JP2021500364A5 - - Google Patents
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- Publication number
- JP2021500364A5 JP2021500364A5 JP2020522739A JP2020522739A JP2021500364A5 JP 2021500364 A5 JP2021500364 A5 JP 2021500364A5 JP 2020522739 A JP2020522739 A JP 2020522739A JP 2020522739 A JP2020522739 A JP 2020522739A JP 2021500364 A5 JP2021500364 A5 JP 2021500364A5
- Authority
- JP
- Japan
- Prior art keywords
- patterned
- substrate
- coating
- range
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 13
- 239000011248 coating agent Substances 0.000 claims 8
- 238000000576 coating method Methods 0.000 claims 8
- 150000001875 compounds Chemical class 0.000 claims 8
- 239000002904 solvent Substances 0.000 claims 5
- 239000011261 inert gas Substances 0.000 claims 3
- 239000002094 self assembled monolayer Substances 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- 150000007514 bases Chemical class 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims 1
- 230000032683 aging Effects 0.000 claims 1
- 125000005370 alkoxysilyl group Chemical group 0.000 claims 1
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000007888 film coating Substances 0.000 claims 1
- 238000009501 film coating Methods 0.000 claims 1
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 238000001465 metallisation Methods 0.000 claims 1
- 230000035943 smell Effects 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762576856P | 2017-10-25 | 2017-10-25 | |
| US62/576,856 | 2017-10-25 | ||
| PCT/EP2018/078940 WO2019081450A1 (en) | 2017-10-25 | 2018-10-23 | AMINO SILOXANE AROMATIC FUNCTIONALIZED MATERIALS FOR USE IN COATING POROUS DIELECTRICS |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021500364A JP2021500364A (ja) | 2021-01-07 |
| JP2021500364A5 true JP2021500364A5 (ko) | 2021-12-02 |
| JP7102519B2 JP7102519B2 (ja) | 2022-07-19 |
Family
ID=64049146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020522739A Active JP7102519B2 (ja) | 2017-10-25 | 2018-10-23 | 多孔性誘電体のキャッピングに使用する芳香族アミノシロキサン官能化材料 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11031237B2 (ko) |
| EP (1) | EP3700912B1 (ko) |
| JP (1) | JP7102519B2 (ko) |
| KR (1) | KR102387755B1 (ko) |
| CN (1) | CN111247156B (ko) |
| SG (1) | SG11202002193WA (ko) |
| TW (1) | TWI768141B (ko) |
| WO (1) | WO2019081450A1 (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021000265A1 (zh) * | 2019-07-02 | 2021-01-07 | 山东圣泉新材料股份有限公司 | 一种粘合促进剂及包含其的光敏树脂组合物 |
| CN112174998B (zh) * | 2019-07-02 | 2023-06-16 | 山东圣泉新材料股份有限公司 | 一种粘合促进剂及包含其的光敏树脂组合物 |
| KR20240058892A (ko) * | 2021-09-07 | 2024-05-08 | 메르크 파텐트 게엠베하 | Dsa에 사용하기 위한 스핀 코팅 방법을 통한 선택적 자기 조립 단층 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK365785A (da) * | 1984-09-17 | 1986-03-18 | Hoffmann La Roche | Metalcomplexer |
| GB2203741A (en) * | 1987-03-25 | 1988-10-26 | Shell Int Research | Nitrogen-containing bidentate compound immobilized on a solid inorganic carrier; organic silicon and organic lithium intermediates |
| US5372930A (en) * | 1992-09-16 | 1994-12-13 | The United States Of America As Represented By The Secretary Of The Navy | Sensor for ultra-low concentration molecular recognition |
| US7964138B2 (en) * | 2005-11-29 | 2011-06-21 | University Of Florida Research Foundation, Inc. | On-demand portable chlorine dioxide generator |
| WO2007143029A1 (en) | 2006-05-31 | 2007-12-13 | Roskilde Semiconductor Llc | Porous materials derived from polymer composites |
| US8943910B2 (en) * | 2012-04-18 | 2015-02-03 | Battelle Memorial Institute | Enhanced surface sampler and process for collection and release of analytes |
| KR101532299B1 (ko) * | 2012-10-11 | 2015-06-30 | 주식회사 엠비케이 | 신규한 전자수송 화합물 및 이를 포함하는 유기전기발광소자 |
| JP6296231B2 (ja) * | 2013-02-28 | 2018-03-20 | 株式会社豊田中央研究所 | 固体触媒 |
| CN105492575B (zh) * | 2013-06-18 | 2019-01-22 | 联吡啶钌科学公司 | 作为生物标记物的电中性金属配合物 |
| CN106582845B (zh) | 2016-11-03 | 2019-09-17 | 天津大学 | 铱基联吡啶-有机硅纳米管多相催化剂及制备方法 |
| CN106588829B (zh) | 2016-11-03 | 2019-03-05 | 天津大学 | 四氢呋喃c-h多相氧化方法 |
-
2018
- 2018-10-23 WO PCT/EP2018/078940 patent/WO2019081450A1/en unknown
- 2018-10-23 JP JP2020522739A patent/JP7102519B2/ja active Active
- 2018-10-23 US US16/646,224 patent/US11031237B2/en active Active
- 2018-10-23 TW TW107137287A patent/TWI768141B/zh active
- 2018-10-23 KR KR1020207014771A patent/KR102387755B1/ko active IP Right Grant
- 2018-10-23 SG SG11202002193WA patent/SG11202002193WA/en unknown
- 2018-10-23 CN CN201880068696.8A patent/CN111247156B/zh active Active
- 2018-10-23 EP EP18795402.9A patent/EP3700912B1/en active Active
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