | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier |
KR20170038220A (ko) * | 2015-09-30 | 2017-04-07 | 주식회사 선익시스템 | 기판 처리 장치 및 그 장치의 기판에 대한 마스크 장착 방법 |
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2018
- 2018-07-30 CN CN201880046285.9A patent/CN110972483A/zh active Pending
- 2018-07-30 KR KR1020197027992A patent/KR20200014726A/ko not_active Application Discontinuation
- 2018-07-30 WO PCT/EP2018/070601 patent/WO2020025101A1/en active Application Filing
- 2018-07-30 JP JP2020503993A patent/JP2021502474A/ja active Pending
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WO2020025101A1 (en) | 2020-02-06 |
CN110972483A (zh) | 2020-04-07 |
TW202020192A (zh) | 2020-06-01 |
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