JP2021130149A - Processing device - Google Patents

Abstract

To provide a processing device capable of restraining grease from being discharged into the device.SOLUTION: A processing device 1 includes: a supply passage 92 having therein an air actuator 50 that uses grease and supplying compressed air from a compressed air supply source 90 to the air actuator 50; a valve 93 installed in the supply passage 92; and a housing box 94 for housing the valve 93. The valve 93 reverses, as appropriate, cylinder ports 933, 934 that function as air supply parts for supplying compressed air to the air actuator 50 and cylinder ports 933, 934 that function as exhaust air receiving parts for receiving exhaust air containing grease from the air actuator 50. The housing box 94 includes an air exhaust unit 942 for discharging atmosphere containing exhaust air containing the grease within a box body 941 to outside of an exterior cover 7 of the processing device 1.SELECTED DRAWING: Figure 3

Description

The present invention relates to a processing apparatus having a pneumatic device.

Actuators that use air, such as air cylinders and rotary air actuators, as internal drive sources in processing equipment that processes and processes (cleans, irradiates ultraviolet rays) various workpieces such as cutting equipment, grinding equipment, and laser processing equipment. Pneumatic devices such as air actuators are used (see, for example, Patent Document 1, Patent Document 2 and Patent Document 3). These pneumatic devices are often used because they are light, inexpensive, and clean because the power source is air.

Japanese Unexamined Patent Publication No. 2016-064490 Japanese Unexamined Patent Publication No. 2011-159823 Japanese Unexamined Patent Publication No. 2001-341040

However, in these pneumatic devices, exhaust is also generated by the amount of air supplied, and these are returned to the valve and discharged into the device outside the valve. Lubricating oil such as grease is inside the pneumatic device. As it is used, the air may be in contact with the lubricating oil, and the air returned to the valve and discharged into the device may contain grease components. If the grease component floats in the device, it may adhere to the work piece, which causes defects for precision parts such as semiconductor devices.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a processing apparatus capable of suppressing the discharge of grease into the apparatus.

In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention is a processing apparatus having a pneumatic device using grease inside, and the pneumatic device is supplied with compressed air from a compressed air supply source. It has a supply path to supply, a valve installed in the supply path, and a storage box for accommodating the valve, and the valve has an air supply unit that supplies compressed air to the pneumatic device and the empty. The storage box has a configuration in which the exhaust receiving portion that receives the exhaust containing the grease from the pressure device is appropriately reversed, and the storage box creates an atmosphere containing the exhaust containing the grease inside the storage box of the processing apparatus. It is characterized by including an exhaust unit that discharges to the outside or to the outside of the storage box through a filter.

In the processing apparatus, the pneumatic device may be an air actuator or an air operated valve.

The present invention has the effect of suppressing the discharge of grease into the apparatus.

FIG. 1 is a perspective view showing a configuration example of the processing apparatus according to the first embodiment. FIG. 2 is a diagram schematically showing a storage box and a valve of the processing apparatus shown in FIG. FIG. 3 is a diagram schematically showing the accommodation box, valve, and air actuator shown in FIG. FIG. 4 is a diagram schematically showing a state in which the rod of the air actuator shown in FIG. 3 is extended. FIG. 5 is a diagram schematically showing a storage box and a valve of the processing apparatus according to the second embodiment. FIG. 6 is a cross-sectional view showing an example of an air operated valve which is a pneumatic device of a processing apparatus according to a modification of the first and second embodiments.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The processing apparatus according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the processing apparatus according to the first embodiment. FIG. 2 is a diagram schematically showing a storage box and a valve of the processing apparatus shown in FIG. FIG. 3 is a diagram schematically showing the accommodation box, valve, and air actuator shown in FIG. FIG. 4 is a diagram schematically showing a state in which the rod of the air actuator shown in FIG. 3 is extended.

