CN113433797A - Substrate processing apparatus and substrate processing method - Google Patents

Substrate processing apparatus and substrate processing method Download PDF

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Publication number
CN113433797A
CN113433797A CN202110274735.3A CN202110274735A CN113433797A CN 113433797 A CN113433797 A CN 113433797A CN 202110274735 A CN202110274735 A CN 202110274735A CN 113433797 A CN113433797 A CN 113433797A
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China
Prior art keywords
unit
conveyor belt
pulley
vibration
shift
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CN202110274735.3A
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Chinese (zh)
Inventor
牧准之辅
寺本聪宽
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/02—Belt- or chain-engaging elements
    • B65G23/04—Drums, rollers, or wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/905—Control arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/12—Measuring characteristics of vibrations in solids by using direct conduction to the detector of longitudinal or not specified vibrations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02—Control or detection
    • B65G2203/0266—Control or detection relating to the load carrier(s)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manipulator (AREA)

Abstract

The invention provides a substrate processing apparatus and a substrate processing method capable of maintaining productivity and checking the state of a conveyor belt. The substrate processing apparatus includes: a processing unit for performing a predetermined process on the substrate; a conveying unit having a holding portion that holds a substrate and a driving portion that includes a conveyor belt and displaces the holding portion in the 1 st direction by moving the conveyor belt; a measuring unit capable of acquiring a vibration signal corresponding to vibration of the conveyor belt caused by displacement of the holding portion; and a control unit. The control unit includes: a process control unit for performing a process including a1 st process for sequentially performing a predetermined process on a plurality of substrates including the substrate by the processing unit and a 2 nd process for carrying in and out each of the plurality of substrates by the processing unit by the transport unit; a signal acquisition unit that acquires a vibration signal from the measurement unit; and a state determination section that determines a state of the conveyor belt based on the vibration signal. The signal acquisition section acquires a vibration signal when performing a process.

Description

Substrate processing apparatus and substrate processing method
Technical Field
The present invention relates to a substrate processing apparatus and a substrate processing method.
Background
Patent document 1 discloses a method for measuring tension of a strip-shaped plate, including: a1 st step of measuring a pressure fluctuation of air generated by vibration of the belt-shaped plate; a 2 nd step of extracting the natural frequency of the strip plate; and a3 rd step of obtaining the tension of the belt-like plate based on the extracted natural frequency.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2005-337846
Disclosure of Invention
Technical problem to be solved by the invention
In a substrate processing apparatus that performs a predetermined process on a substrate, the substrate may be conveyed by a conveying unit having a conveyor belt. The invention provides a substrate processing apparatus and a substrate processing method capable of maintaining productivity and checking the state of a conveyor belt.
Technical solution for solving technical problem
A substrate processing apparatus of an aspect of the present invention includes: a processing unit for performing a predetermined process on the substrate; a conveying unit having a holding portion that holds a substrate, and a driving portion that includes a conveyor belt and displaces the holding portion in the 1 st direction by moving the conveyor belt; a measuring unit which is provided in a state of being close to the conveyor belt and can acquire a vibration signal corresponding to the vibration of the conveyor belt generated by the displacement of the holding portion; and a control unit that controls the processing unit, the conveying unit, and the measuring unit. The control unit includes: a process control unit for performing a process including a1 st process for sequentially performing a predetermined process on a plurality of substrates including the substrate by the processing unit, and a 2 nd process for carrying in and out each of the plurality of substrates by the processing unit by the transport unit; a signal acquisition unit that acquires a vibration signal from the measurement unit; and a state determination section that determines a state of the conveyor belt based on the vibration signal. The signal acquisition section acquires a vibration signal during execution of the process.
Effects of the invention
According to the present invention, it is possible to provide a substrate processing apparatus and a substrate processing method capable of maintaining productivity and checking the state of a conveyor belt.
Drawings
Fig. 1 is a perspective view schematically showing an example of a substrate processing system.
Fig. 2 is a schematic diagram showing an example of the coating and developing apparatus.
Fig. 3 is a plan view schematically showing an example of the conveyance unit.
Fig. 4 is a side view schematically showing an example of the conveyance unit.
Fig. 5 (a) is a schematic diagram showing an example of the inside of the horizontal driving section. Fig. 5 (b) is a schematic diagram showing an example of the measurement unit.
Fig. 6 (a) is a schematic view showing an example of the inside of the elevation driving unit. Fig. 6 (b) is a schematic diagram showing an example of the inside of the horizontal driving section.
Fig. 7 is a block diagram showing an example of a functional configuration of the control device.
Fig. 8 is a block diagram showing an example of a hardware configuration of the control device.
Fig. 9 is a flowchart showing an example of a substrate processing method.
Fig. 10 is a diagram showing an example of a processing sequence of the conveyance operation and the belt inspection.
Fig. 11 is a flowchart showing an example of the belt inspecting method.
Fig. 12 (a) is a graph showing an example of a vibration signal corresponding to the vibration of the conveyor belt. Fig. 12 (b) is a graph showing an example of the result of the spectrum analysis of the vibration signal.
Description of the reference numerals
2 … … coating and developing device, 30 … … horizontal driving part, 36a, 36b, 36c, 36d … … pulley, 38 … … transmission belt, 50 … … horizontal driving part, 56a, 56b … … pulley, 58 … … transmission belt, 62 … … motor, 70 … … lifting driving part, 76a, 76b … … pulley, 78 … … transmission belt, 82 … … motor, 100 … … control device, 130, 150, 170 … … measuring unit, 202 … … processing control part, 212 … … signal acquiring part, 220 … … state judging part, 222 … … output part, W … … workpiece, U1 … … liquid processing unit, U2 … … heat processing unit and A3 … … conveying unit.
Detailed Description
Various exemplary embodiments will be described below.
An exemplary embodiment of a substrate processing apparatus includes: a processing unit for performing a predetermined process on the substrate; a conveying unit having a holding portion that holds a substrate, and a driving portion that includes a conveyor belt and displaces the holding portion in the 1 st direction by moving the conveyor belt; a measuring unit which is provided in a state of being close to the conveyor belt and can acquire a vibration signal corresponding to the vibration of the conveyor belt generated by the displacement of the holding portion; and a control unit that controls the processing unit, the conveying unit, and the measuring unit. The control unit includes: a process control unit for performing a process including a1 st process for sequentially performing a predetermined process on a plurality of substrates including the substrate by the processing unit, and a 2 nd process for carrying in and out each of the plurality of substrates by the processing unit by the transport unit; a signal acquisition unit that acquires a vibration signal from the measurement unit; and a state determination section that determines a state of the conveyor belt based on the vibration signal. The signal acquisition section acquires a vibration signal during execution of the process.
In the substrate processing apparatus, a vibration signal corresponding to vibration of the conveyor belt is acquired during execution of the process, and the state of the conveyor belt is determined based on the vibration signal. In this apparatus, it is not necessary to stop the process treatment by the substrate processing apparatus in order to determine the state of the conveyor belt, and therefore it is possible to inspect the state of the conveyor belt while maintaining productivity.
The substrate processing apparatus may further include an output unit that outputs a signal indicating that the state of the conveyor belt is abnormal, based on a determination result of the state determination unit. In this case, when it is determined that the state of the conveyor belt is abnormal, a process different from the case where the state of the conveyor belt is normal can be executed.
The process control unit may execute a shift process of shifting the holding unit in the 1 st direction by the driving unit in the 2 nd process. After the shift processing is completed, the signal acquisition unit may acquire a vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the shift processing. By acquiring the vibration signal after the shift processing is completed, the influence of external disturbance included in the vibration signal can be reduced.
The state determination unit may determine the state of the conveyor belt based on a vibration signal corresponding to the vibration of the conveyor belt after a predetermined time has elapsed from the end of the shift processing. In this case, the influence of external disturbance included in the vibration signal can be further reduced.
The drive unit may further include 2 pulleys on which at least a part of the conveyor belt is mounted. It is also possible that the measuring unit is arranged close to the part of the conveyor belt arranged between the 2 pulleys. The prescribed time may be set based on the distance between the one of the 2 pulleys that is closer to the measurement unit and the measurement unit. Since the time until the vibration of the conveyor belt subsides depends on the length of the conveyor belt between the fixed end and the close position of the measuring unit, in the above configuration, the state can be appropriately determined from the vibration of the conveyor belt.
The driving unit may further include: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted; and a motor for rotating the 1 st pulley to move the conveyor belt. The measuring unit may be disposed in the vicinity of the 1 st sheave. The process control unit may shift the holding unit in a direction from the 2 nd sheave to the 1 st sheave by the driving unit in the shift process. In this case, a compressive force is applied to a part of the conveyor belt between the member coupled to the holding portion and the 1 st pulley in association with the stop of the holding portion. Therefore, vibration of a part of the conveyor belt becomes large, and a vibration signal is easily obtained.
The driving unit may further include a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the 1 st pulley and the 2 nd pulley. The 1 st pulley, the measuring unit, the slider, and the 2 nd pulley are arranged in this order along the moving path of the conveyor belt. In this case, in a part of the conveyor belt between the 1 st pulley and the slider, vibration accompanying movement of the slider becomes large, and therefore, it is easy to acquire a vibration signal.
The process control unit may repeat the shift process in the 2 nd process. The signal acquisition unit may acquire, for each shift process, a vibration signal corresponding to vibration of the conveyor belt caused by the shift in the shift process. The stop position of the holding portion may be set to a different position for each shift process. The state determination unit may determine the state of the conveyor belt based on the stop position set for each shift process. In this case, even if the stop positions are different, the stop positions for each shift process are added, and therefore the state of the conveyor belt can be appropriately determined.
The transport unit may further include a 2 nd driving unit that displaces the holding unit in the 2 nd direction. The process control unit may execute, in the 2 nd process: a1 st shift process of shifting the holding portion in a1 st direction by the driving portion; and a 2 nd shift process of shifting the holding portion in the 2 nd direction by the 2 nd driving portion. The signal acquisition unit may acquire the vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the 1 st shift process in a period overlapping at least a part of the execution period of the 2 nd shift process. In this case, since the operation of the transport unit and the inspection of the conveyor are performed at least partially overlapping with each other, the influence of the inspection of the conveyor on the processing including the operation of the transport unit can be suppressed.
The driving unit may further include: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in a1 st direction; a motor for moving the conveyor belt by rotating the 1 st pulley; and a slider moving together with the holding portion. The slider may be connected to the belt so as to be movable between the 1 st pulley and the 2 nd pulley. The 1 st pulley, the measuring unit, the slider, and the 2 nd pulley may be arranged in this order along the moving path of the conveyor belt. In this case, in a part of the conveyor belt between the 1 st pulley and the slider, vibration accompanying movement of the slider becomes large, and therefore, it is easy to acquire a vibration signal.
