JP2021076355A - Vapor chamber - Google Patents

Abstract

To provide a vapor chamber that is superior in resistance to pressure from an external environment and heat radiation characteristic, and has circulation properties of a working fluid improved, according to the present invention.SOLUTION: A vapor chamber comprises: a container which has a cavity part of one plate-like body where a heat generating body is thermally connected, and the other plate-like body which faces the one plate-like body; a working fluid which is charged in the cavity part; and a wick structure which is housed in the cavity part and is in a different body from the container. The container has a support part which protrudes from an inner surface of the other plate-like body toward the one plate-like body by providing a recessed part on an outer surface of the other plate-like body, and the angle formed by the support part and an inner surface of the other plate-like body at a base part raised from the inner surface of the other plate-like body of the support part is obtuse.SELECTED DRAWING: Figure 1

Description

The present invention relates to a vapor chamber having excellent resistance to pressure from an external environment and heat dissipation characteristics, and facilitating the flowability of a working fluid.

The amount of heat generated by electronic components such as semiconductor elements mounted on electrical and electronic devices has increased due to high-density mounting due to higher functionality, and cooling thereof has become more important in recent years. Further, heating elements such as electronic parts may be arranged in a narrow space due to the miniaturization of electronic devices. A vapor chamber (flat heat pipe) may be used as a method for cooling a heating element such as an electronic component arranged in a narrow space. Further, from the viewpoint of miniaturization and weight reduction of the vapor chamber, it is required to reduce the wall thickness of the container of the vapor chamber.

Since the inside of the container is decompressed, if the wall thickness of the container is reduced, the container may be deformed by the action of atmospheric pressure or load. If the container is deformed, the flow characteristics of the working fluid may be deteriorated, and the heat dissipation characteristics of the vapor chamber may be deteriorated. Therefore, a support portion may be provided inside the container of the vapor chamber in order to maintain the internal space of the container.

As a conventional technique in which a support portion is provided inside a container, for example, a container, a pillar arranged in the internal space of the container so as to support the container from the inside, a working fluid sealed in the internal space of the container, and a container. A vapor chamber having a wick arranged in the internal space of the container and having at least a part of the main inner surface of the container exposed in the internal space of the container has been proposed (Patent Document 1).

However, in the conventional vapor chamber such as Patent Document 1, the shape of the support portion is a quadrangular side view. Therefore, in the conventional vapor chamber, the angle formed by the rising base portion of the support portion from the container and the inner surface of the container is a right angle. When the angle formed is a right angle, the working fluid of the liquid phase is likely to be stored at the rising base of the support portion, that is, the boundary portion between the support portion and the inner surface of the container, and the working fluid of the liquid phase receives heat of the container. Sometimes it was not possible to return smoothly to the surface. Further, since the side surface of the support portion exposed to the internal space of the container cannot contribute to the heat dissipation action of the vapor chamber, there is room for improvement in the heat dissipation characteristics of the vapor chamber.

JP-A-2018-189349

In view of the above circumstances, it is an object of the present invention to provide a vapor chamber having excellent resistance to pressure from an external environment and heat dissipation characteristics, and smooth flow of a working fluid.

The gist of the structure of the present invention is as follows.
[1] A container in which a cavity is formed by one plate-shaped body to which a heating element is thermally connected and the other plate-shaped body facing the one plate-shaped body.
The working fluid enclosed in the cavity and
A wick structure, which is housed in the cavity and is separate from the container, is provided.
The container has a support portion that projects from the inner surface of the other plate-shaped body toward the one plate-shaped body by providing a recess on the outer surface of the other plate-shaped body.
A vapor chamber in which the angle between the support portion and the inner surface of the other plate-shaped body at the rising base portion of the support portion from the inner surface of the other plate-shaped body is an obtuse angle.
[2] The vapor chamber according to [1], wherein the area of the support portion in the extending direction of the other plate-like body decreases from the rising base portion toward the tip end portion of the support portion.
[3] The vapor chamber according to [1] or [2], wherein the side surface portion of the support portion exposed to the cavity portion has a curved surface.
[4] The vapor chamber according to any one of [1] to [3], wherein the tip end portion of the support portion has a flat portion, and the flat portion is in contact with the wick structure.
[5] The vapor chamber according to any one of [1] to [4], wherein the angle formed is 91 ° or more and 150 ° or less.
[6] The ratio of the area of the rising base of the support to the area of the tip of the support in the extending direction of the other plate is 1.1 or more and 10 or less [1] to The vapor chamber according to any one of [5].
[7] A plurality of the support portions are provided on the other plate-shaped body, and the predetermined support portion and the two other support portions adjacent to the predetermined support portion are arranged in a triangular shape. The vapor chamber according to any one of [1] to [6].
[8] The vapor chamber according to any one of [1] to [7], wherein the wick structure is a metal mesh member.
[9] Any one of [1] to [8], wherein the peripheral edge portion of the one plate-shaped body and the peripheral edge portion of the other plate-shaped body are joined by welding with a fiber laser to form a container. The vapor chamber described in one.
[10] The vapor chamber according to any one of [1] to [9], wherein the thickness of the one plate-shaped body is thicker than the thickness of the other plate-shaped body.
[11] The vapor chamber according to any one of [1] to [9], wherein the thickness of the one plate-shaped body is smaller than the thickness of the other plate-shaped body.
[12] The vapor chamber according to any one of [1] to [11], wherein the container has a bent portion in the thickness direction of the container.

In the above aspect, of the container, one plate-shaped body to which the heating element is thermally connected mainly functions as a heat receiving surface, and the other plate-shaped body facing the one plate-shaped body mainly serves as a heat radiating surface. Function.

