TWI817085B - Control device, control system, lithography device, article manufacturing method, control method, and control program - Google Patents

Abstract

The control device that controls a sub-device connected to the network includes: a generating unit that generates instruction data for controlling processing in the sub-device; and transmits and receives information to and from the sub-device through the network at regular intervals. The communication part of the data frame. If the communication part senses that the reset of the generation part has been executed, the response data to the instruction data sent before the reset is executed remains in the data frame. , the response data is set to an invalid state.

Description

Control device, control system, lithography device, article manufacturing method, control method, and control program

The present invention relates to a control device that controls a sub-device as a main device, a system including the same, a lithography device, a manufacturing method of an article, a control method, and a program.

In a system that transmits and receives data between a master device and a slave device, situations may arise where it is necessary to reset the master device during the operation of the system. Patent Document 1 proposes a system provided with a transfer cancellation unit that replaces the master device when the data transfer operation from the master device to the slave device cannot be executed due to a reset of the master device. device to complete the action of the sub-device.

[Prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2011-81551

In a system that transmits and receives data at regular intervals between a master device and a slave device through a field network, the generation unit provided in the master device may be reset in order to generate instruction data for the slave device. In this case, if the response data from the slave device remains in the data frame of the field network, the response data will be sent by mistake, which may make it difficult for the system to operate normally.

Therefore, an object of the present invention is to provide a technology that facilitates the normal operation of a system that transmits and receives data between a main device and a sub-device through a field network.

In order to achieve the above object, a control device as one aspect of the present invention is a control device that controls a sub-device connected to a network, and is characterized by including: a generating unit that generates instruction data for controlling processing in the sub-device. ; And through the aforementioned network, at regular intervals, the communication unit sends and receives data frames with the aforementioned sub-device. If the aforementioned communication unit senses that the reset of the aforementioned generating unit has been executed, it will When the response data to the instruction data sent before execution remains in the data frame, the response data is set to an invalid state.

Other objects or other aspects of the present invention will become apparent from the preferred embodiments described below with reference to the accompanying drawings.

The present invention can provide a technology that facilitates the normal operation of a system that transmits and receives data between a master device and a slave device through a field network, for example.

Other features and advantages of the present invention will become apparent from the following description with reference to the accompanying drawings. In the accompanying drawings, the same or identical components are designated by the same reference numerals.

The embodiment will be described in detail below with reference to the attached drawings. However, the following embodiments are not intended to limit the scope of the patent application. In the embodiments, plural features are described, but not all of the plural features are necessarily necessary for the invention, and the plural features may be combined arbitrarily. In addition, in the accompanying drawings, the same or similar components are denoted by the same reference numerals, and repeated descriptions are omitted.

<First Embodiment> An embodiment of the present invention will be described. FIG. 1 is a schematic structural diagram of a system 100 according to this embodiment including a sub-device and a main device (control device) that controls the sub-device. The system 100 of this embodiment is shown in Figure 1 and may include: a main device 110, a plurality of sub-devices 120 communicatively connected to the main device 110, and a unit 130 communicatively connected to each sub-device 120. The main device 110 and each sub-device 120 may be configured by, for example, a computer having a CPU or a memory, or may be configured by a tablet computer, or may be configured to be used in conjunction with a tablet computer. In addition, the unit 130 is a mechanism such as a servo motor, which can be controlled by the sub-device 120 .

The plurality of sub-devices 120 are communicatively connected to the main device 110 in a daisy chain manner. The main device 110 transmits and receives data with a plurality of sub-devices 120 at certain intervals through the field network 140. In addition, the plurality of sub-devices 120 respectively control the plurality of units 130 according to the data received from the main device 110 . In this embodiment, two sub-devices 121 and 122 are exemplified as the sub-devices 120 that are communicatively connected to the main device 110. However, the number of sub-devices 120 is not limited to two, and may also be one or three. above. In addition, in this embodiment, two units 131 and 132 are exemplified as the plurality of units 130 controlled by the plurality of sub-devices 120 . The unit 131 can be controlled by the sub-device 121 and the unit 132 can be controlled by the sub-device 122 .