(Cutting equipment)
The processing device 1 shown in FIG. 1 according to the first embodiment is a cutting device that cuts (processes) the workpiece 200. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. In the workpiece 200, the device 203 is formed in a region divided in a grid pattern by a plurality of scheduled division lines 202 formed in a grid pattern on the surface 201.

Further, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which a central portion is thinned and a thick portion is formed on an outer peripheral portion. In addition to the wafer, a device sealed with a resin is used. A rectangular package substrate having a plurality of wafers, a ceramics substrate composed of ceramics, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, or the like may be used. In the first embodiment, the back surface 204 of the workpiece 200 is attached to an adhesive tape 206 having an annular frame 205 attached to the outer peripheral edge thereof, and is supported by the annular frame 205.

The machining apparatus 1 shown in FIG. 1 is a cutting apparatus in which the workpiece 200 is held by the chuck table 10 and cut by the cutting blade 21 along the scheduled division line 202. As shown in FIG. 1, the processing apparatus 1 has a chuck table 10 that sucks and holds the workpiece 200 on the holding surface 11, and a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 with a cutting blade 21. An imaging unit 30 for photographing the workpiece 200 held on the chuck table 10 and a control unit 100 are provided.

Further, as shown in FIG. 1, the processing apparatus 1 includes a moving unit 40 that relatively moves the chuck table 10 and the cutting unit 20. The moving unit 40 has an X-axis moving unit 41 that processes and feeds the chuck table 10 in the horizontal direction and the X-axis direction parallel to the lateral direction of the device main body 2, and the cutting unit 20 in the horizontal direction and the longitudinal direction of the device main body 2. The Y-axis moving unit 42, which is parallel and is indexed and fed in the Y-axis direction orthogonal to the X-axis direction, and the cutting unit 20 are cut in the Z-axis direction parallel to the vertical direction orthogonal to both the X-axis direction and the Y-axis direction. The Z-axis moving unit 43 to be fed and the rotary moving unit 44 that rotates the chuck table 10 around the axis parallel to the Z-axis direction and is machined and fed in the X-axis direction together with the chuck table 10 by the X-axis moving unit 41. Be prepared. As shown in FIG. 1, the processing apparatus 1 is a cutting apparatus provided with two cutting units 20, that is, a two-spindle dier, a so-called facing dual type cutting apparatus.

The X-axis moving unit 41 moves the chuck table 10 together with the rotary moving unit 44 in the X-axis direction, which is the machining feed direction, so that the chuck table 10 and the cutting unit 20 are relatively machined and fed along the X-axis direction. To do. The X-axis moving unit 41 has a loading / unloading area 301 in which the workpiece 200 is loaded / unloaded from the chuck table 10 and a machining region 302 in which the workpiece 200 held in the chuck table 10 is machined by the cutting unit 20. It is moved in the X-axis direction over.

The Y-axis moving unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing and feeding direction, so that the chuck table 10 and the cutting unit 20 are relatively indexed and fed along the Y-axis direction. The Z-axis moving unit 43 cuts and feeds the chuck table 10 and the cutting unit 20 relatively along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction, which is the cutting-feed direction.

The X-axis moving unit 41, the Y-axis moving unit 42, and the Z-axis moving unit 43 include a well-known ball screw rotatably provided around the axis, a well-known motor for rotating the ball screw around the axis, and a chuck table 10. Alternatively, a well-known guide rail that movably supports the cutting unit 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction is provided.

The chuck table 10 has a disk shape, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. Further, the chuck table 10 is provided by the X-axis moving unit 41 so as to be movable in the X-axis direction over the carry-in / out area 301 and the machining area 302, and is provided by the rotary moving unit 44 around the axis center parallel to the Z-axis direction. Is rotatably provided. The chuck table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In the first embodiment, the chuck table 10 sucks and holds the back surface 204 side of the workpiece 200 via the adhesive tape 206.

