JP2021130164A - Wire saw - Google Patents

Abstract

To provide a wire saw capable that allows easy change to an inter-axis distance (a distance between axes) of a processing roller without exchanging a support frame.SOLUTION: A wire saw 1 is a device that cuts a workpiece with a wire 43 by making the wire 43 travel in response to rotation of a plurality of processing rollers 41, 42, the wire 43 being wound between the processing rollers 41, 42. The wire saw 1 includes spindles 44, 45 supporting the processing rollers 41, 42, eccentric bearings 46, 47 rotatably journaling the spindles 44, 45, and support frames 7, 7 having bearing installation holes 7a, 7b into which the eccentric bearings 46, 47 are inserted. Axes 7c, 7d of the bearing installation holes 7a, 7b and axes 44a, 45a of the spindles 44, 45 are eccentric.SELECTED DRAWING: Figure 1

Description

The present invention relates to a wire saw.

FIG. 7 is a schematic view of a main part showing the conventional wire saw 100.
As shown in FIG. 7, in the conventional wire saw 100 for cutting a work W such as a semiconductor material or a magnetic material with a wire 430, the wire 430 wound around a plurality of processing rollers 410 and 420 at predetermined intervals is run at high speed. The work W is pressed against the wire 430 of the machined portion 400 to cut the work W.

In the conventional wire saw 100, when the width L100 of the work W is changed, the wire 430 loosens and the machining accuracy deteriorates. Therefore, the inter-axis distance L200 of the spindles 440 and 450 of the machining rollers 410 and 420 is set to the width of the work W. It is necessary to change according to L100. In that case, it is necessary to replace the support frame 700 that supports the main shafts 440 and 450 with one having an inter-axis distance L200 that matches the width L100 of the work W, and there is a problem that the replacement takes time. ..

In addition, in the case of a wire saw in which the support frame 700 and the processing chamber are integrated, it is necessary to replace the entire processing chamber, and there is a problem that it takes time and effort to change the distance between the spindles.

As a device that solves these problems and makes it possible to easily change the distance between shafts, for example, the wire saw described in Patent Document 1 is known. In the wire saw described in Patent Document 1, a support frame (22) that rotatably supports processing rollers (16, 17) is attached to a fixed frame (14) so as to be removable and replaceable, and a desired shaft is attached. The support frame (22) having a distance is replaceable.

Japanese Unexamined Patent Publication No. 2000-218509 (FIGS. 1 to 3)

However, when changing the shaft-to-axis distance of the processing rollers (16, 17), the wire saw described in Patent Document 1 needs to be replaced with a support frame having a desired shaft-to-axis distance suitable for the width of the work. Therefore, the worker must prepare various types of support frames, and when the width of the work is changed, replace the support frame with a support frame suitable for the width of the work. For this reason, the wire saw described in Patent Document 1 has a problem that the types of support frames increase, and the number of parts, the man-hours for managing parts, and the man-hours for replacing the support frame increase.

The present invention was devised to solve the above-mentioned problems, and a wire saw capable of easily changing the inter-axis distance (distance between the axial centers) of the processing roller without replacing the support frame. The challenge is to provide.

In order to solve the above problems, the wire saw according to the present invention is a wire saw in which a wire is wound between a plurality of processing rollers, the wire is run along with the rotation of the processing rollers, and the work is cut by the wire. The bearing installation hole includes a spindle that supports the processing roller, an eccentric bearing that rotatably supports the spindle, and a support frame having a bearing installation hole into which the eccentric bearing is inserted. The axis of the spindle and the axis of the spindle are eccentric.

The present invention can provide a wire saw capable of easily changing the distance between shafts (distance between shaft centers) of a processing roller without replacing the support frame.