The main device 110 may include a sequence control unit 111, a complex number generation unit (sub-control unit) 112, and a communication control unit (communication unit) 113. The sequence control unit 111 controls the sequence of processing in each sub-device 120 . For example, the sequence control unit 111 controls the plurality generation unit 112 according to a predetermined (set) sequence, procedure, or recipe. The plurality generation unit 112 each generates instruction data for controlling (instructing) the processing of the sub-device 120 that is the control target.

The generation units 112 are provided, for example, in the same number as the sub-devices 120. In this embodiment, two generation units 112a and 112b are provided, each of which controls the two sub-devices 121 and 121, respectively. The generation unit 112a takes the sub-device 121 as a control target and generates instruction data for controlling the processing in the sub-device 121. On the other hand, the generation unit 112b takes the sub-device 122 as a control target and generates instruction data for controlling the processing of the sub-device 122 .

The communication control unit 113 transmits and receives data with the plurality of sub-devices 120 at regular intervals through the field network 140. For example, the communication control unit 113 sends the instruction data generated by the generating units 112a and 112b to the sub-devices 121 and 122 at regular intervals through the field network 140, and the sub-devices 121 and 122 receive the response data. Response data refers to data (flag) indicating, for example, whether processing instructed by instruction data has been completed.

Next, EtherCAT (registered trademark), which is one of the industrial Ethernet networks (registered trademark), will be described as an example of the field network 140 shown in FIG. 1 . In EtherCAT (registered trademark), data frames are sent and received at a certain period (for example, 1m seconds), so the arrival time of the data is guaranteed. If EtherCAT (registered trademark) is used as the field network 140, at least one of the nodes connected to the field network 140 can function as the master device 110, and the other nodes can function as the slave devices 120. The node functioning as the master device 110 manages the transmission and reception timing of data frames in the field network 140 and the like.

In the example shown in FIG. 1 , the main device 110 (communication control unit 113 ) writes the instruction data generated by the generating units 112 a and 112 b into a data frame, and sends the data frame to the slave device 121 . The sub-device 121 that receives the data frame reads and writes the data in the area allocated to itself among the data in the data frame, and sends the data frame to the next sub-device 122 . In addition, the sub-device 122 that receives the data frame reads and writes the data allocated to itself among the data in the data frame, and sends the data frame to the main device 110 through the sub-device 121 .

Specifically, the sub-device 121 reads the instruction data generated by the generation unit 112a from the received data frame, writes the response data, and then sends the data frame to the next Subdevice 122. In addition, the sub-device 122 reads the instruction data generated by the generating unit 112b from the received data frame and writes the response data, and then sends the data frame to the sub-device 121 through the sub-device 121. Main device 110.

In the system 100 that transmits and receives data at regular intervals between the main device 110 and the slave device 120 through the field network as described above, the plurality generating unit 112 only generates the data when an abnormality or failure occurs. 112 is reset. In this case, if the response data from the sub-device 120 as the control object of the generation unit 112 remains in the data frame of the field network 140, the response data will be sent by mistake. In addition, in the generation unit 112 that has been reset, the content that has been processed before the reset is erased, so if response data to the instruction data generated before the reset is received, an error may occur. As a result, it is difficult to operate the system 100 normally.

Therefore, if the communication control unit 113 of this embodiment senses that the generation unit 112 has been reset and the response data from the sub-device 120 remains in the data frame of the field network 140, the response data is discarded. For example, if the communication control unit 113 senses the reset generation unit 112 among the plurality of generation units 112, it specifies the reset generation unit 112 as the control target sub-device 120 among the plurality of sub-devices 120. . Next, when the response data from the specified sub-device 120 remains in the data frame of the field network 140, the communication control unit 113 discards the response data.

FIG. 2 is a flowchart showing the processing performed by the communication control unit 113 of this embodiment. If the user starts the system 100, the main device 110 and the plurality of sub-devices 121 and 122 are started. Next, data transmission and reception at regular intervals through the field network 140 is started between the main device 110 and the plurality of sub-devices 121 and 122, and the flow chart shown in FIG. 2 is started. The communication control unit 113 is also configured to repeatedly execute the transmission and reception of data to and from the plurality of sub-devices 121 and 122 through the field network 140 at certain intervals during the execution of the flow chart shown in FIG. 2 .

