CN113276295A

CN113276295A - Wire saw

Info

Publication number: CN113276295A
Application number: CN202110156802.1A
Authority: CN
Inventors: 长谷川靖夫; 河津知之; 中村哲也; 阿部克彦
Original assignee: Komatsu NTC Ltd
Current assignee: Komatsu NTC Ltd
Priority date: 2020-02-19
Filing date: 2021-02-04
Publication date: 2021-08-20
Anticipated expiration: 2041-02-04
Also published as: JP2021130164A; JP7474603B2; CN113276295B

Abstract

The invention provides a wire saw capable of easily changing the distance between shafts (distance between shaft centers) of processing rollers without replacing a support frame. A wire saw (1) is a device in which a saw wire (43) is wound between a plurality of processing rollers (41, 42), and the saw wire (43) is moved in accordance with the rotation of the processing rollers (41, 42), thereby cutting a workpiece with the saw wire (43). A wire saw (1) is provided with: spindles (44, 45) for supporting the processing rollers (41, 42); eccentric bearings (46, 47) for rotatably supporting the main shafts (44, 45); and support frames (7, 7) having bearing installation holes (7a, 7b) into which the eccentric bearings (46, 47) are inserted. The axial centers (7c, 7d) of the bearing installation holes (7a, 7b) and the axial centers (44a, 45a) of the main shafts (44, 45) are eccentric to each other.

Description

Wire saw

Technical Field

The present invention relates to wire saws.

Background

Fig. 7 is a schematic view showing a main part of a conventional wire saw 100.

As shown in fig. 7, a conventional wire saw 100 for cutting a workpiece W such as a semiconductor material or a magnetic material by a wire 430 moves at a high speed the wire 430 wound around a plurality of

processing rollers

410 and 420 at a predetermined interval, and pushes the workpiece W against the wire 430 of a processing portion 400, thereby cutting the workpiece W.

In the conventional wire saw 100, when the width L100 of the workpiece W is changed, the wire 430 slackens and deteriorates the machining accuracy, and therefore, it is necessary to change the distance L200 between the shafts of the

spindles

440 and 450 of the

machining rollers

410 and 420 in accordance with the width L100 of the workpiece W. In this case, the support frame 700 supporting the

spindles

440 and 450 needs to be replaced with a support frame having an inter-axis distance L200 corresponding to the width L100 of the workpiece W, which is problematic in that it takes time to replace the support frame.

In the case of a wire saw in which the support frame 700 is integrated with the processing chamber, the entire processing chamber needs to be replaced, and there is a problem in that it takes time to change the distance between the shafts of the spindles.

As a wire saw capable of solving these problems and easily changing the distance between axes, for example, a wire saw described in patent document 1 is known. In the wire saw described in patent document 1, the support frame 22 that rotatably and axially supports the processing rollers 16 and 17 is detachably and replaceably attached to the fixed frame 14, and can be replaced with the support frame 22 having a desired axial distance.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. 2000-218509 (FIGS. 1-3).

Disclosure of Invention

Problems to be solved by the invention

However, in the wire saw described in patent document 1, when changing the distance between the shafts of the processing rollers 16 and 17, it is necessary to replace the wire saw with a support frame having a desired distance between the shafts that is appropriate for the width of the workpiece. Therefore, the operator has prepared a plurality of types of support frames in advance, and when the width of the workpiece is changed, the operator must replace the support frame with one that fits the width of the workpiece. In this case, the wire saw described in patent document 1 has a problem that the number of components, the number of man-hours for managing the components, and the number of man-hours for replacing the support frame increase due to an increase in the number of types of the support frames.

The present invention has been made to solve the above-described problems, and an object thereof is to provide a wire saw in which the distance between the axes (distance between the axes) of the processing rollers can be easily changed without replacing the support frame.

