KR20210118744A - Substrate treatment apparatus and substrate treatment method - Google Patents

Abstract

A substrate processing apparatus includes: a processing unit performing predetermined processing on a substrate; a transport unit having a holding and supporting portion for holding and supporting the substrate and a drive portion including a belt and displacing the holding and supporting portion in a first direction by moving the belt; a measurement unit capable of acquiring a vibration signal corresponding to vibration of the belt generated by displacement of the holding portion; and a control unit. The control unit includes: a process control unit that performs a process including a first process in which a predetermined process is sequentially performed on a plurality of substrates including the substrate by the processing unit and a second process in which the plurality of substrates of the processing unit are fed and discharged by the transport unit; a signal acquisition unit that acquires a vibration signal from the measurement unit; and a state determination unit that determines the state of the belt on the basis of the vibration signal. The signal acquisition unit acquires a vibration signal when the process is performed. The present disclosure can provide the substrate processing apparatus and substrate processing method capable of inspecting a state of a belt while maintaining throughput.

Description

Substrate processing apparatus and substrate processing method

The present disclosure relates to a substrate processing apparatus and a substrate processing method.

In Patent Document 1, a first step of measuring the pressure fluctuation of the air generated by vibration of the band-like plate, a second step of extracting the natural frequency of the band-like plate, and the tension of the band-like plate based on the extracted natural frequency A method for measuring the tension of a band-like plate including a third step of obtaining is disclosed.

Japanese Patent Laid-Open No. 2005-337846

In a substrate processing apparatus that performs a predetermined process on a substrate, the substrate may be transported by a transport unit having a belt. The present disclosure provides a substrate processing apparatus and a substrate processing method capable of inspecting the state of a belt while maintaining throughput.

A substrate processing apparatus according to one aspect of the present disclosure includes a processing unit that performs a predetermined process on a substrate, a holding unit that holds the substrate, and a belt, and is held in a first direction by moving the belt a conveying unit having a driving unit for displacing the support, a measurement unit provided in a state close to the belt and capable of acquiring a vibration signal according to vibration of the belt resulting from the displacement of the holding portion; A control unit is provided. The control unit includes a first process in which a predetermined process is sequentially performed by the processing unit on a plurality of substrates including the substrate, and a second process in which each of the plurality of substrates is carried in and out of the processing unit by the transfer unit. It has a process control part which executes the process process to be performed, a signal acquisition part which acquires a vibration signal from a measurement unit, and a state determination part which determines the state of a belt based on a vibration signal. The signal acquisition unit acquires the vibration signal during the execution period of the process processing.

According to the present disclosure, a substrate processing apparatus and a substrate processing method capable of inspecting the state of a belt while maintaining throughput are provided.

1 is a perspective view schematically showing an example of a substrate processing system.
2 is a schematic diagram showing an example of a coating and developing apparatus.
It is a top view which shows typically an example of a conveyance unit.
It is a side view which shows typically an example of a conveyance unit.
Fig. 5 (a) is a schematic diagram showing an example of the inside of the horizontal drive unit. Fig. 5B is a schematic diagram showing an example of a measurement unit.
Fig. 6(a) is a schematic diagram showing an example of the inside of the lifting/lowering drive unit. Fig. 6B is a schematic diagram showing an example of the inside of the horizontal drive unit.
7 is a block diagram showing an example of the functional configuration of the control device.
Fig. 8 is a block diagram showing an example of the hardware configuration of the control device.
9 is a flowchart illustrating an example of a substrate processing method.
It is a figure which shows an example of the processing timing of a conveyance operation|movement and a belt test|inspection.
11 is a flowchart showing an example of a belt inspection method.
Fig. 12 (a) is a graph showing an example of a vibration signal according to vibration of the belt. Fig. 12(b) is a graph showing an example of a spectrum analysis result of a vibration signal.

Hereinafter, various exemplary embodiments will be described.

A substrate processing apparatus according to an exemplary embodiment includes a processing unit that performs a predetermined process on a substrate, a holding unit that holds the substrate, and a belt, and moves the belt in a first direction A conveying unit having a driving unit for displacing the holding portion, a measurement unit provided in a state close to the belt and capable of acquiring a vibration signal according to vibration of the belt resulting from the displacement of the holding portion, and the processing unit, the conveying unit and the measuring unit are controlled A control unit is provided. The control unit includes a first process in which a predetermined process is sequentially performed by the processing unit on a plurality of substrates including the substrate, and a second process in which each of the plurality of substrates is carried in and out of the processing unit by the transfer unit. It has a process control part which executes the process process to be performed, a signal acquisition part which acquires a vibration signal from a measurement unit, and a state determination part which determines the state of a belt based on a vibration signal. The signal acquisition unit acquires the vibration signal during the execution period of the process processing.

In this substrate processing apparatus, in the execution period of a process process, the vibration signal accompanying the vibration of a belt is acquired, and the state of a belt is determined based on the said vibration signal. In this apparatus, since it is not necessary to stop the process processing by the substrate processing apparatus to determine the state of the belt, it becomes possible to inspect the state of the belt while maintaining the throughput.

The said substrate processing apparatus may further be provided with the output part which outputs the signal which shows that the state of a belt is not normal according to the determination result by a state determination part. In this case, when it is determined that the state of the belt is not normal, it becomes possible to execute a process different from that when the state of the belt is normal.

In the second process, the process control unit may perform a displacement process in which the holding unit is displaced along the first direction by the driving unit. The signal acquisition unit may acquire a vibration signal according to the vibration of the belt generated by the displacement in the displacement processing after the displacement processing is completed. By acquiring the vibration signal after completion of the displacement processing, it becomes possible to reduce the influence of the disturbance included in the vibration signal.

The state determination unit may determine the state of the belt based on a vibration signal accompanying vibration of the belt after a predetermined period of time has elapsed after the displacement processing is completed. In this case, it becomes possible to further reduce the influence of the disturbance included in the vibration signal.

The driving unit may further include two pulleys over which at least a part of the belt is draped. The measurement unit may be provided adjacent to a portion of the belt disposed between two pulleys. The predetermined period of time may be set according to the distance between the measurement unit and one of the two pulleys having a shorter distance to the measurement unit. Since it is thought that the time until the vibration of the belt converges depends on the length of the belt between the fixed end and the proximal position of the measurement unit, in the above configuration, it becomes possible to appropriately determine the state according to the vibration of the belt.

The driving unit may further include a first pulley and a second pulley over which at least a part of the belt is applied, and a motor that rotates the first pulley to move the belt. The measurement unit may be disposed in the vicinity of the first pulley. The processing control unit may displace the holding unit by the driving unit in a direction from the second pulley toward the first pulley in the displacement processing. In this case, it is thought that a compressive force is applied to a part of the belt between the member connected to the holding portion and the first pulley with the stop of the holding portion. Therefore, vibration becomes large in a part of the said belt, and acquisition of a vibration signal is easy.

The driving unit may further include a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley may be arranged in this order. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to obtain the vibration signal.

The processing control unit may repeatedly execute the displacement processing in the second processing. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement processing for each displacement processing. The stop position of the holding part may be set to a different position for each displacement process. The state determination unit may determine the state of the belt also based on the stop position set for each displacement process. In this case, even if the stop positions are different, since the stop positions for each displacement process are taken into account, it becomes possible to appropriately determine the state of the belt.

The conveying unit may further have a second driving unit for displacing the holding unit in the second direction. In the second process, the processing control unit executes a first displacement process in which the holding unit is displaced by the driving unit in a first direction and a second displacement process in which the holding unit is displaced by the second driving unit in the second direction. You can do it. In a period overlapping with at least a part of the execution period of the second displacement processing, the signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement processing. In this case, since the operation by the conveying unit and the inspection of the belt are performed at least partially overlappingly, it becomes possible to suppress the influence of the inspection of the belt on the processing including the operation of the conveying unit.

The driving section further includes first and second pulleys over which at least a part of the belt is draped and arranged in the first direction, a motor for moving the belt by rotating the first pulley, and a slider moving together with the holding section You can do it. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley may be arranged in this order. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to obtain the vibration signal.

The driving unit may further include a first pulley and a second pulley arranged in the first direction over which at least a part of the belt spans, and a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. A measurement unit, a 1st pulley, a slider, and a 2nd pulley may be arrange|positioned in this order along the movement path|route of a belt. In this case, the disturbance applied from the slider to a part of the belt to which the measurement unit approaches is reduced by passing the first pulley, and it becomes possible to reduce the influence of the disturbance included in the vibration signal.

A substrate processing method according to one exemplary embodiment includes a first processing in which a predetermined processing is sequentially performed on a plurality of substrates by a processing unit, and each of the plurality of substrates to the processing unit by a conveying unit including a belt Execute a process process including a second process for carrying in/out of the belt, acquiring a vibration signal according to vibration of the belt resulting from the operation of the conveying unit from a measurement unit provided close to the belt, and based on the vibration signal and determining the condition of the belt. Acquiring the vibration signal includes acquiring the vibration signal in the execution period of the process processing. In this substrate processing method, it becomes possible to test|inspect the state of a belt while maintaining a throughput similarly to the above-mentioned substrate processing apparatus.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment is described with reference to drawings. In description, the same code|symbol is attached|subjected to the same element or the element which has the same function, and the overlapping description is abbreviate|omitted. Some drawings show a Cartesian coordinate system defined by an X-axis, a Y-axis, and a Z-axis. In the following embodiment, the Z axis corresponds to the vertical direction, and the X axis and the Y axis correspond to the horizontal direction.

[Substrate processing system]

The substrate processing system 1 shown in FIG. 1 is a system which performs formation of the photosensitive film with respect to the workpiece|work W, exposure of the said photosensitive film, and development of the said photosensitive film. The workpiece W to be processed is, for example, a substrate or a substrate in a state in which a film or circuit is formed by performing a predetermined process. The substrate included in the work W is, for example, a wafer containing silicon. The work W (substrate) may be formed in a circular shape. A glass substrate, a mask substrate, an FPD (Flat Panel Display), etc. may be sufficient as the workpiece|work W to be processed, and the intermediate body obtained by performing predetermined processing on these board|substrates etc. may be sufficient as it. The photosensitive film is, for example, a resist film.

