JP2021150562A - Substrate processing apparatus and substrate processing method - Google Patents

Abstract

To inspect a state of a belt while maintaining throughput.SOLUTION: A substrate processing apparatus comprises: a processing unit which applies predetermined processing to a substrate; a transfer unit including a holding section for holding the substrate and a driving section which includes a belt and transfers the holding section in a first direction by moving the belt; a measurement unit capable of acquiring a vibration signal corresponding to vibration of the belt derived from the displacement of the holding section; and a control unit. The control unit includes: a processing control section for executing process processing including first processing in which the predetermined processing is applied successively to a plurality of substrates including the substrate by the processing unit, and second processing in which the plurality of substrates are respectively transferred into/transferred out of the processing unit by the transfer unit; a signal acquisition section for acquiring the vibration signal from the measurement unit; and a state determination section for determining a state of the belt on the basis of the vibration signal. The signal acquisition section acquires the vibration signal during an execution period of the process processing.SELECTED DRAWING: Figure 5

Description

The present disclosure relates to a substrate processing apparatus and a substrate processing method.

Patent Document 1 describes a first step of measuring the pressure fluctuation of air generated by the vibration of the strip plate, a second step of extracting the natural frequency of the strip plate, and a strip plate based on the extracted natural frequency. A method for measuring the tension of a strip-shaped plate including a third step of determining the tension of the above-mentioned plate is disclosed.

Japanese Unexamined Patent Publication No. 2005-337846

In a substrate processing apparatus that performs a predetermined process on a substrate, the substrate may be conveyed by a transfer unit having a belt. The present disclosure provides a substrate processing apparatus and a substrate processing method capable of inspecting the state of a belt while maintaining throughput.

The substrate processing apparatus according to one aspect of the present disclosure includes a processing unit that performs predetermined processing on a substrate, a holding portion that holds the substrate, and a holding portion that includes a belt and moves the belt in a first direction. A transport unit having a drive unit for displacing the belt, a measurement unit provided close to the belt and capable of acquiring a vibration signal corresponding to the vibration of the belt due to the displacement of the holding portion, a processing unit, a transport unit, and the like. And a control unit for controlling the measurement unit. The control unit is a process process including a first process in which predetermined processes are sequentially performed by a processing unit on a plurality of boards including a board, and a second process in which a transfer unit carries in and out each of the plurality of boards to the processing unit. It has a processing control unit for executing the above, a signal acquisition unit for acquiring a vibration signal from the measurement unit, and a state determination unit for determining the state of the belt based on the vibration signal. The signal acquisition unit acquires a vibration signal during the execution period of the process process.

According to the present disclosure, there is provided a substrate processing apparatus and a substrate processing method capable of inspecting the state of a belt while maintaining throughput.

FIG. 1 is a perspective view schematically showing an example of a substrate processing system. FIG. 2 is a schematic view showing an example of a coating and developing apparatus. FIG. 3 is a plan view schematically showing an example of the transport unit. FIG. 4 is a side view schematically showing an example of the transport unit. FIG. 5A is a schematic view showing an example of the inside of the horizontal drive unit. FIG. 5B is a schematic view showing an example of the measurement unit. FIG. 6A is a schematic view showing an example of the inside of the elevating drive unit. FIG. 6B is a schematic view showing an example of the inside of the horizontal drive unit. FIG. 7 is a block diagram showing an example of the functional configuration of the control device. FIG. 8 is a block diagram showing an example of the hardware configuration of the control device. FIG. 9 is a flowchart showing an example of the substrate processing method. FIG. 10 is a diagram showing an example of processing timing between the transport operation and the belt inspection. FIG. 11 is a flowchart showing an example of the belt inspection method. FIG. 12A is a graph showing an example of a vibration signal corresponding to the vibration of the belt. FIG. 12B is a graph showing an example of the spectrum analysis result of the vibration signal.

Hereinafter, various exemplary embodiments will be described.

The substrate processing apparatus according to one exemplary embodiment includes a processing unit that performs a predetermined process on the substrate, a holding portion that holds the substrate, and a belt that is held in the first direction by moving the belt. A transport unit having a drive unit that displaces the unit, a measurement unit that is provided close to the belt and can acquire a vibration signal corresponding to the vibration of the belt due to the displacement of the holding unit, a processing unit, and a transfer unit. , And a control unit that controls the measurement unit. The control unit is a process process including a first process in which predetermined processes are sequentially performed by a processing unit on a plurality of boards including a board, and a second process in which a transfer unit carries in and out each of the plurality of boards to the processing unit. It has a processing control unit for executing the above, a signal acquisition unit for acquiring a vibration signal from the measurement unit, and a state determination unit for determining the state of the belt based on the vibration signal. The signal acquisition unit acquires a vibration signal during the execution period of the process process.

In this substrate processing apparatus, a vibration signal corresponding to the vibration of the belt is acquired during the execution period of the process processing, and the state of the belt is determined based on the vibration signal. In this device, it is not necessary to stop the process processing by the substrate processing device in order to determine the state of the belt, so that the state of the belt can be inspected while maintaining the throughput.

The substrate processing apparatus may further include an output unit that outputs a signal indicating that the state of the belt is not normal, depending on the determination result by the state determination unit. In this case, when it is determined that the state of the belt is not normal, it is possible to execute a process different from the case where the state of the belt is normal.

In the second process, the process control unit may execute a displacement process in which the holding unit is displaced along the first direction by the drive unit. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process after the displacement process is completed. By acquiring the vibration signal after the displacement processing is completed, it is possible to reduce the influence of the disturbance included in the vibration signal.

The state determination unit may determine the state of the belt based on the vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed after the displacement processing is completed. In this case, the influence of the disturbance included in the vibration signal can be further reduced.

The drive unit may further include two pulleys over which at least a portion of the belt is bridged. The measuring unit may be provided in close proximity to a portion of the belt that is located between the two pulleys. The predetermined time may be set according to the distance between one of the two pulleys, which is closer to the measuring unit, and the measuring unit. The time until the vibration of the belt converges is considered to depend on the length of the belt between the fixed end and the close position of the measuring unit. Therefore, in the above configuration, the state is appropriately determined according to the vibration of the belt. It becomes possible.

The drive unit may further include a first pulley and a second pulley over which at least a part of the belt is bridged, and a motor that rotates the first pulley to move the belt. The measuring unit may be arranged in the vicinity of the first pulley. In the displacement process, the processing control unit may displace the holding unit by the drive unit in the direction from the second pulley to the first pulley. In this case, it is considered that a compressing force is applied to a part of the belt between the member connected to the holding portion and the first pulley as the holding portion stops. Therefore, the vibration becomes large in a part of the belt, and it is easy to acquire the vibration signal.

The drive unit may further include a slider that moves with the holding unit. The slider may be connected to the belt so that it can move between the first pulley and the second pulley. The first pulley, the measuring unit, the slider, and the second pulley may be arranged in this order along the movement path of the belt. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to acquire the vibration signal.

The processing control unit may repeatedly execute the displacement processing in the second processing. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process for each displacement process. The stop position of the holding portion may be set to a different position for each displacement process. The state determination unit may determine the state of the belt based on the stop position set for each displacement process. In this case, even if the stop position is different, the stop position for each displacement process is taken into consideration, so that the state of the belt can be appropriately determined.

The transport unit may further include a second drive unit that displaces the holding unit in the second direction. In the second process, the processing control unit executes a first displacement process in which the holding unit is displaced by the driving unit in the first direction and a second displacement processing in which the holding unit is displaced by the second driving unit in the second direction. You may. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement process during a period overlapping with at least a part of the execution period of the second displacement process. In this case, since the operation by the transfer unit and the inspection of the belt are performed at least partially overlapping, it is possible to suppress the influence of the inspection of the belt on the processing including the operation of the transfer unit.

The drive unit includes a first pulley and a second pulley in which at least a part of the belt is bridged and lined up in the first direction, a motor that moves the belt by rotating the first pulley, and a slider that moves together with the holding unit. And may be further included. The slider may be connected to the belt so that it can move between the first pulley and the second pulley. The first pulley, the measuring unit, the slider, and the second pulley may be arranged in this order along the movement path of the belt. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to acquire the vibration signal.

The drive unit may further include a first pulley and a second pulley in which at least a part of the belt is bridged and arranged in the first direction, and a slider that moves together with the holding unit. The slider may be connected to the belt so that it can move between the first pulley and the second pulley. The measuring unit, the first pulley, the slider, and the second pulley may be arranged in this order along the movement path of the belt. In this case, the disturbance applied from the slider to a part of the belt in which the measurement unit is close is reduced by passing through the first pulley, and the influence of the disturbance included in the vibration signal can be reduced.

In the substrate processing method according to one exemplary embodiment, the first processing in which predetermined processing is sequentially performed on a plurality of substrates by the processing unit, and the loading and unloading of each of the plurality of substrates to the processing unit by the transport unit including the belt are performed. Executing the process process including the second process to be performed, acquiring the vibration signal corresponding to the vibration of the belt derived from the operation of the transport unit from the measurement unit provided close to the belt, and the vibration signal. Includes determining the state of the belt based on. Acquiring the vibration signal includes acquiring the vibration signal during the execution period of the process process. In this substrate processing method, it is possible to inspect the state of the belt while maintaining the throughput in the same manner as the above-mentioned substrate processing apparatus.

Hereinafter, one embodiment will be described with reference to the drawings. In the description, the same elements or elements having the same function are designated by the same reference numerals, and duplicate description will be omitted. Some drawings show a Cartesian coordinate system defined by the X, Y and Z axes. In the following embodiments, the Z-axis corresponds to the vertical direction and the X-axis and the Y-axis correspond to the horizontal direction.

