JP2021131711A5

JP2021131711A5 -

Info

Publication number: JP2021131711A5
Application number: JP2020026476A
Authority: JP
Filing date: 2020-02-19
Publication date: 2023-02-16
Anticipated expiration: 2040-02-19

Description

生成部１１２は、例えばスレーブ装置１２０と同じ数だけ設けられ、本実施形態では、２個のスレーブ装置１２１、１２２をそれぞれ制御対象とする２個の生成部１１２ａ、１１２ｂが設けられている。生成部１１２ａは、スレーブ装置１２１を制御対象としており、スレーブ装置１２１での処理を制御するための指示データを生成する。一方、生成部１１２ｂは、スレーブ装置１２２を制御対象としており、スレーブ装置１２２での処理を制御するための指示データを生成する。 The generators 112 are provided in the same number as the slave devices 120, for example, and in this embodiment, two generators 112a and 112b are provided for controlling two slave devices 121 and 122, respectively. The generation unit 112 a controls the slave device 121 and generates instruction data for controlling processing in the slave device 121 . On the other hand, the generation unit 112b controls the slave device 122 and generates instruction data for controlling the processing in the slave device 122 .

図５に示す露光装置１０において、本発明に係る上記のシステム１００を適用する場合、主制御部１６がマスタ装置１１０として構成されうる。また、マスクステージ制御部３１、投影制御部３２および基板ステージ制御部３３がそれぞれスレーブ装置１２０として構成されうる。第１駆動部２１、第２駆動部２２および第３駆動部２３がそれぞれユニット１３０として構成されうる。主制御部１６、マスクステージ制御部３１、投影制御部３２および基板ステージ制御部３３との間におけるデータの送受信が、フィールドネットワークを介して一定周期ごとに行われることとなる。 When applying the system 100 according to the present invention to the exposure apparatus 10 shown in FIG. Also, the mask stage controller 31 , the projection controller 32 and the substrate stage controller 33 can each be configured as the slave device 120 . The first driving section 21 , the second driving section 22 and the third driving section 23 can each be configured as a unit 130 . Data transmission/reception between the main controller 16, the mask stage controller 31, the projection controller 32, and the substrate stage controller 33 is performed at regular intervals via the field network.

Claims

A control device that controls a slave device as a master device,
a generation unit that generates instruction data for controlling processing in the slave device;
a communication unit that transmits the instruction data generated by the generation unit to the slave device and receives response data from the slave device at regular intervals via a field network;
including
When the communication unit detects that the generation unit has been reset, if response data from the slave device remains in the data frame of the field network, the communication unit discards the response data. Control device.

When the communication unit detects that the generation unit has been reset, the communication unit determines whether or not the slave device is executing the processing, and if the slave device is executing the processing, , instructing the slave device to perform a reset of the slave device.

When the execution of resetting of the slave device is instructed, the communication unit discards the response data from the slave device remaining in the data frame of the field network after the reset of the slave device is completed. 3. The control device according to claim 2, characterized in that:

4. The communication unit maintains communication with the slave device via the field network even during execution of the reset when instructed to reset the slave device. The control device according to .

The control device further includes a sequence control unit that controls the sequence of processing in the slave device,
5. The control device according to any one of claims 1 to 4, wherein the resetting of the generator is performed by the sequence controller.

6. The control device includes a plurality of generation units for controlling the plurality of slave devices, respectively, in order to control the plurality of slave devices via the field network. The control device according to any one of Claims 1 to 3.

When detecting a reset generation unit among the plurality of generation units, the communication unit identifies, among the plurality of slave devices, a slave device to be controlled by the reset generation unit, and 7. The control device according to claim 6, wherein when response data from the device remains in the data frame of said field network, said response data is discarded.

A system including a slave device and a master device that controls the slave device,
The master device
a generation unit that generates instruction data for controlling processing in the slave device;
a communication unit that transmits the instruction data generated by the generation unit to the slave device and receives response data from the slave device at regular intervals via a field network;
When the communication unit detects that the generation unit has been reset, if response data from the slave device remains in the data frame of the field network, the communication unit discards the response data. system.

A lithographic apparatus for patterning a substrate, comprising:
comprising the system of claim 8;
A lithographic apparatus, wherein the slave device controls a mechanism that performs at least part of the process of patterning the substrate.

forming a pattern on a substrate using a lithographic apparatus according to claim 9;
and processing the substrate on which the pattern is formed in the step,
A method for producing an article, comprising producing an article from the processed substrate.

A control method for controlling a slave device by a master device,
a generation step of generating, by a generation unit, instruction data for controlling processing in the slave device;
a communication control step of transmitting the instruction data generated in the generating step to the slave device and receiving response data from the slave device at regular intervals via a field network;
a discarding step of discarding the response data from the slave device if the response data remains in the data frame of the field network when the generator is reset;
A control method comprising:

A program for causing a computer as a master device to execute each step of the control method according to claim 11.