The substrate processing system 1 includes a coating/developing apparatus 2 and an exposure apparatus 3 . The coating/developing apparatus 2 is an apparatus for forming a resist film (photosensitive film) on the work W. The exposure apparatus 3 is an apparatus for exposing a resist film formed on the work W (substrate). Specifically, the exposure apparatus 3 irradiates an energy ray to the exposure target portion of the resist film by a method such as immersion exposure. The coating/developing apparatus 2 applies a resist (chemical solution) to the surface of the workpiece W to form a resist film before exposure treatment by the exposure apparatus 3, and develops the resist film after the exposure treatment. do

(substrate processing unit)

Hereinafter, as an example of a substrate processing apparatus, the structure of the coating/developing apparatus 2 is demonstrated. 1 and 2, the coating/developing apparatus 2 includes a carrier block 4, a processing block 5, an interface block 6, and a control apparatus 100 (control unit). to provide

The carrier block 4 introduces the work W into the coating/developing device 2 and takes out the work W from the inside of the coating/developing device 2 . For example, the carrier block 4 can support the some carrier C for the workpiece|work W, and has built-in the conveyance unit A1 containing a transmission arm. The carrier C accommodates a plurality of circular workpieces W, for example. The conveying unit A1 takes out the workpiece W from the carrier C and delivers it to the processing block 5 , and receives the workpiece W from the processing block 5 and returns it into the carrier C . The processing block 5 has processing modules 11 , 12 , 13 and 14 .

The processing module 11 incorporates a liquid processing unit U1, a heat treatment unit U2, and a conveying unit A3 which conveys the workpiece W to these units. The processing module 11 forms an underlayer film on the surface of the work W by the liquid processing unit U1 and the heat treatment unit U2 . The liquid processing unit U1 applies the processing liquid for forming an underlayer film on the work W. The heat treatment unit U2 performs various heat treatments accompanying the formation of the underlayer film.

The processing module 12 incorporates a liquid processing unit U1, a heat treatment unit U2, and a conveying unit A3 that conveys the workpiece W to these units. The processing module 12 forms a resist film on the underlayer film by the liquid processing unit U1 and the heat treatment unit U2 . The liquid processing unit U1 applies a processing liquid (resist) for forming a resist film on the underlayer film. The heat treatment unit U2 performs various heat treatments accompanying the formation of the resist film.

The processing module 13 incorporates a liquid processing unit U1, a heat treatment unit U2, and a conveying unit A3 that conveys the workpiece W to these units. The processing module 13 forms an upper layer film on the resist film by the liquid processing unit U1 and the heat treatment unit U2 . The liquid processing unit U1 applies a processing liquid for forming an upper layer film on the resist film. The heat treatment unit U2 performs various heat treatments accompanying the formation of the upper layer film.

The processing module 14 incorporates a liquid processing unit U1, a heat treatment unit U2, and a conveying unit A3 for conveying the workpiece W to these units. The processing module 14 performs, by the liquid processing unit U1 and the heat treatment unit U2 , a developing treatment of the resist film subjected to the exposure treatment and a heat treatment accompanying the developing treatment. The liquid processing unit U1 develops the resist film by applying a developer on the surface of the exposed work W and then rinsing it off with a rinse solution. The heat treatment unit U2 performs various heat treatments accompanying the developing treatment. Specific examples of the heat treatment include heat treatment (PEB: Post Exposure Bake) before developing treatment, heat treatment after developing treatment (PB: Post Bake), and the like.

A shelf unit U10 is provided on the carrier block 4 side in the processing block 5 . The shelf unit U10 is divided into a plurality of cells arranged in the vertical direction. In the vicinity of the shelf unit U10, a conveying unit A7 including an elevating arm is provided. The transfer unit A7 raises and lowers the work W between the cells of the shelf unit U10 .

A shelf unit U11 is provided on the interface block 6 side in the processing block 5 . The shelf unit U11 is divided into a plurality of cells arranged in the vertical direction. The shelf units U10 and U11 wait for the workpiece W to perform the next processing (because it functions as a buffer), so these shelf units U10 and U11 also serve the workpiece W. Corresponds to a processing unit that performs processing.

The interface block 6 transfers the work W to and from the exposure apparatus 3 . For example, the interface block 6 incorporates a transfer unit A8 including a transfer arm, and is connected to the exposure apparatus 3 . The transfer unit A8 transfers the work W disposed on the shelf unit U11 to the exposure apparatus 3 . The conveyance unit A8 receives the work W from the exposure apparatus 3 and returns it to the shelf unit U11 .

(conveying unit)

Next, with reference to FIG. 3 and FIG. 4, an example of the conveyance unit A3 in the processing module 12 is demonstrated. The conveying unit A3 conveys the work W in the processing module 12 in a state holding the work W. The conveying unit A3 conveys the work W between the plurality of processing units included in the processing module 12 . In the processing module 12 illustrated in FIG. 3 , the two liquid processing units U1 and the two heat treatment units U2 are arranged in this order along one horizontal direction.

In the present disclosure, the direction from the heat treatment unit U2 to the liquid processing unit U1 is referred to as the “Y-axis positive direction”, and the direction from the liquid treatment unit U1 to the heat treatment unit U2 is referred to as the “Y-axis negative direction” It is said The direction from the conveying unit A3 to the liquid processing unit U1 (or the heat treatment unit U2) is referred to as the "X-axis forward direction", and from the liquid processing unit U1 (the heat treatment unit U2) to the conveying unit A3 ) is referred to as the “X-axis negative direction”. In addition, a vertically upward direction is called "Z-axis positive direction", and a vertically downward direction is called a "Z-axis negative direction." A direction including either the positive direction or the negative direction of each axis is simply expressed as "X-axis direction" or the like.

The conveyance unit A3 has the holding arm 20, the horizontal drive parts 30 and 50, and the raising/lowering drive part 70, for example.

The holding arm 20 (holding part) is comprised so that the workpiece|work W may be hold|maintained. The holding arm 20 holds the work W so that the surface Wa of the work W faces upward. The surface Wa is a surface on which a resist coating film is formed in the liquid processing unit U1. The holding arm 20 may surround the periphery of the work W, and may be formed so as to support the periphery of the back surface opposite to the surface Wa of the work W. The conveyance unit A3 carries out the said workpiece|work W with respect to the processing unit, such as the liquid processing unit U1, by displacing the holding arm 20 which hold|maintained the workpiece|work W. That is, the transfer unit A3 carries the work W into one processing unit by displacing the holding arm 20 , and carries out the work W from the processing unit by displacing the holding arm 20 . do. The conveyance unit A3 may carry in/out with respect to the some workpiece|work W with respect to one processing unit, respectively.

The horizontal drive unit 30 is configured to displace the holding arm 20 in one horizontal direction. The horizontal drive unit 30 is, for example, an actuator configured to reciprocate the holding arm 20 along one horizontal direction by a power source such as a motor. The conveyance unit A3 further has the rotation drive part 46 and the base 48 which support the horizontal drive part 30, as shown in FIG. The rotation drive unit 46 is a rotation actuator configured to rotate the horizontal drive unit 30 about a vertical rotation axis by, for example, a power source such as a motor. When the horizontal drive part 30 rotates by the rotation drive part 46, the moving direction of the holding arm 20 by the horizontal drive part 30 changes.

For example, the horizontal drive part 30 shown in FIG. 4 is arrange|positioned by the rotation drive part 46 so that the holding arm 20 may reciprocate in the X-axis direction. In this arrangement, the horizontal drive unit 30 moves the holding arm 20 in the positive X-axis direction and moves the holding arm 20 in the negative X-axis direction. When the horizontal drive unit 30 moves the holding arm 20 in the X-axis direction (either the positive X-axis direction or the negative X-axis direction), the workpiece W held by the holding arm 20 is It moves along the X-axis direction (first direction). The horizontal drive part 30 is formed so that it may extend along the direction (for example, X-axis direction) in which the holding arm 20 moves. The detail of the drive mechanism of the horizontal drive part 30 is mentioned later. The base 48 is a member that supports the rotation driving unit 46 and the horizontal driving unit 30 . The rotation drive part 46 is provided on the base 48, and the base 48 is formed so that it may extend along the X-axis direction, for example. One end of the base 48 in the negative X-axis direction (for example, each of both side surfaces of one end) is connected to the lifting/lowering drive unit 70 .

The lifting/lowering drive unit 70 is configured to displace the holding arm 20 in the vertical direction (the illustrated Z-axis direction). The lifting/lowering drive unit 70 is an actuator configured to reciprocate the holding arm 20 along the Z-axis direction (first direction) by a power source such as a motor. The raising/lowering drive part 70 supports the base 48, for example, moves the base 48 in a Z-axis positive direction, and moves the base 48 in a Z-axis negative direction. When the lifting/lowering drive unit 70 moves the base 48 in the Z-axis direction, the holding arm 20 (workpiece W) also moves along the Z-axis direction. The raising/lowering drive part 70 is formed so that it may extend along the Z-axis direction which moves the base 48 (holding arm 20). Details of the lift driving unit 70 will be described later.

Returning to FIG. 3 , the horizontal drive unit 50 is configured to displace the holding arm 20 in one horizontal direction (the illustrated Y-axis direction). The horizontal drive unit 50 is an actuator configured to reciprocate the holding arm 20 along the Y-axis direction (first direction) by, for example, a power source such as a motor. The horizontal drive unit 50 supports, for example, the lift drive unit 70 , moves the lift drive unit 70 in the positive Y-axis direction, and moves the lift drive unit 70 in the negative Y-axis direction. When the horizontal drive unit 50 moves the lifting/lowering drive unit 70 in the Y-axis direction, the holding arm 20 (workpiece W) also moves along the Y-axis direction. The horizontal drive unit 50 is formed so as to extend along the Y-axis direction. The detail of the drive mechanism of the horizontal drive part 50 is mentioned later.