Means for solving the problems

In order to solve the above problem, a wire saw according to the present invention winds a wire between a plurality of processing rollers, moves the wire with rotation of the processing rollers, and cuts a workpiece by the wire, the wire saw including: a main shaft supporting the processing roller; an eccentric bearing rotatably shaft-supporting the main shaft; and a support frame having a bearing installation hole into which the eccentric bearing is inserted, an axis of the bearing installation hole and an axis of the main shaft being eccentric to each other.

Effects of the invention

The invention provides a wire saw capable of easily changing the distance between the shafts (distance between the shaft centers) of the processing rollers without replacing the supporting frame.

Drawings

Fig. 1 is a schematic view of main parts of a wire saw according to an embodiment of the present invention.

Fig. 2 is a schematic sectional view of a main part of a wire saw according to an embodiment of the present invention.

Fig. 3 is a schematic view of main parts of a wire saw according to an embodiment of the present invention, showing a state of a processing portion when the left eccentric bearing is rotated 90 degrees in the clockwise direction and the right eccentric bearing is rotated 90 degrees in the counterclockwise direction in the state of fig. 1.

Fig. 4 is a schematic view of main parts showing a state of a processing portion when the left eccentric bearing in the state of fig. 3 is rotated 90 degrees in the clockwise direction and the right eccentric bearing is further rotated 90 degrees in the counterclockwise direction.

Fig. 5 is a schematic view of main parts showing a state of a processing portion when the left eccentric bearing in the state of fig. 4 is rotated 90 degrees in the clockwise direction and the right eccentric bearing is further rotated 90 degrees in the counterclockwise direction.

Fig. 6 is a schematic view of main parts showing a state of a processing portion when the left eccentric bearing in the state of fig. 5 is rotated 90 degrees in the clockwise direction and the right eccentric bearing is further rotated 90 degrees in the counterclockwise direction.

Fig. 7 is a schematic view showing a main part of a conventional wire saw.

Description of the reference numerals

1 wire saw

7 support frame

7a, 7b bearing mounting hole

Axes of 7c and 7d bearing mounting holes

Inner wall surface of 7e, 7f bearing installation hole

7g, 7h, 46b, 47b engaging parts (pin grooves)

40 processing part

41. 42 working roll

43 saw wire

44. 45 spindle

44a, 44a1, 44a2, 44a3, 44a4 and 45a spindle center

46. 47 eccentric bearing

46a, 47a eccentric bearing outer peripheral surface

46c, 47c main shaft setting hole

71. 72 fittings (Pin)

Distance between the axes of the main shafts L2 and L3

The center lines of O1-O1, O2-O2 and O3-O3 eccentric bearings

W workpiece

Detailed Description

A wire saw 1 according to an embodiment of the present invention will be described with reference to fig. 1 to 6.

In the description of the embodiment of the wire saw 1 according to the present invention, for convenience, the direction side in which the

processing rollers

41 and 42 shown in fig. 1 are viewed from the front side will be described as a front side.

< workpiece >

As shown in fig. 1, the workpiece W is made of a hard and brittle material such as a semiconductor material, a magnetic material, or ceramics. The workpiece W is cut and cut by being pushed against the saw wire 43 of the processing apparatus 4 disposed in the wire saw 1.

Fretsaw

The wire saw 1 is a cutting device for cutting the workpiece W by the saw wire 43 of the processing portion 40 between the

processing rollers

41 and 42 of the processing device 4. The wire saw 1 includes: clamping device 2, elevating gear 3, processingequipment 4, braced frame 7.

Clamping device

The clamping device 2 is a holding mechanism for clamping the workpiece W when the machining device 4 machines the workpiece W. The clamping device 2 indirectly clamps the workpiece W fed into the processing chamber by interposing the workpiece holder 21, and then pushes the workpiece W against the saw wire 43 of the processing portion 40 of the processing device 4 to perform processing.

As shown in fig. 1, a work holder 21 is detachably attached to an upper surface of a work W via a plate-like member such as a glass plate or a metal plate. A plurality of clamping portions (not shown) detachably connected to a workpiece holding member (not shown) of the clamping device 2 are provided on the upper surface of the workpiece holder 21.

