JP2021131711A5 - - Google Patents

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Publication number
JP2021131711A5
JP2021131711A5 JP2020026476A JP2020026476A JP2021131711A5 JP 2021131711 A5 JP2021131711 A5 JP 2021131711A5 JP 2020026476 A JP2020026476 A JP 2020026476A JP 2020026476 A JP2020026476 A JP 2020026476A JP 2021131711 A5 JP2021131711 A5 JP 2021131711A5
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JP
Japan
Prior art keywords
slave device
reset
response data
slave
communication unit
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2020026476A
Other languages
English (en)
Japanese (ja)
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JP7466329B2 (ja
JP2021131711A (ja
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Publication date
Application filed filed Critical
Priority to JP2020026476A priority Critical patent/JP7466329B2/ja
Priority claimed from JP2020026476A external-priority patent/JP7466329B2/ja
Priority to CN202180013270.4A priority patent/CN115053506A/zh
Priority to PCT/JP2021/002604 priority patent/WO2021166565A1/ja
Priority to TW110104157A priority patent/TWI817085B/zh
Publication of JP2021131711A publication Critical patent/JP2021131711A/ja
Publication of JP2021131711A5 publication Critical patent/JP2021131711A5/ja
Application granted granted Critical
Publication of JP7466329B2 publication Critical patent/JP7466329B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020026476A 2020-02-19 2020-02-19 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム Active JP7466329B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020026476A JP7466329B2 (ja) 2020-02-19 2020-02-19 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム
CN202180013270.4A CN115053506A (zh) 2020-02-19 2021-01-26 控制装置、系统、光刻装置、物品的制造方法、控制方法及程序
PCT/JP2021/002604 WO2021166565A1 (ja) 2020-02-19 2021-01-26 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム
TW110104157A TWI817085B (zh) 2020-02-19 2021-02-04 控制裝置、控制系統、微影裝置、物品的製造方法、控制方法、及控制程式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020026476A JP7466329B2 (ja) 2020-02-19 2020-02-19 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム

Publications (3)

Publication Number Publication Date
JP2021131711A JP2021131711A (ja) 2021-09-09
JP2021131711A5 true JP2021131711A5 (zh) 2023-02-16
JP7466329B2 JP7466329B2 (ja) 2024-04-12

Family

ID=77390923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020026476A Active JP7466329B2 (ja) 2020-02-19 2020-02-19 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法、およびプログラム

Country Status (4)

Country Link
JP (1) JP7466329B2 (zh)
CN (1) CN115053506A (zh)
TW (1) TWI817085B (zh)
WO (1) WO2021166565A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4386076A1 (en) 2021-08-12 2024-06-19 Kurume University Diagnosis device, information acquisition method, and program

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6600518B2 (ja) * 2015-09-28 2019-10-30 ルネサスエレクトロニクス株式会社 バスシステム
US10524219B2 (en) * 2016-03-31 2019-12-31 Mitsubishi Electric Corporation Communication apparatus, communication system and communication method
TWI764971B (zh) * 2016-12-30 2022-05-21 美商英特爾公司 物聯網

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