The driving unit may further include: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in a1 st direction; and a slider moving together with the holding portion. The slider may be connected to the belt so as to be movable between the 1 st pulley and the 2 nd pulley. The measuring unit, the 1 st pulley, the slider, and the 2 nd pulley may be arranged in this order along the moving path of the conveyor belt. In this case, the external disturbance applied from the slider at a portion of the conveyor belt where the measuring unit approaches is mitigated by the 1 st pulley, and the influence of the external disturbance included in the vibration signal can be reduced.
An exemplary embodiment substrate processing method includes: a step of performing process treatments including a1 st treatment in which a predetermined treatment is sequentially performed on the plurality of substrates by the treatment unit, and a 2 nd treatment in which each of the plurality of substrates of the treatment unit is carried in and out by a transport unit including a conveyor belt; a step of acquiring a vibration signal corresponding to vibration of the conveyor belt generated by an operation of the conveying unit from a measuring unit provided near the conveyor belt; and a step of determining a state of the conveyor belt based on the vibration signal, the step of acquiring the vibration signal including a step of acquiring the vibration signal during execution of the process treatment. In this substrate processing method, the state of the conveyor belt can be checked while maintaining productivity, as in the substrate processing apparatus described above.
An embodiment will be described below with reference to the drawings. In the description, the same elements or elements having the same function are denoted by the same reference numerals, and redundant description thereof is omitted. A rectangular coordinate system defined by an X-axis, a Y-axis, and a Z-axis is shown in a portion of the drawings. In the following embodiments, the Z axis corresponds to the vertical direction, and the X axis and the Y axis correspond to the horizontal direction.
[ substrate processing System ]
The substrate processing system 1 shown in fig. 1 is a system for forming a photosensitive coating film on a workpiece W, exposing the photosensitive coating film, and developing the photosensitive coating film. The workpiece W to be processed is, for example, a substrate or a substrate in a state where a film, a circuit, or the like is formed by performing a predetermined process. The substrate included in the workpiece W is, for example, a silicon-containing wafer. The workpiece W (substrate) may be formed in a circular shape. The workpiece W to be processed may be a glass substrate, a mask substrate, an FPD (Flat Panel Display), or the like, or may be an intermediate obtained by subjecting such a substrate or the like to a predetermined process. The photosensitive coating film is, for example, a resist film.
The substrate processing system 1 includes a coating and developing apparatus 2 and an exposure apparatus 3. The coating and developing apparatus 2 is an apparatus for forming a resist film (photosensitive coating film) on a workpiece W. The exposure apparatus 3 is an apparatus that exposes a resist film formed on a workpiece W (substrate). Specifically, the exposure apparatus 3 irradiates the portion of the resist film to be exposed with energy rays by a method such as liquid immersion exposure. The coating and developing apparatus 2 performs a process of coating a resist (chemical solution) on the surface of the workpiece W to form a resist film before the exposure process by the exposure apparatus 3, and performs a developing process of the resist film after the exposure process.
(substrate processing apparatus)
Next, the configuration of the coating and developing apparatus 2 will be described as an example of the substrate processing apparatus. As shown in fig. 1 and 2, the coating and developing apparatus 2 includes a carrier block 4, a process block 5, an interface block 6, and a control device 100 (control unit).
The carrier block 4 performs introduction of the work W into the coating and developing apparatus 2 and discharge of the work W from the coating and developing apparatus 2. For example, the carrier block 4 has a plurality of carriers C capable of supporting the workpiece W, and a conveying unit a1 including a transfer arm is incorporated therein. The carrier C receives a plurality of circular workpieces W, for example. The transfer unit a1 takes out the workpiece W from the carrier C and delivers it to the processing block 5, and receives the workpiece W from the processing block 5 and returns it into the carrier C. The processing block 5 has processing modules 11, 12, 13, 14.
The processing module 11 incorporates a liquid processing unit U1, a heat processing unit U2, and a transfer unit A3 that transfers the workpiece W to these units. The process module 11 forms an underlying film on the surface of the workpiece W through the liquid process unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a processing liquid for forming a lower layer film to the workpiece W. The heat treatment unit U2 performs various heat treatments accompanied by formation of an underlayer film.
The processing module 12 incorporates a liquid processing unit U1, a heat processing unit U2, and a transfer unit A3 that transfers the workpiece W to these units. The process module 12 forms a resist film on the underlying film through the liquid process unit U1 and the heat process unit U2. The liquid processing unit U1 applies a processing liquid (resist) for forming a resist film on the underlayer film. The heat treatment unit U2 performs various heat treatments accompanied by the formation of a resist film.
The processing module 13 incorporates a liquid processing unit U1, a heat processing unit U2, and a transfer unit A3 that transfers the workpiece W to these units. The process module 13 forms an upper layer film on the resist film through the liquid process unit U1 and the heat process unit U2. The liquid processing unit U1 applies a processing liquid for forming an upper layer film on the resist film. The heat treatment unit U2 performs various heat treatments accompanied by formation of an upper layer film.
The processing module 14 incorporates a liquid processing unit U1, a heat processing unit U2, and a transfer unit A3 that transfers the workpiece W to these units. The process module 14 performs the developing process of the resist film subjected to the exposure process and the heat treatment accompanied by the developing process by the liquid processing unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a developing solution to the surface of the exposed workpiece W, and then washes the surface with a rinse solution to perform a developing process of the resist film. The heat treatment unit U2 performs various heat treatments along with the development treatment. Specific examples of the heat treatment include a heat treatment before development treatment (PEB: Post Exposure Bake), a heat treatment after development treatment (PB: Post Bake ()), and the like.
A shelf unit U10 is provided on the carrier block 4 side in the processing block 5. The shelving unit U10 is divided into a plurality of small chambers side by side in the up-down direction. A conveying unit a7 including a lift arm is provided in the vicinity of the rack unit U10. The transfer unit a7 lifts and lowers the workpieces W between the cells of the rack unit U10.
A shelf unit U11 is provided on the interface block 6 side in the processing block 5. The shelving unit U11 is divided into a plurality of small chambers side by side in the up-down direction. Since the rack units U10 and U11 stand by the workpiece W to perform the next process on the workpiece W (function as buffers), these rack units U10 and U11 also correspond to processing units that perform processes on the workpiece W.
The interface block 6 transfers the workpiece W to and from the exposure apparatus 3. For example, the interface block 6 has a transfer unit A8 including a transfer arm built therein and is connected to the exposure apparatus 3. The conveyance unit A8 delivers the workpiece W placed on the rack unit U11 to the exposure apparatus 3. The conveying unit A8 receives the workpiece W from the exposure apparatus 3 and returns it to the rack unit U11.
(transporting unit)
Next, an example of the conveyance unit a3 in the process module 12 will be described with reference to fig. 3 and 4. The conveying unit a3 conveys the workpiece W in a state of holding the workpiece W within the processing module 12. The conveyance unit a3 conveys the workpiece W between a plurality of processing units included in the processing module 12. In the process module 12 illustrated in fig. 3, 2 liquid process units U1 and 2 heat treatment units U2 are arranged side by side in the horizontal direction.
In the present invention, the direction from the heat treatment unit U2 to the liquid treatment unit U1 is referred to as "positive Y-axis direction", and the direction from the liquid treatment unit U1 to the heat treatment unit U2 is referred to as "negative Y-axis direction". The direction from the transport unit A3 to the liquid treatment unit U1 (or the heat treatment unit U2) is set to the "X-axis positive direction", and the direction from the liquid treatment unit U1 (the heat treatment unit U2) to the transport unit A3 is set to the "X-axis negative direction". The vertical upward direction is referred to as the "positive Z-axis direction", and the vertical downward direction is referred to as the "negative Z-axis direction". Any direction including the positive direction and the negative direction of each axis is abbreviated as "X-axis direction" or the like.
The conveyance unit a3 includes, for example, the holding arm 20, the horizontal driving units 30 and 50, and the elevation driving unit 70.
The holding arm 20 (holding portion) is configured to be able to hold the workpiece W. The holding arm 20 holds the workpiece W such that the front Wa of the workpiece W faces upward. The front side Wa is a surface on which a coating film of a resist is formed in the liquid processing unit U1. The holding arm 20 may be formed so as to surround the peripheral edge of the workpiece W and support the peripheral edge of the rear surface of the workpiece W on the side opposite to the front surface Wa. The conveyance unit a3 carries the workpiece W into and out of the processing unit such as the liquid processing unit U1 by displacing the holding arm 20 holding the workpiece W. That is, the conveying unit a3 feeds the workpiece W into one processing unit by displacing the holding arm 20, and feeds the workpiece W out of the processing unit by displacing the holding arm 20. The conveyance unit a3 may be configured to carry in and out a plurality of workpieces W to and from one processing unit.
The horizontal driving unit 30 is configured to be able to displace the holding arm 20 in one horizontal direction. The horizontal driving unit 30 is, for example, an actuator configured to be able to reciprocate the holding arm 20 in one horizontal direction by a power source such as a motor. As shown in fig. 4, the conveyance unit a3 further includes a rotary drive unit 46 for supporting the horizontal drive unit 30, and a base 48. The rotary drive unit 46 is, for example, a rotary actuator configured to be able to rotate the horizontal drive unit 30 about a vertical rotation axis by a power source such as a motor. The horizontal driving section 30 is rotated by the rotation driving section 46, whereby the moving direction of the holding arm 20 based on the horizontal driving section 30 is changed.
For example, the horizontal driving unit 30 shown in fig. 4 is disposed by the rotation driving unit 46 so as to reciprocate the holding arm 20 in the X-axis direction. In this arrangement, the horizontal drive unit 30 moves the holding arm 20 in the positive X-axis direction and moves the holding arm 20 in the negative X-axis direction. The holding arm 20 is moved in the X-axis direction (either the positive X-axis direction or the negative X-axis direction) by the horizontal driving unit 30, and the workpiece W held by the holding arm 20 is moved in the X-axis direction (the 1 st direction). The horizontal driving portion 30 is formed to extend in a direction (for example, X-axis direction) in which the holding arm 20 moves. The details of the driving mechanism of the horizontal driving unit 30 will be described later. The base 48 supports the rotary drive unit 46 and the horizontal drive unit 30. The rotation driving portion 46 is provided on a base 48, and the base 48 is formed to extend in the X-axis direction, for example. One end portion (for example, each of both side surfaces of the one end portion) of the base 48 in the X-axis negative direction is connected to the elevation driving portion 70.