In the present specification, the "inner surface of the other plate-shaped body" and the "outer surface of the other plate-shaped body" do not include the portion serving as the support portion. Therefore, in the above aspect, the support portion is integrated with the other plate-like body. Further, the support portion rises from the inner surface of the other plate-like body when viewed from the inside of the container, so that the support portion becomes a convex portion protruding from the inner surface of the other plate-like body toward one plate-like body. There is.

Further, in the above aspect, the other plate corresponds to the fact that the angle formed by the support portion and the inner surface of the other plate-like body at the rising base portion of the other plate-like body from the inner surface of the support portion is an acute angle. The angle formed by the outer surface of the recess provided on the outer surface of the shaped body and the outer surface of the other plate-shaped body is an acute angle. In the present specification, the “eggplant angle” means the “eggplant angle” in the side view, which is the thickness direction of the container.

According to the aspect of the present invention, the angle between the support portion and the other plate-shaped body at the rising base of the support portion from the other plate-shaped body is an obtuse angle, so that the support portion and the other plate-shaped body have an obtuse angle. It is possible to prevent the hydraulic fluid of the liquid phase from accumulating at the boundary with the flat portion. Therefore, the working fluid of the liquid phase can be smoothly refluxed from the other plate-shaped body to one plate-shaped body which is the heat receiving surface of the container. Further, according to the aspect of the present invention, the angle formed by the outer surface of the recess provided on the outer surface of the other plate-shaped body and the outer surface of the other plate-shaped body is an acute angle, so that the gas in the recess is formed. The inflow of gas is smoothed, the condensation characteristics of the working fluid in the gas phase are improved, and the heat dissipation characteristics of the vapor chamber are improved.

According to the aspect of the present invention, the container has a support portion that projects from the inner surface of the other plate-shaped body toward one plate-shaped body by providing a recess on the outer surface of the other plate-shaped body. The outer surface area on the heat dissipation surface side of the container is increased, and the heat dissipation characteristics of the vapor chamber are improved. Further, according to the aspect of the present invention, by having the support portion, it is possible to impart resistance to pressure from the external environment to the container.

According to the aspect of the present invention, the area of the support portion in the extending direction of the other plate-like body decreases from the rising base portion toward the tip portion, so that the support portion exposed to the cavity portion. Since the side surface portion can also greatly contribute to heat dissipation, the heat dissipation characteristics of the vapor chamber are further improved.

According to the aspect of the present invention, since the side surface portion of the support portion exposed to the cavity has a curved surface, the working fluid of the liquid phase is transmitted through the side surface portion of the support portion and is smoother from the heat radiation surface to the heat receiving surface of the container. Can be refluxed to.

According to the aspect of the present invention, the tip portion of the support portion has a flat portion, and the flat portion is in contact with the wick structure, so that the support portion is attached to the inner surface of one plate-like body with respect to the wick structure. Functions as a retainer. Therefore, since the wick structure is stably fixed on the inner surface of one of the plate-like bodies, the working fluid of the liquid phase can be stably supplied to the heat receiving surface of the container.

According to the aspect of the present invention, when the angle formed is 91 ° or more and 150 ° or less, the hydraulic fluid of the liquid phase is prevented from accumulating at the boundary between the support portion and the flat portion of the other plate-like body, and the outside is prevented. The resistance of the container to the pressure from the environment can be improved in a well-balanced manner.

According to the aspect of the present invention, the ratio of the area of the rising base portion of the support portion to the area of the tip portion of the support portion is 1.1 or more and 10 or less, so that the support portion and the other plate-like body are formed. It is possible to improve the prevention of the accumulation of the working fluid of the liquid phase at the boundary with the flat portion and the resistance of the container to the pressure from the external environment in a well-balanced manner.

According to the aspect of the present invention, since the plurality of support portions are arranged in a triangular shape, the resistance of the container to the pressure from the external environment can be further improved, and the resistance of the container to the pressure from the external environment can be further improved. It is possible to reduce the number of installations of the support portion without impairing the above.

According to the aspect of the present invention, since one plate-shaped body and the other plate-shaped body are joined by a fiber laser, the joining strength of one plate-shaped body and the other plate-shaped body is improved. Since it is possible to impart excellent sealing properties to the container and prevent a heat load on the container at the time of joining one plate-shaped body and the other plate-shaped body, it is possible to impart excellent mechanical strength to the container.

It is a side sectional view of the vapor chamber which concerns on 1st Embodiment of this invention. It is a top view of the vapor chamber which concerns on 1st Embodiment of this invention. It is a side sectional view of the vapor chamber which concerns on 2nd Embodiment of this invention. It is a side sectional view of the vapor chamber which concerns on 3rd Embodiment of this invention. It is a side sectional view of the vapor chamber which concerns on 4th Embodiment of this invention. It is a side sectional view of the vapor chamber which concerns on 5th Embodiment of this invention.

Hereinafter, the vapor chamber according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a side sectional view of the vapor chamber according to the first embodiment of the present invention. FIG. 2 is a plan view of the vapor chamber according to the first embodiment of the present invention.

As shown in FIGS. 1 and 2, the vapor chamber 1 according to the first embodiment of the present invention faces two opposing plate-shaped bodies, that is, one plate-shaped body 11 and one plate-shaped body 11. The cavity 13 is formed by overlapping the other plate-shaped body 12 to be viewed in a plan view (vertical direction with respect to the plane of the vapor chamber 1, that is, visible from a direction parallel to the thickness method of the vapor chamber 1). It has a flat container 10 having a predetermined shape and a working fluid (not shown) sealed in the cavity 13. Further, the wick structure 15 having a capillary structure is housed in the cavity portion 13. Further, the space between the inner surface of the other plate-shaped body 12 and the wick structure 15 is a steam flow path 18 through which the working fluid of the gas phase flows. The shape of the container 10 in a plan view is not particularly limited, but the vapor chamber 1 has a quadrangular shape for convenience of explanation. Further, the flat container 10 extends along the same plane.