[Board processing system]
The substrate processing system 1 shown in FIG. 1 is a system for forming a photosensitive film, exposing the photosensitive film, and developing the photosensitive film on the work W. The work W to be processed is, for example, a substrate or a substrate in which a film, a circuit, or the like is formed by performing a predetermined process. The substrate included in the work W is, for example, a wafer containing silicon. The work W (substrate) may be formed in a circular shape. The work W to be processed may be a glass substrate, a mask substrate, an FPD (Flat Panel Display), or the like, or may be an intermediate obtained by subjecting these substrates or the like to a predetermined treatment. The photosensitive film is, for example, a resist film.

The substrate processing system 1 includes a coating / developing device 2 and an exposure device 3. The coating / developing device 2 is a device for forming a resist film (photosensitive film) on the work W. The exposure apparatus 3 is an apparatus for exposing a resist film formed on the work W (substrate). Specifically, the exposure apparatus 3 irradiates the exposed portion of the resist film with energy rays by a method such as immersion exposure. The coating / developing device 2 applies a resist (chemical solution) to the surface of the work W to form a resist film before the exposure process by the exposure device 3, and develops the resist film after the exposure process.

(Board processing equipment)
Hereinafter, the configuration of the coating / developing device 2 will be described as an example of the substrate processing device. As shown in FIGS. 1 and 2, the coating / developing device 2 includes a carrier block 4, a processing block 5, an interface block 6, and a control device 100 (control unit).

The carrier block 4 introduces the work W into the coating / developing device 2 and derives the work W from the coating / developing device 2. For example, the carrier block 4 can support a plurality of carriers C for the work W, and includes a transfer unit A1 including a delivery arm. The carrier C accommodates, for example, a plurality of circular workpieces W. The transport unit A1 takes out the work W from the carrier C, passes it to the processing block 5, receives the work W from the processing block 5, and returns it to the carrier C. The processing block 5 has processing modules 11, 12, 13, and 14.

The processing module 11 includes a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transporting the work W to these units. The treatment module 11 forms an underlayer film on the surface of the work W by the liquid treatment unit U1 and the heat treatment unit U2. The liquid treatment unit U1 applies a treatment liquid for forming an underlayer film onto the work W. The heat treatment unit U2 performs various heat treatments accompanying the formation of the underlayer film.

The processing module 12 includes a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transporting the work W to these units. The treatment module 12 forms a resist film on the lower layer film by the liquid treatment unit U1 and the heat treatment unit U2. The liquid treatment unit U1 applies a treatment liquid (resist) for forming a resist film on the lower film. The heat treatment unit U2 performs various heat treatments accompanying the formation of the resist film.

The processing module 13 includes a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transporting the work W to these units. The treatment module 13 forms an upper layer film on the resist film by the liquid treatment unit U1 and the heat treatment unit U2. The liquid treatment unit U1 applies a treatment liquid for forming an upper layer film onto the resist film. The heat treatment unit U2 performs various heat treatments accompanying the formation of the upper layer film.

The processing module 14 includes a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transporting the work W to these units. The processing module 14 is subjected to the development treatment of the exposed resist film and the heat treatment associated with the development treatment by the liquid treatment unit U1 and the heat treatment unit U2. The liquid treatment unit U1 develops a resist film by applying a developing solution on the surface of the exposed work W and then rinsing it with a rinsing solution. The heat treatment unit U2 performs various heat treatments associated with the development process. Specific examples of the heat treatment include heat treatment before development treatment (PEB: Post Exposure Bake), heat treatment after development treatment (PB: Post Bake), and the like.

A shelf unit U10 is provided on the carrier block 4 side in the processing block 5. The shelf unit U10 is divided into a plurality of cells arranged in the vertical direction. A transport unit A7 including an elevating arm is provided in the vicinity of the shelf unit U10. The transport unit A7 raises and lowers the work W between the cells of the shelf unit U10.

A shelf unit U11 is provided on the interface block 6 side in the processing block 5. The shelf unit U11 is divided into a plurality of cells arranged in the vertical direction. Since the shelf units U10 and U11 make the work W wait for the work W to perform the next processing (because it functions as a buffer), these shelf units U10 and U11 are also processing units that perform processing on the work W. Applicable.

The interface block 6 transfers the work W to and from the exposure apparatus 3. For example, the interface block 6 has a built-in transfer unit A8 including a transfer arm, and is connected to the exposure apparatus 3. The transport unit A8 passes the work W arranged on the shelf unit U11 to the exposure apparatus 3. The transport unit A8 receives the work W from the exposure apparatus 3 and returns it to the shelf unit U11.

(Transport unit)
Next, an example of the transport unit A3 in the processing module 12 will be described with reference to FIGS. 3 and 4. The transport unit A3 transports the work W while holding the work W in the processing module 12. The transport unit A3 transports the work W between a plurality of processing units included in the processing module 12. In the processing module 12 illustrated in FIG. 3, two liquid processing units U1 and two heat treatment units U2 are arranged side by side in this order along one horizontal direction.

In the present disclosure, the direction from the heat treatment unit U2 to the liquid treatment unit U1 is defined as the "Y-axis positive direction", and the direction from the liquid treatment unit U1 to the heat treatment unit U2 is defined as the "Y-axis negative direction". The direction from the transport unit A3 to the liquid treatment unit U1 (or the heat treatment unit U2) is defined as the "X-axis positive direction", and the direction from the liquid treatment unit U1 (heat treatment unit U2) to the transport unit A3 is defined as the "X-axis negative direction". do. Further, the vertically upward direction is defined as the "Z-axis positive direction", and the vertically downward direction is defined as the "Z-axis negative direction". The direction including either the positive direction or the negative direction of each axis is simply referred to as "X-axis direction" or the like.

The transport unit A3 has, for example, a holding arm 20, horizontal drive units 30 and 50, and an elevating drive unit 70.

The holding arm 20 (holding portion) is configured to hold the work W. The holding arm 20 holds the work W so that the surface Wa of the work W faces upward. The surface Wa is a surface on which the resist coating film is formed in the liquid treatment unit U1. The holding arm 20 may be formed so as to surround the peripheral edge of the work W and support the peripheral edge of the back surface of the work W opposite to the front surface Wa. The transport unit A3 carries in and out the work W to a processing unit such as the liquid processing unit U1 by displacing the holding arm 20 holding the work W. That is, the transport unit A3 carries the work W into one processing unit by displacing the holding arm 20, and carries out the work W from the processing unit by displacing the holding arm 20. The transport unit A3 may carry in and out a plurality of work W with respect to one processing unit.

The horizontal drive unit 30 is configured to displace the holding arm 20 in one horizontal direction. The horizontal drive unit 30 is an actuator configured to reciprocate the holding arm 20 along one horizontal direction by a power source such as a motor. As shown in FIG. 4, the transport unit A3 further includes a rotary drive unit 46 that supports the horizontal drive unit 30 and a base 48. The rotary drive unit 46 is a rotary actuator configured to rotate the horizontal drive unit 30 around a vertical rotation axis by, for example, a power source such as a motor. As the horizontal drive unit 30 rotates by the rotation drive unit 46, the moving direction of the holding arm 20 by the horizontal drive unit 30 changes.

For example, the horizontal drive unit 30 shown in FIG. 4 is arranged by the rotary drive unit 46 so as to reciprocate the holding arm 20 in the X-axis direction. In this arrangement, the horizontal drive unit 30 moves the holding arm 20 in the positive direction of the X-axis and moves the holding arm 20 in the negative direction of the X-axis. The horizontal drive unit 30 moves the holding arm 20 in the X-axis direction (either the positive direction of the X-axis or the negative direction of the X-axis), so that the work W held by the holding arm 20 is moved in the X-axis direction (first). Move along the direction). The horizontal drive unit 30 is formed so as to extend along a direction in which the holding arm 20 is moved (for example, the X-axis direction). The details of the drive mechanism of the horizontal drive unit 30 will be described later. The base 48 is a member that supports the rotary drive unit 46 and the horizontal drive unit 30. The rotation drive unit 46 is provided on the base 48, and the base 48 is formed so as to extend along the X-axis direction, for example. One end of the base 48 in the negative direction of the X-axis (for example, each of both side surfaces of the one end) is connected to the elevating drive unit 70.

The elevating drive unit 70 is configured to displace the holding arm 20 in the vertical direction (Z-axis direction in the drawing). The elevating drive unit 70 is an actuator configured to reciprocate the holding arm 20 along the Z-axis direction (first direction) by, for example, a power source such as a motor. The elevating drive unit 70 supports, for example, the base 48, moves the base 48 in the positive direction of the Z axis, and moves the base 48 in the negative direction of the Z axis. When the elevating drive unit 70 moves the base 48 in the Z-axis direction, the holding arm 20 (work W) also moves along the Z-axis direction. The elevating drive unit 70 is formed so as to extend along the Z-axis direction in which the base 48 (holding arm 20) is moved. The details of the elevating drive unit 70 will be described later.

Returning to FIG. 3, the horizontal drive unit 50 is configured to displace the holding arm 20 in one horizontal direction (Y-axis direction in the figure). The horizontal drive unit 50 is an actuator configured to reciprocate the holding arm 20 along the Y-axis direction (first direction) by, for example, a power source such as a motor. The horizontal drive unit 50 supports, for example, the elevating drive unit 70, moves the elevating drive unit 70 in the positive direction of the Y axis, and moves the elevating drive unit 70 in the negative direction of the Y axis. When the horizontal drive unit 50 moves the elevating drive unit 70 in the Y-axis direction, the holding arm 20 (work W) also moves along the Y-axis direction. The horizontal drive unit 50 is formed so as to extend along the Y-axis direction. The details of the drive mechanism of the horizontal drive unit 50 will be described later.