The elevation drive unit 70 is configured to be able to displace the holding arm 20 in the vertical direction (the Z-axis direction shown in the figure). The elevation driving unit 70 is an actuator configured to reciprocate the holding arm 20 in the Z-axis direction (1 st direction) by a power source such as a motor, for example. The elevation drive unit 70 supports the base 48, for example, and moves the base 48 in the positive Z-axis direction and the base 48 in the negative Z-axis direction. The elevation drive unit 70 moves the base 48 in the Z-axis direction, and thereby the holding arm 20 (workpiece W) also moves in the Z-axis direction. The elevation drive unit 70 is formed to extend in the Z-axis direction in which the base 48 (the holding arm 20) is moved. The details of the elevation driving unit 70 will be described later.
Returning to fig. 3, the horizontal driving unit 50 is configured to displace the holding arm 20 in one horizontal direction (the illustrated Y-axis direction). The horizontal driving unit 50 is an actuator configured to reciprocate the holding arm 20 in the Y-axis direction (1 st direction) by a power source such as a motor, for example. The horizontal driving unit 50 supports the elevation driving unit 70, for example, and moves the elevation driving unit 70 in the positive Y-axis direction and moves the elevation driving unit 70 in the negative Y-axis direction. The horizontal driving unit 50 moves the elevation driving unit 70 in the Y-axis direction, and thereby the holding arm 20 (workpiece W) also moves in the Y-axis direction. The horizontal driving portion 50 is formed to extend in the Y-axis direction. The details of the driving mechanism of the horizontal driving unit 50 will be described later.
(details of the measuring unit and the respective driving units)
Next, referring to fig. 5 and 6, a description will be given of a measuring unit used for inspecting the state of the conveyor belt included in each driving unit, together with the detailed structure of each driving unit. The coating and developing apparatus 2 further includes measurement units 130, 150, 170.
The measuring unit 130 is used to check the state of the conveyor belt of the horizontal driving part 30. The measuring unit 150 is used to check the state of the conveyor belt of the horizontal driving part 50. The measuring unit 170 is used to check the state of the conveyor belt of the elevation driving part 70. In the present invention, the inspection of the state of the conveyor belt means to inspect whether or not the conveyor belt can normally operate. For example, the conveyor (driving unit) may not operate normally due to deterioration of the conveyor with time, a failure in adjustment of the conveyor, and the like, and in order to prevent such a situation, inspection of the conveyor is performed using each measuring unit. Hereinafter, the driving unit and the measuring unit will be described for each axis.
< Y-axis direction >
Fig. 5 (a) shows a detail of the horizontal driving unit 50 for displacing the holding arm 20 in the Y-axis direction. The horizontal driving unit 50 includes a belt disposed so that at least a part thereof extends in the Y-axis direction, and the holding arm 20 is displaced in the Y-axis direction by moving the belt. The horizontal driving section 50 has, for example, a housing 52, pulleys 56a, 56b, a belt 58, a motor 62, and a slider 54.
The housing 52 accommodates the elements included in the horizontal driving unit 50. The housing 52 is formed so as to extend in the Y-axis direction. An opening 52a (see fig. 4) is provided in a wall of the casing 52 that faces the plurality of process units. A part of the slider 54 protrudes from the opening 52a to the outside of the housing 52.
As shown in fig. 5 (a), the pulley 56a (1 st pulley) and the pulley 56b (2 nd pulley) are arranged in line in the Y-axis direction. The pulleys 56a and 56b are disposed at respective end portions in the Y axis direction in the housing 52, for example. Pulleys 56a, 56b are provided in the housing 52 so as to be rotatable about a rotation axis in the X-axis direction, respectively. The belt 58 is mounted on the pulleys 56a, 56 b. The conveyor belt 58 is, for example, a timing conveyor belt. The motor 62 is a power source that generates rotational torque. The motor 62 is, for example, a servo motor. The motor 62 is connected to the pulley 56a to rotate the pulley 56 a. When torque (driving force) generated by the motor 62 is transmitted to the pulley 56a, the belt 58 bridged over the pulleys 56a, 56b moves in the Y-axis direction.
The slider 54 is formed so as to extend in the X-axis direction as shown in fig. 4, for example. The base end portion (the end portion farther from the process unit) of the slider 54 in the X-axis direction is connected to the conveyor belt 58 inside the housing 52. A front end portion (one end portion closer to the process unit) of the slider 54 in the X-axis direction protrudes out of the housing 52 through the opening 52 a. A lower end portion of the elevation driving portion 70 is connected to a front end portion of the slider 54, for example. In this manner, the slider 54 is connected to the holding arm 20 via another member and moves together with the holding arm 20. When the conveyor 58 is moved in the Y-axis direction by the torque generated by the motor 62, the slider 54 (the elevation driving section 70) connected to the conveyor 58 is also reciprocated in the Y-axis direction, and as a result, the holding arm 20 and the workpiece W are also moved in the Y-axis direction.
In the horizontal driving unit 50 described above, the slider 54 is configured to be movable between the pulleys 56a and 56 b. In a state where the slider 54 is disposed at one position between the pulleys 56a, 56b, the conveyor belt 58 includes: a1 st portion 58a extending in the Y-axis direction and connecting between the pulleys 56a, 56 b; and a 2 nd portion 58b extending in the Y-axis direction and connecting between the pulleys 56a, 56 b. The 1 st segment 58a and the 2 nd segment 58b are arranged in parallel with each other in the Z-axis direction. In the example shown in fig. 5 (a), the slider 54 is connected to the 1 st portion 58 a. Hereinafter, in the 1 st portion 58a, a distance between the pulley 56a and the slider 54 is referred to as a "string 64 a", and a distance between the slider 54 and the pulley 56b is referred to as a "string 64 b".
The measuring unit 150 is configured to be able to acquire a signal (hereinafter referred to as "vibration signal") corresponding to the vibration of the conveyor belt 58 of the horizontal driving section 50. Specifically, the measurement unit 150 acquires a vibration signal corresponding to the vibration of the conveyor belt 58, which is generated along with the movement (conveying operation) of the holding arm 20 by the horizontal driving section 50. The measurement unit 150 acquires, for example, sound waves (vibration of air) generated by vibration of the conveyor belt 58. The measurement unit 150 is disposed in the conveyance unit a3 (inside the housing 52) in a state of being close to the conveyance belt 58. The measuring unit 150 may have 2 sensors (sensors 92, 94) that measure sound waves. The sensor 92 and the sensor 94 have the same function as each other.
As shown in fig. 5 (b), the sensors 92 and 94 are disposed so as to be spaced apart from the conveyor belt 58. In one example, the sensors 92 and 94 are arranged in a line in the Z-axis direction. That is, the sensor 92, the conveyor belt 58, and the sensor 94 are arranged in this order in the Z-axis direction. The sensors 92 and 94 are disposed at positions where the acoustic waves from the conveyor belt 58 can be acquired. The distance in the Z-axis direction between the sensor 92 and the conveyor belt 58 is substantially equal to the distance in the Z-axis direction between the sensor 94 and the conveyor belt 58. The sensor 92 acquires the acoustic wave SW1 propagating in the positive Z-axis direction from the conveyor belt 58, and the sensor 94 acquires the acoustic wave SW2 propagating in the negative Z-axis direction from the conveyor belt 58. In one example, the sensors 92, 94 are MEMS (Micro Electro Mechanical Systems) microphones, respectively. The measurement unit 150 (each of the sensors 92, 94) outputs an electric signal corresponding to the acoustic waves SW1, SW2 to the control device 100.
The measuring unit 150 (sensors 92, 94) is disposed in the vicinity of the pulley 56a connected to the motor 62. In one example, the measurement unit 150 is disposed at a position where the distance from the pulley 56a is equal to or less than 1/3 of the distance in the Y-axis direction between the pulley 56a and the pulley 56 b. The measuring unit 150 is disposed at the position of the head rest 56a in the chord 64a of the 1 st segment 58a, as shown in fig. 5 (a), for example. In this case, the slider 54 is configured to be movable between a position where it does not interfere with the measuring unit 150 and a position where it does not interfere with the pulley 56 b.
In the above configuration, the pulley 56a, the measuring unit 150, the slider 54, and the pulley 56b are arranged in this order along the moving path of the conveyor belt 58 (the moving track of the conveyor belt 58 accompanying the movement of the conveyor belt 58 by the motor 62). Further, the regions of the conveyor belt 58 corresponding to the 1 st and 2 nd portions 58a and 58b ( chords 64a and 64b) described above, respectively, vary depending on the position of the slider 54 in the Y-axis direction. However, the above-described positional relationship of the pulley 56a, the measuring unit 150, the slider 54, and the pulley 56b (positional relationship along the moving path of the conveyor belt 58) is established regardless of the position of the slider 54 within the moving range.
The horizontal driving unit 50 illustrated above is used, for example, when moving the workpiece W between the processing units of the processing module 12. In one example, the horizontal driving unit 50 (see fig. 3) can be used when the liquid treatment unit U1 located at the first position as counted in the positive Y-axis direction moves the workpiece W to the heat treatment unit U2 located at the third position. Specifically, in a state where the base end portion of the holding arm 20 is disposed at a position overlapping the base 48, the horizontal driving unit 50 moves the holding arm 20 from a position (a position overlapping the Y axis direction) facing the liquid processing unit U1 in the X axis direction, which is a movement start position, to a position facing the heat processing unit U2 in the X axis direction, which is a movement target position. At this time, the slider 54 shown in fig. 5 (a) moves from the pulley 56b to the pulley 56a (measuring unit 150). When the holding arm 20 is moved in the positive Y-axis direction by the horizontal driving unit 50, the slider 54 moves from the pulley 56a (measuring unit 150) to the pulley 56 b.
< Z-axis direction >
Fig. 6 (a) shows details of the elevation driving unit 70 for displacing the holding arm 20 in the Z-axis direction. Fig. 6 (a) shows one of a pair of portions of the elevation driving unit 70 that are spaced apart from the base 48 in the Y-axis direction (see fig. 3 as well). The elevation drive unit 70 includes a belt disposed so that at least a part thereof extends in the Z-axis direction, and moves the belt to displace the holding arm 20 in the Z-axis direction. The lift driving unit 70 includes, for example, a housing 72, pulleys 76a and 76b, a belt 78, a motor 82, and a slider 74.
The housing 72 accommodates the elements included in the elevation driving unit 70. The housing 72 is formed so as to extend in the Z-axis direction. An opening 72a is provided in a wall of the case 72 facing the base 48. A portion of the slider 74 protrudes from the opening 72a out of the housing 72.