(Details of the measuring unit and each drive unit)

Next, with reference to FIGS. 5 and 6 , a measurement unit used for inspecting the state of a belt included in each driving unit will be described along with a detailed configuration of each driving unit. The coating/developing apparatus 2 further includes measurement units 130 , 150 , 170 .

The measurement unit 130 is used to inspect the state of the belt of the horizontal drive unit 30 . The measurement unit 150 is used to inspect the state of the belt of the horizontal drive unit 50 . The measurement unit 170 is used to inspect the state of the belt of the lift drive unit 70 . In the present disclosure, the inspection of the state of the belt means inspection of whether the belt can operate normally. In one example, the belt (drive unit) may not operate normally due to deterioration of the belt over time, a problem with the adjustment of the belt, etc. In order to prevent these, the belt is inspected using each measurement unit . Hereinafter, the drive unit and the measurement unit will be described for each axis.

<Y-axis direction>

Fig. 5(a) shows details of the horizontal drive unit 50 for displacing the holding arm 20 in the Y-axis direction. The horizontal drive unit 50 includes a belt arranged so that at least a part thereof extends along the Y-axis direction, and by moving the belt, the holding arm 20 is displaced in the Y-axis direction. The horizontal drive unit 50 includes, for example, a housing 52 , pulleys 56a and 56b , a belt 58 , a motor 62 , and a slider 54 .

The housing 52 accommodates each element included in the horizontal drive unit 50 . The housing 52 is formed so as to extend along the Y-axis direction. An opening 52a is provided in a wall of the housing 52 facing the plurality of processing units (see also FIG. 4 ). A part of the slider 54 protrudes out of the housing 52 from the opening 52a.

As shown to Fig.5 (a), the pulley 56a (1st pulley) and the pulley 56b (2nd pulley) are arrange|positioned along the Y-axis direction. The pulleys 56a and 56b are arranged at each end in the housing 52 in the Y-axis direction, for example. The pulleys 56a and 56b are respectively provided in the housing 52 rotatably around an axis of rotation along the X-axis direction. The belt 58 spans the pulleys 56a and 56b. The belt 58 is, for example, a timing belt. The motor 62 is a power source for generating rotational torque. The motor 62 is, for example, a servo motor. The motor 62 is connected to the pulley 56a, and rotates the pulley 56a. When the torque (driving force) by the motor 62 is transmitted to the pulley 56a, the belt 58 spanning the pulleys 56a and 56b moves along the Y-axis direction.

The slider 54 is formed so as to extend in the X-axis direction, for example, as shown in FIG. 4 . A proximal end (one end farther from the processing unit) in the X-axis direction of the slider 54 is connected to the belt 58 in the housing 52 . The front end of the slider 54 in the X-axis direction (one end closer to the processing unit) protrudes out of the housing 52 through the opening 52a. The lower end of the lifting drive unit 70 is connected to the front end of the slider 54 , for example. In this way, the slider 54 is connected to the holding arm 20 via another member, and moves together with the holding arm 20 . When the belt 58 moves along the Y-axis direction by the torque from the motor 62, the slider 54 (elevating drive unit 70) connected to the belt 58 also reciprocates along the Y-axis direction. As a result, the holding arm 20 and the work W also move along the Y-axis direction.

In the above-mentioned horizontal drive part 50, the slider 54 is comprised so that movement between the pulley 56a and the pulley 56b is possible. In a state in which the slider 54 is disposed at one position between the pulleys 56a and 56b, the belt 58 extends along the Y-axis direction and connects between the pulleys 56a and 56b. It includes a first portion 58a and a second portion 58b extending along the Y-axis direction and connecting between the pulleys 56a and 56b. The first portion 58a and the second portion 58b are arranged in an array along the Z-axis direction, and are substantially parallel to each other. In the example shown in Fig.5 (a), the slider 54 is connected to the 1st part 58a. Hereinafter, among the first portions 58a, the space between the pulley 56a and the slider 54 is referred to as a "string 64a", and the space between the slider 54 and the pulley 56b is referred to as a "string 64b". .

The measurement unit 150 is configured to be able to acquire a signal (hereinafter referred to as a “vibration signal”) according to the vibration of the belt 58 of the horizontal drive unit 50 . Specifically, the measurement unit 150 acquires a vibration signal according to the vibration of the belt 58 that occurs with the movement (transport operation) of the holding arm 20 by the horizontal drive unit 50 . The measurement unit 150 acquires, for example, a sound wave (vibration of air) generated by vibration of the belt 58 . The measurement unit 150 is provided in the conveyance unit A3 (inside the housing 52) in the state adjacent to the belt 58. As shown in FIG. The measurement unit 150 may have two sensors (sensors 92 and 94) that measure sound waves. The sensor 92 and the sensor 94 have functions common to each other.

As shown in FIG. 5B , the sensor 92 and the sensor 94 are arranged so as to sandwich the belt 58 . In one example, the sensor 92 and the sensor 94 are arranged along the Z-axis direction. That is, in the Z-axis direction, the sensor 92 , the belt 58 , and the sensor 94 are arranged in this order. Each of the sensors 92 and 94 is arrange|positioned at the position which can acquire the sound wave from the belt 58. The distance in the Z-axis direction between the sensor 92 and the belt 58 is approximately equal to the distance in the Z-axis direction between the sensor 94 and the belt 58 . The sensor 92 acquires the sound wave SW1 propagated from the belt 58 in the positive Z-axis direction, and the sensor 94 acquires the sound wave SW2 propagated from the belt 58 in the negative Z-axis direction. In one example, each of the sensors 92 and 94 is a Micro Electro Mechanical Systems (MEMS) microphone. The measurement unit 150 (each of the sensors 92 and 94 ) outputs electrical signals corresponding to the sound waves SW1 and SW2 to the control device 100 .

The measurement unit 150 (sensors 92 and 94) may be arranged in the vicinity of the pulley 56a to which the motor 62 is connected. In one example, the measurement unit 150 is disposed at a position where the distance between the pulley 56a and the pulley 56a is 1/3 or less of the distance between the pulley 56a and the pulley 56b in the Y-axis direction. . The measurement unit 150 is arranged, for example, at a position near the pulley 56a among the strings 64a of the first portion 58a, as shown in FIG. 5A . In this case, the slider 54 is configured to be movable between a position where it does not interfere with the measurement unit 150 and a position where it does not interfere with the pulley 56b.

In the above configuration, along the movement path of the belt 58 (the movement trajectory of the belt 58 accompanying the movement of the belt 58 by the motor 62), the pulley 56a, the measurement unit 150, The slider 54 and the pulley 56b are arranged in this order. In addition, according to the position of the slider 54 in the Y-axis direction, it corresponds to each of the above-mentioned 1st part 58a and 2nd part 58b (strings 64a, 64b) of the belt 58. area is changed. However, even if the slider 54 is disposed at any position within the movement range, the above-described arrangement relation (movement path of the belt 58) of the pulley 56a, the measurement unit 150, the slider 54, and the pulley 56b. arrangement relationship according to ) is established.

The horizontal drive unit 50 illustrated above is used, for example, to move the work W between the processing units of the processing module 12 . In one example, the horizontal drive unit 50 is used when the workpiece W is moved from the liquid processing unit U1 located at the 1st position to the heat treatment unit U2 located at the 3rd position, counting from the positive Y-axis direction ( see Figure 3). Specifically, the conveying unit A3 is arranged at a position where the base end of the holding arm 20 overlaps with the base 48 , and is connected to the liquid processing unit U1 of the moving source by the horizontal drive unit 50 . The holding arm 20 is moved from a position opposite in the X-axis direction (a position overlapping in the Y-axis direction) to a position opposite to the heat treatment unit U2 of the moving destination in the X-axis direction. At this time, the slider 54 shown in Fig.5 (a) moves from the pulley 56b toward the pulley 56a (measurement unit 150). When the holding arm 20 is moved in the Y-axis positive direction by the horizontal drive unit 50, the slider 54 moves from the pulley 56a (measurement unit 150) toward the pulley 56b.

<Z-axis direction>

Fig. 6(a) shows the details of the lifting/lowering drive unit 70 for displacing the holding arm 20 in the Z-axis direction. In Fig. 6(a) , one of the pair of portions sandwiching the base 48 in the Y-axis direction among the lifting and lowering driving units 70 is shown (see Fig. 3 as well). The lifting/lowering drive unit 70 includes a belt arranged so that at least a part thereof extends along the Z-axis direction, and by moving the belt, the holding arm 20 is displaced in the Z-axis direction. The lifting drive unit 70 includes, for example, a housing 72 , pulleys 76a and 76b , a belt 78 , a motor 82 , and a slider 74 .

The housing 72 accommodates each element included in the lift driving unit 70 . The housing 72 is formed so as to extend along the Z-axis direction. An opening 72a is provided in a wall of the housing 72 opposite to the base 48 . From the opening 72a, a part of the slider 74 protrudes out of the housing 72 .

The pulley 76a (1st pulley) and the pulley 76b (2nd pulley) are arrange|positioned along the Z-axis direction. The height position of the pulley 76a is lower than the height position of the pulley 76b. The pulleys 76a and 76b are arranged at each end in the housing 72 in the Z-axis direction, for example. The pulleys 76a and 76b are respectively provided in the housing 72 rotatably around an axis of rotation along the X-axis direction. The belt 78 spans the pulleys 76a and 76b. The belt 78 is, for example, a timing belt. The motor 82 is a power source that generates rotational torque. The motor 82 is, for example, a servo motor. The motor 82 is connected to the pulley 76a, and rotates the pulley 76a. When the torque (driving force) by the motor 82 is transmitted to the pulley 76a, the belt 78 spanning the pulleys 76a and 76b moves along the Z-axis direction.