Lifting device

As shown in fig. 1, the lifting device 3 is a device for lifting and lowering a workpiece W by attaching a clamp device 2 for holding the workpiece W via a workpiece holder 21 or the like to a lower end portion thereof. The lifting device 3 moves the workpiece W down and presses the saw wire 43 of the processing device 4 to perform processing, or moves the workpiece W up. The lifting device 3 includes: for example, a moving mechanism (not shown) including a ball screw for moving the clamp device 2 up and down; and a movement drive motor (not shown) including a servo motor and the like for operating the movement mechanism.

Processing apparatus

As shown in fig. 1, the machining device 4 is a cutting mechanism that machines the workpiece W clamped by the clamping device 2. As shown in fig. 1 or 2, the processing device 4 includes: the processing

rollers

41, 42; a saw wire 43;

main shafts

44, 45; a drive motor (not shown) for integrally rotationally driving the

processing rollers

41 and 42 and the

spindles

44 and 45;

eccentric bearings

46, 47;

bearings

48, 48; and

gaskets

49, 49. The processing device 4 is provided in a support frame 7 attached to a device main body (not shown).

As shown in fig. 1, a clamp device 2 for supporting a workpiece W is arranged above a processing portion 40 of a processing device 4 so as to be movable up and down by an elevating device 3. When the wire saw 1 is operated, the machining device 4 moves the saw wire 43 between the machining

rollers

41 and 42, and the workpiece W held by the clamp device 2 is lowered by the lifter device 3 and pressed against the saw wire 43 of the machining portion 40 to cut the workpiece W.

< working roll >

As shown in fig. 1 and 2, the

processing rollers

41 and 42 are a pair of left and right cylindrical rollers around which the saw wire 43 is wound. Both end portions of the

processing rollers

41 and 42 are held and supported by the

spindles

44 and 45 so as to be rotatable integrally with the

spindles

44 and 45. The

processing rollers

41 and 42 are disposed to face each other in the horizontal direction at an appropriate interval (distance L2 and distance L3 between the axes) corresponding to the width L10 of the workpiece W. The

processing rollers

41 and 42 are configured to be driven by a drive motor (not shown) to rotate integrally with the main shaft, and the saw wire 43 is moved between the processing

rollers

41 and 42. The

processing rollers

41 and 42 may be provided in a pair at least on both sides of the processing portion 40, and may be provided in a number of 3 or more if they are arranged in parallel with each other with a space therebetween. Hereinafter, a case where two

processing rollers

41 and 42 are used will be described as an example.

< saw wire >

As shown in fig. 1, the saw wire 43 is a processing saw wire that is rotated and moved by the

processing rollers

41 and 42, cuts and cuts the pressed workpiece W. The saw wire 43 is made of, for example, 1 wire. The saw wire 43 is driven by the

processing rollers

41 and 42 so as to advance stepwise as a whole by repeating constant advance and constant retreat, or to advance continuously in one direction.

< spindle >

The

spindles

44 and 45 are round bar-shaped shafts that hold and support both ends of the

processing rollers

41 and 42 on both sides of the processing unit 40 (see fig. 2). The

main shafts

44 and 45 are inserted into main

shaft installation holes

46c and 47c formed in eccentric portions of the

eccentric bearings

46 and 47. The

axial centers

44a and 45a of the

main shafts

44 and 45 are located at positions shifted from the

axial centers

7c and 7d of the

eccentric bearings

46 and 47 by a distance d in the direction of the center lines O3-O3. Therefore, the distances L2, L3 between the

axial centers

44a, 45a of the plurality of

main shafts

44, 45 can be increased or decreased by changing the attachment angle of the

eccentric bearings

46, 47.

