JP2021114392A - 発光体、電子線検出器、及び走査型電子顕微鏡 - Google Patents
発光体、電子線検出器、及び走査型電子顕微鏡 Download PDFInfo
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Abstract
Description
図1は、第1実施形態に係る発光体10の構成を示す断面図であって、厚み方向に沿った断面を示している。発光体10は、入力した電子を光に変換する。図1に示すように、発光体10は、基板12と、基板12の主面12a上に設けられた窒化物半導体層14と、窒化物半導体層14上に設けられた導電層18と、を備える。導電層18の表面は、電子入力面10aを構成する。
図6は、第2実施形態に係る電子線検出器20の構成を示す断面図であって、厚み方向に沿った断面を示している。この電子線検出器20は、第1実施形態の発光体10と、絶縁性の光学部材(光ガイド部材)22と、光検出器30とを備える。光学部材22は、本実施形態における光透過部材の例であり、絶縁性を有し、発光体10と光検出器30との間に介在して発光体10及び光検出器30を一体化する。発光体10の基板12の裏面12bと、光検出器30の光入射面30aとは、光学部材22を介して光学的に結合されている。具体的には、光学部材22の一端面は光入射面30aと接合されており、光学部材22の他端面は発光体10と接合されている。光学部材22は、ファイバオプティックプレート(FOP)等のライトガイドであってもよく、発光体10において発生した光を光入射面30a上に集光するレンズであってもよい。
第2実施形態の電子線検出器20は、走査型電子顕微鏡(Scanning Electron Microscope:SEM)及び質量分析装置等に用いることができる。図7は、第3実施形態に係る測長SEM40の構成を概略的に示す図である。測長SEM40は、被検査対象物の画像を取得するSEM41と、全体の制御を行う制御部42と、取得した画像などを磁気ディスクや半導体メモリなどに記憶する記憶部43と、プログラムに従い演算を行う演算部44と、を備える。SEM41は、試料ウェハ45を搭載する可動ステージ46、試料ウェハ45に電子線EB1を照射する電子源47、試料ウェハ45から発生した二次電子及び反射電子を検出する複数(図には3つを例示)の電子線検出器20を備える。電子線検出器20の構成は、第2実施形態と同様である。更に、SEM41は、電子線EB1を試料ウェハ45上に収束させる電子レンズ(図示せず)、電子線EB1を試料ウェハ45上で走査するための偏向器(図示せず)、及び、各電子線検出器20からの信号をデジタル変換してデジタル画像を生成する画像生成部48等を備える。可動ステージ46、電子源47、電子線検出器20のうち少なくとも発光体10、電子レンズ、及び偏向器は、真空チャンバ50内に収容されている。画像生成部48及び各電子線検出器20は、配線を介して互いに電気的に接続されている。画像生成部48、制御部42、記憶部43、及び演算部44は、データバス49を介して互いに電気的に接続されている。
Claims (12)
- 入力した電子を光に変換する発光体であって、
前記電子の入力により前記光を発する多重量子井戸構造と、
前記多重量子井戸構造上に設けられる電子入力面と、
を備え、
前記多重量子井戸構造を構成する複数の障壁層に含まれる第1の障壁層は、前記複数の障壁層に含まれ前記第1の障壁層に対して前記電子入力面側に位置する第2の障壁層よりも厚い、発光体。 - 前記第2の障壁層は、前記複数の障壁層のうち前記電子入力面に最も近い障壁層である、請求項1に記載の発光体。
- 前記第2の障壁層は、前記複数の障壁層の中で最も薄い、請求項2に記載の発光体。
- 前記第2の障壁層の厚さは、前記複数の障壁層の平均厚さの80%以下である、請求項2または3に記載の発光体。
- 前記第2の障壁層の厚さは、前記複数の障壁層の平均厚さの20%以下である、請求項4に記載の発光体。
- 前記第1の障壁層は、前記複数の障壁層のうち前記電子入力面に最も近い障壁層と隣り合う障壁層であり、前記第1の障壁層の厚さは、前記複数の障壁層の平均厚さの90%以下である、請求項2〜5のいずれか1項に記載の発光体。
- 前記第1の障壁層の厚さは、前記複数の障壁層の平均厚さの80%以下である、請求項6に記載の発光体。
- 前記複数の障壁層は、前記電子入力面から離れるほど厚くなる、請求項1〜7のいずれか1項に記載の発光体。
- 互いに隣り合う前記障壁層同士の厚さの差は、前記電子入力面から離れるほど小さくなる、請求項1〜8のいずれか1項に記載の発光体。
- 前記多重量子井戸構造を構成する複数の井戸層の組成が互いに同一である、請求項1〜9のいずれか1項に記載の発光体。
- 請求項1〜10のいずれか1項に記載の発光体と、
前記多重量子井戸構造における前記電子入力面とは反対側の面と光学的に結合され、前記多重量子井戸構造が発する前記光に対して感度を有する光検出器と、
前記発光体と前記光検出器との間に介在して前記発光体及び前記光検出器を一体化するとともに絶縁性を有する光透過部材と、
を備える、電子線検出器。 - 請求項1〜10のいずれか1項に記載の発光体と、
前記多重量子井戸構造における前記電子入力面とは反対側の面と光学的に結合され、前記多重量子井戸構造が発する前記光に対して感度を有する光検出器と、
少なくとも前記発光体が内部に設置された真空チャンバと、
を備え、
前記真空チャンバ内に配置された試料の表面上において電子線を走査し、前記試料からの二次電子及び反射電子を前記発光体に導き、前記試料における走査位置と前記光検出器の出力とを対応づけることにより前記試料の像を撮影する、走査型電子顕微鏡。
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JP2020006121A JP6857263B1 (ja) | 2020-01-17 | 2020-01-17 | 発光体、電子線検出器、及び走査型電子顕微鏡 |
CN202080093102.6A CN114981383A (zh) | 2020-01-17 | 2020-11-30 | 发光体、电子束检测器和扫描型电子显微镜 |
DE112020006542.1T DE112020006542T5 (de) | 2020-01-17 | 2020-11-30 | Lichtemittierender Körper, Elektronenstrahldetektor und Rasterelektronenmikroskop |
KR1020227016698A KR20220127226A (ko) | 2020-01-17 | 2020-11-30 | 발광체, 전자선 검출기 및 주사형 전자 현미경 |
US17/775,993 US20220392740A1 (en) | 2020-01-17 | 2020-11-30 | Light-emitting body, electron beam detector, and scanning electron microscope |
PCT/JP2020/044496 WO2021145078A1 (ja) | 2020-01-17 | 2020-11-30 | 発光体、電子線検出器、及び走査型電子顕微鏡 |
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JP2016015379A (ja) * | 2014-07-01 | 2016-01-28 | Dowaホールディングス株式会社 | 電子線励起型発光エピタキシャル基板及びその製造方法、並びに電子線励起型発光装置 |
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JP2005298603A (ja) * | 2004-04-08 | 2005-10-27 | Hamamatsu Photonics Kk | 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置 |
JP2016015379A (ja) * | 2014-07-01 | 2016-01-28 | Dowaホールディングス株式会社 | 電子線励起型発光エピタキシャル基板及びその製造方法、並びに電子線励起型発光装置 |
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US20220392740A1 (en) | 2022-12-08 |
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