(Details of measurement unit and each drive unit)
Next, with reference to FIGS. 5 and 6, a measurement unit used for inspecting the state of the belt included in each drive unit will be described together with a detailed configuration of each drive unit. The coating / developing device 2 further includes measuring units 130, 150, 170.

The measuring unit 130 is used for inspecting the state of the belt of the horizontal drive unit 30. The measuring unit 150 is used for inspecting the state of the belt of the horizontal drive unit 50. The measuring unit 170 is used for inspecting the state of the belt of the elevating drive unit 70. In the present disclosure, the inspection of the state of the belt means inspecting whether or not the belt can operate normally. In one example, the belt (drive unit) may not operate normally due to deterioration of the belt over time, malfunction of belt adjustment, etc., and in order to prevent these, belt inspection using each measurement unit Is done. Hereinafter, the drive unit and the measurement unit will be described for each axis.

<Y-axis direction>
FIG. 5A shows details of the horizontal drive unit 50 that displaces the holding arm 20 in the Y-axis direction. The horizontal drive unit 50 includes a belt arranged so that at least a part thereof extends along the Y-axis direction, and the holding arm 20 is displaced in the Y-axis direction by moving the belt. The horizontal drive unit 50 includes, for example, a housing 52, pulleys 56a and 56b, a belt 58, a motor 62, and a slider 54.

The housing 52 accommodates each element included in the horizontal drive unit 50. The housing 52 is formed so as to extend along the Y-axis direction. An opening 52a is provided in the wall of the housing 52 facing the plurality of processing units (see also FIG. 4). A part of the slider 54 projects from the opening 52a to the outside of the housing 52.

As shown in FIG. 5A, the pulley 56a (first pulley) and the pulley 56b (second pulley) are arranged side by side along the Y-axis direction. The pulleys 56a and 56b are arranged at each end of the housing 52 in the Y-axis direction, for example. The pulleys 56a and 56b are respectively provided in the housing 52 so as to be rotatable around a rotation axis along the X-axis direction. The belt 58 is bridged over the pulleys 56a and 56b. The belt 58 is, for example, a timing belt. The motor 62 is a power source that generates rotational torque. The motor 62 is, for example, a servo motor. The motor 62 is connected to the pulley 56a and rotates the pulley 56a. When the torque (driving force) by the motor 62 is transmitted to the pulleys 56a, the belts 58 spanned by the pulleys 56a and 56b move along the Y-axis direction.

The slider 54 is formed so as to extend in the X-axis direction, for example, as shown in FIG. The base end portion (one end portion farther from the processing unit) of the slider 54 in the X-axis direction is connected to the belt 58 in the housing 52. The tip end portion (one end portion closer to the processing unit) of the slider 54 in the X-axis direction projects to the outside of the housing 52 through the opening 52a. For example, the lower end of the elevating drive unit 70 is connected to the tip of the slider 54. In this way, the slider 54 is connected to the holding arm 20 via another member and moves together with the holding arm 20. When the belt 58 moves along the Y-axis direction due to the torque of the motor 62, the slider 54 (elevating drive unit 70) connected to the belt 58 also reciprocates along the Y-axis direction, and as a result, the holding arm 20 And the work W also moves along the Y-axis direction.

In the above horizontal drive unit 50, the slider 54 is configured to be movable between the pulley 56a and the pulley 56b. In a state where the slider 54 is arranged at one position between the pulleys 56a and 56b, the belt 58 extends along the Y-axis direction and connects between the pulleys 56a and 56b with the first portion 58a and Y. Includes a second portion 58b that extends along the axial direction and connects between the pulleys 56a, 56b. The first portion 58a and the second portion 58b are arranged side by side along the Z-axis direction and are substantially parallel to each other. In the example shown in FIG. 5A, the slider 54 is connected to the first portion 58a. In the following, in the first portion 58a, the space between the pulley 56a and the slider 54 is referred to as "string 64a", and the space between the slider 54 and the pulley 56b is referred to as "string 64b".

The measuring unit 150 is configured to be able to acquire a signal (hereinafter, referred to as “vibration signal”) corresponding to the vibration of the belt 58 of the horizontal drive unit 50. Specifically, the measurement unit 150 acquires a vibration signal corresponding to the vibration of the belt 58 generated by the movement (conveyance operation) of the holding arm 20 by the horizontal drive unit 50. The measuring unit 150 acquires, for example, a sound wave (vibration of air) generated by the vibration of the belt 58. The measuring unit 150 is provided in the transport unit A3 (inside the housing 52) in a state close to the belt 58. The measuring unit 150 may have two sensors (sensors 92 and 94) for measuring sound waves. The sensor 92 and the sensor 94 have a common function with each other.

As shown in FIG. 5B, the sensor 92 and the sensor 94 are arranged so as to sandwich the belt 58. In one example, the sensor 92 and the sensor 94 are arranged side by side along the Z-axis direction. That is, the sensor 92, the belt 58, and the sensor 94 are arranged in this order in the Z-axis direction. Each of the sensors 92 and 94 is arranged at a position where sound waves from the belt 58 can be acquired. The distance between the sensor 92 and the belt 58 in the Z-axis direction is substantially equal to the distance between the sensor 94 and the belt 58 in the Z-axis direction. The sensor 92 acquires the sound wave SW1 propagating from the belt 58 in the positive direction of the Z axis, and the sensor 94 acquires the sound wave SW2 propagating from the belt 58 in the negative direction of the Z axis. In one example, each of the sensors 92 and 94 is a MEMS (Micro Electro Mechanical Systems) microphone. The measurement unit 150 (each of the sensors 92 and 94) outputs an electric signal corresponding to the sound waves SW1 and SW2 to the control device 100.

The measuring unit 150 (sensors 92, 94) may be arranged in the vicinity of the pulley 56a to which the motor 62 is connected. In one example, the measuring unit 150 is arranged at a position where the distance between the pulley 56a and the pulley 56a is 1/3 or less of the distance between the pulley 56a and the pulley 56b in the Y-axis direction. As shown in FIG. 5A, for example, the measuring unit 150 is arranged at a position closer to the pulley 56a in the string 64a of the first portion 58a. In this case, the slider 54 is configured to be movable between a position that does not interfere with the measuring unit 150 and a position that does not interfere with the pulley 56b.

In the above configuration, the pulley 56a, the measuring unit 150, the slider 54, and the pulley 56b are arranged in this order along the movement path of the belt 58 (the movement locus of the belt 58 accompanying the movement of the belt 58 by the motor 62). Has been done. The regions of the belt 58 corresponding to the first portion 58a and the second portion 58b (strings 64a and 64b) of the belt 58 change depending on the position of the slider 54 in the Y-axis direction. However, regardless of the position of the slider 54 in the movement range, the above-mentioned arrangement relationship (arrangement relationship along the movement path of the belt 58) of the pulley 56a, the measuring unit 150, the slider 54, and the pulley 56b remains. To establish.

The horizontal drive unit 50 illustrated above is used, for example, when moving the work W between the processing units of the processing module 12. In one example, the horizontal drive unit 50 is used when moving the work W from the liquid treatment unit U1 located first to the heat treatment unit U2 located third from the positive direction of the Y axis (see FIG. 3). .. Specifically, the transport unit A3 faces the moving source liquid processing unit U1 in the X-axis direction by the horizontal drive unit 50 in a state where the base end portion of the holding arm 20 overlaps the base 48. The holding arm 20 is moved from the position where it is to be moved (the position where it overlaps in the Y-axis direction) to the position where it faces the heat treatment unit U2 at the destination in the X-axis direction. At this time, the slider 54 shown in FIG. 5A moves from the pulley 56b toward the pulley 56a (measurement unit 150). When the holding arm 20 is moved in the positive direction of the Y-axis by the horizontal drive unit 50, the slider 54 moves from the pulley 56a (measurement unit 150) toward the pulley 56b.

<Z-axis direction>
FIG. 6A shows details of the elevating drive unit 70 that displaces the holding arm 20 in the Z-axis direction. FIG. 6A shows one of a pair of parts of the elevating drive unit 70 that sandwich the base 48 in the Y-axis direction (see also FIG. 3). The elevating drive unit 70 includes a belt arranged so that at least a part thereof extends along the Z-axis direction, and the holding arm 20 is displaced in the Z-axis direction by moving the belt. The elevating drive unit 70 includes, for example, a housing 72, pulleys 76a and 76b, a belt 78, a motor 82, and a slider 74.

The housing 72 accommodates each element included in the elevating drive unit 70. The housing 72 is formed so as to extend along the Z-axis direction. An opening 72a is provided in the wall of the housing 72 facing the base 48. A part of the slider 74 projects from the opening 72a to the outside of the housing 72.

The pulley 76a (first pulley) and the pulley 76b (second pulley) are arranged side by side along the Z-axis direction. The height position of the pulley 76a is lower than the height position of the pulley 76b. The pulleys 76a and 76b are arranged at each end of the housing 72 in the Z-axis direction, for example. The pulleys 76a and 76b are respectively provided in the housing 72 so as to be rotatable around a rotation axis along the X-axis direction. The belt 78 is bridged over the pulleys 76a and 76b. The belt 78 is, for example, a timing belt. The motor 82 is a power source that generates rotational torque. The motor 82 is, for example, a servo motor. The motor 82 is connected to the pulley 76a and rotates the pulley 76a. When the torque (driving force) by the motor 82 is transmitted to the pulleys 76a, the belt 78 spanning the pulleys 76a and 76b moves along the Z-axis direction.