One plate-shaped body 11 has a flat plate shape. The other plate-shaped body 12 is plate-shaped, but the portion of the other plate-shaped body 12 excluding the peripheral portion 20 is plastically deformed in a convex shape. The portion of the other plate-shaped body 12 that protrudes outward and is plastically deformed in a convex shape is the convex portion 14 of the container 10, and the inside of the convex portion 14 is the hollow portion 13. The cavity 13 is a sealed space, and the pressure is reduced by deaeration treatment.

The wick structure 15 is a separate body from the container 10, that is, a member different from the container 10. In the vapor chamber 1, the wick structure 15 is not joined to the container 10. The wick structure 15 extends in a plane along the plane of the container 10 which is a plane type. In the vapor chamber 1, the wick structure 15 extends on the inner surface 21 of one of the plate-shaped bodies 11 in a state of being in surface contact with the inner surface 21. The inner surface 21 of one plate-shaped body 11 is a smooth surface. Therefore, the inner surface 21 of one of the plate-shaped bodies 11 does not have a function as a wick structure. The wick structure 15 extends over the entire inner surface 21 of one plate-like body 11. Further, the space formed between the inner surface 22 of the other plate-shaped body 12 and the first wick structure 15 is a steam flow path 18 through which the working fluid of the gas phase mainly flows.

The wick structure 15 is not particularly limited as long as it is a member that generates capillary force, and examples thereof include a metal mesh member. Examples of the material of the mesh member include metals such as copper, copper alloy, aluminum, aluminum alloy, and stainless steel. Further, examples of the wick structure 15 include, in addition to the metal mesh member, a sintered body of metal powder such as copper and copper alloy, and a sintered body of short metal fibers such as copper and copper alloy. .. In the vapor chamber 1, a metal mesh member is used as the wick structure 15.

The thickness of the wick structure 15 can be appropriately selected depending on the usage conditions of the vapor chamber 1, and examples thereof include 0.1 mm to 0.2 mm. The thickness of the wick structure 15 may be, for example, one mesh member having a desired thickness may be laid flat, and if necessary, a plurality of mesh members may be stacked or one mesh member may be bent. Then, the mesh members may be adjusted by overlapping them in the thickness direction. In the vapor chamber 1, one mesh member is laid flat over the entire inner surface 21 of one plate-shaped body 11.

As shown in FIG. 1, the inner surface 22 of the other plate-shaped body 12 is a flat surface. Further, the inner surface 22 of the other plate-shaped body 12 is a smooth surface. Therefore, the inner surface 22 of the other plate-shaped body 12 does not have a function as a wick structure. A support portion 17 is provided on the inner surface 22 side of the other plate-shaped body 12 corresponding to the hollow portion 13 direction. The support portion 17 rises from the inner surface 22 of the other plate-shaped body 12 toward the inner surface 21 of the one plate-shaped body 11 when viewed from the inside of the container 10, so that the inner surface 22 of the other plate-shaped body 12 It is a convex portion that protrudes in the direction of the inner surface 21 of one of the plate-shaped bodies 11. The container 10 of the vapor chamber 1 is provided with a plurality of support portions 17, 17, 17 ... In the container 10 of the vapor chamber 1, the outer surface 24 of the other plate-shaped body 12 is a flat surface. The support portion 17 is formed by providing a plurality of recesses 27, 27, 27 ... On the outer surface 24 side of the other plate-shaped body 12.

The support portion 17 has a function of maintaining the internal space of the container 10 under reduced pressure, that is, the cavity portion 13. The support portion 17 extends from the inner surface 22 of the other plate-shaped body 12 toward the one plate-shaped body 11.

The angle θ1 formed by the support portion 17 and the inner surface 22 of the other plate-shaped body 12 at the base 30 rising from the inner surface 22 of the other plate-shaped body 12 of the support portion 17 is an obtuse angle, that is, more than 90 ° and less than 180 °. It has become. Further, the angle θ2 formed by the outer surface 28 of the recess 27 provided on the outer surface 24 of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is an acute angle, that is, more than 0 ° and less than 90 °. There is.

The plan view shape of the support portion 17, that is, the plan view shape of the recess 27 is not particularly limited, and examples thereof include a polygonal shape such as a circular shape, an elliptical shape, a quadrangular shape, and a pentagonal shape. As shown in FIG. 2, the vapor chamber 1 has a circular shape. Further, as shown in FIG. 1, the area of the support portion 17 in the extending direction of the other plate-shaped body 14 decreases from the rising base portion 30 of the support portion 17 toward the tip portion 31 of the support portion 17. .. Corresponding to the above aspect, in FIG. 1, the width of the support portion 17 becomes narrower from the rising base portion 30 of the support portion 17 toward the tip portion 31 of the support portion 17.

In the vapor chamber 1, the angle θ1 formed is substantially uniform along the circumferential direction of the support portion 17. Further, the angle θ2 formed is substantially uniform along the circumferential direction of the recess 27.

The side surface portion 32 of the support portion 17 is exposed to the hollow portion 13. The surface of the side surface portion 32 of the support portion 17 is a smooth surface. The side view shape of the side surface portion 32 of the support portion 17 is not particularly limited, and examples thereof include a linear shape, a shape having a bent portion, and an arc shape. In the vapor chamber 1, the side view shape of the side surface portion 32 of the support portion 17 is an arc shape. Therefore, the side surface portion 32 of the support portion 17 exposed to the cavity portion 13 has a curved surface, and the entire side surface portion 32 is a curved surface.