The slider 74 is formed so as to extend in the Y-axis direction, for example, as shown in Fig. 6A. A base end (one end farther from the base 48 ) in the Y-axis direction of the slider 74 is connected to the belt 78 in the housing 72 . The front end of the slider 74 in the Y-axis direction (one end closer to the base 48) protrudes outside the housing 72 through the opening 72a. The side surface of one end of the base 48 is connected to the front-end|tip part of the slider 74, for example. In this way, the slider 74 is connected to the holding arm 20 via another member, and moves together with the holding arm 20 . When the belt 78 moves along the Z-axis direction by the torque from the motor 82, the slider 74 (base 48) connected to the belt 78 also reciprocates along the Z-axis direction. . When the slider 74 (base 48) moves along the Z-axis direction, the holding arm 20 and the work W also move along the Z-axis direction.

In the above raising/lowering drive part 70, the slider 74 is comprised so that movement between the pulley 76a and the pulley 76b is possible. In a state where the slider 74 is disposed at one position between the pulleys 76a and 76b, the belt 78 extends along the Z-axis direction and connects the pulleys 76a and 76b. It includes a first portion 78a and a second portion 78b extending along the Z-axis direction and connecting between the pulleys 76a and 76b. The first part 78a and the second part 78b are arranged in a row along the Y-axis direction, and are substantially parallel to each other. In the example shown in Fig.5 (a), the slider 74 is connected to the 1st part 78a.

The measurement unit 170 is configured to be able to acquire a vibration signal in response to the vibration of the belt 78 of the lift drive unit 70 . Specifically, the measurement unit 170 acquires a vibration signal according to the vibration of the belt 78 that occurs with the movement (conveying operation) of the holding arm 20 by the lifting/lowering drive unit 70 . The measurement unit 170 acquires, for example, a sound wave generated by vibration of the belt 78 . The measurement unit 170 is provided in the conveyance unit A3 (inside the housing 72) in the state adjacent to the belt 78. The measurement unit 170 may have two sensors (sensors 92 and 94) for measuring sound waves, similarly to the measurement unit 150 described above.

The sensor 92 and the sensor 94 of the measurement unit 170 are arranged to sandwich the belt 78 . In one example, the sensor 92 and the sensor 94 are arranged along the Y-axis direction. That is, in the Y-axis direction, the sensor 92 , the belt 78 , and the sensor 94 are arranged in this order. The measurement unit 170 (sensors 92 and 94, respectively) outputs electric signals corresponding to the sound waves SW1 and SW2 from the belt 78 to the control device 100 .

The measurement unit 170 (sensors 92 and 94 ) may be disposed in the vicinity of the pulley 76a to which the motor 82 is connected. The measurement unit 170 is arrange|positioned near the pulley 76a among the 2nd part 78b to which the slider 74 is not connected, as shown to Fig.6 (a), for example. In this case, since the slider 74 does not interfere with the measurement unit 170, it is comprised so that it may move between the position which does not interfere with the pulley 76a, and the position which does not interfere with the pulley 76b. The measurement unit 170 may be disposed at a position such that the distance between the pulleys 76a is 1/3 or less of the distance between the pulleys 76a and 76b in the Z-axis direction. The distance between the arrangement position (fixed position) of the measurement unit 170 and the pulley 56a is the upper end of the slider 74 when it is located at the limit position closest to the pulley 76a among the movement range of the slider 74 . It may be about the same as the distance between and the pulley 56a, or may be small.

In the above structure, along the movement path of the belt 78, the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b are arrange|positioned in this order. In addition, according to the position of the slider 74 in the Z-axis direction, the area|region corresponding to the 1st part 78a and the 2nd part 78b of the belt 78 changes. However, even if the slider 74 is disposed at any position within the movement range, the above-described arrangement relationship (the movement path of the belt 78 ) of the measurement unit 170 , the pulley 76a , the slider 74 and the pulley 76b . arrangement relationship according to ) is established.

The lifting/lowering drive part 70 illustrated above is used, for example, when moving the holding arm 20 in the transmission of the workpiece|work W with a processing unit. In one example, the conveying unit A3 is in a state in which the proximal end of the holding arm 20 is disposed at a position that does not overlap the base 48 (a state in which the distal end of the holding arm 20 is located in the processing unit), The holding arm 20 is moved from one height position to a position lower than the height position by the raising/lowering drive part 70. As shown in FIG. At this time, the slider 74 shown in Fig.6 (a) moves from the pulley 76b toward the pulley 76a. When the holding arm 20 moves in the Z-axis positive direction by the lifting/lowering drive unit 70 , the slider 74 moves from the pulley 76a toward the pulley 76b.

<X-axis direction>

Fig. 6(b) shows a horizontal drive unit 30 for displacing the holding arm 20 in the X-axis direction. The horizontal drive unit 30 includes a belt at least a part of which is arranged along the X-axis direction, and by moving the belt, the holding arm 20 is displaced in the X-axis direction. The horizontal drive unit 30 has, for example, a housing 32 , pulleys 36a , 36b , 36c , 36d , a belt 38 , a motor 42 , and a slider 34 .

The housing 32 accommodates each element included in the horizontal drive unit 30 . The housing 32 is formed so as to extend along the X-axis direction. For example, an opening 32a is provided in the upper wall of the housing 32 . From the opening 32a , a part of the slider 34 protrudes out of the housing 32 .

The pulley 36a (1st pulley) and the pulley 36b (2nd pulley) are arrange|positioned along the X-axis direction. The distance in the X-axis direction between the pulley 36a and the liquid processing unit U1 (the heat processing unit U2) is smaller than the distance between the pulley 36b and the liquid processing unit U1. The pulleys 36a and 36b are arranged at each end in the housing 32 in the X-axis direction, for example. The pulley 36c and the pulley 36d are disposed between the pulleys 36a and 36b in the X-axis direction, and are disposed below the pulleys 36a and 36b in the Z-axis direction. The height position of the pulley 36c is higher than the height position of the pulley 36d. In the X-axis direction, the pulley 36a, the pulley 36c, the pulley 36d, and the pulley 36b are arranged in this order. The pulleys 36a, 36b, 36c, and 36d are each provided in the housing 32 rotatably about a rotational axis along the Y-axis direction.

Belt 38 spans pulleys 36a, 36b, 36c, 36d. The belt 38 is, for example, a timing belt. The motor 42 is a power source for generating rotational torque. The motor 42 is, for example, a servo motor. The motor 42 is connected to the pulley 36d, and rotates the pulley 36d. When the torque (driving force) by the motor 42 is transmitted to the pulley 36d, the belt 38 spanning the pulleys 36a, 36b, 36c, 36d moves in the X-axis direction between the pulleys 36a and 36b. move along

The slider 34 is formed so as to extend in the Z-axis direction, for example, as shown in Fig. 6B. The proximal end (one end located below) in the Z-axis direction of the slider 34 is connected to the belt 38 in the housing 32 . A distal end (one end positioned above) of the slider 34 in the Z-axis direction protrudes out of the housing 32 through the opening 32a. A proximal end of the holding arm 20 (a portion of the holding arm 20 that does not hold the work W) is connected to the distal end of the slider 34 , for example. In this way, the slider 34 is connected to the holding arm 20 and moves together with the holding arm 20 . When the belt 38 moves along the X-axis direction by the torque by the motor 42, the slider 34 (holding arm 20) connected to the belt 38 also reciprocates along the X-axis direction. Move. When the slider 34 (holding arm 20) moves along the X-axis direction, the workpiece W held by the holding arm 20 also moves along the X-axis direction.

In the above horizontal drive part 30, the slider 34 is comprised so that movement between the pulley 36a and the pulley 36b is possible. In a state where the slider 34 is disposed at one position between the pulleys 36a and 36b, the belt 38 extends along the X-axis direction and connects the pulleys 36a and 36b. It includes a first part 38a and a second part 38b connecting between the pulleys 36a and 36d. Viewed from the Y-axis direction, the second portion 38b is inclined with respect to the first portion 38a. In the example shown in FIG.6(b), the slider 34 is connected to the 1st part 38a.

The measurement unit 130 is comprised so that acquisition of the vibration signal accompanying the vibration of the belt 38 of the horizontal drive part 30 is possible. Specifically, the measurement unit 130 acquires a vibration signal according to the vibration of the belt 38 that occurs along with the movement (transport operation) of the holding arm 20 by the horizontal drive unit 30 . The measurement unit 130 acquires, for example, a sound wave generated by vibration of the belt 38 . The measurement unit 130 is provided in the conveyance unit A3 (inside the housing 32) in a state close to the belt 38 . The measurement unit 130 may have two sensors (sensors 92 and 94) that measure sound waves, similarly to the measurement unit 150 described above.

The sensor 92 and the sensor 94 of the measurement unit 130 are arranged so as to sandwich the belt 38 . In one example, the sensor 92 and the sensor 94 are arranged and arranged along a direction orthogonal to the second portion 38b of the belt 38 . That is, in the direction orthogonal to the second part 38b, the sensor 92, the belt 38, and the sensor 94 are arranged in this order. The measurement unit 130 (sensors 92 and 94, respectively) outputs electrical signals corresponding to the sound waves SW1 and SW2 from the belt 38 to the control device 100 .

The measurement unit 130 (sensors 92 and 94) may be disposed between the pulley 36a and the pulley 36d. The measurement unit 130 is approximately between the pulley 36a and the pulley 36d of the second part 38b to which the slider 34 is not connected, as shown, for example, in FIG. 6B . It is arranged in the center (approximately near the central pulley 36a). In this case, since the slider 34 does not interfere with the measurement unit 130, it is comprised so that it may move between the position which does not interfere with the pulley 36a, and the position which does not interfere with the pulley 36b.

In the above structure, along the movement path of the belt 38, the measurement unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, and 36d are arrange|positioned in this order. In addition, according to the position of the slider 34 in the X-axis direction, the area|region corresponding to the 1st part 38a and the 2nd part 38b of the belt 38 changes. However, even when the slider 34 is disposed at any position within the movement range, the above-described arrangement relationship (belt 38) of the measurement unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, 36d. ) according to the movement path) is established.