< eccentric bearing >

As shown in fig. 1, the

eccentric bearings

46 and 47 are bearings for rotatably supporting the

main shafts

44 and 45. The

eccentric bearings

46 and 47 are rotatably inserted into the bearing

installation holes

7a and 7b of the support frame 7, and fixed at predetermined positions by fixing

members

71 and 72.

Spindle installation holes

46c, 47c into which the

spindles

44, 45 are rotatably inserted are formed in positions of the

eccentric bearings

46, 47 that are offset from the

axes

7c, 7d by a distance d. A plurality of engaging

portions

46b, 47b into which the fixing

members

71, 72 are respectively detachably inserted are formed on one of the outer

peripheral surfaces

46a, 47a of the

eccentric bearings

46, 47 and the

inner wall surfaces

7e, 7f of the

bearing installation holes

7a, 7b, and at least one engaging

portion

7g, 7h into which the fixing

members

71, 72 are respectively detachably inserted is formed on the other. Between the

eccentric bearings

46 and 47 and the

main shafts

44 and 45, a bearing 48 composed of a plurality of bearings and a washer 49 disposed between the bearing 48 and the bearing 48 are provided.

The engaging

portions

46b and 47b are formed by holes of recessed grooves into which the fixing

members

71 and 72 for stopping the rotation of the

eccentric bearings

46 and 47 are inserted. Hereinafter, as an example of the engaging

portions

7g, 7h, 46b, 47b and the fixing

members

71, 72, an embodiment will be described by taking a case where the engaging

portions

7g, 7h, 46b, 47b are pin grooves and the fixing

members

71, 72 are pins as an example.

The engaging

portions

46b, 47b are formed at four positions on the center lines O1-O1, O2-O2, and O3-O3 of the

eccentric bearings

46, 47 in the vertical and horizontal directions, for example. That is, four

engaging portions

46b and 47b are formed on the outer

peripheral surfaces

46a and 47a at an angle of 90 degrees with respect to the

axial centers

7c and 7d of the

eccentric bearings

46 and 47.

The

spindle mounting holes

46c and 47c are shaft holes for rotatably mounting the

spindles

44 and 45. The

spindle mounting holes

46c and 47c are formed at positions shifted by a distance d from the

axial centers

7c and 7d of the

bearing mounting holes

7a and 7b (the eccentric bearings 46 and 47).

Supporting frame

As shown in fig. 1 and 2, the support frame 7 is a pair of frame members having

bearing installation holes

7a and 7b into which the

eccentric bearings

46 and 47 are inserted. The support frame 7 is provided on a column (not shown) mounted on an upper portion of a base (not shown) of the wire saw 1.

The

axial centers

7c and 7d of the

bearing installation holes

7a and 7b and the

axial centers

44a and 45a of the

main shafts

44 and 45 are eccentrically arranged at an arbitrary distance d. The distance d is, for example, about 2mm to 4 mm.

The engaging

portions

7g and 7h are concave slots into which the

fasteners

71 and 72 are inserted and disposed. The

engagement portions

7g and 7h are formed of one hole disposed at predetermined angular positions on the

inner wall surfaces

7e and 7f of the

bearing installation holes

7a and 7 b.

< fixing Member >

The fixing

members

71 and 72 are members for fixing the

eccentric bearings

46 and 47 rotatably inserted into the bearing

installation holes

7a and 7b at predetermined positions. The

fasteners

71, 72 are inserted into insertion holes each formed by four

engaging portions

46b, 47b and four

engaging portions

7g, 7h engaged with the four

engaging portions

46b, 47 b. The

anchors

71, 72 and the engaging

portions

7g, 7h, 46b, 47b are disposed at positions where the

axial centers

44a, 45a of the main

shaft installation holes

46c, 47c are at least on the center lines O1-O1, O2-O2, O3-O3 of the

eccentric bearings

46, 47.

[ Effect of wire saw ]

Next, the operation of the wire saw 1 according to the embodiment of the present invention will be described with reference to fig. 1 to 6.