The slider 74 is formed so as to extend in the Y-axis direction, for example, as shown in FIG. 6A. The base end portion (one end portion farther from the base 48) of the slider 74 in the Y-axis direction is connected to the belt 78 in the housing 72. The tip of the slider 74 in the Y-axis direction (one end closer to the base 48) projects out of the housing 72 through the opening 72a. For example, the side surface of one end of the base 48 is connected to the tip of the slider 74. In this way, the slider 74 is connected to the holding arm 20 via another member and moves together with the holding arm 20. As the belt 78 moves along the Z-axis direction due to the torque of the motor 82, the slider 74 (base 48) connected to the belt 78 also reciprocates along the Z-axis direction. When the slider 74 (base 48) moves along the Z-axis direction, the holding arm 20 and the work W also move along the Z-axis direction.

In the above elevating drive unit 70, the slider 74 is configured to be movable between the pulley 76a and the pulley 76b. In a state where the slider 74 is arranged at one position between the pulleys 76a and 76b, the belt 78 extends along the Z-axis direction and connects between the pulleys 76a and 76b with the first portion 78a and Z. Includes a second portion 78b that extends along the axial direction and connects between the pulleys 76a, 76b. The first portion 78a and the second portion 78b are arranged side by side along the Y-axis direction and are substantially parallel to each other. In the example shown in FIG. 5A, the slider 74 is connected to the first portion 78a.

The measuring unit 170 is configured to be able to acquire a vibration signal corresponding to the vibration of the belt 78 of the elevating drive unit 70. Specifically, the measurement unit 170 acquires a vibration signal corresponding to the vibration of the belt 78 generated by the movement (conveyance operation) of the holding arm 20 by the elevating drive unit 70. The measuring unit 170 acquires, for example, a sound wave generated by the vibration of the belt 78. The measuring unit 170 is provided in the transport unit A3 (inside the housing 72) in a state close to the belt 78. The measuring unit 170 may have two sensors (sensors 92 and 94) for measuring sound waves, similarly to the measuring unit 150 described above.

The sensor 92 and the sensor 94 of the measuring unit 170 are arranged so as to sandwich the belt 78. In one example, the sensor 92 and the sensor 94 are arranged side by side along the Y-axis direction. That is, the sensor 92, the belt 78, and the sensor 94 are arranged in this order in the Y-axis direction. The measuring unit 170 (each of the sensors 92 and 94) outputs an electric signal corresponding to the sound waves SW1 and SW2 from the belt 78 to the control device 100.

The measuring unit 170 (sensors 92, 94) may be arranged in the vicinity of the pulley 76a to which the motor 82 is connected. The measuring unit 170 is arranged near the pulley 76a of the second portion 78b to which the slider 74 is not connected, for example, as shown in FIG. 6A. In this case, since the slider 74 does not interfere with the measuring unit 170, it is configured to be movable between a position that does not interfere with the pulley 76a and a position that does not interfere with the pulley 76b. The measuring unit 170 may be arranged at a position where the distance between the pulley 76a and the pulley 76a is 1/3 or less of the distance between the pulley 76a and the pulley 76b in the Z-axis direction. The distance between the arrangement position (fixed position) of the measuring unit 170 and the pulley 56a is between the upper end of the slider 74 and the pulley 56a when it is located at the limit position closest to the pulley 76a in the movement range of the slider 74. It may be about the same as the distance of, or it may be small.

In the above configuration, the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b are arranged in this order along the movement path of the belt 78. The regions of the belt 78 corresponding to the first portion 78a and the second portion 78b change according to the position of the slider 74 in the Z-axis direction. However, regardless of the position of the slider 74 within the movement range, the above-mentioned arrangement relationship (arrangement relationship along the movement path of the belt 78) of the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b remains. To establish.

The elevating drive unit 70 illustrated above is used, for example, when moving the holding arm 20 in the transfer of the work W to and from the processing unit. In one example, the transfer unit A3 is in a state where the base end portion of the holding arm 20 is arranged at a position where it does not overlap with the base 48 (a state in which the tip end portion of the holding arm 20 is located in the processing unit), and the elevating drive unit 70 The holding arm 20 is moved from one height position to a position lower than the height position. At this time, the slider 74 shown in FIG. 6A moves from the pulley 76b toward the pulley 76a. When the holding arm 20 is moved in the positive direction of the Z axis by the elevating drive unit 70, the slider 74 moves from the pulley 76a toward the pulley 76b.

<X-axis direction>
FIG. 6B shows a horizontal drive unit 30 that displaces the holding arm 20 in the X-axis direction. The horizontal drive unit 30 includes a belt at least partially arranged along the X-axis direction, and the holding arm 20 is displaced in the X-axis direction by moving the belt. The horizontal drive unit 30 includes, for example, a housing 32, pulleys 36a, 36b, 36c, 36d, a belt 38, a motor 42, and a slider 34.

The housing 32 accommodates each element included in the horizontal drive unit 30. The housing 32 is formed so as to extend along the X-axis direction. For example, an opening 32a is provided in the upper wall of the housing 32. A part of the slider 34 projects from the opening 32a to the outside of the housing 32.

The pulley 36a (first pulley) and the pulley 36b (second pulley) are arranged side by side along the X-axis direction. The distance between the pulley 36a and the liquid treatment unit U1 (heat treatment unit U2) in the X-axis direction is smaller than the distance between the pulley 36b and the liquid treatment unit U1. The pulleys 36a and 36b are arranged at each end of the housing 32 in the X-axis direction, for example. The pulley 36c and the pulley 36d are arranged between the pulleys 36a and 36b in the X-axis direction and below the pulleys 36a and 36b in the Z-axis direction. The height position of the pulley 36c is higher than the height position of the pulley 36d. In the X-axis direction, the pulley 36a, the pulley 36c, the pulley 36d, and the pulley 36b are arranged in this order. The pulleys 36a, 36b, 36c, and 36d are each rotatably provided in the housing 32 around a rotation axis along the Y-axis direction.

The belt 38 is bridged over the pulleys 36a, 36b, 36c, 36d. The belt 38 is, for example, a timing belt. The motor 42 is a power source that generates rotational torque. The motor 42 is, for example, a servo motor. The motor 42 is connected to the pulley 36d and rotates the pulley 36d. When the torque (driving force) by the motor 42 is transmitted to the pulleys 36d, the belt 38 bridged over the pulleys 36a, 36b, 36c, 36d moves along the X-axis direction between the pulleys 36a, 36b.

The slider 34 is formed so as to extend in the Z-axis direction, for example, as shown in FIG. 6 (b). The base end portion (one end portion located below) of the slider 34 in the Z-axis direction is connected to the belt 38 in the housing 32. The tip end portion (one end portion located above) of the slider 34 in the Z-axis direction projects to the outside of the housing 32 through the opening 32a. For example, a base end portion of the holding arm 20 (a portion of the holding arm 20 that does not hold the work W) is connected to the tip end portion of the slider 34. In this way, the slider 34 is connected to the holding arm 20 and moves together with the holding arm 20. As the belt 38 moves along the X-axis direction due to the torque generated by the motor 42, the slider 34 (holding arm 20) connected to the belt 38 also reciprocates along the X-axis direction. When the slider 34 (holding arm 20) moves along the X-axis direction, the work W held by the holding arm 20 also moves along the X-axis direction.

In the above horizontal drive unit 30, the slider 34 is configured to be movable between the pulley 36a and the pulley 36b. In a state where the slider 34 is arranged at one position between the pulleys 36a and 36b, the belt 38 extends along the X-axis direction and connects between the pulleys 36a and 36b with the first portion 38a and the pulley. It includes a second portion 38b connecting between 36a and 36d. The second portion 38b is inclined with respect to the first portion 38a when viewed from the Y-axis direction. In the example shown in FIG. 6B, the slider 34 is connected to the first portion 38a.

The measuring unit 130 is configured to be able to acquire a vibration signal corresponding to the vibration of the belt 38 of the horizontal drive unit 30. Specifically, the measurement unit 130 acquires a vibration signal corresponding to the vibration of the belt 38 generated by the movement (conveyance operation) of the holding arm 20 by the horizontal drive unit 30. The measuring unit 130 acquires, for example, a sound wave generated by the vibration of the belt 38. The measuring unit 130 is provided in the transport unit A3 (inside the housing 32) in a state close to the belt 38. The measuring unit 130 may have two sensors (sensors 92 and 94) for measuring sound waves, similarly to the measuring unit 150 described above.

The sensor 92 and the sensor 94 of the measuring unit 130 are arranged so as to sandwich the belt 38. In one example, the sensor 92 and the sensor 94 are arranged side by side along a direction orthogonal to the second portion 38b of the belt 38. That is, the sensor 92, the belt 38, and the sensor 94 are arranged in this order in the direction orthogonal to the second portion 38b. The measuring unit 130 (each of the sensors 92 and 94) outputs an electric signal corresponding to the sound waves SW1 and SW2 from the belt 38 to the control device 100.

The measuring unit 130 (sensors 92, 94) may be arranged between the pulley 36a and the pulley 36d. As shown in FIG. 6B, for example, the measuring unit 130 is located substantially at the center (closer to the pulley 36a at the center) between the pulley 36a and the pulley 36d of the second portion 38b to which the slider 34 is not connected. Is located in. In this case, since the slider 34 does not interfere with the measuring unit 130, it is configured to be movable between a position that does not interfere with the pulley 36a and a position that does not interfere with the pulley 36b.

In the above configuration, the measuring unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, 36d are arranged in this order along the moving path of the belt 38. The regions of the belt 38 corresponding to the first portion 38a and the second portion 38b change according to the position of the slider 34 in the X-axis direction. However, regardless of the position of the slider 34 in the movement range, the above-mentioned arrangement relationship (along the movement path of the belt 38) of the measurement unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, 36d Arrangement relationship) holds.