In S11, the communication control unit 113 monitors (confirms) the reset of each plurality generation unit 112. Next, in S12, the communication control unit 113 determines whether the reset generation unit 112 among the plurality generation units 112 (112a, 112b) has been sensed. For example, when the generation unit 112 has been reset, the instruction data sent by the generation unit 112 at a certain period is not transmitted. Therefore, the communication control unit 113 can sense the reset generation unit 112 according to whether the instruction data has been received. In addition, the communication control unit 113 may sense that the generation unit 112 has been reset based on the data (flag) sent by the generation unit 112 when the reset of the generation unit 112 is performed. If the reset generation unit 112 is detected, the process proceeds to S13. If the reset generation unit 112 is not detected, the process returns to S11.

In S13, the communication control unit 113 specifies the reset generation unit 112 as the sub-device 120 to be controlled. In the system 100 of this embodiment, the plurality generation unit 112 is provided with each of the plurality of sub-devices 120 as a control object, and the corresponding relationship between the plurality of sub-devices 120 and the plurality generation unit 112 is known in advance. Therefore, the communication control unit 113 can specify the sub-device 120 that has been reset by the generation unit 112 among the plurality of sub-devices 120 as the control target based on the information indicating the corresponding relationship. Hereinafter, the sub-device 120 specified in S13 may be referred to as the "specified sub-device 120".

In S14, the communication control unit 113 confirms the status of the processing in the specific sub-device 120. Next, in S15, the communication control unit 113 determines whether the processing in the specific sub-device 120 is being executed. For example, the communication control unit 113 can determine whether the processing in the specific sub-device 120 is being executed by confirming the data frames of the field network 140 received at regular intervals. Specifically, a flag indicating that the processing at the specific sub-device 120 is completed is set in the data frame of the field network 140 . If the communication control unit 113 sets the flag in the data frame of the field network 140, it can determine that the processing of the specific sub-device 120 is completed. On the other hand, if the flag is not set in the data frame of the field network 140, the communication control unit 113 can determine that the processing of the specific sub-device 120 is being executed. If the processing in the specific sub-device 120 is in execution, the process proceeds to S16. If the processing in the specific sub-device 120 is completed, the process proceeds to S19.

S16 to S18 are processes performed when the process of the specific sub-device 120 is being executed. Regardless of whether the generation unit 112 with the specific sub-device 120 as the control target has been reset, if the processing of the specific sub-device 120 is completed, it may be difficult for the system 100 to operate normally. Therefore, in this project, if the processing of the specific sub-device 120 is in execution, the specific sub-device 120 is reset.

In S16, the communication control unit 113 instructs the specific sub-device 120 to perform resetting of the specific sub-device 120. For example, the communication control unit 113 may instruct the reset of the specific sub-device 120 by writing an instruction (data) instructing the reset of the specific sub-device 120 to a data frame on the field network 140 . Here, the specific sub-device 120 can reset itself while maintaining communication with the main device 110 and other sub-devices 120 through the field network 140 . Thereby, the communication control unit 113 can maintain communication through the field network 140 with the sub-devices 120 other than the specific sub-device 120 even when resetting the specific sub-device 120 .

In S17, the communication control unit 113 confirms the execution status of the reset of the specific sub-device 120. Next, in S18, the communication control unit 113 determines whether the reset of the specific sub-device 120 has been completed. For example, the communication control unit 113 can determine whether the processing in the specific sub-device 120 is being executed by confirming the data frames of the field network 140 received at regular intervals. Specifically, a flag indicating that the reset of the specific sub-device 120 has been completed is set in the data frame of the field network 140 . The communication control unit 113 can determine that the reset of the specific sub-device 120 has been completed if the flag has been set in the data frame of the field network 140 . On the other hand, the communication control unit 113 may determine that the reset of the specific sub-device 120 is in progress if the flag is not set in the data frame of the field network 140 . If the reset of the specific sub-device 120 is completed, the process proceeds to S19. If the reset of the specific sub-device 120 is not completed, the process returns to S17.