The pulley 76a (1 st pulley) and the pulley 76b (2 nd pulley) are arranged in line in the Z-axis direction. The height position of the pulley 76a is lower than the height position of the pulley 76 b. The pulleys 76a and 76b are disposed at respective ends in the Z-axis direction in the housing 72, for example. The pulleys 76a, 76b are provided in the housing 72 so as to be rotatable about a rotation axis in the X-axis direction, respectively. The conveyor belt 78 is mounted on the pulleys 76a, 76 b. The conveyor belt 78 is, for example, a timing conveyor belt. The motor 82 is a power source that generates rotational torque. The motor 82 is, for example, a servo motor. The motor 82 is connected to the pulley 76a to rotate the pulley 76 a. When torque (driving force) generated by the motor 82 is transmitted to the pulley 76a, the belt 78 mounted on the pulleys 76a and 76b moves in the Z-axis direction.
The slider 74 is formed to extend in the Y-axis direction, for example, as shown in fig. 6 (a). The base end (end farther from the base 48) of the slider 74 in the Y axis direction is connected to the conveyor 78 in the housing 72. The front end portion (one end portion closer to the base 48) of the slider 74 in the Y axis direction protrudes out of the housing 72 through the opening 72 a. A side surface of one end of the base 48 is connected to a tip end of the slider 74, for example. In this manner, the slider 74 is connected to the holding arm 20 via another member and moves together with the holding arm 20. The conveyor 78 moves in the Z-axis direction by the torque generated by the motor 82, and thereby the slider 74 (base 48) connected to the conveyor 78 also reciprocates in the Z-axis direction. The slider 74 (base 48) moves in the Z-axis direction, and the holding arm 20 and the workpiece W also move in the Z-axis direction.
In the above-described elevation driving unit 70, the slider 74 is configured to be movable between the pulleys 76a and 76 b. In a state where the slider 74 is disposed at one position between the pulleys 76a, 76b, the conveyor belt 78 includes: a1 st portion 78a extending in the Z-axis direction and connecting between the pulleys 76a, 76 b; and a 2 nd portion 78b extending in the Z-axis direction and connecting between the pulleys 76a, 76 b. The 1 st portion 78a and the 2 nd portion 78b are arranged in the Y axis direction and are substantially parallel to each other. In the example shown in fig. 5 (a), the slider 74 is attached to the 1 st portion 78 a.
The measurement unit 170 is configured to be able to acquire a vibration signal according to the vibration of the conveyor belt 78 of the elevation drive unit 70. Specifically, the measurement unit 170 can acquire a vibration signal corresponding to the vibration of the conveyor belt 78 caused by the movement (conveying operation) of the holding arm 20 by the elevation drive unit 70. The measurement unit 170 acquires, for example, sound waves generated by vibration of the conveyor belt 78. The measurement unit 170 is disposed in the conveyance unit a3 (inside the housing 72) in a state of being close to the conveyance belt 78. The measurement unit 170 may also include 2 sensors (sensors 92 and 94) for measuring an acoustic wave, as in the measurement unit 150 described above.
The sensor 92 and the sensor 94 of the measuring unit 170 are disposed so as to be spaced apart from the conveyor belt 78. In one example, the sensors 92 and 94 are arranged in a line in the Y-axis direction. That is, the sensor 92, the conveyor belt 78, and the sensor 94 are arranged in this order in the Y-axis direction. The measurement unit 170 (each of the sensors 92, 94) outputs an electric signal corresponding to the acoustic waves SW1, SW2 from the conveyor belt 78 to the control device 100.
The measurement unit 170 (sensors 92, 94) may be disposed in the vicinity of the pulley 76a to which the motor 82 is connected. The measuring unit 170 is disposed in the vicinity of the pulley 76a in the 2 nd part 78b to which the slider 74 is not attached, as shown in fig. 6 (a), for example. In this case, the slider 74 is configured to be movable between a position where it does not interfere with the pulley 76a and a position where it does not interfere with the pulley 76b, because it does not interfere with the measuring unit 170. The measurement unit 170 may be disposed at a position below 1/3 where the distance from the pulley 76a is equal to the distance in the Z-axis direction between the pulley 76a and the pulley 76 b. The distance between the position (fixed position) where the measuring unit 170 is disposed and the pulley 56a may be the same as or smaller than the distance between the upper end of the slider 74 and the pulley 56a at the limit position closest to the pulley 76a in the moving range of the slider 74.
In the above configuration, the measuring unit 170, the pulley 76a, the slider 74, and the pulley 76b are arranged in this order along the moving path of the conveyor 78. Further, the regions of the conveyor belt 78 corresponding to the 1 st and 2 nd portions 78a and 78b vary depending on the position of the slider 74 in the Z-axis direction. However, the above-described positional relationship of the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b (positional relationship along the moving path of the conveyor belt 78) is established regardless of the position of the slider 74 within the moving range.
The elevation drive unit 70 described above is used, for example, when moving the holding arm 20 during transfer of the workpiece W to and from the processing unit. In one example, in a state where the base end portion of the holding arm 20 is disposed at a position not overlapping the base 48 (a state where the tip end portion of the holding arm 20 is positioned in the processing unit), the transport unit a3 moves the holding arm 20 from a height position to a position lower than the height position by the elevation driving unit 70. At this time, the slider 74 shown in fig. 6 (a) moves from the pulley 76b to the pulley 76 a. When the holding arm 20 is moved in the positive Z-axis direction by the elevation driving unit 70, the slider 74 moves from the pulley 76a to the pulley 76 b.
< X-axis direction >
Fig. 6 (b) shows the horizontal driving unit 30 that displaces the holding arm 20 in the X-axis direction. The horizontal driving unit 30 includes a belt at least a part of which is disposed along the X-axis direction, and moves the belt to displace the holding arm 20 in the X-axis direction. The horizontal drive section 30 has, for example, a housing 32, pulleys 36a, 36b, 36c, and 36d, a belt 38, a motor 42, and a slider 34.
The housing 32 houses the elements included in the horizontal driving unit 30. The housing 32 is formed so as to extend in the X-axis direction. An opening 32a is provided in an upper wall in the housing 32, for example. A part of the slider 34 protrudes from the opening 32a to the outside of the housing 32.
The pulley 36a (1 st pulley) and the pulley 36b (2 nd pulley) are arranged in line in the X-axis direction. The distance in the X-axis direction between the pulley 36a and the liquid treatment unit U1 (heat treatment unit U2) is smaller than the distance between the pulley 36b and the liquid treatment unit U1. The pulleys 36a and 36b are disposed at respective end portions in the X-axis direction in the housing 32, for example. The pulley 36c and the pulley 36d are disposed between the pulleys 36a and 36b in the X-axis direction and below the pulleys 36a and 36b in the Z-axis direction. The height position of the pulley 36c is higher than that of the pulley 36 d. In the X axis direction, the pulley 36a, the pulley 36c, the pulley 36d, and the pulley 36b are arranged in this order. The pulleys 36a, 36b, 36c, 36d are provided in the housing 32 so as to be rotatable about rotation axes in the Y-axis direction, respectively.
The conveyor belt 38 is mounted on pulleys 36a, 36b, 36c, 36 d. The conveyor belt 38 is, for example, a timing conveyor belt. The motor 42 is a power source that generates rotational torque. The motor 42 is, for example, a servo motor. The motor 42 is connected to the pulley 36d to rotate the pulley 36 d. When torque (driving force) generated by the motor 42 is transmitted to the pulley 36d, the belt 38 bridged over the pulleys 36a, 36b, 36c, 36d moves in the X-axis direction between the pulleys 36a, 36 b.
The slider 34 is formed to extend in the Z-axis direction, for example, as shown in fig. 6 (b). A root end portion (one end portion located below) of the slider 34 in the Z-axis direction is connected to the conveyor belt 38 inside the housing 32. A front end portion (one end portion located above) of the slider 34 in the Z-axis direction protrudes out of the housing 32 through the opening 32 a. A base end portion of the holding arm 20 (a portion of the holding arm 20 that does not hold the workpiece W) is connected to a tip end portion of the slider 34, for example. In this manner, the slider 34 is connected to the holding arm 20 and moves together with the holding arm 20. The conveyor belt 38 is moved in the X-axis direction by the torque generated by the motor 42, whereby the slider 34 (holding arm 20) connected to the conveyor belt 38 is also reciprocated in the X-axis direction. The slider 34 (holding arm 20) moves in the X-axis direction, whereby the workpiece W held by the holding arm 20 also moves in the X-axis direction.
In the horizontal driving unit 30 described above, the slider 34 is configured to be movable between the pulleys 36a and 36 b. In a state where the slider 34 is disposed at one position between the pulleys 36a, 36b, the conveyor belt 38 includes: a1 st portion 38a extending in the X-axis direction and connecting between the pulleys 36a, 36 b; and a 2 nd portion 38b connecting between the pulleys 36a, 36 d. The 2 nd portion 38b is inclined with respect to the 1 st portion 38a as viewed from the Y-axis direction. In the example shown in fig. 6 (b), the slider 34 is attached to the 1 st portion 38 a.
The measuring unit 130 is configured to be able to acquire a vibration signal corresponding to the vibration of the conveyor belt 38 of the horizontal driving section 30. Specifically, the measurement unit 130 acquires a vibration signal corresponding to the vibration of the conveyor belt 38, which is generated along with the movement (conveying operation) of the holding arm 20 by the horizontal driving section 30, of the conveyor belt 38. The measurement unit 130 acquires, for example, sound waves generated due to vibration of the conveyor belt 38. The measurement unit 130 is provided in the conveyance unit a3 (inside the housing 32) in a state of being close to the conveyance belt 38. The measurement unit 130 may have 2 sensors (sensors 92 and 94) for measuring the acoustic wave, as in the measurement unit 150 described above.
The sensor 92 and the sensor 94 of the measuring unit 130 are disposed so as to be spaced apart from the conveyor belt 38. In one example, the sensors 92 and 94 are arranged in a direction orthogonal to the 2 nd portion 38b of the conveyor belt 38. That is, the sensor 92, the conveyor belt 38, and the sensor 94 are arranged in this order in the direction orthogonal to the 2 nd portion 38 b. The measurement unit 130 (each of the sensors 92, 94) outputs an electric signal corresponding to the acoustic waves SW1, SW2 from the conveyor belt 38 to the control device 100.
The measurement unit 130 (sensors 92, 94) may be disposed between the pulley 36a and the pulley 36 d. The measurement unit 130 is disposed substantially at the center (near the pulley 36a in the substantially center) between the pulley 36a and the pulley 36d to which the 2 nd part 38b of the slider 34 is not connected, as shown in fig. 6b, for example. In this case, the slider 34 does not interfere with the measuring unit 130, and therefore, is configured to be movable between a position where it does not interfere with the pulley 36a and a position where it does not interfere with the pulley 36 b.