As shown in fig. 1, when the width L10 of the workpiece W is relatively narrow, the distance L2 between the

axial centers

44a and 45a of the

main shafts

44 and 45 is made narrow in accordance with the width L10 of the workpiece W. This can narrow the distance L2 between the axial centers of the

processing rollers

41 and 42.

When a workpiece W slightly larger than the workpiece W having the width L10 shown in fig. 1 is machined, for example, the left eccentric bearing 46 in the state shown in fig. 1 is rotated 90 degrees in the clockwise direction (arrow a direction), and the right eccentric bearing 47 is rotated 90 degrees in the counterclockwise direction (arrow b direction). Then, as shown in fig. 3, the spindle 44 (machining roller 41) on the left side indicated by the virtual line is displaced downward by a distance d and leftward by the distance d, as is the case with the spindle 44 indicated by the solid line in fig. 3. The right spindle 45 (machining roller 42) indicated by the virtual line is displaced downward by a distance d and rightward by the distance d, as is the case with the spindle 45 indicated by the solid line in fig. 3. Therefore, the distance L2 between the axial centers of the

processing rollers

41 and 42 becomes longer by the same length as the distance L1.

When a larger workpiece W is machined, the left eccentric bearing 46 in the state of fig. 3 is further rotated by 90 degrees in the clockwise direction (arrow a direction), and the right eccentric bearing 47 in the state of fig. 3 is further rotated by 90 degrees in the counterclockwise direction (arrow b direction). Then, the left spindle 44 (machining roller 41) is displaced upward by a distance d and leftward by the distance d, as is the case with the spindle 44 shown by the solid line in fig. 4. The right spindle 45 (machining roller 42) is displaced upward by a distance d and rightward by the distance d, as is the case with the spindle 45 shown by the solid line in fig. 4. Therefore, the distance L2 between the axial centers of the

processing rollers

41 and 42 can be set to a distance L3 that is twice the distance d longer than the distance L1 between the axial centers of the

eccentric bearings

46 and 47.

The left eccentric bearing 46 in the state of fig. 4 is further rotated by 90 degrees in the clockwise direction (arrow a direction), and the right eccentric bearing 47 in the state of fig. 4 is further rotated by 90 degrees in the counterclockwise direction (arrow b direction). Then, the left spindle 44 (machining roller 41) is displaced upward by a distance d and rightward by the distance d, as is the case with the spindle 44 shown by the solid line in fig. 5. The right spindle 45 (machining roller 42) is displaced upward by a distance d and leftward by a distance d, as is the case with the spindle 45 shown by the solid line in fig. 5. Therefore, the distance L2 between the axial centers of the

processing rollers

41 and 42 becomes the distance L1.

The left eccentric bearing 46 in the state of fig. 5 is further rotated by 90 degrees in the clockwise direction (arrow a direction), and the right eccentric bearing 47 in the state of fig. 5 is further rotated by 90 degrees in the counterclockwise direction (arrow b direction). Then, the left spindle 44 (machining roller 41) is displaced downward by a distance d and rightward by the distance d, as is the case with the spindle 44 shown by the solid line in fig. 6. The right spindle 45 (machining roller 42) is displaced upward by a distance d and leftward by a distance d, as is the case with the spindle 45 shown by the solid line in fig. 6. Therefore, the

eccentric bearings

46 and 47 are returned to the original state shown in fig. 1, and the distance L2 between the axial centers of the

processing rollers

41 and 42 can be changed to the shortest length (distance L2).

Thus, the

main shafts

44 and 45 are configured to be displaced when the

eccentric bearings

46 and 47 are rotated. When the

eccentric bearings

46 and 47 are rotated, the

processing rollers

41 and 42 are supported by the

spindles

44 and 45 and are displaced together, and the distance L2 between the axial centers of the

processing rollers

41 and 42 can be increased or decreased.

