JP2021082684A - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
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- JP2021082684A JP2021082684A JP2019208023A JP2019208023A JP2021082684A JP 2021082684 A JP2021082684 A JP 2021082684A JP 2019208023 A JP2019208023 A JP 2019208023A JP 2019208023 A JP2019208023 A JP 2019208023A JP 2021082684 A JP2021082684 A JP 2021082684A
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 110
- 238000012545 processing Methods 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims description 42
- 230000007246 mechanism Effects 0.000 claims description 38
- 238000001816 cooling Methods 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 10
- 239000011343 solid material Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 134
- 239000004065 semiconductor Substances 0.000 description 112
- 229910052736 halogen Inorganic materials 0.000 description 62
- 150000002367 halogens Chemical class 0.000 description 62
- 238000012546 transfer Methods 0.000 description 53
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 239000012535 impurity Substances 0.000 description 14
- 230000005855 radiation Effects 0.000 description 14
- 229910001873 dinitrogen Inorganic materials 0.000 description 13
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 13
- 229910052724 xenon Inorganic materials 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 8
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
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- 238000005468 ion implantation Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
- F27D2007/023—Conduits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/0005—Cooling of furnaces the cooling medium being a gas
- F27D2009/0008—Ways to inject gases against surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0037—Supports specially adapted for semi-conductors
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
3 制御部
4 ハロゲン加熱部
5 フラッシュ加熱部
6 チャンバー
7 保持部
10 移載機構
20 放射温度計
63 上側チャンバー窓
64 下側チャンバー窓
65 熱処理空間
67 水冷管
74 サセプタ
81 ガス吐出口
82 ガス供給口
83 ガス供給管
90 ガスリング
91 上部リング
92 下部リング
92a 内壁面
93 導入孔
97 流路
FL フラッシュランプ
HL ハロゲンランプ
W 半導体ウェハー
Claims (7)
- 基板に光を照射することによって該基板を加熱する熱処理装置であって、
円筒形状の側壁を有するチャンバーと、
前記チャンバー内にて基板を保持する保持部と、
前記保持部に保持された前記基板に光を照射する光照射部と、
前記側壁に取り付けられ、前記チャンバーの外部から供給された処理ガスを前記チャンバーの内部に導く円環形状のガスリングと、
前記側壁を冷却する冷却機構と、
を備え、
前記ガスリングは、円環形状の第1リングおよび円環形状の第2リングを含み、
前記第1リングと前記第2リングとの間の隙間が前記処理ガスの流路とされ、
前記第2リングは、前記側壁の径よりも小さな径を有する円筒状の内壁面を有し、
少なくとも前記第2リングは前記側壁と面接触することを特徴とする熱処理装置。 - 請求項1記載の熱処理装置において、
前記第2リングは中実材であることを特徴とする熱処理装置。 - 請求項1または請求項2記載の熱処理装置において、
前記第1リングと前記第2リングとの間の前記流路には、前記処理ガスの流速を低下させるラビリンス構造の抵抗部が形成されることを特徴とする熱処理装置。 - 請求項3記載の熱処理装置において、
前記チャンバーの外部からガス供給口を経て供給された前記処理ガスを前記抵抗部に導入する複数の導入孔を備え、
前記複数の導入孔の配設間隔は前記ガス供給口からの距離が長くなるほど広くなることを特徴とする熱処理装置。 - 請求項1から請求項4のいずれかに記載の熱処理装置において、
前記光照射部は、前記チャンバーの下方から光を照射する連続点灯ランプを含むことを特徴とする熱処理装置。 - 請求項5記載の熱処理装置において、
前記光照射部は、前記チャンバーの上方から閃光を照射するフラッシュランプを含むことを特徴とする熱処理装置。 - 基板に光を照射することによって該基板を加熱する熱処理装置であって、
円筒形状の側壁を有するチャンバーと、
前記チャンバー内にて基板を保持する保持部と、
前記保持部に保持された前記基板に光を照射する光照射部と、
前記側壁に取り付けられ、前記チャンバーの外部から供給された処理ガスを前記チャンバーの内部に導く円環形状のガスリングと、
前記側壁を冷却する冷却機構と、
を備え、
前記ガスリングは、円環形状の第1リングおよび円環形状の第2リングを含み、
前記第1リングと前記第2リングとの間の隙間が前記処理ガスの流路とされ、
前記第2リングは、前記側壁の径よりも小さな径を有する円筒状の内壁面を有し、
前記第2リングの熱容量および前記第2リングから前記側壁への熱伝導度は前記光照射部からの光照射によって前記第2リングの前記内壁面が変色しない値とされていることを特徴とする熱処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2019208023A JP7319894B2 (ja) | 2019-11-18 | 2019-11-18 | 熱処理装置 |
US17/075,739 US11798823B2 (en) | 2019-11-18 | 2020-10-21 | Light irradiation type thermal process apparatus using a gas ring |
KR1020200153649A KR102514880B1 (ko) | 2019-11-18 | 2020-11-17 | 열처리 장치 |
CN202011292027.4A CN112820666A (zh) | 2019-11-18 | 2020-11-18 | 热处理装置 |
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JP2019208023A JP7319894B2 (ja) | 2019-11-18 | 2019-11-18 | 熱処理装置 |
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JP2021082684A true JP2021082684A (ja) | 2021-05-27 |
JP7319894B2 JP7319894B2 (ja) | 2023-08-02 |
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JP (1) | JP7319894B2 (ja) |
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JP2022017022A (ja) * | 2020-07-13 | 2022-01-25 | ウシオ電機株式会社 | 光加熱装置 |
US20220322492A1 (en) * | 2021-04-06 | 2022-10-06 | Applied Materials, Inc. | Epitaxial deposition chamber |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011077143A (ja) * | 2009-09-29 | 2011-04-14 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
JP2013161936A (ja) * | 2012-02-03 | 2013-08-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置および熱処理方法 |
JP2018195686A (ja) * | 2017-05-17 | 2018-12-06 | 株式会社Screenホールディングス | 熱処理装置 |
JP2019165157A (ja) * | 2018-03-20 | 2019-09-26 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
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JP2000228370A (ja) | 1999-02-05 | 2000-08-15 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP4866020B2 (ja) | 2005-05-02 | 2012-02-01 | 大日本スクリーン製造株式会社 | 熱処理装置 |
KR101324207B1 (ko) | 2006-10-19 | 2013-11-06 | 주성엔지니어링(주) | 가스 분사 장치 및 이를 포함하는 기판 처리 장치 |
JP5437863B2 (ja) | 2010-03-10 | 2014-03-12 | 大日本スクリーン製造株式会社 | 熱処理装置 |
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- 2020-10-21 US US17/075,739 patent/US11798823B2/en active Active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011077143A (ja) * | 2009-09-29 | 2011-04-14 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
JP2013161936A (ja) * | 2012-02-03 | 2013-08-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置および熱処理方法 |
JP2018195686A (ja) * | 2017-05-17 | 2018-12-06 | 株式会社Screenホールディングス | 熱処理装置 |
JP2019165157A (ja) * | 2018-03-20 | 2019-09-26 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
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