Further, as shown in FIG. 1, a plurality of clamp portions 12 for clamping the annular frame 205 are provided around the chuck table 10. The clamp portion 12 has a state in which the annular frame 205 is clamped by the rotary air actuator 13 which is a pneumatic device driven by the compressed air supplied from the compressed air supply source shown in FIG. 2, and a state in which the clamp of the annular frame 205 is released. It is rotated over and.

The cutting unit 20 is a processing unit to which a cutting blade 21 for cutting the workpiece 200 held on the chuck table 10 is detachably attached. Each of the cutting units 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 42 with respect to the workpiece 200 held by the chuck table 10, and is provided in the Z-axis direction by the Z-axis moving unit 43. It is provided so that it can be moved.

As shown in FIG. 1, the cutting unit 20 is provided on a pillar portion of a gate-shaped support frame 3 erected from the apparatus main body 2 via a Y-axis moving unit 42, a Z-axis moving unit 43, and the like. The cutting unit 20 can position the cutting blade 21 at an arbitrary position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit 42 and the Z-axis moving unit 43.

As shown in FIG. 1, the cutting unit 20 includes a cutting blade 21, a spindle housing 22 movably provided in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 42 and the Z-axis moving unit 43, and a spindle housing. A spindle 23 that is rotatably provided around the axis of 22 and is rotated by a motor (not shown) and has a cutting blade 21 mounted on the tip, a blade cover 24 fixed to the tip surface of the spindle housing 22, and a cutting blade. A nozzle 25 for supplying cutting water to 21 is provided.

The cutting blade 21 is an ultra-thin cutting grindstone having a substantially ring shape. In the first embodiment, as shown in FIG. 2, the cutting blade 21 is arranged on an annular circular base 211 and an outer peripheral edge of the circular base 211 to cut the workpiece 200. It is a so-called hub blade provided with 212. The cutting edge 212 is formed of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal and resin to have a predetermined thickness. In the present invention, the cutting blade 21 may be a so-called washer blade composed of only the cutting blade 212.

The spindle 23 rotates the cutting blade 21 around the axis by a motor. The blade cover 24 covers the cutting blade 21. As shown in FIG. 2, the blade cover 24 includes a cover main body 241 fixed to the tip surface of the spindle housing 22, an upper cover 242 covering the upper side of the cutting blade 21, and a cutting blade 21 fixed to the cover main body 241. It includes a front cover 243 that covers the front side of the carry-in / out area 301 side, and a rear cover 244 that is fixed to the upper cover 242 and covers the rear side of the cutting blade 21 on the machining area 302 side.

The nozzle 25 includes a shower nozzle 251 provided on the front cover 243 and a pair of cooler nozzles 252 attached to the lower end of the rear cover 244. The shower nozzle 251 faces the cutting edge 212 of the cutting blade 21 in the X-axis direction, and supplies cutting water to the cutting edge 212 of the cutting blade 21 during cutting. The cooler nozzles 252 extend parallel to the X-axis direction and are arranged at intervals in the Y-axis direction. The cooler nozzle 252 positions the lower end of the cutting blade 212 of the cutting blade 21 between each other, and supplies cutting water to the lower end of the cutting blade 212 of the cutting blade 21 during cutting.

Further, in the first embodiment, the blade cover 24 includes an air actuator 50 which is a pneumatic device for moving the rear cover 244 with respect to the cover main body 241 in the X-axis direction. As shown in FIGS. 3 and 4, the air actuator 50 includes a cylinder 51 in which compressed air is supplied from the compressed air supply source 90 via a regulator 91, and a first chamber 511 and a second chamber 512 in the cylinder 51. A piston 52 for partitioning into a piston 52 and a rod 53 connected to the piston 52 are provided. The cylinder 51 is attached to the cover body 241. The rod 53 is arranged parallel to the X-axis direction, and its tip is attached to the rear cover 244.