As described above, as shown in fig. 1, the wire saw 1 according to the present invention is a wire saw 1 in which a wire 43 is wound between a plurality of

processing rollers

41 and 42, and the wire 43 is moved in accordance with the rotation of the

processing rollers

41 and 42, thereby cutting a workpiece W with the wire 43, and includes:

spindles

44, 45 supporting the

processing rollers

41, 42;

eccentric bearings

46, 47 rotatably supporting the

main shafts

44, 45; and support frames 7, 7 having

bearing installation holes

7a, 7b into which

eccentric bearings

46, 47 are inserted, wherein

axial centers

7c, 7d of the

bearing installation holes

7a, 7b and

axial centers

44a, 45a of the

main shafts

44, 45 are eccentric to each other.

With this configuration, in the wire saw 1 according to the present invention, the

axial centers

7c and 7d of the

bearing installation holes

7a and 7b and the

axial centers

44a and 45a of the

spindles

44 and 45 are eccentric to each other, so that the distance L2 between the axial centers of the

processing rollers

41 and 42 can be easily changed without replacing the support frame 7.

Therefore, the wire saw 1 of the present invention can be adapted to workpieces W of different sizes because the distance L2 between the axial centers of the

processing rollers

41 and 42 can be changed without changing the support frame 7 and using one support frame 7. As a result, the wire saw 1 of the present invention can reduce the number of components, the number of man-hours for managing the components, and the number of man-hours for replacing the support frame 7, thereby reducing the cost.

As shown in fig. 1, a plurality of engaging

portions

46b, 47b into which the fixing

members

71, 72 are respectively detachably inserted are formed on one of the outer

peripheral surfaces

46a, 47a of the

eccentric bearings

46, 47 and the

inner wall surfaces

7e, 7f of the

bearing installation holes

7a, 7b, and at least one engaging

portion

7g, 7h into which the fixing

members

71, 72 are respectively detachably inserted is formed on the other.

With this configuration, the

eccentric bearings

46 and 47 and the support frames 7 and 7 are provided with a plurality of engaging

portions

7g, 7h, 46b, and 47b into which the

fasteners

71 and 72 are inserted, so that the

fasteners

71 and 72 can be inserted into the engaging

portions

7g, 7h, 46b, and 47b located at appropriate positions and positioned.

As shown in fig. 1, the

engagement portions

7g, 7h, 46b, 47b are disposed at predetermined angular intervals on the outer

peripheral surfaces

46a, 47a of the

eccentric bearings

46, 47 and the

inner wall surfaces

7e, 7f of the

bearing installation holes

7a, 7 b.

With this configuration, by rotating the

eccentric bearings

46 and 47 by a predetermined angle, the fixing

members

71 and 72 can be inserted into the engaging

portions

7g, 7h, 46b, and 47b, and the

eccentric bearings

46 and 47 can be fixed to predetermined positions of the support frame 7.

Further, as shown in fig. 1, by changing the attachment angle of the

eccentric bearings

46 and 47, the distances L2 and L3 between the

axial centers

44a and 45a of the plurality of

main shafts

44 and 45 can be increased or decreased.

With this configuration, the distances L2, L3 between the axial centers of the

main shafts

44, 45 can be adjusted by changing the attachment angle of the

eccentric bearings

46, 47 by rotating the

eccentric bearings

46, 47, thereby adjusting the distances L2, L3 between the axial centers of the

processing rollers

41, 42. Thus, the distances L2, L3 between the axial centers of the

processing rollers

41, 42 can be adjusted to a distance matching the width L10 of the workpiece W.

The fixing

members

71, 72 are constituted by pins, and the engaging

portions

7g, 7h, 46b, 47b are constituted by pin grooves.

According to this configuration, since the fixing

members

71 and 72 are constituted by pins and the engaging

portions

7g, 7h, 46b, and 47b are constituted by pin grooves, the fixing

members

71 and 72 can be easily attached to and detached from the engaging

portions

7g, 7h, 46b, and 47b, and the pin grooves into which the pins are inserted can be changed.