It is a schematic diagram of the main part which shows the wire saw which concerns on embodiment of this invention. It is sectional drawing of the main part of the wire saw which concerns on embodiment of this invention. It is a schematic diagram of the main part of the wire saw according to the embodiment of the present invention, in which the eccentric bearing on the left side in the state of FIG. 1 is rotated 90 degrees clockwise and the eccentric bearing on the right side is rotated 90 degrees counterclockwise. The state of the machined part when it is rotated is shown. Outline of the main part showing the state of the machined part when the eccentric bearing on the left side in the state of FIG. 3 is rotated 90 degrees clockwise and the eccentric bearing on the right side is further rotated counterclockwise 90 degrees. It is a figure. Outline of the main part showing the state of the machined part when the eccentric bearing on the left side in the state of FIG. 4 is rotated 90 degrees clockwise and the eccentric bearing on the right side is further rotated counterclockwise 90 degrees. It is a figure. Outline of the main part showing the state of the machined part when the eccentric bearing on the left side in the state of FIG. 5 is rotated 90 degrees clockwise and the eccentric bearing on the right side is further rotated counterclockwise 90 degrees. It is a figure. It is a schematic diagram of the main part which shows the conventional wire saw.

The wire saw 1 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6.
In explaining the embodiment of the wire saw 1 of the present invention, for convenience, the direction side of the processing rollers 41 and 42 shown in FIG. 1 as viewed from the front side will be described as the front surface.

<Work>
As shown in FIG. 1, the work W is made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic. The work W is cut by pressing against the wire 43 of the processing apparatus 4 arranged on the wire saw 1.

≪Wire saw≫
The wire saw 1 is a cutting device that cuts the work W by the wire 43 of the processing portion 40 between the processing rollers 41 and 42 of the processing device 4. The wire saw 1 includes a clamp device 2, an elevating device 3, a processing device 4, and a support frame 7.

≪Clamp device≫
The clamp device 2 is a holding mechanism for clamping the work W when the work W is machined by the processing device 4. The clamping device 2 indirectly clamps the work W carried into the machining chamber via the work jig 21, and then presses the work W against the wire 43 of the machining portion 40 of the machining device 4 for machining. do.

As shown in FIG. 1, a work jig 21 is detachably attached to the upper surface of the work W via a plate-shaped member such as a glass plate or a metal plate. On the upper surface of the work jig 21, a plurality of clamped portions (not shown) that are detachably connected to the work holding member (not shown) of the clamp device 2 are provided.

≪Elevating device≫
As shown in FIG. 1, the elevating device 3 is a device for raising and lowering the work W by providing a clamp device 2 for holding the work W with a work jig 21 or the like interposed at the lower end portion. The elevating device 3 lowers and presses the work W against the wire 43 of the processing device 4 for processing, or raises the work W. The elevating device 3 includes, for example, a moving mechanism (not shown) including a ball screw or the like for moving the clamp device 2 up and down, a moving drive motor (not shown) including a servomotor or the like for operating the moving mechanism, and the like. It is configured with.

≪Processing equipment≫
As shown in FIG. 1, the processing device 4 is a cutting mechanism for processing the work W clamped by the clamping device 2. As shown in FIG. 1 or 2, the processing apparatus 4 rotates the processing rollers 41, 42, the wire 43, the spindles 44, 45, the processing rollers 41, 42, and the spindles 44, 45 in an integrally rotatable manner. It is configured to include a drive motor (not shown) for driving, eccentric bearings 46 and 47, bearings 48 and 48, and collars 49 and 49. The processing apparatus 4 is provided on a support frame 7 attached to an apparatus main body (not shown).

As shown in FIG. 1, a clamp device 2 that supports the work W is arranged above the machining portion 40 of the machining device 4 so as to be able to move up and down by the lifting device 3. In the processing device 4, when the wire saw 1 is operated, the wire 43 is driven between the processing rollers 41 and 42, and the work W held by the clamp device 2 is lowered by the elevating device 3 to lower the wire 43 of the processing unit 40. It cuts by being pressed against.

<Processing roller>
As shown in FIGS. 1 and 2, the processing rollers 41 and 42 are a pair of left and right cylindrical rollers around which the wire 43 is wound. Both ends of the processing rollers 41 and 42 are sandwiched and supported by the spindles 44 and 45 so as to be integrally rotatable with the spindles 44 and 45. The processing rollers 41 and 42 are arranged so as to face each other in the horizontal direction at appropriate intervals (distances L2 and L3 between the axes) corresponding to the width L10 of the work W. The processing rollers 41 and 42 are configured to run the wire 43 between the processing rollers 41 and 42 by being integrally rotated with the spindle by a drive motor (not shown). The number of processing rollers 41 and 42 may be at least a pair on both sides of the processing portion 40, and may be three or more as long as they are arranged in parallel with mutual spacing. Hereinafter, the case where the processing rollers 41 and 42 are two will be described as an example.