The horizontal drive unit 30 illustrated above is used, for example, when the holding arm 20 is moved to carry in / out the work W to / from the processing unit. In one example, the transport unit A3 faces the processing unit at the loading / unloading destination in the X-axis direction, and the base end of the holding arm 20 overlaps the base 48 from the position where the base end of the holding arm 20 overlaps the base 48. The holding arm 20 is moved to a position where it does not overlap with. At this time, the slider 34 shown in FIG. 6B moves from the pulley 36b toward the pulley 36a. When the holding arm 20 is moved in the negative direction of the X-axis by the horizontal drive unit 30, the slider 34 moves from the pulley 36a toward the pulley 36b.

(Control device)
Subsequently, an example of the control device 100 will be described with reference to FIGS. 7 and 8. The control device 100 controls the coating / developing device 2. The control device 100 controls at least the liquid treatment unit U1, the heat treatment unit U2, the transfer unit A3, and the measurement units 130, 150, 170. The control device 100 has, for example, a processing control unit 202 and an inspection control unit 204 as a functional configuration (hereinafter, referred to as a “functional module”). The inspection control unit 204 includes a signal acquisition unit 212, a data extraction unit 214, a frequency calculation unit 216, a storage unit 218, a state determination unit 220, and an output unit 222. The process executed by each functional module corresponds to the process executed by the control device 100.

The process control unit 202 executes process processing for a plurality of work Ws. The process process is to sequentially apply a series of processes (for example, a series of processes from the formation of the underlayer film to the developing process) executed in the coating / developing device 2 to a plurality of work Ws in a predetermined period. .. The process treatment includes a first treatment in which a predetermined treatment (for example, liquid treatment or heat treatment) is performed on a plurality of works W by a treatment unit such as a liquid treatment unit U1 (heat treatment unit U2). In addition, the process process includes a second process in which a plurality of work Ws are carried in and out of one processing unit such as the liquid processing unit U1 by the transfer unit A3.

The second process includes a displacement process in which the holding arm 20 is displaced by the horizontal drive unit 30 along the X-axis direction, a displacement process in which the holding arm 20 is displaced by the horizontal drive unit 50 along the Y-axis direction, and a Z-axis direction. Includes a displacement process in which the holding arm 20 is displaced by the elevating drive unit 70 along the line. Each of these three displacement processes includes a displacement process that displaces the holding arm 20 in the positive direction of each axis and a displacement process that displaces the holding arm 20 in the negative direction of each axis.

The signal acquisition unit 212 acquires vibration signals corresponding to the vibration of the belt from the measurement units 130, 150, and 170, respectively. For example, the signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt by calculating the difference between the two electric signals corresponding to the sound waves SW1 and SW2 from the sensors 92 and 94 of each measurement unit. The signal acquisition unit 212 acquires a vibration signal during the execution period of the process process. The signal acquisition unit 212 acquires a vibration signal without stopping a series of processes (operation of the device) by the coating / developing device 2, for example, during the operating period of the coating / developing device 2. In one example, the signal acquisition unit 212 receives a vibration signal (displacement in the displacement process) from the belt of the drive unit corresponding to the displacement process in a state where the holding arm 20 is stopped on the axis after the displacement process of each axis is completed. (Vibration signal corresponding to the vibration of the belt generated by) is acquired.

The data extraction unit 214 extracts data used for belt inspection (hereinafter, referred to as “analysis data”) from the vibration signals acquired by the signal acquisition unit 212. For example, the data extraction unit 214 further seconds from the first predetermined time from the time when the first predetermined time elapses from the vibration signal after the displacement processing is completed (after the holding arm 20 is stopped). The data up to the time when the predetermined time has passed is extracted. The first predetermined time and the second predetermined time are set in advance so that the sound wave corresponding to the vibration of the belt can be measured after the displacement processing is completed. For example, the first predetermined time is set to about several tens of milliseconds to several hundreds of milliseconds, and the second predetermined time is set to about several milliseconds to several tens of milliseconds.

The frequency calculation unit 216 calculates the frequency of the belt based on the analysis data extracted by the data extraction unit 214. For example, the frequency calculation unit 216 calculates a frequency spectrum by performing a fast Fourier transform on the analysis data, and detects the frequency having the largest amplitude from the frequency spectrum as the frequency of the belt. (calculate.

The storage unit 218 stores the frequency (frequency) of the belt vibration calculated by the frequency calculation unit 216 for each axis. The storage unit 218 stores the frequency of the belt repeatedly calculated by the frequency calculation unit 216 for each axis in a predetermined period. The predetermined period is predetermined and may be, for example, one day, one week, one month, or several months, and is a period from the start of operation of the coating / developing device 2 to the stop of operation for maintenance or the like. It may be.

The state determination unit 220 determines the state of the belt for each axis based on the vibration signal acquired by the signal acquisition unit 212. The state determination unit 220 determines, for example, whether or not the belt state is abnormal based on the calculation result of the belt frequency stored by the storage unit 218 for each axis. In the present disclosure, the abnormal state of the belt means that the belt may become inoperable not only when the belt has already failed but also when the belt is approaching the failed state (that is, if it is used continuously as it is). If is high) is also included.

The output unit 222 outputs a signal (hereinafter, referred to as “abnormal signal”) indicating that the state of the belt on the shaft is not normal according to the determination result for each axis by the state determination unit 220. For example, the output unit 222 outputs an abnormality signal to a monitor for notifying the operator or the like when the determination result by the state determination unit 220 indicates that the belt state is abnormal. Alternatively, the output unit 222 receives an abnormality signal in order to stop a series of processes (process processes) by the coating / developing device 2 when the determination result by the state determination unit 220 indicates that the state of the belt is abnormal. Is output to the processing control unit 202.

The control device 100 is composed of one or a plurality of control computers. For example, the control device 100 has a circuit 240 shown in FIG. The circuit 240 has one or more processors 242, a memory 244, a storage 246, an input / output port 248, and a timer 252. The storage 246 has a computer-readable storage medium, such as a hard disk. The storage medium stores a program for causing the control device 100 to execute the substrate processing method described later. The storage medium may be a removable medium such as a non-volatile semiconductor memory, a magnetic disk, or an optical disk. The memory 244 temporarily stores the program loaded from the storage medium of the storage 246 and the calculation result by the processor 242.

The processor 242 executes the above program in cooperation with the memory 244. The input / output port 248 inputs / outputs an electric signal to / from the liquid processing unit U1, the transport unit A3, the measurement units 130, 150, 170, etc., in accordance with a command from the processor 242. The timer 252 measures the elapsed time, for example, by counting a reference pulse having a fixed cycle. The hardware configuration of the control device 100 may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) in which the logic circuit is integrated.

[Board processing method]
Subsequently, with reference to FIG. 9, the coating / developing process executed in the coating / developing apparatus 2 will be described as an example of the substrate processing method. FIG. 9 is a flowchart showing an example of the coating and developing process including the exposure process, and shows the procedure of the coating and developing process for one work W. First, the processing control unit 202 of the control device 100 controls the transport unit A1 so as to transport the work W in the carrier C to the shelf unit U10, and the transport unit so as to arrange the work W in the cell for the processing module 11. Control A7.

Next, the processing control unit 202 controls the processing module 11 so as to form an underlayer film on the surface Wa of the work W (step S01). In step S01, for example, the processing control unit 202 controls the transport unit A3 so as to transport the work W from the shelf unit U10 to the liquid processing unit U1. Then, the processing control unit 202 controls the liquid treatment unit U1 so that a coating film of the treatment liquid for forming the lower layer film is formed on the surface Wa of the work W. The processing control unit 202 controls the transport unit A3 so as to transport the work W on which the coating film is formed to the heat treatment unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 so that the underlayer film is formed on the surface Wa of the work W. After that, the processing control unit 202 controls the transport unit A3 so as to return the work W after the lower layer film is formed to the shelf unit U10, and the transport unit A7 so as to arrange the work W in the cell for the processing module 12. To control.

Next, the processing control unit 202 controls the processing module 12 so as to form a resist film on the surface Wa of the work W after the lower layer film is formed (step S02). In step S02, for example, the processing control unit 202 controls the transport unit A3 so as to transport the work W of the shelf unit U10 to any of the liquid processing units U1 in the processing module 12. Then, the processing control unit 202 controls the liquid processing unit U1 so that a coating film of the resist is formed on the surface Wa of the work W. The processing control unit 202 controls the transport unit A3 so as to transport the work W on which the resist coating film is formed to the heat treatment unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 so that a resist film is formed on the surface Wa of the work W. After that, the processing control unit 202 controls the transport unit A3 so as to return the work W after the resist film is formed to the shelf unit U10, and the transport unit A7 so as to arrange the work W in the cell for the processing module 13. To control.

Next, the processing control unit 202 controls the processing module 13 so as to form an upper layer film on the surface Wa of the work W after the resist film is formed (step S03). In step S03, for example, the processing control unit 202 controls the transport unit A3 so as to transport the work W to the liquid processing unit U1. Then, the processing control unit 202 controls the liquid treatment unit U1 so that a coating film of the treatment liquid for forming the upper layer film is formed on the surface Wa of the work W. The processing control unit 202 controls the transport unit A3 so as to transport the work W on which the coating film is formed to the heat treatment unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 so that the upper layer film is formed on the surface Wa of the work W. After that, the processing control unit 202 controls the transport unit A3 so as to transport the work W after the upper layer film is formed to the shelf unit U11.

Next, the processing control unit 202 controls the transport unit A8 so as to send the work W of the shelf unit U11 to the exposure apparatus 3. Then, a control device different from the control device 100 controls the exposure device 3 so as to perform the exposure process on the work W on which the resist film is formed (step S04). After that, the processing control unit 202 controls the transport unit A8 so as to receive the exposed work W from the exposure apparatus 3 and arrange it in the cell for the processing module 14 in the shelf unit U11.