In the above configuration, the measuring unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, and 36d are arranged in this order along the moving path of the conveyor belt 38. Further, the regions of the conveyor belt 38 corresponding to the 1 st and 2 nd portions 38a and 38b vary depending on the position of the slider 34 in the X-axis direction. However, the above-described positional relationship among the measuring unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, and 36d (positional relationship along the moving path of the conveyor belt 38) is established regardless of the position of the slider 34 in the moving range.
The horizontal driving unit 30 illustrated above is used, for example, when the holding arm 20 is moved to carry the workpiece W into and out of the processing unit. In one example, the transport unit a3 moves the holding arm 20 from a position where the base end of the holding arm 20 overlaps the base 48 to a position where the base end of the holding arm 20 does not overlap the base 48 in a state where the transport unit a opposes the processing unit at the carrying-in/out destination in the X-axis direction. At this time, the slider 34 shown in fig. 6 (b) moves from the pulley 36b to the pulley 36 a. When the holding arm 20 is moved in the X-axis negative direction by the horizontal driving unit 30, the slider 34 moves from the pulley 36a to the pulley 36 b.
(control device)
Next, an example of the control device 100 will be described with reference to fig. 7 and 8. The control device 100 controls the coating and developing device 2. The control device 100 controls at least the liquid treatment unit U1, the heat treatment unit U2, the delivery unit A3, and the measurement units 130, 150, 170. The control device 100 includes, for example, a processing control unit 202 and an inspection control unit 204 as a functional configuration (hereinafter referred to as a "functional block"). The inspection control unit 204 includes a signal acquisition unit 212, a data extraction unit 214, a frequency calculation unit 216, a storage unit 218, a state determination unit 220, and an output unit 222. The processing performed by each functional block corresponds to the processing performed by the control device 100.
The process control unit 202 performs a process on a plurality of workpieces W. The process treatment is a series of treatments (for example, a series of treatments from formation of a lower layer film to a development treatment) sequentially performed in the coating and developing apparatus 2 for a predetermined period of time on the plurality of works W. The process treatment includes a1 st treatment of performing a predetermined treatment (for example, liquid treatment or heat treatment) on the plurality of workpieces W by a treatment unit such as the liquid treatment unit U1 (heat treatment unit U2). Further, the process treatment includes the 2 nd treatment of carrying in and out the plurality of works W to and from one treatment unit such as the liquid treatment unit U1 by the conveyance unit A3, respectively.
The 2 nd process includes: a displacement process of displacing the holding arm 20 in the X-axis direction by the horizontal driving section 30; a displacement process of displacing the holding arm 20 in the Y-axis direction by the horizontal driving section 50; and a displacement process of displacing the holding arm 20 in the Z-axis direction by the elevation drive section 70. In each of the 3 shift processes, there are included: a shift process of shifting the holding arm 20 in the positive direction of each axis; and a displacement process of displacing the holding arm 20 in the negative direction of each axis.
The signal acquisition unit 212 acquires vibration signals corresponding to the vibrations of the conveyor belt from the measurement units 130, 150, and 170, respectively. For example, the signal acquisition unit 212 calculates the difference between 2 electric signals corresponding to the sound waves SW1 and SW2 from the sensors 92 and 94 of the respective measurement units, thereby acquiring a vibration signal corresponding to the vibration of the conveyor belt. The signal acquisition section 212 acquires a vibration signal during execution of the process. The signal acquisition section 212 acquires the vibration signal without stopping a series of processes (operation of the apparatus) performed by the coating and developing apparatus 2, for example, during operation of the coating and developing apparatus 2. In one example, the signal acquiring unit 212 acquires a vibration signal (a vibration signal corresponding to vibration of the conveyor belt due to displacement in the displacement process) from the conveyor belt of the driving unit corresponding to the displacement process in a state where the holding arm 20 is stopped with the shaft after the displacement process of each shaft is completed.
The data extraction unit 214 extracts usage data (hereinafter referred to as "analysis data") for inspection of the conveyor belt from the vibration signal acquired by the signal acquisition unit 212. For example, the data extraction unit 214 extracts data from the vibration signal, the data being a period from the time when the 1 st predetermined time has elapsed after the end of the shift process (after the holding arm 20 is stopped) to the time when the 2 nd predetermined time has elapsed from the 1 st predetermined time. The 1 st predetermined time and the 2 nd predetermined time are set in advance to a degree that the sound wave corresponding to the vibration of the conveyor belt can be measured after the shift processing is finished. For example, the 1 st predetermined time is set to about several tens to several hundreds of milliseconds, and the 2 nd predetermined time is set to about several milliseconds to several tens of milliseconds.
The frequency calculation unit 216 calculates the frequency of the conveyor based on the analysis data extracted by the data extraction unit 214. For example, the frequency calculating unit 216 calculates a frequency spectrum by performing Fast Fourier Transform (Fast Fourier Transform) on the analysis data, and detects (calculates) a frequency having the maximum amplitude from the frequency spectrum as the frequency of the belt.
The storage unit 218 stores the frequency of the vibration of the conveyor belt calculated by the frequency calculation unit 216 for each axis. The storage unit 218 stores the frequency of the conveyor belt repeatedly calculated by the frequency calculation unit 216 for each axis for a predetermined period. The predetermined period is set in advance, and may be, for example, 1 day, 1 week, 1 month, or several months, or may be a period from the start of the operation of the coating and developing apparatus 2 to the stop of the operation for maintenance or the like.
The state determination unit 220 determines the state of the conveyor belt on an axis-by-axis basis on the vibration signal acquired by the signal acquisition unit 212. The state determination unit 220 determines whether or not the state of the conveyor belt is abnormal, for example, on an axis-by-axis basis of the calculation result of the frequency of the conveyor belt stored in the storage unit 218. In the present invention, the abnormal state of the conveyor belt includes not only a case where the conveyor belt has failed but also a case where a failure state is approached (i.e., a case where there is a high possibility that the conveyor belt cannot be operated if it is continuously used while keeping the current state).
The output unit 222 outputs a signal (hereinafter referred to as "abnormal signal") indicating that the state of the conveyor belt on each axis is abnormal, based on the determination result determined for the axis by the state determination unit 220. For example, when the state of the conveyor belt is abnormal according to the determination result of the state determination unit 220, the output unit 222 outputs an abnormal signal to a monitor for notifying an operator or the like. Alternatively, when the state of the conveyor belt is abnormal according to the determination result of the state determining unit 220, the output unit 222 outputs an abnormal signal to the process control unit 202 to stop a series of processes (process processes) performed by the coating and developing apparatus 2.
The control device 100 is constituted by one or more control computers. For example, the control device 100 has a circuit 240 shown in fig. 8. The circuit 240 has one or more processors 242, memory 244, storage 246, input-output ports 248, and timers 252. The memory 246 has a storage medium such as a hard disk that can be read by a computer. The storage medium stores a program for causing the control device 100 to execute a substrate processing method described later. The storage medium may be a removable medium such as a nonvolatile semiconductor memory, a magnetic disk, and an optical disk. The memory 244 temporarily stores a program loaded from a storage medium of the storage 246 and an operation result of the processor 242.
The processor 242 and the memory 244 work together to execute the above-described programs. The input/output port 248 performs input/output of electrical signals with the liquid processing unit U1, the delivery unit A3, the measurement units 130, 150, 170, and the like, according to instructions from the processor 242. The timer 252 measures the elapsed time by, for example, counting a standard pulse of a certain period. The hardware configuration of the control device 100 may be constituted by a dedicated logic Circuit or an ASIC (Application Specific Integrated Circuit) into which the logic Circuit is Integrated.
[ method of treating substrate ]
Next, a coating and developing process performed by the coating and developing apparatus 2 will be described as an example of a substrate processing method with reference to fig. 9. Fig. 9 is a flowchart showing an example of the coating and developing process including the exposure process, and shows a flow of the coating and developing process for 1 workpiece W. First, the process controller 202 of the control apparatus 100 controls the transfer unit a1 to transfer the workpiece W in the carrier C to the rack unit U10, and controls the transfer unit a7 to arrange the workpiece W in the cell for the process module 11.
Next, the process control unit 202 controls the process module 11 to form an underlayer film on the front side Wa of the workpiece W (step S01). In step S01, for example, the process control part 202 controls the conveying unit A3 to convey the workpiece W from the rack unit U10 to the liquid processing unit U1. Then, the process control unit 202 controls the liquid processing unit U1 to form a coating film of the processing liquid for forming the lower layer film on the front side Wa of the workpiece W. The process control section 202 controls the conveying unit a3 to convey the workpiece W on which the coating film is formed to the heat treatment unit U2. Then, the process control unit 202 controls the heat treatment unit U2 to form an underlayer film on the front side Wa of the workpiece W. The processing controller 202 then controls the transfer unit A3 to return the workpiece W on which the lower layer film has been formed to the shelf unit U10, and controls the transfer unit a7 to place the workpiece W in the chamber for the processing module 12.
Next, the process control unit 202 controls the process module 12 to form a resist film on the front side Wa of the workpiece W on which the lower layer film is formed (step S02). In step S02, the process control section 202 controls the conveying unit A3 to convey the workpieces W of the rack unit U10 to any one of the liquid processing units U1 in the process module 12, for example. Then, the process control section 202 controls the liquid processing unit U1 to form a coating film of resist on the front side Wa of the workpiece W. The process control section 202 controls the conveying unit a3 to convey the workpiece W on which the coating film of the resist is formed to the heat treatment unit U2. Then, the process control section 202 controls the heat treatment unit U2 to form a resist film on the front side Wa of the workpiece W. Thereafter, the process controller 202 controls the transfer unit A3 to return the resist film-formed workpiece W to the rack unit U10, and controls the transfer unit a7 to arrange the workpiece W in a chamber for the process module 13.
Next, the process control unit 202 controls the process module 13 to form an upper film on the front side Wa of the workpiece W on which the resist film is formed (step S03). In step S03, the process control section 202 controls the conveying unit A3 to convey the workpiece W to the liquid processing unit U1, for example. Then, the process control unit 202 controls the liquid processing unit U1 to form an application film of the processing liquid for forming the upper layer film on the front side Wa of the work W. The process control section 202 controls the conveying unit a3 to convey the workpiece W on which the coating film is formed to the heat treatment unit U2. Then, the process control unit 202 controls the heat treatment unit U2 to form an upper film on the front side Wa of the workpiece W. Thereafter, the process controller 202 controls the transfer unit a3 to transfer the workpiece W on which the upper film is formed to the rack unit U11.
Next, the process control unit 202 controls the conveying unit A8 to send out the workpiece W of the rack unit U11 to the exposure apparatus 3. Then, a control device different from the control device 100 controls the exposure device 3 to perform exposure processing on the workpiece W on which the resist film is formed (step S04). Thereafter, the processing controller 202 controls the transport unit A8 to receive the workpiece W subjected to the exposure processing from the exposure apparatus 3, and arranges the workpiece W in the cell for the processing module 14 in the shelf unit U11.