In the vapor chamber 1, the support portion 17 is supported by the rising base portion 30 of the support portion 17 from the inner surface 22 of the other plate-shaped body 12 because the angle θ1 formed by the support portion 17 and the inner surface of the other plate-shaped body 12 is an obtuse angle. It is possible to prevent the hydraulic fluid of the liquid phase from accumulating at the boundary between the portion 17 and the inner surface 22 which is a flat portion of the other plate-shaped body 12. Therefore, the working fluid of the liquid phase can be smoothly refluxed from the other plate-shaped body 12 that functions as the heat radiation surface of the container 10 to the one plate-shaped body 11 that functions as the heat receiving surface of the container 10. Further, in the vapor chamber 1, the angle θ2 formed by the outer surface 28 of the recess 27 provided on the outer surface 24 of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is an acute angle. The inflow of gas into the recess 27 is smoothed, the condensation characteristic of the working fluid in the gas phase is improved, and the heat dissipation characteristic of the vapor chamber 1 is improved.

Further, in the vapor chamber 1, the container 10 is supported by providing a recess 27 on the outer surface 24 of the other plate-shaped body 12 so as to project from the inner surface 22 of the other plate-shaped body 12 toward the one plate-shaped body 11. Since the portion 17 is formed, the surface area of the outer surface of the container 10 on the heat radiating surface side is increased. Therefore, in the vapor chamber 1, the heat dissipation characteristics are improved. Further, in the vapor chamber 1, by having the support portion 17, it is possible to impart resistance to the pressure from the external environment to the container 10.

Further, the area of the support portion 17 in the extending direction of the other plate-shaped body 12 becomes smaller from the rising base portion 30 toward the tip portion 31, so that the side surface portion of the support portion 17 exposed to the cavity portion 13 Since 32 can also greatly contribute to heat dissipation, the heat dissipation characteristics of the vapor chamber 1 are further improved.

Further, since the side surface portion 32 of the support portion 17 exposed to the cavity portion 13 has a curved surface, the working fluid of the liquid phase is transmitted through the side surface portion 32 of the support portion 17 from the heat radiation surface to the heat receiving surface of the container 10, that is, The fluid can flow more smoothly from the other plate-shaped body 12 toward the one plate-shaped body 11.

As shown in FIG. 1, the tip portion 31 of the support portion 17 is a flat portion, and the flat portion of the tip portion 31 is in contact with the wick structure 15. Therefore, the support portion 17 also functions as a presser that presses the wick structure 15 toward the inner surface 21 of one plate-like body 11 to fix it to the inner surface 21 of one plate-like body 11. From the above, since the wick structure 15 is stably fixed on the inner surface 1 of one of the plate-like bodies 11, the working fluid of the liquid phase can be stably supplied to the heat receiving surface of the container 10 and the dryout can be reliably performed. Can be prevented. In the vapor chamber 1, the tip portion 31 of the support portion 17 is not in contact with the inner surface 21 of one plate-shaped body 11 of the container 10.

In the vapor chamber 1, the space between the support portion 17 and the support portion 17 serves as a steam flow path 18 through which the working fluid of the gas phase flows. The height of the support portion 17 is appropriately selected according to the thickness of the vapor chamber 1, the thickness of one plate-shaped body 11 and the other plate-shaped body 12, and the thickness of the wick structure 15, for example, 0. 1 mm to 0.8 mm can be mentioned.

The angle θ1 formed by the support portion 17 and the inner surface 22 of the other plate-shaped body 12 at the rising base portion 30 from the inner surface 22 of the other plate-shaped body 12 is not particularly limited as long as it is an obtuse angle, but the lower limit value thereof is not particularly limited. 91 ° from the viewpoint of surely improving the resistance of the container to the pressure from the external environment while preventing the accumulation of the working fluid of the liquid phase at the boundary between the support portion 17 and the inner surface 22 of the other plate-shaped body 12. Is preferable, 105 ° is more preferable, and the liquid phase working fluid is more reliably prevented from being stored, because the resistance of the container to the pressure from the external environment is not impaired and the liquid phase working fluid is surely prevented from being stored. From this point of view, 115 ° is particularly preferable. On the other hand, the upper limit of the angle θ1 formed is preferably 150 ° from the viewpoint of more reliably preventing the accumulation of the working fluid of the liquid phase without impairing the resistance of the container to the pressure from the external environment, and the working fluid of the liquid phase. 140 ° is more preferable from the viewpoint of surely obtaining the resistance of the container to the pressure from the external environment while surely preventing the storage of the fluid, and 135 ° from the viewpoint of surely improving the resistance of the container to the pressure from the external environment. Is particularly preferable.

The angle θ2 formed by the outer surface 28 of the recess 27 provided on the outer surface 24 side of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is due to the smooth inflow of gas into the recess 27 and the external environment. From the viewpoint of improving the resistance of the container 10 to the pressure of 30 ° or more in a well-balanced manner, 30 ° or more and 89 ° or less is preferable, 40 ° or more and 75 ° or less is more preferable, and 45 ° or more and 65 ° or less is particularly preferable.

