JP2021141219A - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
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- JP2021141219A JP2021141219A JP2020038366A JP2020038366A JP2021141219A JP 2021141219 A JP2021141219 A JP 2021141219A JP 2020038366 A JP2020038366 A JP 2020038366A JP 2020038366 A JP2020038366 A JP 2020038366A JP 2021141219 A JP2021141219 A JP 2021141219A
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- semiconductor element
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- wiring
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 254
- 239000000758 substrate Substances 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000000956 alloy Substances 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 229910000881 Cu alloy Inorganic materials 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910000640 Fe alloy Inorganic materials 0.000 description 3
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- 239000004020 conductor Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- 230000005669 field effect Effects 0.000 description 2
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- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 238000000465 moulding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
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Abstract
Description
24には、下アーム(第2アーム)を構成する4つの半導体素子(第1〜第4半導体素子3a−3d)が鏡像配置されている。
(1)主電流の流れる並列数を従来の1列から2列に増やした。
(2)P端子とN端子間の電流経路ができる限り近くなるように互いに平行となるような配線パターン(回路板のレイアウト)とした。
また、図示しない絶縁紙が、正極端子17と負極端子18が積層される部分の間に挟まれている。正極端子17と負極端子18が隣接配置されているので、各端子のインダクタンスを低減できる。
上記実施の形態に記載の半導体モジュールは、平面視矩形枠状を有するケース部材の側壁部に各々の平坦部を露出したゲート端子及びソース端子と、前記ケース部材の側壁部に並列にそれぞれ配置され、上面にゲート電極及びソース電極をそれぞれ有し、電気的に並列接続された第1半導体素子及び第2半導体素子と、前記第1半導体素子と前記第2半導体素子との中間位置にそれぞれ設置され、前記ケース部材の側壁部に平行に延在したゲート中継層及びソース中継層と、前記第1半導体素子と前記第2半導体素子との間を通って前記ゲート端子の前記平坦部から前記ゲート中継層に接続された第1ゲート配線と、前記第1半導体素子と前記第2半導体素子との間を通って前記ソース端子の前記平坦部から前記ソース中継層に接続された第1ソース配線と、前記第1半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第2ゲート配線と、前記第1半導体素子の前記ソース電極から前記ソース中継層へ接続された第2ソース配線と、前記第2半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第3ゲート配線と、前記第2半導体素子の前記ソース電極から前記ソース中継層へ接続された第3ソース配線と、を備え、前記第1ゲート配線に前記第1ソース配線が隣接し、前記第2ゲート配線に前記第2ソース配線が隣接し、前記第3ゲート配線に前記第3ソース配線が隣接している。
2 :積層基板
3 :半導体素子
3a :第1半導体素子
3b :第2半導体素子
3c :第3半導体素子
3d :第4半導体素子
4a :第1配線
4b :第2配線