Next, the process control unit 202 controls the process module 14 to perform the development process on the workpiece W subjected to the exposure process (step S05). In step S05, for example, after the process control portion 202 controls the conveyance unit A3 to convey the workpiece W to the heat treatment unit U2, the heat treatment unit U2 is controlled to perform the pre-development heat treatment on the resist film of the workpiece W. Then, the process controller 202 controls the transport unit a3 to transport the workpiece W subjected to the heat treatment before development to the liquid treatment unit U1, and then controls the liquid treatment unit U1 to perform the development treatment on the resist film of the workpiece W.
After that, the process controller 202 controls the conveyance unit a3 to convey the workpiece W subjected to the development process to the heat treatment unit U2, and then controls the heat treatment unit U2 to perform the post-development heat treatment on the resist film of the workpiece W. Then, the process control section 202 controls the conveying unit A3 to return the workpiece W to the rack unit U10, and controls the conveying unit a7 and the conveying unit a1 to return the workpiece W to the carrier C. In the above manner, the coating and developing process for 1 workpiece W is completed.
In the substrate processing method exemplified above, the control device 100 (inspection control section 204) detects the state of the conveyor belt of each drive section in parallel with the conveyance operation (shift process) of each of the plurality of workpieces W in the series of process processes performed by the coating and developing apparatus 2. Each of the conveying operations of the workpiece W includes a shift process of the holding arm 20 in a state where the workpiece W is not held and a shift process of the holding arm 20 in a state where the workpiece W is held. After the shift processing of the holding arm 20 in the X-axis direction, the control device 100 checks the state of the conveyor belt 38 of the horizontal driving section 30 using the measuring unit 130. After the shift processing of the holding arm 20 in the Y-axis direction, the control device 100 checks the state of the conveyor belt 58 of the horizontal driving section 50 using the measuring unit 150. The control device 100 checks the state of the conveyor belt 78 of the elevation driving part 70 after the displacement process of the holding arm 20 in the Z-axis direction using the measurement unit 170.
Fig. 10 partially shows an example of a timing chart of the conveying operation (shift processing) of the holding arm 20 performed in the resist film forming processing of step S02 shown in fig. 9 and the inspection of the conveyer belt performed in association with the conveying operation. In a part of step S02, for example, the process controller 202 of the control device 100 sequentially executes a feeding operation of feeding the workpiece W out of the liquid processing unit U1, a moving operation of moving the workpiece W from the liquid processing unit U1 to the heat processing unit U2, and a feeding operation of feeding the workpiece W into the heat processing unit U2.
In the sending-out operation of sending out the workpiece W from the liquid processing unit U1, first, the "X-axis projecting-out" operation is performed. In the X-axis extending operation, the process control unit 202 of the control device 100 executes the shift process (the 1 st shift process) of shifting the holding arm 20 in the positive direction in the X-axis direction by the horizontal driving unit 30 in a state where the holding arm 20 is not holding the workpiece W and is disposed at a position facing the liquid processing unit U1 in the X-axis direction (a position overlapping in the Y-axis direction).
Then, the "Z-axis up (Z-axis up)" operation is performed. In the Z-axis raising operation, the process control unit 202 receives the workpiece W from the liquid processing unit U1 by performing a displacement process (2 nd displacement process) of displacing the holding arm 20 in the positive direction in the Z-axis direction (2 nd direction) by the elevation drive unit 70 (2 nd drive unit). The X-axis inspection is performed during a period overlapping with at least a part of the execution period of the shift process by the elevation drive unit 70. In the X-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the conveyor belt 38 of the horizontal driving unit 30 caused by the displacement in the previous displacement process (X-axis extension operation) in the positive X-axis direction, and performs the inspection (for example, calculation and storage of the frequency) of the conveyor belt 38 based on the acquired vibration signal. Thereafter, the "X-axis pull-back" operation is performed. In the X-axis retracting operation, the process control unit 202 performs a displacement process of displacing the holding arm 20 holding the workpiece W in the X-axis negative direction.
Next, in the movement operation of moving the workpiece W from the liquid processing unit U1 to the heat processing unit U2, "Y-axis operation" is performed. In the Y-axis operation, the process control unit 202 executes a shift process (1 st shift process) of shifting the holding arm 20 in the Y-axis negative direction by the horizontal driving unit 50.
Next, in the feeding operation of the workpiece W into the heat treatment unit U2, the "X-axis extension" operation is first performed. In the X-axis extending operation, the process control unit 202 executes a shift process (2 nd shift process) of shifting the holding arm 20 holding the workpiece W in the positive direction in the X-axis direction (2 nd direction) by the horizontal driving unit 30 (2 nd driving unit). The "Y-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the shift processing executed by the horizontal driving unit 30. In the Y-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the conveyor belt 58 of the horizontal driving unit 50 caused by the shift in the shift process (Y-axis operation) of the previous shift in the Y-axis negative direction, and performs the inspection of the conveyor belt 58 based on the acquired vibration signal.
Then, the "Z-axis lowering (Z-axis down)" operation is performed. In the Z-axis lowering operation, the process control unit 202 performs a displacement process of displacing the holding arm 20 in the negative direction in the Z-axis direction by the elevation drive unit 70 to deliver the workpiece W held by the holding arm 20 to the heat treatment unit U2 (the 2 nd displacement process). The X-axis inspection is performed during a period overlapping with at least a part of the execution period of the shift process executed by the elevation drive unit 70. In the X-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the conveyor belt 38 of the horizontal driving unit 30 caused by the displacement in the preceding displacement process in the positive X-axis direction (the displacement process in the positive X-axis direction in which the workpiece W is held), and performs the inspection (for example, the calculation and storage of the frequency) of the conveyor belt 38 based on the acquired vibration signal.
Thereafter, the "X-axis pull-back" operation is performed. In the X-axis retracting operation, the process control unit 202 executes a displacement process (2 nd displacement process) of displacing the holding arm 20, which does not hold the workpiece W, in the X-axis negative direction by the horizontal driving unit 30. The "Z-axis inspection" is performed during a period that overlaps with at least a part of the execution period of the displacement process executed by the elevation drive unit 70. In the Z-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the conveyor belt 78 of the elevation drive unit 70 caused by the displacement in the previous displacement process (Z-axis lowering operation) in which the displacement is performed in the Z-axis negative direction, and performs the inspection (for example, calculation and storage of the frequency) of the conveyor belt 78 based on the acquired vibration signal. In this way, the feeding operation of the workpiece W into the heat treatment unit U2 is completed.
After that, the control device 100 repeats the same conveying operation and inspection. In the above-described inspection, the inspection control unit 204 may repeat the calculation and storage of the frequency of the conveyor belt 38 of the horizontal driving unit 30 with the conveyance operation in the negative X-axis direction, and may not calculate and store the frequency of the conveyor belt 38 with the conveyance operation in the positive X-axis direction. Alternatively, the inspection control unit 204 may repeat the calculation of the frequency of the conveyor belt 38 in accordance with the conveyance operation in the positive X-axis direction, and may not calculate the frequency of the conveyor belt 38 in accordance with the conveyance operation in the negative X-axis direction. In addition, unlike the above-described example, the inspection control unit 204 may calculate the frequency of the conveyor belt 38 in the X-axis positive direction (X-axis negative direction) in the conveyance operation in either one of the state where the holding arm 20 holds the workpiece W and the state where the workpiece W is not held, and may not calculate the vibration of the conveyor belt 38 in the X-axis positive direction (X-axis negative direction) in the conveyance operation in the other state. The inspection control unit 204 may repeat the calculation of the frequency of the conveyor in the same operation (or the same operation and state) as in the X-axis direction, for the inspection associated with the conveyance operation in the Y-axis direction and the conveyance operation in the Z-axis direction.
Next, the inspection of the conveyor belt in the driving portion of one shaft will be described with reference to fig. 11 and 12. Fig. 11 is a flowchart showing an example of a process flow (inspection method) when the conveyor 38 is inspected by repeatedly calculating the frequency in the conveying operation (shift process) in the X-axis positive direction.
In this inspection method, first, the control device 100 waits until the shift processing in the positive X-axis direction is completed (step S21). In step S21, for example, the inspection control unit 204 waits until the movement of the holding arm 20 to the position where the base end of the holding arm 20 does not overlap with the base 48 is stopped. In one example, the inspection control unit 204 acquires information that the rotation of the horizontal driving unit 30 is stopped by the motor 62 from the processing control unit 202.
When it is determined in step S21 that the shift process has ended (YES in step S21), the control device 100 acquires a vibration signal corresponding to the vibration of the conveyor belt 38 caused by the shift process in the positive X-axis direction (step S22). For example, the signal acquisition unit 212 acquires the vibration signal from the measurement unit 130 during a predetermined time period that has elapsed since the end of the shift processing in the positive X-axis direction. In step S22, the process control unit 202 may perform the shift process on the axis other than the X-axis direction, or may perform the process on the workpiece W by the processing unit.
Next, the control device 100 extracts analysis data for the inspection of the conveyor belt from the vibration signal acquired by the signal acquisition unit 212 (step S23). As shown in fig. 12 (a), for example, the data extraction unit 214 extracts, from the vibration signal, data of a period of 2 nd predetermined time t2 after 1 st predetermined time t1 has elapsed since the end of the shift process (the stop time of the holding arm 20) as analysis data. The 1 st prescribed time t1 and the 2 nd prescribed time t2 are set in advance based on the time at which the sound wave generated due to the vibration of the conveyor belt caused by the displacement of the holding arm 20 can be measured. The 1 st predetermined time t1 is set to a time from the end of the shift process to the start of vibration supposed to accompany the stop of the holding arm 20 (slider) in a part of the conveyor belt where the inspection mechanism approaches. The 2 nd predetermined time t2 is set to a time period during which the vibration of the conveyor belt due to the stop of the holding arm 20 (slider) is assumed to continue.
Next, the control device 100 calculates the frequency of the vibration of the conveyor belt 38 caused by the shift processing in step S21, based on the analysis data extracted by the data extraction unit 214 (step S24). For example, the frequency calculation unit 216 calculates a frequency spectrum as shown in fig. 12 (b) by performing fast fourier transform on the analysis data. Then, the frequency calculation unit 216 calculates, as the frequency of the conveyor belt 38, a frequency having the maximum amplitude (frequency f1 in the example shown in fig. 12 b) from the calculated frequency spectrum. Next, the control device 100 (storage unit 218) stores information indicating the calculated frequency of the conveyor belt 38 (step S25).