<Wire>
As shown in FIG. 1, the wire 43 is a machining wire for cutting and cutting the pressed work W by traveling by rotating the machining rollers 41 and 42. The wire 43 is composed of, for example, one wire rod. The wire 43 is driven by the processing rollers 41 and 42 so as to repeatedly advance by a certain amount and retract by a certain amount to advance stepwise as a whole or to advance continuously in one direction.

<Spindle>
The spindles 44 and 45 are round bar-shaped shafts that sandwich and support both ends of the processing rollers 41 and 42 on both sides of the processing portion 40 (see FIG. 2). The spindles 44 and 45 are inserted into the spindle installation holes 46c and 47c formed at the eccentric portions of the eccentric bearings 46 and 47. The axial centers 44a and 45a of the spindles 44 and 45 are located at positions deviated from the axial centers 7c and 7d of the eccentric bearings 46 and 47 in the direction of the center line O3-O3 by a distance d. Therefore, the distances L2 and L3 between the axes 44a and 45a of the plurality of spindles 44 and 45 can be increased or decreased by changing the mounting angles of the eccentric bearings 46 and 47.

<Eccentric bearing>
As shown in FIG. 1, the eccentric bearings 46 and 47 are bearings that rotatably support the spindles 44 and 45. The eccentric bearings 46 and 47 are rotatably inserted into the bearing installation holes 7a and 7b of the support frame 7, and are fixed at predetermined positions by the fixtures 71 and 72. Spindle installation holes 46c and 47c into which the spindles 44 and 45 are rotatably inserted are formed at positions deviated from the axial centers 7c and 7d of the eccentric bearings 46 and 47 by a distance d. Engagement portions into which fixtures 71 and 72 are detachably inserted into one of the outer peripheral surfaces 46a and 47a of the eccentric bearings 46 and 47 and the inner wall surfaces 7e and 7f of the bearing installation holes 7a and 7b, respectively. A plurality of 46b and 47b are formed, and at least one engaging portion 7g and 7h into which the fixtures 71 and 72 are detachably inserted are formed on the other side. Between the eccentric bearings 46 and 47 and the spindles 44 and 45, a bearing 48 composed of a plurality of bearings and a collar 49 arranged between the bearing 48 and the bearing 48 are provided.

The engaging portions 46b and 47b are formed of holes in the concave groove into which the fixtures 71 and 72 that suppress the rotation of the eccentric bearings 46 and 47 are inserted. Hereinafter, as an example of the engaging portions 7g, 7h, 46b, 47b and the fixtures 71, 72, the case where the engaging portions 7g, 7h, 46b, 47b are keyways and the fixtures 71, 72 are keys will be given as an example. , Embodiment will be described.

The engaging portions 46b and 47b are formed at four locations on the center lines O1-O1, O2-O2 and O3-O3 in the vertical and horizontal directions of the eccentric bearings 46 and 47, for example. That is, four engaging portions 46b and 47b are formed on the outer peripheral surfaces 46a and 47a at an angle of 90 degrees with respect to the axial centers 7c and 7d of the eccentric bearings 46 and 47.

The spindle installation holes 46c and 47c are shaft holes for rotatably mounting the spindles 44 and 45. The spindle installation holes 46c and 47c are formed at positions deviated from the axial centers 7c and 7d of the bearing installation holes 7a and 7b (eccentric bearings 46 and 47) by a distance d.

≪Support frame≫
As shown in FIGS. 1 and 2, the support frame 7 is a pair of frame members having bearing installation holes 7a and 7b into which eccentric bearings 46 and 47 are inserted. The support frame 7 is provided on a column (not shown) mounted on the base (not shown) of the wire saw 1.

The axial centers 7c and 7d of the bearing installation holes 7a and 7b and the axial centers 44a and 45a of the spindles 44 and 45 are arranged so as to be eccentric with an arbitrary distance d. The distance d is, for example, about 2 mm to 4 mm.

The engaging portions 7g and 7h are concave groove holes into which the fixtures 71 and 72 are inserted and arranged. The engaging portions 7g and 7h are composed of one hole arranged at a predetermined angle position set in advance on the inner wall surfaces 7e and 7f of the bearing installation holes 7a and 7b.