Next, the processing control unit 202 controls the processing module 14 so that the work W after the exposure processing is subjected to the development processing (step S05). In step S05, for example, the processing control unit 202 controls the transfer unit A3 so as to transfer the work W to the heat treatment unit U2, and then causes the heat treatment unit U2 to perform the heat treatment before development on the resist film of the work W. Control. Then, the processing control unit 202 controls the transport unit A3 so as to transport the work W that has been heat-treated before development to the liquid treatment unit U1, and then develops the resist film of the work W. Controls the liquid processing unit U1.

After that, the processing control unit 202 controls the transport unit A3 so as to transport the developed work W to the heat treatment unit U2, and then the heat treatment unit so as to perform the heat treatment after development on the resist film of the work W. Control U2. Then, the processing control unit 202 controls the transport unit A3 so as to return the work W to the shelf unit U10, and controls the transport unit A7 and the transport unit A1 so as to return the work W to the carrier C. This completes the coating and developing process for one work W.

In the substrate processing method exemplified above, the control device 100 (inspection control unit 204) is in parallel with the transfer operation (displacement processing) of each of the plurality of workpieces W in the series of process processing by the coating / developing device 2. Inspect the condition of the drive belt. Each transfer operation of the work W includes a displacement process of the holding arm 20 in a state where the work W is not held and a displacement process of the holding arm 20 in a state where the work W is held. After the displacement process of the holding arm 20 in the X-axis direction, the control device 100 uses the measuring unit 130 to inspect the state of the belt 38 of the horizontal drive unit 30. After the displacement process of the holding arm 20 in the Y-axis direction, the control device 100 uses the measuring unit 150 to inspect the state of the belt 58 of the horizontal drive unit 50. The control device 100 uses the measuring unit 170 to inspect the state of the belt 78 of the elevating drive unit 70 after the displacement process of the holding arm 20 in the Z-axis direction.

FIG. 10 shows a timing chart of the transfer operation (displacement process) of the holding arm 20 executed in the resist film forming process of step S02 shown in FIG. 9 and the belt inspection executed in association with the transfer operation. An example is shown partially. In a part of step S02, for example, the processing control unit 202 of the control device 100 carries out the work W from the liquid processing unit U1, moves the work W from the liquid processing unit U1 to the heat treatment unit U2, and heat-treats. The operation of carrying the work W into the unit U2 is executed in order.

In the operation of carrying out the work W from the liquid processing unit U1, first, the "X-axis alignment" operation is performed. In this X-axis alignment operation, the control device 100 is arranged at a position facing the liquid processing unit U1 in the X-axis direction (a position overlapping in the Y-axis direction) and the holding arm 20 does not hold the work W. The processing control unit 202 executes a displacement process (first displacement process) for displaced the holding arm 20 in the positive direction in the X-axis direction by the horizontal drive unit 30.

Then, the "Z-axis up" operation is performed. In this Z-axis up operation, the processing control unit 202 displaces the holding arm 20 in the positive direction in the Z-axis direction (second direction) in order to receive the work W from the liquid processing unit U1 (second displacement processing). ) Is executed by the elevating drive unit 70 (second drive unit). The "X-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the displacement process by the elevating drive unit 70. In this X-axis inspection, the inspection control unit 204 vibrates in response to the vibration of the belt 38 of the horizontal drive unit 30 generated by the displacement in the previous displacement process in the positive direction of the X-axis (X-axis alignment operation). Is acquired, and the belt 38 is inspected (for example, calculation and storage of the frequency) based on the acquired vibration signal. After that, the "X-axis pull" operation is performed. In this X-axis pulling operation, the processing control unit 202 executes a displacement process that displaces the holding arm 20 holding the work W in the negative direction of the X-axis.

Next, in the movement operation of the work W from the liquid treatment unit U1 to the heat treatment unit U2, a "Y-axis operation" is performed. In this Y-axis operation, the processing control unit 202 executes a displacement process (first displacement process) that displaces the holding arm 20 in the negative direction of the Y-axis by the horizontal drive unit 50.

Next, in the operation of carrying the work W into the heat treatment unit U2, first, the "X-axis alignment" operation is performed. In this X-axis alignment operation, the processing control unit 202 performs a displacement process (second displacement process) in which the holding arm 20 holding the work W is displaced in the positive direction in the X-axis direction (second direction) by the horizontal drive unit. It is executed by 30 (second drive unit). The "Y-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the displacement process by the horizontal drive unit 30. In this Y-axis inspection, the inspection control unit 204 transmits a vibration signal corresponding to the vibration of the belt 58 of the horizontal drive unit 50 generated by the displacement in the previous displacement process in the negative direction of the Y-axis (Y-axis operation). The belt 58 is inspected based on the acquired vibration signal.

Then, the "Z-axis down" operation is performed. In this Z-axis down operation, the processing control unit 202 displaces the holding arm 20 in the negative direction in the Z-axis direction in order to deliver the work W held by the holding arm 20 to the heat treatment unit U2 (second). Displacement processing) is executed by the elevating drive unit 70. The "X-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the displacement process by the elevating drive unit 70. In this X-axis inspection, the inspection control unit 204 of the horizontal drive unit 30 generated by the displacement in the previous X-axis positive direction displacement process (X-axis positive direction displacement process holding the work W). A vibration signal corresponding to the vibration of the belt 38 is acquired, and the belt 38 is inspected (for example, calculation and storage of the frequency) based on the acquired vibration signal.

After that, the "X-axis pull" operation is performed. In this X-axis pulling operation, the processing control unit 202 executes a displacement process (second displacement process) in which the holding arm 20 that does not hold the work W is displaced in the negative direction of the X-axis by the horizontal drive unit 30. The "Z-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the displacement process by the elevating drive unit 70. In this Z-axis inspection, the inspection control unit 204 vibrates according to the vibration of the belt 78 of the elevating drive unit 70 generated by the displacement in the previous displacement process in the negative direction of the Z-axis (Z-axis down operation). Is acquired, and the belt 78 is inspected (for example, calculation and storage of the frequency) based on the acquired vibration signal. As described above, the operation of carrying the work W into the heat treatment unit U2 is completed.

After that, the control device 100 repeats the same transfer operation and inspection. In the above inspection, the inspection control unit 204 repeats the calculation and storage of the frequency of the belt 38 of the horizontal drive unit 30 along with the transport operation in the negative direction of the X-axis, and the belt 38 is carried out with the transport operation in the positive direction of the X-axis. It is not necessary to calculate and store the frequency of. Alternatively, the inspection control unit 204 does not have to repeatedly calculate the frequency of the belt 38 in the positive direction of the X-axis and calculate the frequency of the belt 38 in the negative direction of the X-axis. good. Further, unlike the above-mentioned example, the inspection control unit 204 has an X-axis positive direction (X-axis) in either a state in which the holding arm 20 holds the work W or a state in which the work W is not held. The frequency of the belt 38 is calculated in accordance with the transport operation in the negative direction), and the vibration of the belt 38 is calculated in accordance with the transport operation in the positive direction of the X-axis (negative direction of the X-axis) in the other state. It does not have to be. The inspection control unit 204 calculates the frequency of the belt in the same operation (or the same operation and state) as in the X-axis direction for the inspection accompanying the transfer operation in the Y-axis direction and the transfer operation in the Z-axis direction. You may repeat it.

Subsequently, the inspection of the belt in the drive unit of one shaft will be described with reference to FIGS. 11 and 12. FIG. 11 is a flowchart showing an example of a processing procedure (inspection method) when the belt 38 is inspected by repeatedly calculating the frequency in the transport operation (displacement processing) in the positive direction of the X-axis.

In this inspection method, first, the control device 100 waits until the displacement process in the positive direction of the X axis is completed (step S21). In step S21, for example, the inspection control unit 204 waits until the operation of moving the holding arm 20 to a position where the base end portion of the holding arm 20 does not overlap with the base 48 is stopped. In one example, the inspection control unit 204 acquires information from the processing control unit 202 that the rotation of the horizontal drive unit 30 by the motor 62 has stopped.

When it is determined in step S21 that the displacement process is completed (step S21: YES), the control device 100 outputs a vibration signal corresponding to the vibration of the belt 38 generated due to the displacement process in the positive direction of the X axis. Acquire (step S22). For example, the signal acquisition unit 212 acquires a vibration signal from the measurement unit 130 from the end of the displacement process in the positive direction of the X-axis until a predetermined predetermined time elapses. During the execution of step S22, the processing control unit 202 may perform displacement processing on an axis other than the X-axis direction, or the processing unit may cause the work W to execute the processing.

Next, the control device 100 extracts analysis data used for belt inspection from the vibration signals acquired by the signal acquisition unit 212 (step S23). As shown in FIG. 12A, for example, the data extraction unit 214 waits after the first predetermined time t1 has elapsed from the end time of the displacement process (the time when the holding arm 20 is stopped) from the vibration signal. The data during the second predetermined time t2 is extracted as analysis data. The first predetermined time t1 and the second predetermined time t2 are preset based on the time at which the sound wave due to the vibration of the belt caused by the displacement of the holding arm 20 can be measured. The first predetermined time t1 is set to a time at which vibration accompanying the stop of the holding arm 20 (slider) is expected to start from the end of the displacement process in a part of the belt in which the inspection unit is close. The second predetermined time t2 is set to a time at which the vibration of the belt is expected to continue due to the stop of the holding arm 20 (slider).

Next, the control device 100 calculates the frequency of the vibration of the belt 38 generated by the displacement process in step S21 based on the analysis data extracted by the data extraction unit 214 (step S24). For example, the frequency calculation unit 216 calculates a frequency spectrum as shown in FIG. 12B by performing a fast Fourier transform on the analysis data. Then, the frequency calculation unit 216 calculates the frequency having the largest amplitude (frequency f1 in the example shown in FIG. 12B) from the calculated frequency spectrum as the frequency of the belt 38. Next, the control device 100 (storage unit 218) stores the calculated information indicating the frequency of the belt 38 (step S25).