Next, the control device 100 determines whether or not a predetermined period has elapsed from a predetermined reference time point (step S26). In step S26, for example, the control device 100 determines whether or not a predetermined period (for example, 1 day) has elapsed since the start of the operation of the coating and developing device 2. If it is determined in step S26 that the predetermined period has not elapsed (NO in step S26), control device 100 repeatedly executes steps S21 to S26. Thus, the control device 100 (inspection control unit 204) acquires a vibration signal corresponding to the vibration of the conveyor belt 38 caused by the displacement in the displacement process for each displacement process while the process control unit 202 repeatedly executes the displacement process. Then, the inspection control unit 204 calculates the frequency of the conveyor belt 38 for each shift process, and stores the calculated frequency. As a result, a plurality of measured values are stored in the storage unit 218 with respect to the frequency of the conveyor belt 38.
Next, the control device 100 calculates a frequency for determination of the state of the conveyor belt 38 (hereinafter referred to as "determination frequency") (step S27). In step S27, for example, the state determination unit 220 calculates statistical data on the measured values of the plurality of frequencies stored in the predetermined period as the determination frequency. In one example, the state determination unit 220 calculates an average value, a median, a lower limit value, an upper limit value, or a standard deviation of a plurality of measurement values regarding the frequency of the conveyor belt 38 as the determination frequency.
Next, the control device 100 (state determination unit 220) determines whether or not the determination frequency is smaller than a predetermined threshold value (step S28). The threshold value is set in advance, for example, based on a value obtained by measuring the frequency of the belt when the tension of the belt is intentionally reduced. If it is determined in step S28 that the determination frequency is lower than the threshold value (yes in step S28), the control device 100 outputs an abnormality signal indicating that the state of the conveyor belt 38 is abnormal (step S29).
In step S29, for example, the output unit 222 outputs an abnormality signal indicating that the conveyor belt 38 has failed or an abnormality signal indicating that the conveyor belt 38 is approaching a failure state. In one example, the output unit 222 outputs an abnormality signal to a monitor for notifying an operator or the like. Alternatively, the output unit 222 outputs an abnormality signal to the process control unit 202, and the process control unit 202 that receives the abnormality signal stops the process performed by the coating and developing apparatus 2. On the other hand, if it is determined that the determination frequency is equal to or greater than the threshold (no in step S28), control device 100 does not execute step S29. In the above manner, a series of processing steps relating to the inspection of the conveyor belt 38 is completed.
In the above-described flow, the inspection of the conveyor belt 38 relating to the X axis is described, but the inspection of the conveyor belt 58 relating to the Y axis and the inspection of the conveyor belt 78 relating to the Z axis may be performed in the same manner as the inspection of the conveyor belt 38.
In step S23, the 1 st predetermined time t1 for determining the extraction range of the data may be set to a different value for each axis. The 1 st prescribed time t1 may be set according to the distance between the measuring unit and one of the 2 pulleys that are closer to the measuring unit with the measuring unit in between. For example, the 1 st predetermined time t1 may be set to a longer value as the distance between the measurement unit and the pulley is longer. In the above example, the distance between the pulley 36a of the horizontal driving unit 30 in the X-axis direction and the measuring unit 130 is larger than the distance between the pulley 56a of the horizontal driving unit 50 in the Y-axis direction and the measuring unit 150, and is also larger than the distance between the pulley 76a of the vertical movement driving unit 70 in the Z-axis direction and the measuring unit 170. That is, the 1 st predetermined time t1 relating to the X-axis direction is longer than the 1 st predetermined time t1 relating to the Y-axis direction and is also longer than the 1 st predetermined time t1 relating to the Z-axis direction.
The above steps S21 to S26 are also repeated in the inspection of the conveyor belt 58 on the Y axis. In this case, the inspection control unit 204 may calculate the frequency of the vibration of the conveyor belt 58 for each shift process in which the process control unit 202 shifts the holding arm 20 in the Y-axis negative direction for a predetermined period. The movement of the holding arm 20 in the Y-axis direction differs depending on the processing unit at the transfer destination, and the stop position of the holding arm 20 (the stop position of the slider 54) differs. When the stop position of the slider 54 is different, the length of a part of the conveyor belt 58 where the measuring unit 150 is provided (the length from the slider 54 to the pulley 56 a) is different, and the frequency changes regardless of whether the state of the conveyor belt 58 is abnormal or not.
Therefore, in step S24, the frequency calculation unit 216 may correct the frequency of the conveyor belt 58 so that the calculated frequency corresponds to the frequency at the arbitrarily set reference position in the stop position, based on the stop position of the holding arm 20 (slider 54). The frequency calculation unit 216 may convert the frequency calculated from the vibration signal into a frequency at which the slider 54 is supposed to stop at the reference position, using an equation that defines the relationship between the string length, tension, and unit mass and the natural frequency of the string. In this case, the storage unit 218 stores information indicating the corrected frequency. Then, the state determination unit 220 determines the state of the conveyor belt 58 by comparing the statistical value regarding the corrected frequency with a threshold value. The threshold value is determined based on the state of the conveyor belt 58 in which the slider 54 is at the reference position. As described above, the state determination unit 220 may determine the state of the conveyor belt 58 based on the stop position set for each shift process in addition to the vibration signal obtained from the vibration of the conveyor belt 58.
The above steps S21 to S26 are also repeated in the inspection of the conveyor 78 relating to the Z axis. In this case, the inspection control unit 204 may calculate the frequency of the vibration of the conveyor belt 78 for each shift process in which the process control unit 202 shifts the holding arm 20 in the Z-axis negative direction (downward) for a predetermined period.
In the above example, the vibration signal is acquired from the end time point of the shift processing, and a part of the data of the vibration signal is extracted by the data extraction unit 214, but the vibration signal may be acquired by the signal acquisition unit 212 during a period for calculating the frequency. For example, the signal acquiring unit 212 may start the acquisition of the vibration signal at a time point when the shift process is ended, without starting the acquisition of the vibration signal at a time point when the 1 st predetermined time t1 has elapsed, and may stop the acquisition of the vibration signal at a time point when the 2 nd predetermined time t2 has elapsed from the 1 st predetermined time t 1. In this case, the extraction of a part of the data by the data extraction unit 214 may not be performed. As described above, regardless of whether or not data is extracted, the state determination unit 220 determines the state of the belt based on the vibration signal corresponding to the vibration of the belt after the 1 st predetermined time t1 has elapsed since the end of the shift processing.
[ Effect of the embodiment ]
In the coating and developing apparatus 2 and the substrate processing method described above, a vibration signal corresponding to the vibration of the conveyor belt is acquired during the execution of the process treatment, and the state of the conveyor belt is determined based on the vibration signal. In this apparatus and method, it is not necessary to stop the process treatment by the coating and developing apparatus 2 in order to determine the state of the conveyor belt, and therefore it is possible to detect the state of the conveyor belt while maintaining productivity.
When the tension (tension) of the belt is reduced due to deterioration or the like with the passage of time, there is a possibility that a failure such as a belt breakage or tooth jumping occurs. Since the tension of the conveyor belt corresponds to the frequency of the conveyor belt, the failure of the conveyor belt can be prevented by periodically checking the frequency of the conveyor belt. As a method of inspecting the state of the conveyor belt, a method of stopping a series of processes performed in the coating and developing apparatus 2 and measuring the frequency of the conveyor belt is considered. However, when the operation of the coating and developing apparatus 2 is stopped, the productivity of the work W is lowered. In contrast, in the above apparatus and method, the frequency of the conveyor belt is measured without stopping the operation of the coating and developing apparatus 2 (without stopping the process), and therefore the tension of the conveyor belt can be checked without reducing productivity.
The coating and developing apparatus 2 described above further includes an output unit 222 that outputs an abnormality signal indicating that the state of the conveyor belt is abnormal, based on the determination result of the state determination unit 220. In this case, when it is determined that the state of the conveyor belt is abnormal, a process different from that in the case where the state of the conveyor belt is normal can be executed.
In the coating and developing apparatus 2 described above, the process control unit 202 executes the shift process of shifting the holding arm 20 in the 1 st direction by the driving unit in the 2 nd process of feeding and discharging each of the plurality of works W to and from the process unit. After the shift processing is completed, the signal acquiring unit 212 acquires a vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the shift processing. In the vibration signal acquired in performing the shift processing, information of vibration due to external disturbance is contained more. In the above configuration, by acquiring the vibration signal from the end of the shift processing, the influence of the external disturbance included in the vibration signal can be reduced.
In the coating and developing apparatus 2 described above, the state determination unit 220 determines the state of the conveyor belt based on the vibration signal corresponding to the vibration of the conveyor belt after a predetermined time has elapsed from the end of the shift process. Vibration information due to external disturbance may remain in the vibration signal acquired immediately after the shift processing is completed. In the above configuration, the influence of external noise included in the vibration signal can be further reduced.
In the above-described coating and developing apparatus 2, the driving section further includes 2 pulleys on which at least a part of the conveyor belt is mounted. The measuring unit is arranged close to the part of the conveyor belt arranged between the 2 pulleys. The prescribed time may be set according to a distance between one of the 2 pulleys that is closer to the measurement unit and the measurement unit. The time until the vibration of the conveyor belt subsides depends on the length of the conveyor belt between the fixed end and the close position of the measuring unit. In the above configuration, the predetermined time varies depending on the length of the belt between the fixed end and the measuring unit, and therefore, the state can be appropriately determined based on the vibration of the belt.
In the coating and developing apparatus 2 described above, the driving section further includes: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted; and a motor for rotating the 1 st pulley to move the conveyor belt. The measuring unit is disposed in the vicinity of the 1 st sheave. The process control section displaces the holding arm 20 in the direction from the 2 nd sheave to the 1 st sheave by the drive section in the displacement process. In this case, when the holding arm 20 is stopped during the shift process, an inertial force of the slider coupled to the holding arm 20 is generated in a direction toward the 1 st sheave. Therefore, a compressive force is applied to a part of the belt between the slider and the 1 st pulley in association with the stop of the holding arm 20 (slider). Thus, the vibration of the portion of the conveyor belt including the portion of the conveyor belt and where the measuring unit is disposed becomes large, and the vibration signal is easily acquired.
In the coating and developing apparatus 2 described above, the driving section further includes a slider that moves together with the holding arm 20. The slider is movably connected to the conveyor belt between the 1 st pulley and the 2 nd pulley. The 1 st pulley, the measuring unit, the slider, and the 2 nd pulley are arranged in this order along the moving path of the conveyor belt. When the slider moves from the 2 nd pulley to the 1 st pulley, the impact accompanying the stop of the slider in the shift process becomes large in a part of the conveyor belt between the 1 st pulley and the slider, and the vibration signal is easily acquired.
