JP2021131711A5 - - Google Patents
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- JP2021131711A5 JP2021131711A5 JP2020026476A JP2020026476A JP2021131711A5 JP 2021131711 A5 JP2021131711 A5 JP 2021131711A5 JP 2020026476 A JP2020026476 A JP 2020026476A JP 2020026476 A JP2020026476 A JP 2020026476A JP 2021131711 A5 JP2021131711 A5 JP 2021131711A5
- Authority
- JP
- Japan
- Prior art keywords
- slave device
- reset
- response data
- slave
- communication unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 4
- 238000000059 patterning Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020026476A JP7466329B2 (ja) | 2020-02-19 | 2020-02-19 | 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム |
CN202180013270.4A CN115053506A (zh) | 2020-02-19 | 2021-01-26 | 控制装置、系统、光刻装置、物品的制造方法、控制方法及程序 |
PCT/JP2021/002604 WO2021166565A1 (ja) | 2020-02-19 | 2021-01-26 | 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム |
TW110104157A TWI817085B (zh) | 2020-02-19 | 2021-02-04 | 控制裝置、控制系統、微影裝置、物品的製造方法、控制方法、及控制程式 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020026476A JP7466329B2 (ja) | 2020-02-19 | 2020-02-19 | 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021131711A JP2021131711A (ja) | 2021-09-09 |
JP2021131711A5 true JP2021131711A5 (zh) | 2023-02-16 |
JP7466329B2 JP7466329B2 (ja) | 2024-04-12 |
Family
ID=77390923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020026476A Active JP7466329B2 (ja) | 2020-02-19 | 2020-02-19 | 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7466329B2 (zh) |
CN (1) | CN115053506A (zh) |
TW (1) | TWI817085B (zh) |
WO (1) | WO2021166565A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4386076A1 (en) | 2021-08-12 | 2024-06-19 | Kurume University | Diagnosis device, information acquisition method, and program |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6600518B2 (ja) * | 2015-09-28 | 2019-10-30 | ルネサスエレクトロニクス株式会社 | バスシステム |
US10524219B2 (en) * | 2016-03-31 | 2019-12-31 | Mitsubishi Electric Corporation | Communication apparatus, communication system and communication method |
TWI764971B (zh) * | 2016-12-30 | 2022-05-21 | 美商英特爾公司 | 物聯網 |
-
2020
- 2020-02-19 JP JP2020026476A patent/JP7466329B2/ja active Active
-
2021
- 2021-01-26 WO PCT/JP2021/002604 patent/WO2021166565A1/ja active Application Filing
- 2021-01-26 CN CN202180013270.4A patent/CN115053506A/zh active Pending
- 2021-02-04 TW TW110104157A patent/TWI817085B/zh active
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