The horizontal drive unit 30 exemplified above is used, for example, when moving the holding arm 20 in order to load and unload the work W with respect to the processing unit. In one example, the carrying unit A3 is opposite the processing unit of the carrying-in/out destination in the X-axis direction, from a position where the base end of the holding arm 20 overlaps the base 48 , the holding arm 20 . The holding arm 20 is moved to a position where the proximal end of the base 48 does not overlap with the base 48 . At this time, the slider 34 shown in FIG.6(b) moves toward the pulley 36a from the pulley 36b. When the holding arm 20 moves in the negative X-axis direction by the horizontal drive unit 30 , the slider 34 moves from the pulley 36a toward the pulley 36b.

(controller)

Subsequently, an example of the control device 100 will be described with reference to FIGS. 7 and 8 . The control device 100 controls the coating/developing device 2 . The control device 100 controls at least the liquid processing unit U1 , the heat treatment unit U2 , the conveying unit A3 , and the measurement units 130 , 150 , and 170 . The control device 100 has, for example, a processing control unit 202 and an inspection control unit 204 as a functional configuration (hereinafter, referred to as a “function module”). The inspection control unit 204 includes a signal acquisition unit 212 , a data extraction unit 214 , a frequency calculation unit 216 , a storage unit 218 , a state determination unit 220 , and an output unit 222 . ) has The processing executed by each function module corresponds to the processing executed by the control device 100 .

The processing control unit 202 executes process processing for the plurality of works W. As shown in FIG. The process process is a series of processes (for example, a series of processes from the formation of the underlayer film to the development process) performed in the coating/developing apparatus 2 in order for the plurality of workpieces W in a predetermined period of time. it will be carried out The process processing is a first processing in which a predetermined processing (eg, liquid processing or heat treatment) is performed on the plurality of workpieces W by a processing unit such as the liquid processing unit U1 (heat processing unit U2 ). includes In addition, the process processing includes the second processing of carrying out the loading and unloading of the plurality of workpieces W by the conveying unit A3 with respect to one processing unit such as the liquid processing unit U1, respectively.

The second process includes a displacement process in which the holding arm 20 is displaced by the horizontal drive unit 30 along the X-axis direction, and a displacement process in which the holding arm 20 is displaced by the horizontal drive unit 50 along the Y-axis direction. Displacement processing for displacing the holding arm 20 by the lifting/lowering drive unit 70 along the Z-axis direction is included. Each of these three displacement processes includes a displacement process for displacing the holding arm 20 in the positive direction of each axis and a displacement process for displacing the holding arm 20 in the negative direction of each axis.

The signal acquisition unit 212 acquires, from each of the measurement units 130 , 150 , and 170 , a vibration signal according to the vibration of the belt. For example, the signal acquisition part 212 acquires the vibration signal according to the vibration of a belt by calculating the difference of two electrical signals according to the sound waves SW1 and SW2 from the sensors 92 and 94 of each measurement unit. The signal acquisition unit 212 acquires a vibration signal during the execution period of the process processing. The signal acquisition unit 212 acquires, for example, a vibration signal during the operation period of the coating/developing device 2 without stopping a series of processes (operation of the device) by the coating/developing device 2 . . In one example, the signal acquisition unit 212 sends a vibration signal (the displacement) from the belt of the drive unit corresponding to the displacement processing in a state in which the holding arm 20 is stopped on the axis after the displacement processing of each axis is completed. A vibration signal according to the vibration of the belt caused by the displacement in the process) is acquired.

The data extraction unit 214 extracts data (hereinafter referred to as "analysis data") used for the inspection of the belt from the vibration signal acquired by the signal acquisition unit 212 . For example, the data extraction unit 214 from the first predetermined time elapses after the displacement processing is completed (after the holding arm 20 is stopped) from the vibration signal, from the first predetermined time Again, data up to the time point when the second predetermined time has elapsed is extracted. The first predetermined time and the second predetermined time are set in advance, and after the end of the displacement process, they are set to such a degree that the sound wave accompanying the vibration of the belt can be measured. For example, the first predetermined time is set to about several tens of milliseconds to several hundreds of milliseconds, and the second predetermined time is set to about several milliseconds to several tens of milliseconds.

The frequency calculation unit 216 calculates the frequency of the belt based on the analysis data extracted by the data extraction unit 214 . For example, the frequency calculation unit 216 calculates a frequency spectrum by performing Fast Fourier Transform on the analysis data, and detects the frequency with the largest amplitude from the frequency spectrum as the frequency of the belt ( calculated).

The storage unit 218 stores the frequency (frequency) of the belt vibration calculated by the frequency calculation unit 216 for each axis. The storage unit 218 stores the frequency of the belt repeatedly calculated by the frequency calculation unit 216 for each axis in a predetermined period. The predetermined period is predetermined and may be, for example, one day, one week, one month, or several months, or the period from the start of operation of the coating/developing apparatus 2 to the stop of operation for maintenance or the like.

The state determination unit 220 determines the state of the belt based on the vibration signal acquired by the signal acquisition unit 212 for each axis. The state determination unit 220 determines whether the state of the belt is abnormal, for example, based on the calculation result of the frequency of the belt stored by the storage unit 218 for each axis. In the present disclosure, the abnormal state of the belt includes not only a case in which the belt has already failed, but also a case close to a failure state (that is, a case where there is a high possibility that the belt will become inoperable if it is continuously used as it is). do.

The output unit 222 outputs a signal (hereinafter referred to as an "abnormal signal") indicating that the state of the belt on the axis is not normal according to the determination result for each axis by the state determination unit 220 . . For example, the output part 222 outputs an abnormality signal to the monitor for reporting to an operator etc., when it appears that the state of a belt is abnormal by the determination result by the state determination part 220. FIG. Alternatively, the output unit 222 stops a series of processing (process processing) by the coating/developing device 2 when the state of the belt is abnormal as a result of the determination by the state determination unit 220 . An abnormal signal is output to the processing control unit 202 in order to

The control device 100 is constituted by one or a plurality of control computers. For example, the control device 100 has the circuit 240 shown in FIG. 8 . The circuit 240 includes one or more processors 242 , a memory 244 , a storage 246 , an input/output port 248 , and a timer 252 . The storage 246 has a storage medium readable by a computer, such as a hard disk, for example. The storage medium stores a program for causing the control device 100 to execute a substrate processing method described later. The storage medium may be a removable medium such as a nonvolatile semiconductor memory, a magnetic disk, or an optical disk. The memory 244 temporarily stores the program loaded from the storage medium of the storage 246 and the operation result by the processor 242 .

The processor 242 executes the program in cooperation with the memory 244 . The input/output port 248 performs input/output of electrical signals between the liquid processing unit U1, the conveying unit A3, the measurement units 130, 150, 170, and the like in response to an instruction from the processor 242. The timer 252 measures the elapsed time by, for example, counting a reference pulse of a fixed period. In addition, the hardware configuration of the control device 100 may be constituted by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) integrating the same.

[Substrate processing method]

Then, with reference to FIG. 9, the application|coating and developing process performed in the coating/developing apparatus 2 as an example of a substrate processing method is demonstrated. 9 is a flowchart showing an example of the coating and developing process including the exposure process, and shows the procedure of the coating and developing process for one work W. As shown in FIG. First, the processing control unit 202 of the control device 100 controls the conveying unit A1 to convey the workpiece W in the carrier C to the shelf unit U10, and transfers the workpiece W to the processing module ( 11), the conveying unit A7 is controlled so as to be disposed in the cell.

Next, the processing control unit 202 controls the processing module 11 to form an underlayer film on the surface Wa of the work W (step S01). In step S01 , for example, the processing control unit 202 controls the conveying unit A3 to convey the workpiece W from the shelf unit U10 to the liquid processing unit U1 . And the process control part 202 controls the liquid processing unit U1 so that the coating film of the process liquid for underlayer film formation is formed on the surface Wa of the workpiece|work W. The processing control part 202 controls the conveyance unit A3 so that the workpiece|work W with a coating film may be conveyed to the heat processing unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 to form an underlayer film on the surface Wa of the work W. Thereafter, the processing control unit 202 controls the conveying unit A3 to return the workpiece W after the underlayer film has been formed to the shelf unit U10, and transfers the workpiece W to the cell for the processing module 12 . The conveying unit A7 is controlled so as to be placed in

Next, the processing control unit 202 controls the processing module 12 to form a resist film on the surface Wa of the work W after the underlayer film is formed (step S02). In step S02 , for example, the processing control unit 202 controls the conveying unit A3 to convey the workpiece W of the shelf unit U10 to any liquid processing unit U1 in the processing module 12 . . Then, the processing control unit 202 controls the liquid processing unit U1 so that a resist coating film is formed on the surface Wa of the work W. The processing control part 202 controls the conveyance unit A3 so that the workpiece|work W on which the coating film of the resist was formed may be conveyed to the heat processing unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 to form a resist film on the surface Wa of the work W. Thereafter, the processing control unit 202 controls the conveying unit A3 to return the work W after the resist film has been formed to the shelf unit U10, and transfers the work W to the cell for the processing module 13 . The conveying unit A7 is controlled so as to be placed in

Next, the processing control unit 202 controls the processing module 13 to form an upper layer film on the surface Wa of the work W after the resist film is formed (step S03). In step S03 , for example, the processing control unit 202 controls the conveying unit A3 to convey the workpiece W to the liquid processing unit U1 . And the process control part 202 controls the liquid processing unit U1 so that the coating film of the process liquid for upper layer film formation is formed on the surface Wa of the workpiece|work W. The processing control part 202 controls the conveyance unit A3 so that the workpiece|work W with a coating film may be conveyed to the heat processing unit U2. Then, the processing control unit 202 controls the heat treatment unit U2 to form an upper layer film on the surface Wa of the work W. Thereafter, the processing control unit 202 controls the conveying unit A3 to convey the workpiece W after the upper layer film is formed to the shelf unit U11 .