In the first embodiment, as shown in FIG. 3, in the air actuator 50, when compressed air is supplied into the first chamber 511 and the second chamber 512 is released to the atmosphere, the rod 53 shrinks, and FIG. 2 shows. The rear cover 244 is positioned at a cutting position close to the cover body 241 indicated by the dotted line. The cutting position is a position where the rear cover 244 is positioned when the cutting unit 20 cuts the workpiece 200. As shown in FIG. 4, in the air actuator 50, when compressed air is supplied into the second chamber 512 and the first chamber 511 is released to the atmosphere, the rod 53 expands and the cover main body shown by the solid line in FIG. The rear cover 244 is positioned at a blade attachment / detachment position separated from 241. The blade attachment / detachment position is a position where the rear cover 244 is positioned when the cutting blade 21 is attached / detached to / from the spindle 23 of the cutting unit 20.

The axes of the cutting blade 21 and the spindle 23 of the cutting unit 20 are parallel to the Y-axis direction.

The image pickup unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The image pickup unit 30 includes an image pickup element that captures a region to be divided of the workpiece 200 before cutting held on the chuck table 10. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 30 photographs the workpiece 200 held on the chuck table 10 to obtain an image for performing alignment for aligning the workpiece 200 and the cutting blade 21, and obtains the obtained image. Output to the control unit 100.

Further, the processing apparatus 1 has an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction, and a Y-axis direction position (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. It includes a detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction by the pulse of the motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the positions of the chuck table 10 in the X-axis direction, the cutting unit 20 in the Y-axis direction, or the Z-axis direction to the control unit 100. .. In the first embodiment, the positions of each component of the processing apparatus 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined with reference to a predetermined reference position (not shown).

Further, the processing apparatus 1 includes a cassette elevator 60 on which a cassette 61 for accommodating the workpiece 200 before and after cutting is placed and the cassette 61 is moved in the Z-axis direction, and a cleaning unit for cleaning the workpiece 200 after cutting. The 70 and a transport unit 80 for moving the workpiece 200 in and out of the cassette 61 and transporting the workpiece 200 are provided.

The cleaning unit 70 sucks and holds the work piece 200 after cutting and supplies wash water to the spinner table 71 that rotates in the Z-axis direction and around the axis, and the work piece 200 that is sucked and held by the spinner table 71. A supply nozzle 72 and an elevating air actuator (not shown) for elevating and lowering the spinner table 71 in the Z-axis direction are provided.

The transport unit 80 raises and lowers the gripping unit 81 that grips the annular frame 205 that supports the workpiece 200, the air actuator 82 for raising and lowering that is a pneumatic device that moves the gripping unit 81 in the Z-axis direction, and the gripping unit 81. Along with the air actuator 82, the air actuator 83 for horizontal movement, which is a pneumatic device for moving in the Y-axis direction, is provided.

The elevating air actuators and air actuators 82 and 83 of the cleaning unit 70 have the same configuration as the air actuator 50.

The rotary air actuator 13, the air actuator 50, the lifting air actuator of the cleaning unit 70, and the air actuators 82 and 83, which are the above-mentioned pneumatic devices, use grease as a lubricating oil inside. The rotary air actuator 13, the air actuator 50, the elevating air actuator of the cleaning unit 70, and the air actuators 82 and 83 have the same configuration.

The air actuator 50, the air actuator for raising and lowering the cleaning unit 70, and the air actuators 82 and 83 use grease internally in order to suppress friction between the piston 52 and the cylinder 51. For this reason, the air actuator 50, the elevating air actuator of the cleaning unit 70, and the air actuators 82 and 83 have an atmosphere containing grease in the cylinder 51, that is, the first chamber 511 and the second chamber 512.

Further, as shown in FIG. 1, the processing apparatus 1 is installed on a processing chamber wall 6 that surrounds the outside of the processing region 302 to suppress the diffusion of cutting water, and on the cassette elevator 60 and the cassette elevator 60 on the apparatus main body 2. It is provided with an exterior cover 7 that covers the cassette 61 except for the cassette 61. In the first embodiment, the processing chamber wall 6 forms a processing chamber 303 in the processing apparatus 1 for accommodating the chuck table 10 and the cutting unit 20 located in the processing region 302. The exterior cover 7 houses the processing chamber wall 6, that is, the chuck table 10, the cutting unit 20, the cleaning unit 70, and the transport unit 80.