4c :第3配線
4d :第4配線
10 :ベース板
11 :ケース部材
12 :封止樹脂
13 :側壁部
13a :段部
14 :ゲート端子
14a :平坦部
14b :鉛直部
15 :ソース端子
15a :平坦部
15b :鉛直部
16 :出力端子
16a :出力端部
17 :正極端子
17a :正極端部
18 :負極端子
18a :負極端部
18b :負極端部
20 :絶縁板
21 :放熱板
22 :回路板
23 :第1導電層
23a :第1長尺部
23b :第1長尺部
23c :第1連結部
24 :第2導電層
24a :第1矩形部
24b :第2矩形部
25 :第3導電層
26 :第4導電層
27 :ゲート中継層
28 :ソース中継層
30 :ゲート電極
40 :第1接合部
41 :第2接合部
42 :連結部
F1 :電流経路
F2 :電流経路
G1 :第1ゲート配線
G2 :第2ゲート配線
G3 :第3ゲート配線
G4 :第4ゲート配線
G5 :第5ゲート配線
S1 :第1ソース配線
S2 :第2ソース配線
S3 :第3ソース配線
S4 :第4ソース配線
S5 :第5ソース配線
Claims (5)
- 平面視矩形枠状を有するケース部材の側壁部に各々の平坦部を露出したゲート端子及びソース端子と、
前記ケース部材の側壁部に並列にそれぞれ配置され、上面にゲート電極及びソース電極をそれぞれ有し、電気的に並列接続された第1半導体素子及び第2半導体素子と、
前記第1半導体素子と前記第2半導体素子との中間位置にそれぞれ設置され、前記ケース部材の側壁部に平行に延在したゲート中継層及びソース中継層と、
前記第1半導体素子と前記第2半導体素子との間を通って前記ゲート端子の前記平坦部から前記ゲート中継層に接続された第1ゲート配線と、
前記第1半導体素子と前記第2半導体素子との間を通って前記ソース端子の前記平坦部から前記ソース中継層に接続された第1ソース配線と、
前記第1半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第2ゲート配線と、
前記第1半導体素子の前記ソース電極から前記ソース中継層へ接続された第2ソース配線と、
前記第2半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第3ゲート配線と、
前記第2半導体素子の前記ソース電極から前記ソース中継層へ接続された第3ソース配線と、を備え、
前記第1ゲート配線に前記第1ソース配線が隣接し、前記第2ゲート配線に前記第2ソース配線が隣接し、前記第3ゲート配線に前記第3ソース配線が隣接している、半導体モジュール。 - 前記ケース部材の側壁部と前記第1半導体素子及び前記第2半導体素子を有する列との間に、前記ケース部材の側壁部に平行に配置された主配線層と、
前記第1半導体素子の前記ソース電極から前記主配線層へ接続された第1配線と、
前記第2半導体素子の前記ソース電極から前記主配線層へ接続された第2配線と、を備え、
前記第1ゲート配線は、前記第1配線又は前記第2配線に沿って近傍に配置されている、請求項1に記載の半導体モジュール。 - 前記ゲート中継層及び前記ソース中継層を挟んで前記第1半導体素子と前記第2半導体素子と対称位置にそれぞれ配置され、上面にゲート電極及びソース電極をそれぞれ有し、電気的に並列接続された第3半導体素子及び第4半導体素子と、
前記第3半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第4ゲート配線と、
前記第3半導体素子の前記ソース電極から前記ソース中継層へ接続された第4ソース配線と、
前記第4半導体素子の前記ゲート電極から前記ゲート中継層へ接続された第5ゲート配線と、
前記第4半導体素子の前記ソース電極から前記ソース中継層へ接続された第5ソース配線と、を更に備え、
前記第4ゲート配線に前記第4ソース配線が隣接し、前記第5ゲート配線に前記第5ソース配線が隣接している、請求項1又は請求項2に記載の半導体モジュール。 - 前記ゲート中継層及び前記ソース中継層を挟んで前記ケース部材の前記側壁部と対向する対向側壁部と前記第3半導体素子及び前記第4半導体素子を有する列との間に、前記ケース部材の前記対向側壁部に平行に配置された他の主配線層と、
前記第3半導体素子の前記ソース電極から前記他の主配線層へ接続された第3配線と、
前記第4半導体素子の前記ソース電極から前記他の主配線層へ接続された第4配線と、を更に備える、請求項3に記載の半導体モジュール。 - 前記第1〜第4半導体素子により、第1アームが形成され、
他の前記第1〜第4半導体素子により、第2アームが形成され、
前記第1アーム及び前記第2アームは、前記ケース部材の側壁部の延在方向に並んで配置され、
前記第1アーム側に隣接して一列に配列された第1外部端子及び第2外部端子を更に備え、
前記第1外部端子は、前記第1アームに電気的に接続される第1端部を有し、
前記第2外部端子は、前記第2アームに電気的に接続され、少なくとも2つに分岐した第2端部を有し、
前記第1端部は、一方及び他方の前記第2端部の間に配置されている、請求項4に記載の半導体モジュール。
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