In S19, the communication control unit 113 confirms the data frame of the field network 140. For example, if the reset of the specific sub-device 120 has been performed in S16 to S18, the communication control unit 113 only needs to confirm the data frame after the reset of the specific sub-device 120 is completed. Next, in S20 , the communication control unit 113 determines whether response data from the specific sub-device 120 remains (exists) in the data frame of the field network 140 . If the response data from the specific sub-device 120 does not remain in the data frame, the process returns to S11. On the other hand, if the response data from the specific sub-device 120 remains in the data frame, the system proceeds to S21, and after the response data is discarded from the data frame, the process returns to S11.

Here, "destroyment of response data" means that the response data is in a state that is not valid (invalid state). For example, the communication control unit 113 may perform the destruction of the response data by clearing (erasing) the response data from the specific sub-device 120 from the data frame of the field network 140 . In addition, if the response data is indicated by whether a flag indicating that the processing has been completed has been set, the communication control unit 113 may cancel the response data by removing the flag that has been set in the data frame.

Next, the data flow in the system 100 of this embodiment will be described. 3 to 4 are diagrams showing an example of the data flow between the sequence control unit 111, the generation unit 112, the communication control unit 113, and the sub-device 120 in the system 100 of this embodiment. FIG. 3 shows an example of the data flow when the data frame of the field network 140 has no response data remaining (Embodiment 1). FIG. 4 shows the data flow when the data frame has response data remaining. One example (Example 2).

[Example 1] Example 1 will be described with reference to FIG. 3 . The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate instruction data to the generation unit 112 according to a predetermined (set) sequence, procedure or recipe (S101). The generation unit 112 that receives the control instruction from the sequence control unit 111 generates instruction data for causing the sub-device 120 to execute processing based on the control instruction and sends it to the communication control unit 113 (S102). The communication control unit 113 that receives the instruction data from the generation unit 112 sends the instruction data to the sub-device 120 by writing the instruction data in the data frame of the field network 140 (S103). The sub-device 120 that has received the instruction data from the communication control unit 113 starts executing the processing instructed by the instruction data and starts the control of the unit 130 . Thereby, the sub-device 120 becomes processing.

Here, if it is necessary to reset the generation unit 112, the sequence control unit 111 sends a reset instruction instruction to execute the reset of the generation unit 112 to the generation unit 112, and executes the reset of the generation unit 112 (S104 ). In addition, the generation unit 112 on which reset is performed sends data indicating execution of the reset (reset execution command) to the communication control unit 113 (S105). Thereby, the communication control unit 113 can sense that the generation unit 112 has been reset. The communication control unit 113 specifies the reset generation unit 112 as the sub-device 120 to be controlled (S106), and determines whether the sub-device 120 is a sub-device 120 by confirming the processing status of the specified sub-device 120. Processing is being executed (S107). In this embodiment 1, the sub-device 120 is executing processing (that is, no response data has been sent by the sub-device 120). Therefore, the communication control unit 113 sends a reset instruction command instructing the reset of the sub-device 120 to the sub-device 120 (S108). The sub-device 120 that has received the reset instruction command performs its own reset, and if the reset is completed, data indicating the completion of the reset (reset completion command) is sent to the communication control through the field network 140 Part 113 (S109).

After receiving the reset completion command, the communication control unit 113 confirms whether the response data from the sub-device 120 remains in the data frame of the field network 140 (S110). In this embodiment 1, since the sub-device 120 performs a reset of the sub-device 120 during processing, the response data indicating that the processing of the sub-device 120 is completed is not written to the data frame of the field network 140 . That is, in the first embodiment, the response data from the sub-device 120 does not remain in the data frame, and the response data is not destroyed by the communication control unit 113 to proceed to the next control.

The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate the next instruction data to the generation unit 112 according to a predetermined (set) sequence, procedure or recipe (S111). The generation unit 112 generates instruction data for causing the sub-device 120 to perform processing based on the received control command and sends it to the communication control unit 113 (S112). The communication control unit 113 writes the received instruction data into the data frame of the field network 140, thereby sending the instruction data to the sub-device 120 (S113). The sub-device 120 that has received the instruction data from the communication control unit 113 starts executing the process instructed by the instruction data. Then, upon completion of the processing, the sub-device 120 writes the response data in the data frame of the field network 140, thereby sending the response data to the communication control unit 113 (S114). The response data received in the communication control unit 113 is sent to the sequence control unit 111 (S116) through the generation unit 112 (S115).