Further, as shown in FIGS. 2, 3 and 4, the processing apparatus 1 supplies the rotary air actuator 13 and the air actuators 50, 82, 83 with a supply path 92 for supplying compressed air from the compressed air supply source 90. It has a valve 93 installed on the road 92 and a storage box 94 for accommodating the valve 93.

As shown in FIG. 2, the supply path 92 branches from the trunk supply path 921 and the trunk supply path 921 provided with a regulator 91 which is connected to the compressed air supply source 90 and adjusts the pressure of the compressed air, and is pneumatic. It has a one-to-one correspondence with the rotary air actuator 13 and the air actuators 50, 82, 83, which are devices, and has a corresponding rotary air actuator 13 and a branch supply path 922 connected to the air actuators 50, 82, 83.

The branch supply path 922, the rotary air actuator 13 and the air actuators 50, 82, 83, which are pneumatic devices, and the valve 93 have a one-to-one correspondence. For this purpose, the processing apparatus 1 has the same number of branch supply paths 922, rotary air actuators 13, air actuators 50, 82, 83, and valves 93, and in the first embodiment, a plurality of them. Hereinafter, since the configurations of the rotary air actuator 13 and the air actuators 50, 82, 83, and the branch supply paths 922 and the valve 93 corresponding thereto are the same as each other, the air actuator 50 and the branch supply path 922 corresponding to the air actuator 50 And the valve 93 will be described on behalf of the valve 93.

The branch supply path 922 connects to the supply port 931 of the valve 93 to supply compressed air to the supply port 931. Further, the supply path 92 is a first chamber supply path 923 connected to the first chamber 511 of the air actuator 50 and the valve 93, and a second chamber supply path connected to the second chamber 512 of the air actuator 50 and the valve 93. It is equipped with 924. The first chamber supply path 923 and the second chamber supply path 924 are paired with each other and correspond to the valve 93, the rotary air actuator 13, and the air actuators 50, 82, 83 on a one-to-one basis.

The first chamber supply path 923 can supply compressed air from the compressed air supply source 90 to the first chamber 511 of the air actuator 50, and releases the first chamber 511 of the air actuator 50 to the atmosphere via the valve 93. Is possible. The second chamber supply path 924 can supply compressed air from the compressed air supply source 90 to the second chamber 512 of the air actuator 50, and releases the second chamber 512 of the air actuator 50 to the atmosphere via the valve 93. Is possible. The term "opening the first chamber 511 and the second chamber 512 to the atmosphere" as used herein means communicating the first chamber 511 and the second chamber 512 with the inside of the storage box 94.

The valve 93 is a valve 93 that supplies compressed air to one of the first chamber 511 and the second chamber 512 of the air actuator 50 and releases the other to the atmosphere to expand and contract the rod 53 of the air actuator 50, that is, a drive source. A certain compressed air is supplied to the air actuator 50 to drive the air actuator 50. The valve 93 is a so-called four-way solenoid valve (also referred to as a direction switching valve) including a supply port 931, an exhaust port 932, and a pair of cylinder ports 933 and 934. In the first embodiment, one supply port 931 is provided and connected to a branch supply path 922 of the supply path 92, and one exhaust port 932 is provided.

One of the pair of cylinder ports 933 and 934, the cylinder port 933, communicates with the inside of the first chamber supply path 923 and the first chamber 511. The other cylinder port 934 communicates with the inside of the second chamber supply path 924 and the second chamber 512. In this way, in the valve 93, the supply port 931 connects to the branch supply path 922 of the supply path 92, one cylinder port 933 communicates with the first chamber supply path 923, and the other cylinder port 934 communicates with the second chamber supply path 924. It is installed in the supply path 92 by communicating with.