In the vapor chamber 1, the ratio of the area of the rising base portion 30 of the support portion 17 to the area of the tip portion 31 of the support portion 17 in the extending direction of the other plate-shaped body 12 is more than 1.0. .. The area ratio improves the resistance of the container 10 to the pressure from the external environment in a well-balanced manner and prevents the accumulation of the working fluid of the liquid phase at the boundary between the support portion 17 and the inner surface 22 of the other plate-shaped body 12. From this point of view, 1.1 or more and 10 or less are preferable, 2.0 or more and 8.0 or less are more preferable, and 3.0 or more and 6.0 or less are particularly preferable.

As shown in FIG. 2, a plurality of support portions 17, 17, 17 ... Are arranged in parallel in the container 10. The arrangement relationship of the plurality of support portions 17, 17, 17 ... Is not particularly limited, but in the vapor chamber 1, a predetermined support portion 17 and two other support portions 17 adjacent to the predetermined support portion 17 ( 17') and 17 (17') are arranged in a triangular shape. Since the plurality of support portions 17, 17, 17 ... Are arranged in a triangular shape, the resistance of the container 10 to the pressure from the external environment can be further improved, and the container 10 to the pressure from the external environment can be further improved. It is possible to reduce the number of installations of the support portion 17 without impairing the resistance of the support portion 17. Further, since the plurality of support portions 17, 17, 17 ... Are arranged in a triangular shape, the number of support portions 17 installed can be reduced, so that the steam flow path 18 can be secured more reliably, and the air flow can be secured. The flow characteristics of the working fluid of the phase are improved more reliably.

As a method of forming the support portion 17 which is a recess 27 provided on the outer surface 24 side of the other plate-shaped body 12, for example, a method of pressing the other plate-shaped body 12 to provide the recess 27 can be mentioned. In this case, the support portion 17 is integrally molded with the other plate-shaped body 12, and the material of the support portion 17 is the same as the material of the other plate-shaped body 12.

Examples of the material of the container 10 include copper, aluminum, stainless steel, titanium, copper alloy, aluminum alloy, titanium alloy and the like. These may be used alone or in combination of two or more. Examples of the thickness of the vapor chamber 1 include 0.3 mm to 1.0 mm. The thickness of one plate 11 and the thickness of the other plate 12 may be the same or different. In the vapor chamber 1, the thickness of one plate 11 and the thickness of the other plate 12 may be the same or different. The thickness is the same. In the vapor chamber 1, the thickness of one plate-shaped body 11 is substantially uniform over the entire plate-shaped body 11. Further, the thickness of the other plate-shaped body 12 is substantially uniform over the entire other plate-shaped body 12. The thickness of one plate-shaped body 11 and the other plate-shaped body 12 can be, for example, 0.1 mm, respectively.

Further, the peripheral edge portion 40 of one plate-shaped body 11 and the peripheral edge portion 20 of the other plate-shaped body 12 are brought into surface contact with each other, and the peripheral edge portion 20 and the peripheral edge portion 40 are joined over the entire circumference to form a closed container. The container 10 is formed and the cavity 13 is sealed. The bonding method between the peripheral edge portion 20 and the peripheral edge portion 40 is not particularly limited, and examples thereof include diffusion bonding, brazing, laser welding by a fiber laser, ultrasonic welding, friction welding, pressure welding, and the like. Of these, the joint strength between one plate-shaped body 11 and the other plate-shaped body 12 can be improved to impart excellent sealing properties to the container 10, and one plate-shaped body 11 and the other plate-shaped body 12 can be provided. Welding with a fiber laser is preferable from the viewpoint that excellent mechanical strength can be imparted to the container 10 and thermal deformation of the container 10 can be prevented by preventing a heat load on the container 10 at the time of joining. Further, as the joint width, for example, 0.3 mm to 2.5 mm can be mentioned.

The working fluid to be sealed in the cavity 13 can be appropriately selected depending on the compatibility with the material of the container 10. For example, water can be mentioned, and other CFC substitutes, fluorocarbons, etc. Cyclopentane, ethylene glycol, a mixture of these and water, and the like can be mentioned.

Next, the operation of the vapor chamber 1 according to the first embodiment of the present invention will be described with reference to FIG. Of the container 10, the heating element 100 is thermally connected to the outer surface 23 of one plate-shaped body 11, one plate-shaped body 11 functions as a heat receiving surface, and the outer surface 23 of one plate-shaped body 11 The portion in contact with the heating element 100 functions as a heat receiving portion. When the vapor chamber 1 receives heat from the heating element 100 at the heat receiving portion, the working fluid of the liquid phase enclosed in the cavity 13 changes phase from the liquid phase to the gas phase at the heat receiving portion, and the phase-changed gas phase operation. The fluid flows through the steam flow path 18 and moves mainly from the heat receiving portion of the vapor chamber 1 to the heat radiating surface (that is, the other plate-shaped body 12). The working fluid of the gas phase that has moved mainly from the heat receiving portion to the heat radiating surface dissipates latent heat on the heat radiating surface and undergoes a phase change from the gas phase to the liquid phase. At this time, the recess 27 is formed on the outer surface of the container 10 on the heat dissipation surface side to increase the surface area of the outer surface on the heat dissipation surface side, and the gas flows into the recess 27 to dissipate heat on the heat dissipation surface, that is, Condensation of the working fluid in the gas phase is promoted. Further, the side surface portion 32 of the support portion 17 exposed to the cavity portion 13 also greatly contributes to heat dissipation, so that heat dissipation from the heat dissipation surface is promoted. The latent heat released on the heat radiating surface is further released to the external environment of the vapor chamber 1. The working fluid whose phase has changed from the gas phase to the liquid phase on the heat radiating surface drops from the side surface portion 32 of the support portion 17 or from the radiating surface and returns to the heat receiving surface (that is, one plate-shaped body 11). The working fluid of the liquid phase that has returned to the heat receiving surface of the container 10 is transported to the heat receiving portion by the capillary force of the wick structure 15.