[Example 2] Example 2 will be described with reference to FIG. 4 . The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate the next instruction data to the generation unit 112 according to a predetermined (set) sequence, procedure or recipe (S201). The generation unit 112 generates instruction data for causing the sub-device 120 to perform processing based on the received control command and sends it to the communication control unit 113 (S202). The communication control unit 113 sends the received instruction data to the sub-device 120 by writing the instruction data into the data frame of the field network 140 (S203). The sub-device 120 that has received the instruction data from the communication control unit 113 starts executing the processing instructed by the instruction data. Next, upon completion of the processing, the sub-device 120 writes the response data in the data frame of the field network 140, thereby sending the response data to the communication control unit 113 (S204).

Here, if it is necessary to reset the generation unit 112, the sequence control unit 111 sends a reset instruction instruction to cause the generation unit 112 to reset, and executes the reset of the generation unit 112 (S205 ). In addition, the generation unit 112 on which reset is performed sends data indicating execution of the reset (reset execution command) to the communication control unit 113 (S206). Thereby, the communication control unit 113 can sense that the generation unit 112 has been reset. The communication control unit 113 specifies the reset generation unit 112 as the sub-device 120 to be controlled (S207), and determines whether the sub-device 120 is a process by confirming the processing status of the specified sub-device 120. Executing (S208). In this embodiment 2, since the processing in the sub-device 120 has been completed (that is, the response data is sent by the sub-device 120 in S204), the reset of the sub-device 120 is not performed.

The communication control unit 113 confirms whether the response data from the sub-device 120 remains in the data frame of the field network 140 (S209). In the second embodiment, the sub-device 120 completes the processing and the sub-device 120 sends the response data, but the response data is not sent to the generation unit 112 and the sequence control unit 111. That is, the status of the data frame in response to data remaining on the field network 140 . Therefore, the communication control unit 113 destroys the response data remaining in the data frame (S210), and proceeds to the next process (S211-S216). S211 to S216 are the same processes as S111 to S116 of FIG. 3 described in Embodiment 1. This can avoid the situation where the response data remaining in the data frame is sent to the generation unit 112 and the sequence control unit 111 after being sent by the sub-device 120 in S204. That is, it is possible to avoid the situation where the past response data sent by the sub-device 120 in S204 is sent to the generation unit 112 and the sequence control unit 111 as the response data to the instruction data sent to the sub-device 120 in S213.

As described above, the main device 110 (communication control unit 113) of this embodiment senses the reset of the generating unit 112 and the response data from the sub-device 120 remains in the data frame of the field network 140. This response information is abolished. In this way, the response data of the data frame remaining in the field network 140 can be avoided from being sent in error, and the system 100 can operate normally.

＜Embodiment of lithography apparatus＞ An embodiment of a lithography apparatus to which the system 100 of the present invention is applied will be described. In this embodiment, an exposure device that exposes a substrate to form a pattern on the substrate is exemplified as a lithography device applicable to the system 100, but the invention is not limited thereto. For example, the above-mentioned system 100 can also be applied to a lithography device such as an imprint device that uses a mold to form a pattern of an imprint material on a substrate, or a drawing device that irradiates a substrate with charged particle beams to form a pattern on the substrate. .

FIG. 5 is a schematic diagram showing the structure of the exposure device 10 . The exposure device 10 is an exposure device that projects the pattern of the mask M onto the substrate W through the projection optical system 14 to expose the substrate W. The exposure device 10 includes a light source 11, an illumination optical system 12, a mask stage 13, a projection optical system 14, a substrate stage 15, and a main control unit 16. In addition, the exposure device 10 includes a first driving unit 21 that drives the mask stage 13 , a second driving unit 22 that drives the lens 14 a of the projection optical system 14 , and a third driving unit 23 that drives the substrate stage 15 . The first driving part 21, the second driving part 22, and the third driving part 23 are mechanisms that perform at least part of the process of forming a pattern on the substrate W. Through the mask stage control part 31, the projection control part 32, and the substrate The stage control unit 33 controls each. In addition, the main control unit 16 has, for example, a CPU or a memory (storage unit), and controls the entire exposure device 10 by controlling the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33. (Each part of the exposure device 10).