Further, the valve 93 has an electromagnet (not shown), and by switching between supplying a current to the electromagnet and stopping the supply of the current to the electromagnet, one of the cylinder ports 933 shown in FIG. 3 becomes the supply port 931. A state in which the other cylinder port 934 communicates with the exhaust port 932 and a state in which one cylinder port 933 shown in FIG. 4 communicates with the exhaust port 932 and the other cylinder port 934 communicates with the supply port 931. It is provided with a valve body (not shown) for switching between.

In the valve 93, when one cylinder port 933 shown in FIG. 3 communicates with the supply port 931 and the other cylinder port 934 communicates with the exhaust port 932, one cylinder port 933 communicates with the air actuator 50 in the first chamber 511. The compressed air from the compressed air supply source 90 is supplied to the cylinder port 934, and the other cylinder port 934 receives the exhaust containing grease from the second chamber 512 of the air actuator 50 and guides it to the inside of the accommodation box 94 via the exhaust port 932. The rod 53 of the air actuator 50 is reduced. In the state shown in FIG. 3, one cylinder port 933 functions as an air supply unit that supplies compressed air from the compressed air supply source 90 into the first chamber 511 of the air actuator 50, and the other cylinder port 934 serves as an air supply unit. It functions as an exhaust receiving unit that receives exhaust including grease from the second chamber 512 of the air actuator 50.

In the valve 93, when one cylinder port 933 shown in FIG. 4 communicates with the exhaust port 932 and the other cylinder port 934 communicates with the supply port 931, one cylinder port 933 communicates with the air actuator 50 in the first chamber 511. The exhaust containing the grease from the air actuator 50 is received and guided to the inside of the accommodation box 94 via the exhaust port 932, and the other cylinder port 934 supplies the compressed air from the compressed air supply source 90 into the second chamber 512 of the air actuator 50. Then, the rod 53 of the air actuator 50 is extended. In the state shown in FIG. 4, one cylinder port 933 functions as an exhaust receiving unit for receiving exhaust gas containing grease from the first chamber 511 of the air actuator 50, and the other cylinder port 934 is the second air actuator 50. It functions as an air supply unit that supplies compressed air from the compressed air supply source 90 into the chamber 512.

Thus, in the first embodiment, the valve 93 is provided with the valve body described above, so that the cylinder ports 933 and 934 function as an air supply unit that supplies the compressed air from the compressed air supply source 90 to the air actuator 50. It has a configuration in which the state in which it is exerted and the state in which it exerts a function as an exhaust receiving unit that receives exhaust gas including grease from the air actuator 50 are appropriately reversed.

The storage box 94 processes an atmosphere including an exhaust containing grease supplied from a box-shaped box body 941 that houses a plurality of valves 93 and the inside of the box body 941 of the storage box 94. It is provided with an exhaust unit 942 that discharges to the outside of the device 1. The exhaust unit 942 has an exhaust duct 943 having one end connected to the box body 941 and communicating with the inside of the box body 941 and the other end penetrating the exterior cover 7 and communicating with the outside of the exterior cover 7 of the processing apparatus 1. The exhaust duct 943 is provided with an exhaust fan (not shown) for discharging the gas in the exhaust duct 943 to the outside of the exterior cover 7 of the processing apparatus 1.

Further, in the first embodiment, as shown in FIG. 1, the exhaust duct 943 has one end connected to the processing chamber wall 6 and the other end of the processing chamber exhaust duct 304 communicating with the inside of the processing chamber 303. The exhaust unit 942 discharges the atmosphere including the exhaust containing grease in the box body 941 of the accommodation box 94 to the outside of the exterior cover 7 of the processing apparatus 1, and processes the atmosphere inside the processing chamber wall 6, that is, inside the processing chamber 303. It is discharged to the outside of the exterior cover 7 of the device 1.