The vapor chamber 1 can be operated by natural air cooling without using a cooling air supply device without supplying cooling air (that is, forced air cooling) using a cooling air supply device such as a blower fan. it can.

Next, the vapor chamber according to the second embodiment of the present invention will be described. Since the vapor chamber according to the second embodiment has the same main part as the vapor chamber according to the first embodiment, the same reference numerals are used for the same components as the vapor chamber according to the first embodiment. explain. FIG. 3 is a side sectional view of the vapor chamber according to the second embodiment of the present invention.

In the vapor chamber 1 according to the first embodiment, the side view of the side surface portion 32 of the support portion 17 has an arcuate shape, but instead of this, as shown in FIG. 3, the second embodiment In the vapor chamber 2 according to the example, the side view shape of the side surface portion 32 of the support portion 17 is linear. Further, in the vapor chamber 2, as in the vapor chamber 1 according to the first embodiment, the tip portion 31 of the support portion 17 is a flat portion, and the flat portion of the tip portion 31 is in contact with the wick structure 15. ..

In the vapor chamber 2, the area of the support portion 17 in the extending direction of the other plate-shaped body 14 decreases from the rising base portion 30 of the support portion 17 toward the tip portion 31 of the support portion 17. Corresponding to the above aspect, in FIG. 3, the support portion 17 becomes narrower from the rising base portion 30 of the support portion 17 toward the tip portion 31 of the support portion 17, and the side cross section of the support portion 17 is a base. It has a shape.

In the vapor chamber 2, the plan view shape of the support portion 17, that is, the plan view shape of the recess 27 is a quadrangular shape.

In the vapor chamber 2, as in the vapor chamber 1 according to the first embodiment, the rising base portion 30 of the support portion 17 with respect to the area of the tip portion 31 of the support portion 17 in the extending direction of the other plate-shaped body 12 The area ratio is over 1.0. The area ratio improves the resistance of the container 10 to the pressure from the external environment in a well-balanced manner and prevents the accumulation of the working fluid of the liquid phase at the boundary between the support portion 17 and the inner surface 22 of the other plate-shaped body 12. From this point of view, 1.1 or more and 10 or less are preferable, 2.0 or more and 8.0 or less are more preferable, and 3.0 or more and 6.0 or less are particularly preferable.

In the vapor chamber 2, as in the vapor chamber 1 according to the first embodiment, at the rising base portion 30 of the support portion 17 from the inner surface 22 of the other plate-shaped body 12, the inner surface of the support portion 17 and the other plate-shaped body 12 Since the angle θ1 formed between the two is an obtuse angle, it is possible to prevent the working fluid of the liquid phase from accumulating at the boundary between the support portion 17 and the inner surface 22 which is the flat portion of the other plate-shaped body 12. Therefore, the working fluid of the liquid phase can be smoothly refluxed from the other plate-shaped body 12 that functions as the heat radiation surface of the container 10 to the one plate-shaped body 11 that functions as the heat receiving surface of the container 10. Further, also in the vapor chamber 2, the angle θ2 formed by the outer surface 28 of the recess 27 provided on the outer surface 24 of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is an acute angle. The inflow of gas into the recess 27 is smoothed, the condensation characteristic of the working fluid in the gas phase is improved, and the heat dissipation characteristic of the vapor chamber 2 is improved.

Further, in the vapor chamber 2, as in the vapor chamber 1 according to the first embodiment, the container 10 is provided with a recess 27 on the outer surface 24 of the other plate-shaped body 12, so that the inner surface 22 of the other plate-shaped body 12 is provided. The surface area of the outer surface of the container 10 on the heat radiating surface side is increased by forming the support portion 17 projecting in the direction of one of the plate-shaped bodies 11. Therefore, even in the vapor chamber 2, the heat dissipation characteristics are improved. Further, also in the vapor chamber 2, by having the support portion 17, it is possible to impart resistance to the pressure from the external environment to the container 10.

Next, the vapor chamber according to the third embodiment of the present invention will be described. Since the vapor chamber according to the third embodiment has the same main part as the vapor chamber according to the first and second embodiments, the same components as the vapor chamber according to the first and second embodiments are used. Will be described using the same reference numerals. FIG. 4 is a side sectional view of the vapor chamber according to the third embodiment of the present invention.

In the vapor chambers 1 and 2 according to the first and second embodiments, the thickness of one plate-shaped body 11 and the thickness of the other plate-shaped body 12 were the same, but instead of this, FIG. As shown in the above, in the vapor chamber 3 according to the third embodiment, the thickness of the other plate-shaped body 12 is thicker than the thickness of the one plate-shaped body 11. The thickness of one plate-shaped body 11 is substantially uniform over the entire plate-shaped body 11. Further, the thickness of the other plate-shaped body 12 is substantially uniform over the entire other plate-shaped body 12. In the vapor chamber 3, as in the vapor chambers 1 and 2, the container 10 is provided with a recess 27 on the outer surface 24 of the other plate-shaped body 12, so that the container 10 has a plate shape from the inner surface 22 of the other plate-shaped body 12. A support portion 17 projecting in the direction of the body 11 is formed.

The thickness of one plate-shaped body 11 is not particularly limited, and for example, 0.08 mm can be mentioned. The thickness of the other plate-shaped body 12 is not particularly limited, and for example, 0.12 mm can be mentioned. Examples of the thickness of the vapor chamber 3 include 0.3 mm to 1.0 mm. Also in the vapor chamber 3, the heating element 100 is thermally connected to one of the plate-shaped bodies 11.