The light source 11 emits exposure light. The illumination optical system 12 illuminates the mask M using the light emitted from the light source 11 . The mask stage 13 may be configured to hold the mask M, and may be moved in the XY direction by the first drive unit 21 . The projection optical system 14 projects the pattern of the mask M illuminated by the illumination optical system 12 on the substrate. The projection optical system 14 includes a lens 14 a movable in, for example, the X direction by the second drive unit 22 . The substrate stage 15 is configured to hold the substrate W and be movable in, for example, the XY direction by the third drive unit 23 .

In the exposure apparatus 10 shown in FIG. 5 , if the above-mentioned system 100 of the present invention is applied, the main control unit 16 can be configured as the main device 110 . In addition, the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33 may be configured as sub-devices 120, respectively. The first driving part 21, the second driving part 22, and the second driving part may each be configured as the unit 130. Data transmission and reception with the main control unit 16, the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33 is performed at regular intervals through the field network.

＜Embodiment of manufacturing method of article＞ The method for manufacturing an article according to the embodiment of the present invention is suitable for manufacturing articles having micro-components or micro-structures such as semiconductor components. The method of manufacturing an article according to this embodiment includes a process of forming a pattern on a substrate using the above-mentioned lithography apparatus (exposure apparatus), and a process of processing the substrate on which the pattern is formed in the process. In addition, the manufacturing method includes other well-known processes (oxidation, film formation, evaporation, doping, planarization, etching, resist stripping, cutting, joining, packaging, etc.). The method for manufacturing an article according to this embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared with the conventional method.

<Other Examples> In the present invention, a program that implements one or more functions of the above-described embodiment is supplied to a system or device through a network or a storage medium, and one or more processors in a computer of the system or device reads and executes the program. processing can also be achieved. In addition, it can also be implemented by a circuit (such as an ASIC) that implements more than one function.

The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the claims are attached to disclose the scope of the invention.

10:Exposure device 11:Light source 12:Department of Illumination Optics 13: Mask stage 14: Department of Projection Optics 14a:Lens 15: Substrate carrier 16: Main control department 21: 1st drive unit 22: 2nd drive unit 23:3rd drive unit 31: Mask stage control section 32:Projection control department 33:Substrate stage control section 100:System 110: Main device 111: Sequence Control Department 112,112a,112b: Generation department 113:Communication Control Department 120:Subdevice 121,122:Subdevice 130:Unit 131,132: unit 140: Live network M: mask W: substrate

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, are used to explain the principles of the invention. [Fig. 1] is a schematic configuration diagram of a system including a main device and a sub-device. [Fig. 2] is a flowchart showing the processing performed by the communication control unit of the host device. [Fig. 3] is a diagram showing an example of the data flow between the sequence control unit, the generation unit, the communication control unit, and the sub-device. [Fig. 4] A diagram showing an example of the data flow between the sequence control unit, the generation unit, the communication control unit, and the sub-device. [Fig. 5] is a schematic diagram showing the structure of the exposure device.

100:System

110: Main device

111: Sequence Control Department

112a, 112b: Generation department

113:Communication Control Department

120:Subdevice

121,122:Subdevice

130:Unit

131,132: unit

140: Live network

Claims (16)