The control unit 100 controls each of the above-mentioned units of the processing device 1 to cause the processing device 1 to perform a processing operation on the workpiece 200. The control unit 100 is an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and input / output. A computer having an interface device. In the arithmetic processing unit of the control unit 100, the arithmetic processing unit executes arithmetic processing according to a computer program stored in the storage device, and a control signal for controlling the processing apparatus 1 is sent to the processing apparatus via an input / output interface device. Output to the above-mentioned component of 1.

Further, the control unit 100 is connected to a display unit 102 composed of a liquid crystal display device or the like for displaying a processing operation state, an image, or the like, and an input unit used by an operator when registering processing content information or the like. .. The input unit is composed of at least one of a touch panel provided on the display unit 102 and an external input device such as a keyboard.

As described above, in the processing apparatus 1 according to the first embodiment, since the box body 941 of the accommodation box 94 accommodates a plurality of valves 93, the valves 93 exhaust the exhaust gas including the grease from the air actuator 50 from the exhaust port 932. Exhaust into the box body 941. The processing device 1 includes an exhaust unit 942 in which the storage box 94 discharges an atmosphere including exhaust including grease inside the box body 941 to the outside of the exterior cover 7 of the processing device 1. In this way, the processing device 1 accommodates the valve 93 in the box body 941 of the storage box 94, and the storage box 94 discharges the atmosphere inside the box body 941 to the outside of the exterior cover 7 of the processing device 1. Since the 942 is provided, it is possible to prevent the atmosphere containing the grease of the air actuator 50 returning from the air actuator 50 from being discharged to the inside of the exterior cover 7 inside the processing apparatus 1. As a result, the processing apparatus 1 has the effect of suppressing the discharge of grease to the inside of the exterior cover 7.

[Embodiment 2]
The processing apparatus according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a diagram schematically showing a storage box and a valve of the processing apparatus according to the second embodiment. In FIG. 5, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In the processing apparatus 1 according to the second embodiment, as shown in FIG. 5, the exhaust unit 942-2 of the accommodating box 94 does not include the exhaust duct 943, and the hole 944 penetrates the outer wall of the box body 941 of the accommodating box 94. And a filter 945 that closes the hole 944, the other end of the processing chamber exhaust duct 304 penetrates the exterior cover 7, and the gas in the processing chamber exhaust duct 304 is discharged to the outside of the exterior cover 7 of the processing apparatus 1. The configuration is the same as that of the first embodiment except that an exhaust fan (not shown) is provided.

The filter 945 regulates the passage of grease in the atmosphere and allows expectations to pass. In the processing apparatus 1 according to the second embodiment, the exhaust unit 942-2 of the accommodating box 94 creates an atmosphere including the exhaust including grease inside the box body 941 of the accommodating box 94 inside the exterior cover 7 via the filter 945. It is discharged to the outside of the box body 941 of the storage box 94.

In the processing apparatus 1 according to the second embodiment, since the box body 941 of the housing box 94 accommodates a plurality of valves 93, the valves 93 exhaust the exhaust including grease from the air actuator 50 from the exhaust port 932 into the box body 941. do. The processing apparatus 1 is an exhaust unit 942- It has 2. As described above, the processing apparatus 1 according to the second embodiment accommodates the valve 93 in the box main body 941 of the accommodating box 94, and the accommodating box 94 passes the atmosphere inside the box main body 941 through the filter 945 of the accommodating box 94. Since the exhaust unit 942-2 that discharges to the outside of the box body 941 is provided, the atmosphere containing the grease of the air actuator 50 that returns the exhaust from the air actuator 50 is discharged inside the exterior cover 7 that is inside the processing device 1. It can be suppressed. As a result, the processing apparatus 1 has the effect of suppressing the discharge of grease to the inside of the exterior cover 7.