The vapor chamber 3 has a support portion 17 formed by providing a recess 27 on the outer surface 24 of the other plate-shaped body 12, so that the container 10 can be imparted with resistance to pressure from the external environment. Further, since the other plate-shaped body 12 having the support portion 17 is thickened, the resistance of the container 10 to the pressure from the external environment is further improved, and the container 10 is imparted with further excellent mechanical strength. Will be done. Therefore, even if a load is applied to the container 10 due to the installation and usage conditions of the vapor chamber 3, it is possible to more reliably prevent the container 10 from being warped.

Next, the vapor chamber according to the fourth embodiment of the present invention will be described. Since the vapor chamber according to the fourth embodiment has the same main part as the vapor chamber according to the first to third embodiments, the same components as the vapor chamber according to the first to third embodiments are used. Will be described using the same reference numerals. FIG. 5 is a side sectional view of the vapor chamber according to the fourth embodiment of the present invention.

In the vapor chambers 1 and 2 according to the first and second embodiments, the thickness of one plate-shaped body 11 and the thickness of the other plate-shaped body 12 were the same, but instead of this, FIG. As shown in the above, in the vapor chamber 4 according to the fourth embodiment, the thickness of one plate-shaped body 11 is thicker than the thickness of the other plate-shaped body 12. The thickness of one plate-shaped body 11 is substantially uniform over the entire plate-shaped body 11. Further, the thickness of the other plate-shaped body 12 is substantially uniform over the entire other plate-shaped body 12. In the vapor chamber 4, as in the vapor chambers 1 and 2, the container 10 is provided with a recess 27 on the outer surface 24 of the other plate-shaped body 12, so that the container 10 has a plate shape from the inner surface 22 of the other plate-shaped body 12. A support portion 17 projecting in the direction of the body 11 is formed.

The thickness of one plate-shaped body 11 is not particularly limited, and for example, 0.12 mm can be mentioned. The thickness of the other plate-shaped body 12 is not particularly limited, and for example, 0.08 mm can be mentioned. Examples of the thickness of the vapor chamber 4 include 0.3 mm to 1.0 mm. Also in the vapor chamber 4, the heating element 100 is thermally connected to one of the plate-shaped bodies 11.

The vapor chamber 4 has a support portion 17 formed by providing a recess 27 on the outer surface 24 of the other plate-shaped body 12, so that resistance to pressure from the external environment can be imparted to the container 10. By thickening one plate-shaped body 11, the mechanical strength of one plate-shaped body 11 is improved, and deformation such as bending and distortion of one plate-shaped body 11 can be prevented. Therefore, in the vapor chamber 4, the container 10 has resistance to pressure from the external environment, and the contact between the heating element 100 and the container 10 is improved, so that excellent thermal connectivity is imparted to the heating element 100. Will be done.

Next, the vapor chamber according to the fifth embodiment of the present invention will be described. Since the vapor chamber according to the fifth embodiment has the same main part as the vapor chamber according to the first to fourth embodiments, the same components as the vapor chamber according to the first to fourth embodiments are used. Will be described using the same reference numerals. FIG. 6 is a side sectional view of the vapor chamber according to the fifth embodiment of the present invention.

In the vapor chambers 1, 2, 2, and 4 according to the first to fourth embodiments, the planar container 10 extends along the same plane, but instead, it is shown in FIG. As described above, in the vapor chamber 5 according to the fifth embodiment, the flat container 10 does not extend along the same plane and has a bent portion 50. The bent portion 50 of the container 10 is a portion bent in the thickness direction of the container 10.

In the vapor chamber of the present invention having a support portion 17 formed by providing a recess 27 on the outer surface 24 of the other plate-like body 12, such as the vapor chamber 5, the thickness of the container 10 depends on the usage conditions and the like. The bent portion 50 may be formed in the direction. That is, in the vapor chamber 5, it can be mounted on a device having a bent portion. In the vapor chamber 5, even if the bent portion 50 is formed in the container 10, the buckling of the container 10 in the bent portion 50 can be prevented by having the support portion 17, so that the hollow portion 13 can be maintained in the bent portion 50 as well. As a result, the hollow portion 13 can be maintained over the entire container 10 having the bent portion 50.

The method for forming the bent portion 50 is not particularly limited, and examples thereof include a method of attaching the container 10 to a mold to form the bent portion 50, a method of bending the container 10 to form the bent portion 50, and the like. ..

Next, another embodiment of the vapor chamber of the present invention will be described. In the vapor chamber of each of the above-described embodiments, one mesh member is laid flat over the entire inner surface 21 of one plate-shaped body 11 as the wick structure 15. Instead of this, in the heat receiving portion of the plate-shaped body 11 to which the heating element 100 is thermally connected, a plurality of mesh members may be overlapped and laminated as the wick structure 15. In this case, the wick structure 15 may be a single mesh member at a portion other than the heat receiving portion. That is, the thickness of the wick structure 15 in the heat receiving portion may be thicker than the thickness of the wick structure 15 in the portion other than the heat receiving portion. By superimposing a plurality of mesh members in the heat receiving portion of one plate-shaped body 11, the capillary force of the wick structure 15 in the heat receiving portion and the holding amount of the working fluid of the liquid phase are further improved, and the heat receiving portion Dry-out can be reliably prevented.

An oxide film may be further formed on the inner surface of the container 10 of the vapor chamber according to each of the above embodiments. Examples of the composition of the oxide film include oxides of the metal used in the container 10. Moreover, as the structure of the oxide film, for example, a crystalline body and an amorphous body can be mentioned. Since the oxide film is formed on the inner surface of the container 10, corrosion of the inner surface of the container 10 can be prevented, and the durability of the container 10 is improved.