Next, the control device 100 determines whether or not a predetermined period has elapsed from a predetermined reference time point (step S26). In step S26, for example, the control device 100 determines whether or not a predetermined period (for example, one day) has elapsed from the start of operation of the coating / developing device 2. If it is determined in step S26 that the predetermined period has not elapsed (step S26: NO), the control device 100 repeatedly executes steps S21 to S26. As a result, the control device 100 (inspection control unit 204) receives a vibration signal corresponding to the vibration of the belt 38 generated by the displacement in the displacement process for each displacement process while the process control unit 202 repeats the execution of the displacement process. To get. Then, the inspection control unit 204 calculates the frequency of the belt 38 for each displacement process and stores the calculated frequency. As a result, a plurality of measured values for the frequency of the belt 38 are stored in the storage unit 218.

Next, the control device 100 calculates a frequency (hereinafter, referred to as “determination frequency”) to be used for determining the state of the belt 38 (step S27). In step S27, for example, the state determination unit 220 calculates statistical values for the measured values of the plurality of frequencies stored in the predetermined period as the determination frequencies. In one example, the state determination unit 220 calculates the average value, median value, lower limit value, upper limit value, or standard deviation of a plurality of measured values for the frequency of the belt 38 as the determination frequency.

Next, the control device 100 (state determination unit 220) determines whether or not the determination frequency is smaller than a predetermined threshold value (step S28). The threshold value is set in advance, and is set based on, for example, a measured value of the frequency of the belt when the tension of the belt is intentionally lowered. When it is determined in step S28 that the determination frequency is smaller than the above threshold value (step S28: YES), the control device 100 outputs an abnormal signal indicating that the state of the belt 38 is not normal (step S29). ..

In step S29, for example, the output unit 222 outputs an abnormal signal indicating that the belt 38 has failed, or an abnormal signal indicating that the belt 38 is approaching a failed state. In one example, the output unit 222 outputs an abnormal signal to a monitor for notifying an operator or the like. Alternatively, the output unit 222 outputs an abnormal signal to the processing control unit 202, and the processing control unit 202 that receives the abnormal signal stops the process processing by the coating / developing device 2. On the other hand, when it is determined that the determination frequency is equal to or higher than the above threshold value (step S28: NO), the control device 100 does not execute step S29. As described above, a series of processing procedures for the inspection of the belt 38 is completed.

In the flow described above, the inspection of the belt 38 with respect to the X-axis has been described, but the inspection of the belt 58 with respect to the Y-axis and the inspection of the belt 78 with respect to the Z-axis may be performed in the same manner as the inspection of the belt 38.

The first predetermined time t1 that determines the data extraction range in step S23 may be set to a different value for each axis. The first predetermined time t1 may be set according to the distance between the measuring unit and one of the two pulleys sandwiching the measuring unit, which is closer to the measuring unit. For example, the longer the distance between the measuring unit and the pulley, the longer the first predetermined time t1 may be set. In the above example, the distance between the pulley 36a of the horizontal drive unit 30 in the X-axis direction and the measurement unit 130 is larger than the distance between the pulley 56a of the horizontal drive unit 50 in the Y-axis direction and the measurement unit 150. , It is larger than the distance between the pulley 76a of the elevating drive unit 70 in the Z-axis direction and the measuring unit 170. That is, the first predetermined time t1 in the X-axis direction is longer than the first predetermined time t1 in the Y-axis direction, and is longer than the first predetermined time t1 in the Z-axis direction.

In the inspection of the belt 58 with respect to the Y-axis, the above-mentioned steps S21 to S26 are repeated. In this case, the inspection control unit 204 may calculate the vibration frequency of the belt 58 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the negative direction of the Y axis in a predetermined period. Regarding the movement of the holding arm 20 in the Y-axis direction, the stop position of the holding arm 20 (the stop position of the slider 54) differs depending on the processing unit at the loading / unloading destination. If the stop position of the slider 54 is different, the length of a part of the belt 58 (the length from the slider 54 to the pulley 56a) on which the measurement unit 150 is provided is different, and the frequency is increased regardless of whether the state of the belt 58 is abnormal or not. Change.

Therefore, in step S24, the frequency calculation unit 216 corresponds to the calculated frequency according to the stop position of the holding arm 20 (slider 54) at the reference position arbitrarily determined among the stop positions. The frequency of the belt 58 may be corrected so as to be performed. The frequency calculation unit 216 uses a formula that defines the relationship between the length, tension, and unit mass of the string and the natural frequency of the string, and the slider 54 sets the frequency calculated from the vibration signal to the reference position. It may be converted into the frequency when it is assumed that it has stopped. In this case, the storage unit 218 stores information indicating the corrected frequency. Then, the state determination unit 220 determines the state of the belt 58 by comparing the statistical value of the corrected frequency with the threshold value. This threshold is determined based on the state of the belt 58 in which the slider 54 is located at the reference position. As described above, the state determination unit 220 may determine the state of the belt 58 based on the stop position set for each displacement process in addition to the vibration signal obtained from the vibration of the belt 58.

In the inspection of the belt 78 with respect to the Z axis, the above-mentioned steps S21 to S26 are repeated. In this case, the inspection control unit 204 may calculate the vibration frequency of the belt 78 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the negative direction of the Z axis (downward) in a predetermined period. good.

In the above example, the vibration signal is acquired from the end of the displacement process, and a part of the data of the vibration signal is extracted by the data extraction unit 214, but the signal acquisition unit 212 is used for calculating the frequency during the period. The vibration signal may be acquired. For example, the signal acquisition unit 212 does not start acquiring the vibration signal at the end of the displacement process, but starts acquiring the vibration signal when the first predetermined time t1 elapses, and further from the first predetermined time t1. 2 Acquisition of the vibration signal may be stopped when the predetermined time t2 has elapsed. In this case, it is not necessary for the data extraction unit 214 to extract a part of the data. As described above, regardless of whether or not the data is extracted, the state determination unit 220 is based on the vibration signal corresponding to the vibration of the belt after the first predetermined time t1 has elapsed since the displacement processing is completed. Determine the condition of the belt.

[Effect of Embodiment]
In the coating / developing apparatus 2 and the substrate processing method described above, a vibration signal corresponding to the vibration of the belt is acquired during the execution period of the process processing, and the state of the belt is determined based on the vibration signal. With this device and method, it is not necessary to stop the process processing by the coating / developing device 2 in order to determine the state of the belt, so that the state of the belt can be inspected while maintaining the throughput.

If the tension of the belt decreases due to deterioration over time, a failure such as belt breakage or tooth skipping may occur. Since the tension of the belt depends on the frequency of the belt, it is possible to prevent the belt from breaking down by checking the frequency of the belt on a regular basis. As a method of inspecting the state of the belt, it is conceivable to stop a series of processes performed in the coating / developing device 2 and measure the frequency of the belt. However, if the operation of the coating / developing apparatus 2 is stopped, the throughput of the work W is lowered. On the other hand, in the above devices and methods, the frequency of the belt is measured without stopping the operation of the coating / developing device 2 (without stopping the process processing), so that the throughput of the belt is not reduced. The tension can be inspected.

The coating / developing device 2 described above further includes an output unit 222 that outputs an abnormal signal indicating that the state of the belt is not normal according to the determination result by the state determination unit 220. In this case, when it is determined that the state of the belt is not normal, it is possible to execute a process different from the case where the state of the belt is normal.

In the coating / developing apparatus 2 described above, the processing control unit 202 displaces the holding arm 20 along the first direction by the driving unit in the second processing of carrying in / out to / from the processing unit of each of the plurality of work Ws. Displacement processing is executed. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process after the displacement process is completed. The vibration signal acquired during the execution of the displacement process may include a large amount of information on vibration due to disturbance. In the above configuration, by acquiring the vibration signal from the end of the displacement process, it is possible to reduce the influence of the disturbance included in the vibration signal.

In the coating / developing apparatus 2 described above, the state determination unit 220 determines the state of the belt based on the vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed after the displacement processing is completed. In the vibration signal acquired immediately after the displacement processing is completed, information on vibration due to disturbance may remain. With the above configuration, it is possible to further reduce the influence of disturbance included in the vibration signal.

In the coating / developing apparatus 2 described above, the drive unit further includes two pulleys over which at least a part of the belt is bridged. The measuring unit may be provided in close proximity to a portion of the belt that is located between the two pulleys. The predetermined time may be set according to the distance between one of the two pulleys, which is closer to the measuring unit, and the measuring unit. The time it takes for the vibration of the belt to converge is considered to depend on the length of the belt between the fixed end and the close position of the measuring unit. In the above configuration, since the predetermined time changes according to the length of the belt between the fixed end and the measuring unit, it is possible to appropriately determine the state according to the vibration of the belt.

In the coating / developing apparatus 2 described above, the drive unit further includes a first pulley and a second pulley over which at least a part of the belt is bridged, and a motor for rotating the first pulley to move the belt. The measuring unit is arranged in the vicinity of the first pulley. In the displacement process, the processing control unit displaces the holding arm 20 by the drive unit in the direction from the second pulley to the first pulley. In this case, when the holding arm 20 is stopped in the displacement process, the inertial force of the slider connected to the holding arm 20 is generated in the direction toward the first pulley. Therefore, it is considered that a compressing force is applied to a part of the belt between the slider and the first pulley as the holding arm 20 (slider) stops. As a result, the vibration of the part of the belt including a part of the belt and in which the measurement unit is arranged becomes large, and it is easy to acquire the vibration signal.

In the coating / developing apparatus 2 described above, the driving unit further includes a slider that moves together with the holding arm 20. The slider is connected to the belt so that it can move between the first pulley and the second pulley. The first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along the movement path of the belt. When the slider moves from the second pulley to the first pulley, the impact caused by the stop of the slider in the displacement process becomes large in a part of the belt between the first pulley and the slider, and it is easy to acquire the vibration signal. Is.