Next, the processing control unit 202 controls the conveying unit A8 to send the workpiece W of the shelf unit U11 to the exposure apparatus 3 . Then, a control device separate from the control device 100 controls the exposure device 3 to perform exposure processing on the work W on which the resist film is formed (step S04). Thereafter, the processing control unit 202 receives the workpiece W subjected to the exposure processing from the exposure apparatus 3 , and arranges it in the cell for the processing module 14 in the shelf unit U11 , the conveying unit A8 . ) to control

Next, the processing control unit 202 controls the processing module 14 to perform the development processing on the workpiece W after the exposure processing has been performed (step S05). In step S05, for example, the processing control unit 202 controls the conveying unit A3 to convey the work W to the heat treatment unit U2, and then heat treatment the resist film of the work W before development. Controls the heat treatment unit (U2) to carry out. Then, the processing control unit 202 controls the conveying unit A3 to convey the workpiece W subjected to the heat treatment before development to the liquid processing unit U1, and then develops the workpiece W on the resist film. The liquid processing unit U1 is controlled to perform processing.

After that, the processing control unit 202 controls the conveying unit A3 to convey the developed work W to the heat treatment unit U2, and then, after developing the resist film of the work W, heat treatment after development. Controls the heat treatment unit (U2) to carry out. Then, the processing control unit 202 controls the conveying unit A3 to return the work W to the shelf unit U10, and the conveying unit A7 to return the work W into the carrier C. ) and the conveying unit A1. As described above, the coating and developing treatment for one work W is completed.

In the substrate processing method exemplified above, the control apparatus 100 (inspection control unit 204 ) conveys each of the plurality of workpieces W in a series of process processing by the coating/developing apparatus 2 . In parallel with the operation (displacement processing), the state of the belt of each driving unit is inspected. In each conveyance operation of this work W, displacement processing of the holding arm 20 in a state in which the work W is not held and the holding arm 20 in a state holding the work W are performed. ) displacement treatment is included. The control device 100 inspects the state of the belt 38 of the horizontal drive unit 30 using the measurement unit 130 after the displacement processing of the holding arm 20 in the X-axis direction. The control device 100 inspects the state of the belt 58 of the horizontal drive unit 50 using the measurement unit 150 after the displacement processing of the holding arm 20 in the Y-axis direction. The control device 100 uses the measurement unit 170 to inspect the state of the belt 78 of the elevating drive unit 70 after displacement processing of the holding arm 20 in the Z-axis direction.

10 is a timing chart of a transfer operation (displacement process) of the holding arm 20 performed in the resist film formation process of step S02 shown in FIG. 9 and a belt inspection performed in conjunction with the transfer operation. An example is partially shown. In a part of step S02, for example, the processing control unit 202 of the control device 100 performs an operation of unloading the workpiece W from the liquid processing unit U1 and a heat treatment unit ( The movement operation|movement of the workpiece|work W to U2), and the carrying-in operation|movement of the workpiece|work W to the heat processing unit U2 are performed in order.

In the unloading operation of the workpiece W from the liquid processing unit U1, first, an “X-axis betting” operation is performed. In this X-axis betting operation, it is disposed at a position opposite to the liquid processing unit U1 in the X-axis direction (a position that overlaps in the Y-axis direction), and the holding arm 20 holds the workpiece W. In a state not being performed, the processing control unit 202 of the control device 100 performs a displacement processing (first displacement processing) for displacing the holding arm 20 in the forward direction in the X-axis direction to the horizontal drive unit 30 . run by

Then, a “Z-axis up” operation is performed. In this Z-axis up operation, the processing control unit 202 forwardly displaces the holding arm 20 in the Z-axis direction (second direction) in order to receive the workpiece W from the liquid processing unit U1 . The displacement processing (second displacement processing) to be performed is executed by the lifting driving unit 70 (second driving unit). In a period overlapping with at least a part of the execution period of the displacement processing by the lifting drive unit 70, "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit 204 controls the vibration of the belt 38 of the horizontal drive unit 30 caused by displacement in the previous X-axis forward displacement processing (X-axis betting operation). A vibration signal is acquired, and the test|inspection (for example, calculation and memory|storage of a frequency|frequency) of the belt 38 is performed based on the said vibration signal acquired. After that, the "X-axis pulling" operation is performed. In this X-axis pulling operation, the processing control unit 202 executes a displacement process in which the holding arm 20 holding the workpiece W is displaced in the negative X-axis direction.

Next, in the movement operation|movement of the workpiece|work W from the liquid processing unit U1 to the heat processing unit U2, "Y-axis operation|movement" is performed. In this Y-axis operation, the horizontal drive unit 50 executes the displacement processing (first displacement processing) in which the processing control unit 202 displaces the holding arm 20 in the negative Y-axis direction.

Next, in the carrying-in operation|movement of the workpiece|work W to the heat processing unit U2, "X-axis betting" operation|movement is performed first. In this X-axis betting operation, the processing control unit 202 displaces the holding arm 20 holding the workpiece W in the positive direction in the X-axis direction (second direction) in a displacement process (second displacement). process) is executed by the horizontal driving unit 30 (second driving unit). In a period overlapping with at least a part of the execution period of the displacement processing by the horizontal drive unit 30, "Y-axis inspection" is performed. In this Y-axis inspection, the inspection control unit 204 responds to the vibration of the belt 58 of the horizontal drive unit 50 caused by displacement in the previous displacement processing in the negative Y-axis direction (Y-axis operation). A vibration signal is acquired, and the belt 58 is inspected based on the acquired vibration signal.

Then, a “Z-axis down” operation is performed. In this Z-axis down operation, the processing control unit 202 transfers the workpiece W held by the holding arm 20 to the heat treatment unit U2, the holding arm 20 in the Z-axis direction. Displacement processing (second displacement processing) for displacing in the negative direction is executed by the lifting drive unit 70 . In a period overlapping with at least a part of the execution period of the displacement processing by the lifting drive unit 70, "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit 204 controls a horizontal drive unit ( 30), a vibration signal corresponding to the vibration of the belt 38 is acquired, and based on the acquired vibration signal, the belt 38 is inspected (eg, calculation and storage of the frequency).

After that, the "X-axis pulling" operation is performed. In this X-axis pulling operation, the processing control unit 202 performs displacement processing (second displacement processing) for displacing the holding arm 20 that does not hold the workpiece W in the negative X-axis direction (second displacement processing) to the horizontal drive unit. (30) is executed. A "Z-axis inspection" is performed in a period overlapping with at least a part of the execution period of the displacement processing by the lifting drive unit 70 . In this Z-axis inspection, the inspection control unit 204 responds to the vibration of the belt 78 of the elevating drive unit 70 caused by displacement in the previous Z-axis negative direction displacement process (Z-axis down operation). A corresponding vibration signal is acquired, and based on the acquired vibration signal, the test|inspection of the belt 78 (for example, calculation and memory|storage of a frequency) is performed. By the above, the carrying-in operation|movement of the workpiece|work W to the heat processing unit U2 is completed.

Thereafter, the control apparatus 100 repeats the same conveyance operation and inspection. In the above inspection, the inspection control unit 204 repeats the calculation and storage of the frequency of the belt 38 of the horizontal drive unit 30 accompanying the conveying operation in the negative X-axis direction, followed by the conveying operation in the positive X-axis direction. Therefore, it is not necessary to calculate and store the frequency of the belt 38 . Alternatively, the inspection control unit 204 repeats the calculation of the frequency of the belt 38 with the conveying operation in the positive X-axis direction, and does not calculate the frequency of the belt 38 with the conveying operation in the negative X-axis direction. you don't have to In addition, unlike the above-mentioned example, the test|inspection control part 204 is in either state of the state in which the holding arm 20 hold|maintains the workpiece|work W, and the state which does not hold the workpiece|work W. with the conveying operation in the X-axis positive direction (X-axis negative direction), the frequency of the belt 38 is calculated, It is not necessary to calculate the vibration of the belt 38 . The inspection control unit 204 controls the frequency of the belt in the same operation (or the same operation and state) as in the X-axis direction with respect to the inspection accompanying the conveying operation in the Y-axis direction and the conveying operation in the Z-axis direction. The calculation may be repeated.

Next, with reference to FIGS. 11 and 12, the test|inspection of the belt in the drive part of one shaft is demonstrated. 11 is a flowchart showing an example of a processing procedure (inspection method) in the case of inspecting the belt 38 by repeatedly calculating the frequency in the transfer operation (displacement processing) in the positive X-axis direction.

In this inspection method, first, the control apparatus 100 waits until the displacement process in the X-axis positive direction is complete|finished (step S21). In step S21, for example, the test|inspection control part 204 waits until the operation|movement which the holding arm 20 moves to the position where the base end of the holding arm 20 does not overlap with the base 48 stops. In an example, the test|inspection control part 204 acquires from the process control part 202 the information which rotation by the motor 62 of the horizontal drive part 30 stopped.

In step S21, when it is determined that the displacement processing has been completed (step S21: YES), the control device 100 generates a vibration signal according to the vibration of the belt 38 generated from the displacement processing in the positive X-axis direction. is acquired (step S22). For example, the signal acquisition unit 212 acquires a vibration signal from the measurement unit 130 from the end of the displacement processing in the X-axis positive direction until a predetermined time elapses. During execution of step S22, the processing control unit 202 may perform displacement processing in axes other than the X-axis direction, or may cause the workpiece W to perform processing by the processing unit.

Next, the control apparatus 100 extracts the analysis data used for the test|inspection of a belt from the vibration signal acquired by the signal acquisition part 212 (step S23). As shown in (a) of FIG. 12 , for example, the data extracting unit 214 has a first predetermined time t1 from the end time of the displacement processing (the stopping time of the holding arm 20 ) from the vibration signal. After the lapse of time, the data for the second predetermined time t2 is extracted as analysis data. The first predetermined time t1 and the second predetermined time t2 are preset based on the time in which a sound wave by vibration of the belt derived from the displacement of the holding arm 20 can be measured. The first predetermined time t1 is set to a time at which it is assumed that the vibration accompanying the stop of the holding arm 20 (slider) is started from the end point of the displacement processing in a part of the belt to which the inspection unit approaches. The second predetermined time t2 is set to a time period assumed to continue for vibration of the belt accompanying the stop of the holding arm 20 (slider).