<Fixing tool>
The fixtures 71 and 72 are members for fixing the eccentric bearings 46 and 47 rotatably inserted into the bearing installation holes 7a and 7b at predetermined predetermined positions. The fixtures 71 and 72 are inserted into the insertion holes including one of the four engaging portions 46b and 47b and the engaging portions 7g and 7h matched to the engaging portions 46b and 47b. In the fixtures 71, 72 and the engaging portions 7g, 7h, 46b, 47b, the axial centers 44a, 45a of the spindle installation holes 46c, 47c are at least the center lines O1-O1, O2-O2 of the eccentric bearings 46,47. It is located on O3-O3.

[Action of wire saw]
Next, the operation of the wire saw 1 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6.

As shown in FIG. 1, when the width L10 of the work W is relatively narrow, the distance L2 between the axes 44a and 45a of the spindles 44 and 45 is narrowed according to the width L10 of the work W. As a result, the distance L2 between the axes of the processing rollers 41 and 42 can be narrowed.

When machining a work W having a width L10 shown in FIG. 1, for example, the eccentric bearing 46 on the left side in the state shown in FIG. 1 is rotated 90 degrees in the clockwise direction (arrow a direction). At the same time, the eccentric bearing 47 on the right side is rotated 90 degrees in the counterclockwise direction (arrow b direction). Then, as shown in FIG. 3, the left spindle 44 (processing roller 41) shown by the virtual line is displaced by a distance d in the downward direction and a distance d in the left direction like the spindle 44 shown by the solid line in FIG. .. The right spindle 45 (machining roller 42) shown by the virtual line is displaced by a distance d in the downward direction and a distance d in the right direction, as in the spindle 45 shown by the solid line in FIG. Therefore, the distance L2 between the axes of the processing rollers 41 and 42 becomes longer to the same length as the distance L1.

When processing a larger workpiece W, the eccentric bearing 46 on the left side in the state of FIG. 3 is further rotated 90 degrees in the clockwise direction (direction of arrow a), and the eccentric bearing on the right side in the state of FIG. 3 is formed. The 47 is further rotated 90 degrees in the counterclockwise direction (direction of arrow b). Then, the spindle 44 (processing roller 41) on the left side is displaced by a distance d in the upward direction and a distance d in the left direction, as shown by the spindle 44 shown by the solid line in FIG. The right spindle 45 (processing roller 42) is displaced upward by a distance d and to the right by a distance d, as shown by the solid line in FIG. Therefore, the distance L2 between the axes of the processing rollers 41 and 42 can be set to a distance L3 that is twice as long as the distance d than the distance L1 between the axes of the eccentric bearings 46 and 47.

The eccentric bearing 46 on the left side in the state of FIG. 4 is further rotated 90 degrees in the clockwise direction (arrow a direction), and the eccentric bearing 47 on the right side in the state of FIG. 4 is rotated in the counterclockwise direction (arrow). Rotate further 90 degrees in the b direction). Then, the left spindle 44 (processing roller 41) is displaced upward by a distance d and to the right by a distance d, as shown by the solid line in FIG. The right spindle 45 (processing roller 42) is displaced upward by a distance d and to the left by a distance d, as shown by the solid line in FIG. Therefore, the distance L2 between the axes of the processing rollers 41 and 42 becomes the distance L1.

The eccentric bearing 46 on the left side in the state of FIG. 5 is further rotated 90 degrees in the clockwise direction (direction of arrow a), and the eccentric bearing 47 on the right side in the state of FIG. 4 is rotated in the counterclockwise direction (arrow). Rotate further 90 degrees in the b direction). Then, the spindle 44 (processing roller 41) on the left side is displaced by a distance d in the downward direction and a distance d in the right direction, as shown by the spindle 44 shown by the solid line in FIG. The right spindle 45 (processing roller 42) is displaced upward by a distance d and to the left by a distance d, as shown by the solid line in FIG. Therefore, the eccentric bearings 46 and 47 return to the original state shown in FIG. 1, and the distance L2 between the axes of the processing rollers 41 and 42 can be changed to the shortest length (distance L2). ..