The present invention is not limited to the above embodiments and modifications. That is, it can be modified in various ways without departing from the gist of the present invention. For example, the processing apparatus 1 according to the first and second embodiments includes the air operated valve 110 shown in FIG. 6 as a pneumatic device, and the valve 93 transfers compressed air as a drive source to the air operated valve 110. It may be supplied to drive the air operated valve 110. Note that FIG. 6 is a cross-sectional view showing an example of an air operated valve which is a pneumatic device of the processing apparatus according to the modified examples of the first and second embodiments. In FIG. 6, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

The air operated valve 110 shown in FIG. 6 has a valve box provided with a supply port 111 for supplying a fluid composed of at least one of a liquid and a gas, and a discharge port 112 for supplying the fluid to various devices. The 113, two valve seats 114 provided in the valve box 113 and communicating with the supply port 111 or the discharge port 112, and two valve bodies 115 for opening and closing the valve seat 114 are provided. The valve box 113 has an inner space divided into a first chamber 116 that can communicate with the supply port 931 and a second chamber 117 that can communicate with the discharge port 112, and is connected to the valve body 115 in each of the chambers 116 and 117. It houses the plate-shaped member 118.

Further, the valve box 113 has a spring 119 that urges the plate-shaped member 118 in the first chamber 116 in the direction in which the valve body 115 connected to the plate-shaped member 118 in the first chamber 116 closes the valve seat 114. A spring housed in the first chamber 116 and urging the plate-shaped member 118 in the second chamber 117 in a direction in which the valve body 115 connected to the plate-shaped member 118 in the second chamber 117 opens the valve seat 114. 120 is housed in the second room 117.

In the air operated valve 110 shown in FIG. 6, compressed air from the compressed air supply source 90 is supplied from the valve 93 to the first chamber 116 through the first chamber supply path 923, and the second chamber 117 is the second chamber supply path 924. And when released to the atmosphere by the valve 93, the two valve bodies 115 each open the valve seat 114 and discharge the fluid supplied from the supply port 111 from the discharge port 112. In the air operated valve 110 shown in FIG. 6, the first chamber 116 is released to the atmosphere by the first chamber supply path 923 and the valve 93, and the compressed air from the compressed air supply source 90 is second from the valve 93 to the second chamber 117. By being supplied through the chamber supply path 924, the two valve bodies 115 each close the valve seat 114, blocking the flow of fluid from the supply port 111 to the discharge port 112. In this way, the air operated valve 110 is driven by supplying compressed air from the valve 93.

Further, in the above-described first embodiment, the processing apparatus 1 is a cutting apparatus for cutting the workpiece 200, but the present invention is not limited to the cutting apparatus, for example, a grinding apparatus for grinding the workpiece 200. , A polishing device that polishes the workpiece 200, or a laser processing apparatus that laser-processes the workpiece 200, and various other processing devices that perform various processing on the workpiece 200 may be used.

1 Processing equipment 13 Rotary air actuator (pneumatic equipment)
50 Air actuator (pneumatic equipment)
82 Elevating air actuator (pneumatic equipment)
83 Horizontal movement air actuator (pneumatic equipment)
90 Compressed air supply source 92 Supply path 93 Valve 94 Containment box 110 Air operated valve (pneumatic equipment)
933,934 Cylinder port (air supply part, exhaust receiving part)
942,942-2 Exhaust unit 943 Exhaust duct 945 filter

Claims (2)

A processing device that has a pneumatic device that uses grease inside.
It has a supply path for supplying compressed air from a compressed air supply source to the pneumatic device, a valve installed in the supply path, and a storage box for accommodating the valve.
The valve is
It has a configuration in which the air supply unit that supplies compressed air to the pneumatic device and the exhaust receiving unit that receives the exhaust gas containing the grease from the pneumatic device are appropriately reversed.
The storage box
A processing apparatus including an exhaust unit that exhausts an atmosphere including exhaust containing grease inside the accommodating box to the outside of the processing apparatus or to the outside of the accommodating box through a filter. The processing apparatus according to claim 1, wherein the pneumatic device is an air actuator or an air operated valve.

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