A control device serving as a master device that controls a sub-device through a network, characterized by: including: a generating unit that generates instruction data for controlling processing in the sub-device; and through the network, The communication unit transmits and receives data frames with the sub-device at regular intervals. The communication unit sends the data frame in which the instruction data generated by the generating unit is written to the sub-device and receives the data frame. By the foregoing sub-device being written into the foregoing data frame indicating that the foregoing processing corresponding to the foregoing instruction data has been completed, if it is sensed that the reset of the foregoing generating part has been executed, the reset of the foregoing generating part is When the aforementioned instruction data is executed and the aforementioned response data that has been written to the aforementioned data frame by the aforementioned sub-device remains in the aforementioned data frame, the response data is set to an invalid state. The control device of claim 1, wherein if the communication unit senses that the reset of the generation unit has been executed, it determines whether the sub-device is executing the processing, and if the sub-device is executing the processing, The aforementioned sub-device instructs to perform a reset of the aforementioned sub-device. For example, the control device of claim 2, wherein if the aforementioned communication unit has been instructed to perform the reset of the aforementioned sub-device, confirm whether the aforementioned response data remains in the aforementioned data frame after the aforementioned reset of the aforementioned sub-device is completed. If the aforementioned The aforementioned response data remains in the data frame, and the response data into an invalid state. For example, the control device of claim 2 or 3, wherein if the aforementioned communication unit has been instructed to perform the reset of the aforementioned sub-device, during the execution of the reset, communication with the aforementioned sub-device through the aforementioned network is also performed at regular intervals. The sending and receiving of the aforementioned data frames. The control device according to any one of claims 1 to 3, wherein the control device additionally includes a sequence control unit that controls the sequence of processing in the sub-device, and the generation unit is reset by the sequence control unit. to execute. The control device according to any one of claims 1 to 3, wherein the control device includes: a plurality of the aforementioned generating units, which respectively control the plurality of sub-devices through the aforementioned network and regard the plurality of sub-devices as control objects. . The control device of claim 6, wherein if the communication unit senses the reset generation unit among the plurality of generation units, it specifies the reset generation unit among the plurality of sub-devices as the control object. When the response data written by the specified sub-device remains in the data frame, the response data is set to an invalid state. The control device of claim 6, wherein the plurality of sub-devices are connected in a daisy chain manner. The control device of claim 6, wherein the data frame includes areas allocated to each of the plurality of sub-devices, and the plurality of sub-devices read and write data allocated to each of the areas. The control device of any one of claims 1 to 3, wherein the communication unit, if it senses that the reset of the generation unit has been executed, will proceed according to the instruction data before the reset of the generation unit is executed. The response data that has been written into the data frame by the sub-device is not sent to the generating unit and becomes invalid. The control device according to any one of claims 1 to 3, wherein the communication unit will retain the instruction data generated by the generation unit after the reset of the generation unit has been performed, and the data information will remain in the control device. After the response data of the frame becomes invalid, it is written to the data frame. A control system including: a sub-device and a main device that controls the sub-device through a network, characterized in that the main device includes: generating instruction data for controlling processing in the sub-device The generation unit; and the communication unit that transmits and receives data frames with the aforementioned sub-device through the aforementioned network at regular intervals. The aforementioned communication unit writes the aforementioned data that has been written into the aforementioned instruction data generated by the aforementioned generation unit. The message frame is sent to the aforementioned sub-device, and the aforementioned data frame in which the response data indicating that the aforementioned processing corresponding to the aforementioned instruction data has been completed is received is received. If it is sensed that the reset of the aforementioned generating unit has been Execution, by the aforementioned sub-device according to the aforementioned instruction data before the reset of the aforementioned generating unit is executed When the response data written to the data frame remains in the data frame, the response data is set to an invalid state. A lithography device for forming a pattern on a substrate, characterized in that it includes a control system according to claim 12, and the sub-device is a mechanism that controls at least part of the process of forming a pattern on the substrate. A manufacturing method of an article, characterized by: including: a process of forming a pattern on a substrate using a lithography device as claimed in Claim 13; and a process of processing the aforementioned substrate with the pattern formed in the aforementioned process, using the processed Use the aforementioned substrates to manufacture items. A control method in which a master device controls a sub-device through a network, characterized by comprising: a generating unit generating a process for controlling processing of the sub-device; The network transmits and receives data frames with the sub-device at regular intervals, sends the data frame in which the instruction data generated by the generating unit is written to the sub-device, and receives the data frame via the sub-device. The sub-device is written with the project of the aforementioned data frame representing the response data corresponding to the completion of the aforementioned processing of the aforementioned instruction data; and If the reset of the generating part has been executed, the response data that has been written to the data frame by the sub-device according to the instruction data before the reset of the generating part is executed remains in the data frame. , this is a project that puts the response data into an invalid state. A control program for causing a computer serving as a host device to execute each process of the control method of claim 15.

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