In this way, the spindles 44 and 45 are configured to be displaced when the eccentric bearings 46 and 47 are rotated. When the eccentric bearings 46 and 47 are rotated, the processing rollers 41 and 42 are pivotally supported by the spindles 44 and 45, so that they are displaced together and the distance between the axes of the processing rollers 41 and 42. It is configured so that L2 can be increased or decreased.

As described above, in the wire saw 1 of the present invention, as shown in FIG. 1, the wire 43 is wound between the plurality of processing rollers 41 and 42, and the wire 43 is caused to travel as the processing rollers 41 and 42 rotate. In the wire saw 1 that cuts the work W by the wire 43, the spindles 44 and 45 that support the processing rollers 41 and 42, the eccentric bearings 46 and 47 that rotatably support the spindles 44 and 45, and the eccentricity. Support frames 7 and 7 having bearing installation holes 7a and 7b into which bearings 46 and 47 are inserted are provided. 45a is eccentric.

According to this configuration, in the wire saw 1 of the present invention, the shaft centers 7c and 7d of the bearing installation holes 7a and 7b and the shaft centers 44a and 45a of the spindles 44 and 45 are eccentric, so that the support frame is supported. The distance L2 between the axes of the processing rollers 41 and 42 can be easily changed without replacing 7.
Therefore, in the wire saw 1 of the present invention, the distance L2 between the axes of the processing rollers 41 and 42 can be changed by using one support frame 7 as it is without changing the support frame 7. It can handle work W of different sizes. As a result, the wire saw 1 of the present invention can reduce the cost by suppressing an increase in the number of parts, the parts management man-hours, and the man-hours for replacing the support frame 7.

Further, as shown in FIG. 1, fixtures 71 and 72 are provided on one of the outer peripheral surfaces 46a and 47a of the eccentric bearings 46 and 47 and the inner wall surfaces 7e and 7f of the bearing installation holes 7a and 7b, respectively. A plurality of engaging portions 46b and 47b to be detachably inserted are formed, and at least one engaging portions 7g and 7h into which the fixtures 71 and 72 are detachably inserted are formed on the other side. ..

According to this configuration, the eccentric bearings 46, 47 and the support frames 7, 7 are fixed by forming a plurality of engaging portions 7g, 7h, 46b, 47b into which the fixtures 71, 72 are inserted. The tools 71 and 72 can be positioned by inserting them into the engaging portions 7g, 7h, 46b and 47b at the suitable positions.

Further, as shown in FIG. 1, the engaging portions 7g, 7h, 46b, 47b are formed on the outer peripheral surfaces 46a, 47a of the eccentric bearings 46, 47 and the inner wall surfaces 7e, 7f of the bearing installation holes 7a, 7b. They are arranged at predetermined angular intervals set in advance.

According to such a configuration, the fixtures 71 and 72 insert the eccentric bearings 46 and 47 into the engaging portions 7g, 7h, 46b and 47b by rotating the eccentric bearings 46 and 47 by a predetermined angle to insert the eccentric bearings 46 and 47. It can be fixed at a predetermined position of the support frame 7.

Further, as shown in FIG. 1, the distances L2 and L3 between the axes 44a and 45a of the plurality of spindles 44 and 45 can be increased or decreased by changing the mounting angles of the eccentric bearings 46 and 47.

According to this configuration, the distances L2 and L3 between the axes of the spindles 44 and 45 are the processing rollers by rotating the eccentric bearings 46 and 47 and changing the mounting angles of the eccentric bearings 46 and 47. The distances L2 and L3 between the axes of 41 and 42 can be adjusted. As a result, the distances L2 and L3 between the axes of the processing rollers 41 and 42 can be adjusted to match the width L10 of the work W.

Further, the fixtures 71 and 72 are composed of keys, and the engaging portions 7g, 7h, 46b and 47b are composed of key grooves.

According to this configuration, the fixtures 71 and 72 are composed of keys, and the engaging portions 7g, 7h, 46b and 47b are composed of key grooves so that the fixtures 71 and 72 are engaged with the engaging portions 7g, 7h and 46b. , 47b can be easily attached and detached to change the keyway into which the key is inserted.