Next, based on the analysis data extracted by the data extraction part 214, the control apparatus 100 calculates the frequency of the vibration of the belt 38 which generate|occur|produces with the displacement process of step S21 (step S24). . For example, the frequency calculation unit 216 calculates a frequency spectrum as shown in FIG. 12B by performing a fast Fourier transform on the analysis data. And the frequency calculation part 216 calculates the frequency with the largest amplitude (frequency f1 in the example shown in FIG. 12(b)) as a frequency of the belt 38 from the calculated frequency spectrum. Next, the control device 100 (storage unit 218) stores information indicating the calculated frequency of the belt 38 (step S25).

Next, the control apparatus 100 determines whether a predetermined period has elapsed from a predetermined reference time point (step S26). In step S26, for example, the control device 100 determines whether a predetermined period (for example, one day) has elapsed from the start of operation of the coating/developing apparatus 2 . In step S26, when it is determined that the predetermined period has not elapsed (step S26: NO), the control device 100 repeatedly executes steps S21 to S26. Thereby, the control device 100 (inspection control unit 204 ) controls the belt 38 generated by displacement in the displacement processing for each displacement processing while the processing control unit 202 repeats the execution of the displacement processing. Acquire a vibration signal according to the vibration of And the test|inspection control part 204 calculates the frequency of the belt 38 for every displacement process, and memorize|stores the calculated frequency. As a result, a plurality of measured values for the frequency of the belt 38 are stored in the storage unit 218 .

Next, the control apparatus 100 calculates the frequency (henceforth a "determination frequency") for use in determination of the state of the belt 38 (step S27). In step S27, for example, the state determination part 220 computes the statistical value about the measured value of the some frequency|frequency memorize|stored in the predetermined period as a determination frequency. In an example, the state determination part 220 calculates the average value, a median value, a lower limit, an upper limit, or a standard deviation of the some measured value with respect to the frequency|frequency of the belt 38 as a determination frequency.

Next, the control apparatus 100 (state determination unit 220) determines whether the determination frequency is smaller than a predetermined threshold (step S28). The threshold is set in advance, and is set, for example, based on a value obtained by measuring the frequency of the belt when the tension of the belt is intentionally lowered. When it is determined in step S28 that the determination frequency is smaller than the threshold value (step S28: Yes), the control device 100 outputs an abnormal signal indicating that the state of the belt 38 is not normal (step S29). .

In Step S29, for example, the output unit 222 outputs an abnormal signal indicating that the belt 38 has failed, or an abnormal signal indicating that the belt 38 is approaching a failure state. In one example, the output unit 222 outputs an abnormal signal to a monitor for reporting to an operator or the like. Alternatively, the output unit 222 outputs an abnormal signal to the processing control unit 202 , and the processing control unit 202 receiving the abnormal signal stops the process processing by the coating/developing apparatus 2 . On the other hand, when it is determined that the determination frequency is equal to or greater than the threshold value (step S28: NO), the control device 100 does not execute step S29. As a result, a series of processing procedures for the inspection of the belt 38 are completed.

In the flow explained above, although the test|inspection of the belt 38 regarding the X-axis was demonstrated, the test|inspection of the belt 58 regarding the Y-axis, the test|inspection of the belt 78 regarding the Z-axis are also test|inspection of the belt 38. It can also be executed as

The first predetermined time t1 for determining the data extraction range in step S23 may be set to a different value for each axis. The first predetermined time t1 may be set in accordance with the distance between the measurement unit and the one pulley having a shorter distance to the measurement unit among the two pulleys sandwiching the measurement unit. For example, as the distance between the measurement unit and the pulley becomes longer, the first predetermined time t1 may be set to a longer value. In the above example, the distance between the pulley 36a of the horizontal drive unit 30 in the X-axis direction and the measurement unit 130 is between the pulley 56a of the horizontal drive unit 50 in the Y-axis direction and the measurement unit 150 . is larger than the distance between the pulley 76a of the elevating drive unit 70 in the Z-axis direction and the measurement unit 170 . That is, the first predetermined time t1 in the X-axis direction is longer than the first predetermined time t1 in the Y-axis direction, and is longer than the first predetermined time t1 in the Z-axis direction.

Also in the inspection of the belt 58 with respect to the Y-axis, the above-described steps S21 to S26 are repeated. In this case, even if the inspection control unit 204 calculates the frequency of vibration of the belt 58 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the negative Y-axis direction in a predetermined period, do. Regarding the movement of the holding arm 20 in the Y-axis direction, the stop position of the holding arm 20 (the stop position of the slider 54 ) differs depending on the processing unit of the carrying-in/out destination. If the stop position of the slider 54 is different, the length of a part of the belt 58 in which the measurement unit 150 is provided (the length from the slider 54 to the pulley 56a) is different, and the state of the belt 58 is different. The frequency changes regardless of the presence or absence of abnormality.

For this reason, in step S24, the frequency calculation part 216 sets the calculated frequency according to the stop position of the holding arm 20 (slider 54) to the frequency at the reference position arbitrarily determined among the stop positions. You may correct the frequency of the belt 58 so that it may correspond. The frequency calculation unit 216 calculates the frequency calculated from the vibration signal using an expression that determines the relationship between the string length, tension, and unit mass and the string natural frequency, assuming that the slider 54 is stationary at the reference position. You may convert it to the frequency of a case. In this case, the storage unit 218 stores information indicating the corrected frequency. Then, the state determination unit 220 determines the state of the belt 58 by comparing the statistical value for the corrected frequency with a threshold value. This threshold value is determined based on the state of the belt 58 in which the slider 54 is located at the reference position. As mentioned above, in addition to the vibration signal obtained from the vibration of the belt 58, the state determination part 220 may determine the state of the belt 58 also based on the stop position set for every displacement process.

Also in the inspection of the belt 78 with respect to the Z-axis, the above-described steps S21 to S26 are repeated. In this case, the inspection control unit 204 controls the vibration of the belt 78 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the Z-axis negative direction (downward) for a predetermined period. You may calculate the frequency of vibration.

In the above example, the vibration signal is acquired from the end of the displacement processing, and data of a part of the vibration signal is extracted by the data extraction unit 214, but the signal acquisition unit 212 is In this case, a vibration signal may be acquired. For example, the signal acquisition part 212 does not start acquisition of a vibration signal at the end time of a displacement process, but starts acquisition of a vibration signal when the 1st predetermined time t1 has elapsed, The 1st predetermined time Acquisition of the vibration signal may be stopped when the second predetermined time t2 has elapsed from t1 again. In this case, it is not necessary to extract some data by the data extraction unit 214 . As described above, irrespective of whether or not data is extracted, the state determination unit 220 determines whether the belt is subjected to vibration based on the vibration signal accompanying the vibration of the belt after the first predetermined time t1 has elapsed after the displacement processing is completed. determine the status

[Effect of embodiment]

In the coating/developing apparatus 2 and the substrate processing method described above, a vibration signal corresponding to the vibration of the belt is acquired during the execution period of the process processing, and the state of the belt is determined based on the vibration signal. In this apparatus and method, since it is not necessary to stop the process processing by the coating/developing apparatus 2 in order to determine the state of the belt, it becomes possible to inspect the state of the belt while maintaining the throughput.

When the tension (tension) of a belt falls due to deterioration with time, etc., there exists a possibility that malfunctions, such as a belt breakage or a tooth skip, may generate|occur|produce. Since the tension of the belt depends on the frequency of the belt, the failure of the belt can be prevented in advance by periodically checking the frequency of the belt. As a method of inspecting the state of the belt, it is conceivable to stop a series of processes performed in the coating/developing apparatus 2 and measure the frequency of the belt. However, when the operation of the coating/developing apparatus 2 is stopped, the throughput of the work W is reduced. On the other hand, in the above apparatus and method, since the frequency of the belt is measured without stopping the operation of the coating/developing apparatus 2 (without stopping the process), the tension of the belt can be inspected without reducing the throughput. .

The coating/developing apparatus 2 described above further includes an output unit 222 that outputs an abnormal signal indicating that the state of the belt is not normal according to the determination result by the state determination unit 220 . In this case, when it is determined that the state of the belt is not normal, it becomes possible to execute a process different from that when the state of the belt is normal.

In the coating/developing apparatus 2 described above, the processing control unit 202 is held along the first direction by the driving unit in the second processing of carrying in and out of each of the plurality of workpieces W to and from the processing unit. A displacement process for displacing the arm 20 is executed. The signal acquisition unit 212 acquires a vibration signal according to the vibration of the belt generated by the displacement in the displacement processing after the displacement processing is completed. The vibration signal acquired during execution of the displacement process may contain a lot of information on vibration due to disturbance. In the above configuration, by acquiring the vibration signal from the end of the displacement processing, it is possible to reduce the influence of the disturbance included in the vibration signal.

In the coating/developing apparatus 2 described above, the state determination unit 220 determines the state of the belt based on the vibration signal accompanying the vibration of the belt after a predetermined time has elapsed after the displacement processing is completed. In some cases, information on vibration due to disturbance remains in the vibration signal acquired immediately after the end of the displacement processing. With the above configuration, it is possible to further reduce the influence of disturbance included in the vibration signal.

In the coating/developing apparatus 2 described above, the driving unit further includes two pulleys over which at least a part of the belt is draped. The measurement unit may be provided adjacent to a portion of the belt disposed between two pulleys. The predetermined period of time may be set according to the distance between the measurement unit and one of the two pulleys having a shorter distance to the measurement unit. It is considered that the time until the vibration of the belt converges depends on the length of the belt between the fixed end and the proximal position of the measuring unit. In the above configuration, since the predetermined time varies according to the length of the belt between the fixed end and the measurement unit, it becomes possible to appropriately determine the state according to the vibration of the belt.