In the vapor chamber according to each of the above embodiments, the surface of the side surface portion 32 of the support portion 17 is a smooth surface, but instead, the surface of the side surface portion 32 may have a structure having capillary force. Good. Since the surface of the side surface portion 32 has a capillary force, the working fluid of the liquid phase can be more smoothly returned from the heat radiation surface to the heat receiving surface of the container 10. Examples of the structure having capillary force include a sintered layer of metal powder formed on the surface of the side surface portion 32, a plurality of fine grooves formed on the surface of the side surface portion 32, and the like.

In the vapor chamber according to each of the above embodiments, the wick structure 15 was not joined to one plate-shaped body 11 of the container 10, but instead, the wick structure 15 is one plate of the container 10. It may be joined to the body 11. As an embodiment in which the wick structure 15 is joined to one plate-shaped body 11 of the container 10, for example, the wick structure 15 is a sintered body of metal powder or a sintered body of metal short fibers, and the metal powder. The above-mentioned sintered body and the sintered body of the short metal fibers are provided on the inner surface 21 of one of the plate-shaped bodies 11. In the above aspect, the working fluid of the liquid phase can more reliably obtain heat from the heat receiving portion.

In the vapor chamber according to each of the above embodiments, the tip portion 31 of the support portion 17 is in contact with the wick structure 15, but instead, the tip portion 31 of the support portion 17 is one plate-like body of the container 10. It may be in contact with the inner surface 21 of 11. In this case, a wick structure 15 such as a metal powder sintered body or a metal short fiber sintered body is provided on the inner surface 21 of one of the plate-shaped bodies 11 and around the tip portion 31 of the support portion 17. Has been done. Since the tip portion 31 of the support portion 17 is in contact with the inner surface 21 of one plate-shaped body 11 of the container 10, the resistance of the container 10 to pressure from the external environment is further improved.

In the vapor chamber according to each of the above embodiments, the tip portion 31 of the support portion 17 is in contact with the wick structure 15, but instead of this, one of the plurality of support portions 17, 17, 17, ... The tip end 31 of the support portion 17 of the portion may be in contact with the wick structure 15, and the tip end portion 31 of the other support portion 17 may be in contact with the inner surface 21 of one plate-shaped body 11 of the container 10. In this case, for example, in the heat receiving portion of one plate-shaped body 11, the tip portion 31 of the supporting portion 17 is in contact with the wick structure 15, and in the region other than the heat receiving portion of one plate-shaped body 11, the tip portion of the supporting portion 17 is in contact with the wick structure 15. The portion 31 may be in contact with the inner surface 21 of one of the plate-shaped bodies 11. In the above aspect, the resistance of the container 10 to the pressure from the external environment is further improved while the working fluid of the liquid phase more reliably obtains the heat from the heat receiving portion.

The vapor chamber of the present invention has excellent resistance to pressure from the external environment and heat dissipation characteristics, and facilitates the flowability of the working fluid, so that it can be used in a wide range of fields. It has high utility value in the field of cooling highly functional electronic devices such as personal computers such as 2in1 tablets.

1, 2, 3, 4, 5 Vapor chamber 10 Container 11 One plate 12 12 The other plate 13 Cavity 15 Wick structure 17 Support 18 Steam flow path 27 Recess 30 Rising base

Claims (12)

A container in which a cavity is formed by one plate-shaped body to which the heating element is thermally connected and the other plate-shaped body facing the one plate-shaped body.
The working fluid enclosed in the cavity and
A wick structure, which is housed in the cavity and is separate from the container, is provided.
The container has a support portion that projects from the inner surface of the other plate-shaped body toward the one plate-shaped body by providing a recess on the outer surface of the other plate-shaped body.
A vapor chamber in which the angle between the support portion and the inner surface of the other plate-shaped body at the rising base portion of the support portion from the inner surface of the other plate-shaped body is an obtuse angle. The vapor chamber according to claim 1, wherein the area of the support portion in the extending direction of the other plate-shaped body decreases from the rising base portion toward the tip end portion of the support portion. The vapor chamber according to claim 1 or 2, wherein the side surface portion of the support portion exposed to the cavity portion has a curved surface. The vapor chamber according to any one of claims 1 to 3, wherein the tip end portion of the support portion has a flat portion, and the flat portion is in contact with the wick structure. The vapor chamber according to any one of claims 1 to 4, wherein the angle formed is 91 ° or more and 150 ° or less. Any of claims 1 to 5, wherein the ratio of the area of the rising base of the support to the area of the tip of the support in the extending direction of the other plate is 1.1 or more and 10 or less. The vapor chamber according to item 1. Claim 1 in which a plurality of the support portions are provided on the other plate-shaped body, and the predetermined support portion and the two other support portions adjacent to the predetermined support portion are arranged in a triangular shape. 6. The vapor chamber according to any one of 6. The vapor chamber according to any one of claims 1 to 7, wherein the wick structure is a metal mesh member. The one according to any one of claims 1 to 8, wherein the peripheral edge portion of the one plate-shaped body and the peripheral edge portion of the other plate-shaped body are joined by welding with a fiber laser to form a container. Vapor chamber. The vapor chamber according to any one of claims 1 to 9, wherein the thickness of one of the plate-shaped bodies is larger than the thickness of the other plate-shaped body. The vapor chamber according to any one of claims 1 to 9, wherein the thickness of one of the plate-shaped bodies is smaller than the thickness of the other plate-shaped body. The vapor chamber according to any one of claims 1 to 11, wherein the container has a bent portion in the thickness direction of the container.

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