In the coating / developing apparatus 2 described above, the processing control unit repeatedly executes the displacement processing in the Y-axis direction in the second processing. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt 58 generated by the displacement in the displacement process for each displacement process. The stop position of the holding arm 20 is set to a different position for each displacement process. The state determination unit 220 determines the state of the belt 58 based on the stop position set for each displacement process. In this case, even if the stop position of the holding arm 20 is different, the stop position of the holding arm 20 for each displacement process is taken into consideration, so that the state of the belt 58 can be appropriately determined.

In the coating / developing apparatus 2 described above, the transport unit A3 further has a second drive unit that displaces the holding arm 20 in the second direction. In the second process, the process control unit 202 includes a first displacement process in which the holding arm 20 is displaced by the drive unit in the first direction, and a second displacement process in which the holding arm 20 is displaced by the second drive unit in the second direction. To execute. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement process in a period overlapping with at least a part of the execution period of the second displacement process. In this case, since the operation by the transport unit A3 and the inspection of the belt are performed at least partially overlapping, it is possible to suppress the influence of the inspection of the belt on the process processing.

In the coating / developing apparatus 2 described above, the drive unit rotates the first pulley and the second pulley in which at least a part of the belt is bridged and arranged in the first direction, and the first pulley to rotate the belt. It further includes a moving motor and a slider that moves with the holding arm 20. The slider is connected to the belt so that it can move between the first pulley and the second pulley. The first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along the movement path of the belt. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to acquire the vibration signal.

In the coating / developing apparatus 2 described above, the drive unit further includes a first pulley and a second pulley in which at least a part of the belt is bridged and arranged in the first direction, and a slider that moves together with the holding arm 20. .. The slider is connected to the belt so that it can move between the first pulley and the second pulley. The measuring unit, the first pulley, the slider, and the second pulley may be arranged in this order along the movement path of the belt. In this case, the disturbance applied from the slider to a part of the belt in which the measurement unit is close is reduced by passing through the first pulley, and the influence of the disturbance included in the vibration signal can be reduced.

[Modification example]
Although the embodiments according to the present disclosure have been described in detail above, various modifications may be added to the above embodiments within the scope of the gist of the present disclosure. The transport unit A3 may further include another holding arm 20 and another horizontal drive unit 30 that displaces the other holding arm 20 at least in the X-axis direction. The horizontal drive unit 30 and another horizontal drive unit 30 may be arranged side by side in the vertical direction. In this case, the coating / developing device 2 may further include another measuring unit 130 for inspecting the belt 38 of another horizontal driving unit 30.

The transport unit A3 does not have to have any one of the three drive units of the horizontal drive unit 30, the horizontal drive unit 50, and the elevating drive unit 70, and any two drive units may be used. You do not have to have it. The drive mechanisms of the horizontal drive units 30 and 50 and the elevating drive unit 70 are not limited to the above examples, and the drive unit may have at least a belt arranged so as to extend in the moving direction. In each drive unit, a belt may be bridged over three pulleys or five or more pulleys.

The measurement units 130, 150, 170 do not have to have any one of the sensors 92, 94. When the sensors 92 and 94 are arranged so as to sandwich the belt, the vibration of the air due to the disturbance is in phase between the sound wave SW1 acquired by the sensor 92 and the sound wave SW2 acquired by the sensor 94, and the air generated by the belt. Vibrations are out of phase. Therefore, by using the difference between the sound wave SW1 and the sound wave SW2 as the vibration signal, it is possible to obtain a signal in which the vibration of the air due to the belt is strengthened and the vibration of the air due to the disturbance is reduced. The measuring units 130, 150, 170 may be configured in any way as long as they can acquire a signal corresponding to the vibration of the belt.

The arrangement positions of the measurement units 130, 150, and 170 are not limited to the above examples. The measuring unit may be arranged at any position in the movement path of the belt as long as it can acquire a vibration signal corresponding to the vibration of the belt without interfering with other members (for example, a slider). That is, the pulley, the slider, and the measuring unit may be arranged in any order in the movement path of the belt.

In the transport unit other than the transport unit A3 of the processing module 12, the belt of each drive unit may be inspected in the same manner as the transport unit A3 of the processing module 12. The coating / developing device 2 may include a unit that performs a treatment other than the liquid treatment and the heat treatment as a treatment unit that performs a predetermined treatment on the work W. For example, the coating / developing device 2 may include an inspection unit for inspecting the state of the surface Wa, and the transport unit A3 carries in and out the work W to the inspection unit. May be good. The substrate processing system 1 controls at least one processing unit, a transfer unit for loading and unloading the work W to the processing unit, and a measurement unit for inspecting the belt of the drive unit included in the transfer unit. It may be configured in any way as long as it includes a unit.

2 ... Coating / developing device, 30 ... Horizontal drive unit, 36a, 36b, 36c, 36d ... Pulley, 38 ... Belt, 50 ... Horizontal drive unit, 56a, 56b ... Pulley, 58 ... Belt, 62 ... Motor, 70 ... Elevating Drive unit, 76a, 76b ... Pulley, 78 ... Belt, 82 ... Motor, 100 ... Control device, 130, 150, 170 ... Measurement unit, 202 ... Processing control unit, 212 ... Signal acquisition unit, 220 ... Status determination unit 222 ... Output unit, W ... Work, U1 ... Liquid processing unit, U2 ... Heat treatment unit, A3 ... Conveying unit.

Claims (12)

A processing unit that performs predetermined processing on the substrate,
A transport unit having a holding portion that holds the substrate, and a driving portion that includes a belt and displaces the holding portion in a first direction by moving the belt.
A measurement unit provided in a state close to the belt and capable of acquiring a vibration signal corresponding to the vibration of the belt due to the displacement of the holding portion.
The processing unit, the transport unit, and the control unit that controls the measurement unit are provided.
The control unit is
Includes a first process in which the predetermined processing is sequentially performed by the processing unit on a plurality of substrates including the substrate, and a second processing in which the transfer unit carries in and out each of the plurality of substrates to the processing unit. A process control unit that executes process processing
A signal acquisition unit that acquires the vibration signal from the measurement unit, and
It has a state determination unit that determines the state of the belt based on the vibration signal.
The signal acquisition unit is a substrate processing device that acquires the vibration signal during the execution period of the process processing. The substrate processing apparatus according to claim 1, further comprising an output unit that outputs a signal indicating that the state of the belt is not normal according to the determination result by the state determination unit. In the second process, the process control unit executes a displacement process in which the drive unit displaces the holding unit along the first direction.
The substrate processing apparatus according to claim 1 or 2, wherein the signal acquisition unit acquires the vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement processing after the displacement processing is completed. The substrate according to claim 3, wherein the state determination unit determines the state of the belt based on the vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed after the displacement processing is completed. Processing equipment. The drive further includes two pulleys over which at least a portion of the belt is bridged.
The measuring unit is provided in close proximity to a portion of the belt that is located between the two pulleys.
The substrate processing apparatus according to claim 4, wherein the predetermined time is set according to the distance between one of the two pulleys, which is closer to the measuring unit, and the measuring unit. .. The drive unit further includes a first pulley and a second pulley over which at least a part of the belt is bridged, and a motor that rotates the first pulley to move the belt.
The measuring unit is arranged in the vicinity of the first pulley, and the measuring unit is arranged in the vicinity of the first pulley.
The substrate processing apparatus according to claim 3 or 4, wherein the processing control unit displaces the holding unit by the driving unit in a direction from the second pulley toward the first pulley in the displacement processing. The drive unit further includes a slider that moves with the holding unit.
The slider is connected to the belt so as to be movable between the first pulley and the second pulley.
The substrate processing apparatus according to claim 6, wherein the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along the moving path of the belt. The processing control unit repeatedly executes the displacement processing in the second processing.
The signal acquisition unit acquires the vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process for each displacement process.
The stop position of the holding portion is set to a different position for each displacement process.
The substrate processing apparatus according to claim 7, wherein the state determination unit determines the state of the belt based on the stop position set for each displacement process. The transport unit further includes a second drive unit that displaces the holding unit in the second direction.
In the second process, the process control unit displaces the holding unit by the driving unit in the first direction and displaces the holding unit by the second driving unit in the second direction. Execute the second displacement process,
The signal acquisition unit acquires the vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement process during a period overlapping with at least a part of the execution period of the second displacement process. Item 2. The substrate processing apparatus according to any one of Items 1 to 8. The drive unit
With the first pulley and the second pulley in which at least a part of the belt is bridged and arranged in the first direction,
A motor that moves the belt by rotating the first pulley, and
Further including a slider that moves with the holding portion.
The slider is connected to the belt so as to be movable between the first pulley and the second pulley.
The substrate treatment according to any one of claims 1 to 4, wherein the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along the moving path of the belt. Device. The drive unit
With the first pulley and the second pulley in which at least a part of the belt is bridged and arranged in the first direction,
Further including a slider that moves with the holding portion.
The slider is connected to the belt so as to be movable between the first pulley and the second pulley.
The substrate treatment according to any one of claims 1 to 4, wherein the measuring unit, the first pulley, the slider, and the second pulley are arranged in this order along the moving path of the belt. Device. A process process including a first process in which predetermined processes are sequentially performed on a plurality of boards by a processing unit and a second process in which each of the plurality of boards is carried in and out of the processing unit by a transport unit including a belt is executed. To do and
Obtaining a vibration signal corresponding to the vibration of the belt derived from the operation of the transport unit from a measurement unit provided close to the belt, and
Including determining the state of the belt based on the vibration signal.
Acquiring the vibration signal is a substrate processing method including acquiring the vibration signal during the execution period of the process processing.

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