In the coating and developing apparatus 2 described above, the process control unit repeatedly executes the shift process in the Y-axis direction in the 2 nd process. The signal acquisition unit 212 acquires, for each shift process, a vibration signal corresponding to the vibration of the conveyor belt 58 caused by the shift in the shift process. The stop position of the holding arm 20 is set to a different position for each shift process. The state determination unit 220 also determines the state of the conveyor belt 58 based on the stop position set for each transition process. In this case, even if the stop positions of the holding arms 20 are different, since the stop position of the holding arm 20 for each shift process is added, the state of the conveyor belt 58 can be appropriately judged.
In the above-described coating and developing apparatus 2, the conveyance unit a3 further includes the 2 nd driving portion that displaces the holding arm 20 in the 2 nd direction. The process control portion 202 executes, in the 2 nd process, the 1 st shift process of shifting the holding arm 20 in the 1 st direction by the drive portion and the 2 nd shift process of shifting the holding arm 20 in the 2 nd direction by the 2 nd drive portion. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the 1 st shift process during a period that overlaps at least a part of the execution period of the 2 nd shift process. In this case, since the operation of the transport unit a3 and the inspection of the conveyor are performed at least partially overlapping with each other, the influence on the process due to the inspection of the conveyor can be suppressed.
In the coating and developing apparatus 2 described above, the driving section further includes: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in a1 st direction; a motor for moving the conveyor belt by rotating the 1 st pulley; and a slider that moves together with the holding arm 20. The slider is connected to the conveyor belt in such a manner as to be movable between the 1 st pulley and the 2 nd pulley. The 1 st pulley, the measuring unit, the slider, and the 2 nd pulley are arranged in this order along the moving path of the conveyor belt. In this case, since vibration accompanying the movement of the slider becomes large in a part of the conveyor belt between the 1 st pulley and the slider, it is easy to acquire a vibration signal.
In the coating and developing apparatus 2 described above, the driving unit may further include: a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in a1 st direction; and a slider that moves together with the holding arm 20. The slider is connected to the conveyor belt in such a manner as to be movable between the 1 st pulley and the 2 nd pulley. The measuring unit, the 1 st pulley, the slider, and the 2 nd pulley are arranged in this order along the moving path of the conveyor belt. In this case, the external disturbance applied from the slider to a part of the conveyor belt where the measuring unit approaches is reduced by the 1 st pulley, and the influence of the external disturbance included in the vibration signal can be reduced.
[ modified examples ]
Although the embodiments of the present invention have been described in detail, various modifications may be made to the above embodiments within the scope of the present invention. The conveying unit a3 may further include: the other holding arms 20; and another horizontal driving section 30 for displacing the other holding arm 20 at least in the X-axis direction. The horizontal driving unit 30 and the other horizontal driving units 30 are arranged in a vertical direction. In this case, the coating and developing apparatus 2 may further include another measuring unit 130 for inspecting the conveyor belt 38 of another horizontal driving section 30.
The conveyance unit a3 may not have any one of the 3 driving units of the horizontal driving unit 30, the horizontal driving unit 50, and the elevation driving unit 70, or may not have any two driving units. The drive mechanism of the horizontal drive units 30 and 50 and the elevation drive unit 70 is not limited to the above example, and the drive unit may include at least a conveyor belt disposed to extend in the moving direction. In each drive unit, the belt may be mounted on 3 pulleys or 5 or more pulleys.
The measurement units 130, 150, 170 may not have any of the sensors 92, 94. In addition, when the sensors 92 and 94 are disposed so as to sandwich the conveyor belt, the vibration of the air caused by the external disturbance is in phase with the sound wave SW1 acquired by the sensor 92 and the vibration of the air caused by the conveyor belt is in opposite phase with each other in the sound wave SW2 acquired by the sensor 94. Therefore, by using the difference between the sound wave SW1 and the sound wave SW2 as the vibration signal, a signal can be obtained in which the vibrations of the air caused by the conveyor belt are mutually intensified and the vibration of the air caused by the external disturbance is reduced. The measurement units 130, 150, and 170 may be configured in any manner as long as they can acquire signals corresponding to the vibration of the conveyor belt.
The configuration positions of the measurement units 130, 150, 170 are not limited to the above examples. The measuring unit may be disposed at any position in the moving path of the conveyor belt as long as it can acquire a vibration signal corresponding to the vibration of the conveyor belt without interfering with other members (e.g., a slider). That is, in the moving path of the conveyor belt, the pulley, the slider, and the measuring unit may be arranged in an arbitrary order.
The inspection of the conveyor belts of the respective driving units may be performed in a conveying unit other than the conveying unit A3 of the process module 12, similarly to the conveying unit A3 of the process module 12. The coating and developing apparatus 2 may include a unit that performs a liquid treatment or a treatment other than a heat treatment as a treatment unit that performs a predetermined treatment on the workpiece W. For example, the coating and developing apparatus 2 may include an inspection unit for inspecting the state of the front side Wa, and the conveying unit a3 may feed and discharge the workpiece W to and from the inspection unit. The substrate processing system 1 may include: at least 1 processing unit; a conveying unit for carrying the workpiece W into and out of the processing unit; a measuring unit for inspecting the conveyor belt of the driving part included in the conveying unit; and a control unit may be constituted in any manner.

Claims (12)

1. A substrate processing apparatus, comprising:
a processing unit for performing a predetermined process on the substrate;
a conveying unit having: a holding portion for holding the substrate; and a driving portion that includes a conveyor belt and displaces the holding portion in the 1 st direction by moving the conveyor belt;
a measuring unit which is provided in a state of being close to the conveyor belt and which can acquire a vibration signal corresponding to vibration of the conveyor belt generated by displacement of the holding portion; and
a control unit that controls the processing unit, the conveying unit, and the measuring unit,
the control unit includes:
a process control section that performs a process including: a1 st process for sequentially performing the predetermined process on a plurality of substrates including the substrate by the processing unit; and 2 nd processing of carrying in and out each of the plurality of substrates of the processing unit by the conveying unit;
a signal acquisition unit that acquires the vibration signal from the measurement unit; and
a state judging section that judges a state of the conveyor belt based on the vibration signal,
the signal acquisition section acquires the vibration signal during execution of the process.
2. The substrate processing apparatus according to claim 1, wherein:
and an output unit that outputs a signal indicating that the state of the conveyor belt is abnormal, based on a determination result of the state determination unit.
3. The substrate processing apparatus according to claim 1, wherein:
the process control section executes a shift process of shifting the holding section in the 1 st direction by the driving section in the 2 nd process,
the signal acquisition unit acquires the vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the shift process after the shift process is completed.
4. The substrate processing apparatus according to claim 3, wherein:
the state determination unit determines the state of the conveyor belt based on the vibration signal corresponding to the vibration of the conveyor belt after a predetermined time has elapsed from the end of the shift processing.
5. The substrate processing apparatus according to claim 4, wherein:
the drive section further comprises 2 pulleys on which at least a portion of the conveyor belt is mounted,
the measuring unit is arranged close to a part of the conveyor belt arranged between the 2 pulleys,
the prescribed time is set according to a distance between one of the 2 pulleys that is closer to the measurement unit and the measurement unit.
6. The substrate processing apparatus according to claim 3, wherein:
the driving part further includes: a1 st pulley and a 2 nd pulley on which at least a part of the conveyor belt is erected; and a motor that rotates the 1 st pulley to move the conveyor belt,
the measuring unit is arranged in the vicinity of the 1 st sheave,
the process control portion displaces the holding portion in a direction from the 2 nd sheave to the 1 st sheave by the driving portion in the displacement process.
7. The substrate processing apparatus according to claim 6, wherein:
the driving part further includes a slider moving together with the holding part,
the slide block is connected to the conveyor belt in a manner of being capable of moving between the 1 st pulley and the 2 nd pulley,
the 1 st pulley, the measuring unit, the slider, and the 2 nd pulley are arranged in this order along a moving path of the conveyor belt.
8. The substrate processing apparatus according to claim 7, wherein:
the process control unit repeatedly executes the shift process in the 2 nd process,
the signal acquisition unit acquires the vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the shift process for each shift process,
the stop position of the holding part is set to a different position for each of the shift processes,
the state determination unit also determines the state of the conveyor belt based on the stop position set for each of the shift processes.
9. The substrate processing apparatus according to any one of claims 1 to 8, wherein:
the conveying unit further has a 2 nd driving portion that displaces the holding portion in a 2 nd direction,
the process control unit executes, in the 2 nd process: a1 st shift process of shifting the holding portion in the 1 st direction by the driving portion; and a 2 nd shift process of shifting the holding portion in the 2 nd direction by the 2 nd driving portion,
the signal acquisition unit acquires the vibration signal corresponding to the vibration of the conveyor belt caused by the shift in the 1 st shift process in a period that overlaps at least a part of the execution period of the 2 nd shift process.
10. The substrate processing apparatus according to any one of claims 1 to 4, wherein:
the driving part further includes:
a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in the 1 st direction;
a motor for moving the conveyor belt by rotating the 1 st pulley; and
a slider that moves together with the holding portion,
the slide block is connected to the conveyor belt in a manner of being capable of moving between the 1 st pulley and the 2 nd pulley,
the 1 st pulley, the measuring unit, the slider, and the 2 nd pulley are arranged in this order along a moving path of the conveyor belt.
11. The substrate processing apparatus according to any one of claims 1 to 4, wherein:
the driving part further includes:
a1 st pulley and a 2 nd pulley on which at least a portion of the conveyor belt is mounted and which are aligned in the 1 st direction; and
a slider that moves together with the holding portion,
the slide block is connected to the conveyor belt in a manner of being capable of moving between the 1 st pulley and the 2 nd pulley,
the measuring unit, the 1 st pulley, the slider, and the 2 nd pulley are sequentially arranged along a moving path of the conveyor belt.
12. A method of processing a substrate, comprising:
a step of performing a process treatment, the process treatment comprising: a1 st process of sequentially performing a predetermined process on a plurality of substrates by a processing unit, and a 2 nd process of carrying in and out each of the plurality of substrates of the processing unit by a conveying unit including a conveyor belt;
acquiring a vibration signal corresponding to vibration of the conveyor belt generated by an operation of the conveying unit from a measuring unit provided near the conveyor belt; and
a step of judging a state of the conveyor belt based on the vibration signal,
the step of acquiring a vibration signal includes the step of acquiring the vibration signal during execution of the process.
CN202110274735.3A 2020-03-23 2021-03-15 Substrate processing apparatus and substrate processing method Pending CN113433797A (en)

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JPH06218690A (en) * 1993-01-26 1994-08-09 Hitachi Ltd Damping of vibration of driving device which is magnetically joined
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JP6615698B2 (en) 2016-06-20 2019-12-04 東京エレクトロン株式会社 Conveying device, conveying method, and inspection system
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