The

eccentric bearings

46 and 47 have main

shaft installation holes

46c and 47c for rotatably installing the

main shafts

44 and 45, and the

anchors

71 and 72 and the

engagement portions

7g, 7h, 46b and 47b are disposed at positions where the

axial centers

44a and 45a of the main

shaft installation holes

46c and 47c (the main shafts 44 and 45) are at least on the center lines O1-O1, O2-O2 and O3-O3 of the

eccentric bearings

46 and 47.

With this configuration, the

axial centers

44a and 45a of the main

shaft installation holes

46c and 47c (the main shafts 44 and 45) are arranged on the center lines O1-O1, O2-O2, and O3-O3 of the

eccentric bearings

46 and 47, and the

axial centers

44a and 45a of the main

shaft installation holes

46c and 47c (the main shafts 44 and 45) can be displaced by a distance twice the maximum eccentric distance d by rotating the left and right

eccentric bearings

46 and 47. Therefore, since the working

rollers

41 and 42 can displace the position of the axial center 44a1 of the spindle 44 shown in fig. 1 to the axial center 44a3, the distance L2 between the working

rollers

41 and 42 can be extended to the distance L3.

In this way, since the wire saw 1 can change the distance L2 between the processing

rollers

41 and 42 by rotating the

eccentric bearings

46 and 47, it is not necessary to replace the support frame 7 in accordance with the size of the workpiece W. Therefore, the number of components, the number of replacement work steps, and the replacement work time can be reduced, and cost reduction can be achieved.

[ modified examples ]

The present invention is not limited to the above-described embodiments, and various modifications and changes can be made within the scope of the technical idea thereof.

For example, in the embodiment, as the members for fixing the

eccentric bearings

46 and 47 to the

bearing installation holes

7a and 7b of the support frame 7, pin grooves as the engaging

portions

7g, 7h, 46b, and 47b formed in the support frame 7 and the

eccentric bearings

46 and 47, and pins as the fixing

pieces

71 and 72 inserted into the engaging

portions

7g, 7h, 46b, and 47b have been described as an example, but the present invention is not limited thereto.

The

fasteners

71, 72 may be positioning fasteners such as draw bolts and positioning pins. In this case, the engaging

portions

7g, 7h, 46b, and 47b may be formed in a female screw shape by engaging with a draw bolt, or may be formed in a positioning hole by engaging with a positioning pin.

Even with such a configuration, the same operational effects as those of the above embodiment can be obtained.

Claims

1. A wire saw for winding a wire between a plurality of processing rollers and cutting a workpiece with the wire by moving the wire with rotation of the processing rollers, the wire saw comprising:

a main shaft supporting the processing roller;

an eccentric bearing rotatably shaft-supporting the main shaft; and

a support frame having a bearing installation hole into which the eccentric bearing is inserted,

the axis of the bearing installation hole and the axis of the main shaft are eccentric to each other.

2. The wire saw of claim 1,

a plurality of engaging portions into which the fixing members are respectively detachably inserted are formed on one of the outer peripheral surface of the eccentric bearing and the inner wall surface of the bearing installation hole,

at least one engaging portion into which the fixing member is detachably inserted is formed on the other.

3. The wire saw of claim 2,

the engaging portion is disposed at a predetermined angular interval between an outer peripheral surface of the eccentric bearing and an inner wall surface of the bearing installation hole.

4. The wire saw according to any one of claims 1 to 3,

the distance between the axes of the plurality of spindles can be increased or decreased by changing the installation angle of the eccentric bearing.

5. The wire saw of claim 2 or 3,

the fixing member is constituted by a pin, and the engaging portion is constituted by a pin groove.

6. The wire saw of claim 2 or 3,

the eccentric bearing has a spindle providing hole for rotatably shaft-mounting the spindle,

the fixing member and the engaging portion are disposed at positions where the axis of the spindle mounting hole is at least on the center line of the eccentric bearing.