In the coating/developing apparatus 2 described above, the driving unit further includes a first pulley and a second pulley over which at least a part of the belt is applied, and a motor that rotates the first pulley to move the belt. The measurement unit is disposed in the vicinity of the first pulley. The processing control unit displaces the holding arm 20 by the driving unit in a direction from the second pulley toward the first pulley in the displacement processing. In this case, when the holding arm 20 is stopped in the displacement process, the inertial force of the slider connected to the holding arm 20 is generated in the direction toward the first pulley. Therefore, it is considered that a compressive force is applied to a part of the belt between the slider and the first pulley as the holding arm 20 (slider) stops. Thereby, the vibration of the part of the belt including a part of the said belt and in which the measuring unit is arrange|positioned becomes large, and acquisition of a vibration signal is easy.

In the coating/developing apparatus 2 described above, the driving unit further includes a slider that moves together with the holding arm 20 . The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order. When the slider moves from the second pulley toward the first pulley, in a part of the belt between the first pulley and the slider, the impact accompanying the stop of the slider in the displacement processing becomes large, so that the acquisition of the vibration signal is easy.

In the coating/developing apparatus 2 described above, the processing control unit repeatedly executes the displacement processing in the Y-axis direction in the second processing. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt 58 generated by displacement in the displacement processing for each displacement processing. The stop position of the holding arm 20 is set to a different position for each displacement process. The state determination unit 220 determines the state of the belt 58 also based on the stop position set for each displacement process. In this case, even if the stop position of the holding arm 20 is different, since the stop position of the holding arm 20 for each displacement process is taken into account, it becomes possible to determine the state of the belt 58 appropriately.

In the coating/developing apparatus 2 demonstrated above, the conveyance unit A3 further has the 2nd drive part which displaces the holding arm 20 in a 2nd direction. In the second process, the processing control unit 202 includes a first displacement process for displacing the holding arm 20 by a driving unit in a first direction, and a holding arm ( ) with a second driving unit in a second direction. 20), the second displacement processing is executed. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement processing in a period overlapping with at least a part of the execution period of the second displacement processing. In this case, since the operation by the conveying unit A3 and the inspection of the belt are performed at least partially overlappingly, it becomes possible to suppress the influence on the process processing by the inspection of the belt.

In the coating/developing apparatus 2 described above, the driving unit includes first and second pulleys arranged in the first direction over at least a part of the belt, and a motor for moving the belt by rotating the first pulley and a slider that moves together with the holding arm 20 . The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to obtain the vibration signal.

In the coating/developing apparatus 2 described above, the driving unit includes first and second pulleys arranged in the first direction over at least a part of the belt, and a slider that moves together with the holding arm 20 . include more The slider is connected to the belt so as to be movable between the first pulley and the second pulley. A measurement unit, a 1st pulley, a slider, and a 2nd pulley may be arrange|positioned in this order along the movement path|route of a belt. In this case, the disturbance applied from the slider to a part of the belt to which the measurement unit approaches is reduced by passing the first pulley, and it becomes possible to reduce the influence of the disturbance included in the vibration signal.

[Variation]

As mentioned above, although embodiment which concerns on this indication was described in detail, you may add various deformation|transformation to the above-mentioned embodiment within the scope of the summary of this indication. The transfer unit A3 may further include a separate holding arm 20 and a separate horizontal drive unit 30 for displacing the other holding arm 20 in at least the X-axis direction. The horizontal drive unit 30 and the other horizontal drive unit 30 may be arranged in a vertical direction. In this case, the coating/developing apparatus 2 may further include a separate measurement unit 130 for inspecting the belt 38 of the other horizontal drive unit 30 .

The conveyance unit A3 does not need to have any one drive part among three drive parts of the horizontal drive part 30, the horizontal drive part 50, and the raising/lowering drive part 70, and does not need to have any two drive parts. The drive mechanism of the horizontal drive parts 30 and 50 and the lift drive part 70 is not limited to the above-mentioned example, What is necessary is just to have a belt arrange|positioned so that a drive part may extend in a movement direction at least. In each drive unit, the belt may be spread over three pulleys or five or more pulleys.

The measurement units 130 , 150 , 170 do not need to include any one of the sensors 92 and 94 . In addition, when the sensors 92 and 94 are arranged so as to sandwich the belt, the sound wave SW1 acquired by the sensor 92 and the sound wave SW2 acquired by the sensor 94 are in phase with the vibration of air due to disturbance, The vibration of air by the belt is out of phase. For this reason, by making the difference between the sound wave SW1 and the sound wave SW2 as a vibration signal, a signal in which the vibration of the air by the belt is mutually strengthened and the vibration of the air caused by the disturbance is reduced is obtained. The measurement units 130 , 150 , 170 may be configured in any way as long as a signal according to the vibration of the belt can be acquired.

The arrangement positions of the measurement units 130 , 150 , and 170 are not limited to the above-described examples. The measurement unit may be disposed at any position in the movement path of the belt as long as it can acquire a vibration signal according to vibration of the belt without interfering with other members (eg, slider). That is, in the movement path of the belt, the pulley, the slider, and the measurement unit may be arranged in any order.

Also in the conveying units other than the conveying unit A3 of the processing module 12 , similarly to the conveying unit A3 of the processing module 12 , the inspection of the belt of each driving unit may be performed. The coating/developing apparatus 2 is a processing unit that performs a predetermined processing on the work W, and may include a unit that performs processing other than liquid processing and heat treatment. For example, the coating/developing apparatus 2 may be provided with a unit for inspection for inspecting the state of the surface Wa, and the conveying unit A3 transfers the workpiece W to the unit for inspection. You may carry out carrying in and out. The substrate processing system 1 includes at least one processing unit, a conveying unit for carrying in/out of a work W to and from the processing unit, a measurement unit for inspecting a belt of a drive unit included in the conveying unit, and a control unit; If provided, it may be configured in any way.

Claims (12)

a processing unit for performing predetermined processing on the substrate;
a conveying unit including a holding portion for holding the substrate and a driving unit including a belt and displacing the holding portion in a first direction by moving the belt;
a measuring unit provided in a state adjacent to the belt and capable of acquiring a vibration signal according to vibration of the belt resulting from displacement of the holding portion;
a control unit for controlling the processing unit, the conveying unit, and the measuring unit;
The control unit is
A first process in which the predetermined processing is sequentially performed by the processing unit on a plurality of substrates including the substrate, and a second process in which each of the plurality of substrates is carried in and out of the processing unit by the transfer unit A processing control unit for executing a process process comprising:
a signal acquisition unit for acquiring the vibration signal from the measurement unit;
a state determination unit that determines the state of the belt based on the vibration signal;
The said signal acquisition part acquires the said vibration signal in the execution period of the said process process, The substrate processing apparatus. The substrate processing apparatus according to claim 1, further comprising an output unit for outputting a signal indicating that the state of the belt is not normal according to a result of determination by the state determination unit. 2 . The processing unit according to claim 1 , wherein the processing control unit executes, in the second processing, a displacement processing for displacing the holding unit along the first direction by the driving unit,
The said signal acquisition part acquires the said vibration signal according to the vibration of the said belt which generate|occur|produces by the displacement in the said displacement process after the said displacement process is complete|finished. The substrate processing apparatus according to claim 3, wherein the state determination unit determines the state of the belt based on the vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed after the displacement processing is finished. 5. The method of claim 4, wherein the driving unit further comprises two pulleys over which at least a portion of the belt is spanned,
The measuring unit is provided adjacent to a portion of the belt disposed between the two pulleys,
The said predetermined time is set according to the distance between the said measurement unit and one of the said two pulleys, the distance to the said measurement unit is short, and the said measurement unit. The method according to claim 3, wherein the driving unit further comprises: a first pulley and a second pulley over which at least a portion of the belt spans; and a motor rotating the first pulley to move the belt,
The measurement unit is disposed in the vicinity of the first pulley,
The processing control unit displaces the holding unit by the driving unit in a direction from the second pulley toward the first pulley in the displacement processing. The method according to claim 6, wherein the driving unit further comprises a slider moving together with the holding unit;
the slider is connected to the belt so as to be movable between the first pulley and the second pulley;
along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley are arranged in this order. The method according to claim 7, wherein the processing control unit repeatedly executes the displacement processing in the second processing,
The signal acquisition unit acquires the vibration signal corresponding to the vibration of the belt generated according to the displacement in the displacement processing for each displacement processing,
The stop position of the holding part is set to a different position for each displacement process,
The said state determination part determines the state of the said belt also based on the said stop position set for each said displacement process, The substrate processing apparatus. 9. The method according to any one of claims 1 to 8, wherein the conveying unit further has a second driving unit for displacing the holding unit in a second direction,
In the second process, the processing control unit includes a first displacement process for displacing the holding unit by the driving unit in the first direction, and a first displacement process for displacing the holding unit by the second driving unit in the second direction. performing a second displacement process for displacing;
The signal acquisition unit acquires the vibration signal according to the vibration of the belt generated according to the displacement in the first displacement processing in a period overlapping with at least a part of an execution period of the second displacement processing. Device. The method according to any one of claims 1 to 4, wherein the driving unit,
a first pulley and a second pulley over which at least a portion of the belt spans and arranged in the first direction;
a motor for moving the belt by rotating the first pulley;
Further comprising a slider moving together with the holding portion,
the slider is connected to the belt so as to be movable between the first pulley and the second pulley;
along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley are arranged in this order. The method according to any one of claims 1 to 4, wherein the driving unit,
a first pulley and a second pulley over which at least a portion of the belt spans and arranged in the first direction;
Further comprising a slider moving together with the holding portion,
the slider is connected to the belt so as to be movable between the first pulley and the second pulley;
along the movement path of the belt, the measurement unit, the first pulley, the slider, and the second pulley are arranged in this order. A process comprising: a first process in which a processing unit sequentially performs predetermined processing on a plurality of substrates; and a second process in which each of the plurality of substrates is carried in and out of the processing unit by a conveying unit including a belt executing processing;
acquiring, from a measurement unit provided close to the belt, a vibration signal according to the vibration of the belt derived from the operation of the conveying unit;
determining the condition of the belt based on the vibration signal;
Acquiring the vibration signal includes acquiring the vibration signal in an execution period of the process processing.

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