Further, the eccentric bearings 46 and 47 have spindle installation holes 46c and 47c for rotatably mounting the spindles 44 and 45, and the fixtures 71 and 72 and the engaging portions 7g, 7h, 46b and 47b are spindles. The axial centers 44a and 45a of the installation holes 46c and 47c (spindles 44 and 45) are arranged at least at positions on the center lines O1-O1, O2-O2 and O3-O3 of the eccentric bearings 46 and 47.

According to this configuration, the axial centers 44a and 45a of the spindle installation holes 46c and 47c (spindles 44 and 45) are arranged on the center lines O1-O1, O2-O2 and O3-O3 of the eccentric bearings 46 and 47. Therefore, by rotating the left and right eccentric bearings 46 and 47, the eccentric bearings 46 and 47 can be displaced by a distance twice the maximum eccentric distance d. Therefore, since the processing rollers 41 and 42 can displace the position of the axis 44a1 of the spindle 44 shown in FIG. 1 to the axis 44a3, the distance L2 between the processing rollers 41 and 42 can be expanded to the distance L3. can.

In this way, the wire saw 1 can change the distance L2 between the processing rollers 41 and 42 by rotating the eccentric bearings 46 and 47, so that the support frame 7 can be adjusted to the size of the work W. No need to replace. Therefore, the number of parts, the man-hours for the replacement work, and the work time for the replacement work can be reduced to reduce the cost.

[Modification example]
The present invention is not limited to the above-described embodiment, and various modifications and modifications can be made within the scope of the technical idea thereof, and the present invention may extend to these modified and modified inventions. Of course.

For example, in the embodiment, as a means for fixing the eccentric bearings 46, 47 to the bearing installation holes 7a, 7b of the support frame 7, the engaging portions 7g, 7h, 46b formed in the support frame 7 and the eccentric bearings 46, 47b. , 47b and the keys as fixtures 71 and 72 inserted into the engaging portions 7g, 7h, 46b, 47b have been described as examples, but the present invention is not limited thereto.
Fixtures 71 and 72 may be positioning fixtures such as draw bolts and positioning pins. In that case, the engaging portions 7g, 7h, 46b, 47b may be formed in a female screw shape according to the draw bolt, or may form a positioning hole according to the positioning pin.

Even with this configuration, the same effects as those of the above-described embodiment can be obtained.

1 Wire saw 7 Support frame 7a, 7b Bearing installation hole 7c, 7d Axial center of bearing installation hole 7e, 7f Inner wall surface of bearing installation hole 7g, 7h, 46b, 47b Engagement part (key groove)
40 Machining part 41, 42 Machining roller 43 Wire 44, 45 Spindle 44a, 44a 1, 44a 2, 44a 3, 44a 4, 45a Spindle axis 46, 47 Eccentric bearing 46a, 47a Outer peripheral surface of eccentric bearing 46c, 47c Spindle installation Holes 71,72 Fixtures (keys)
Distance between the axes of the L2 and L3 spindles O1-O1, O2-O2, O3-O3 Center line of eccentric bearing W work

Claims (6)

In a wire saw in which a wire is wound between a plurality of processing rollers, the wire is run along with the rotation of the processing rollers, and the work is cut by the wires.
The spindle that supports the processing roller and
An eccentric bearing that rotatably supports the spindle and
A support frame having a bearing installation hole into which the eccentric bearing is inserted is provided.
A wire saw characterized in that the axis of the bearing installation hole and the axis of the spindle are eccentric. A plurality of engaging portions into which fixtures are detachably inserted are formed on one of the outer peripheral surface of the eccentric bearing and the inner wall surface of the bearing installation hole.
On the other hand, the wire saw according to claim 1, wherein at least one engaging portion is formed into which the fixtures are detachably inserted. The wire saw according to claim 2, wherein the engaging portion is arranged on the outer peripheral surface of the eccentric bearing and the inner wall surface of the bearing installation hole at a predetermined angle interval set in advance. The wire saw according to any one of claims 1 to 3, wherein the distance between the axes of the plurality of spindles can be increased or decreased by changing the mounting angle of the eccentric bearing. The fixture consists of a key
The wire saw according to claim 2 or 3, wherein the engaging portion comprises a keyway. The eccentric bearing has a spindle installation hole for rotatably mounting the spindle.
The wire saw according to claim 2 or 3, wherein the fixture and the engaging portion have the axial center of the spindle installation hole arranged at least at a position on the center line of the eccentric bearing.

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