JP2019143960A - Vapor chamber, electronic equipment, metal sheet for vapor chamber and method for manufacturing vapor chamber - Google Patents

Abstract

To provide a vapor chamber capable of improving a transport function for liquefied working fluid to improve heat transport efficiency.SOLUTION: A liquid flow passage part of a vapor chamber according to the invention has a plurality of main flow grooves each extending in a first direction and through which liquefied working liquid passes. Between a pair of adjacent main flow grooves, a convex row including a plurality of liquid flow passage convex parts arranged in the first direction via a communication groove is provided. The communication groove communicates with a corresponding pair of main flow grooves. The width of the communication groove is larger than the width of the main flow groove.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a vapor chamber having a sealed space in which hydraulic fluid is sealed, an electronic device, a metal sheet for the vapor chamber, and a method for manufacturing the vapor chamber.

  Devices with heat generation such as a central processing unit (CPU), a light emitting diode (LED), and a power semiconductor used in mobile terminals such as mobile terminals and tablet terminals are cooled by a heat radiating member such as a heat pipe ( For example, see Patent Documents 1 to 5). In recent years, in order to reduce the thickness of mobile terminals and the like, it is also required to reduce the thickness of the heat radiating member, and the development of a vapor chamber that can be made thinner than a heat pipe is underway. A working fluid is sealed in the vapor chamber, and the working fluid absorbs the heat of the device and releases it to the outside, thereby cooling the device.

  More specifically, the working fluid in the vapor chamber receives heat from the device at a portion close to the device (evaporation unit) to evaporate into vapor, and then the vapor separates from the evaporation unit at the vapor flow path unit. It moves to a new position, cools, condenses and becomes liquid. In the vapor chamber, a liquid flow path part as a capillary structure (wick) is provided, and the condensed working liquid enters the liquid flow path part from the vapor flow path part, and the liquid flow path part And is transported toward the evaporation section. Then, the hydraulic fluid is evaporated again by receiving heat in the evaporation section. In this way, the working fluid recirculates in the vapor chamber while repeating phase change, that is, evaporation and condensation, thereby moving the heat of the device and improving the heat radiation efficiency.

  By the way, the liquid flow path portion has a plurality of main flow grooves extending in the first direction. The liquid working fluid condensed from the steam in the steam flow path portion passes through the plurality of communication grooves extending in the second direction intersecting the first direction and enters the main flow groove, and receives the capillary action of the main flow groove to the evaporation section. Get the driving force to head. In this way, the hydraulic fluid passes through the main flow groove toward the evaporation section. Further, the hydraulic fluid can come and go between adjacent mainstream grooves by a plurality of communication grooves. In this way, in the liquid flow path portion, a plurality of main flow grooves and a plurality of communication grooves are formed in a lattice shape, so that the working fluid is evenly distributed in the liquid flow path portion.

JP2015-59693A Japanese Patent Laying-Open No. 2015-88882 Japanese Patent Laid-Open No. 2006-17702 JP, 2006-50682, A JP 2006-206993 A

  However, when it is difficult for the hydraulic fluid condensed from the steam to smoothly pass through the communication groove, it is difficult for the hydraulic fluid to enter the main flow groove on the side close to the steam flow path and the main flow groove on the side far from the steam flow path. Thus, the amount of working fluid entering the mainstream groove is reduced. In this case, there is a problem that the amount of hydraulic fluid transported to the evaporation section is reduced and the heat transport efficiency is lowered.

  The present invention has been made in consideration of the above points, and can improve the transport function of a liquid working fluid and improve the heat transport efficiency, a vapor chamber, an electronic device, a metal sheet for a vapor chamber, and a vapor. It is an object to provide a method for manufacturing a chamber.

The present invention
A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet laminated on the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
A width of the communication groove is larger than a width of the mainstream groove, a vapor chamber;
I will provide a.

In the above-described vapor chamber,
The depth of the communication groove is deeper than the depth of the mainstream groove,
You may do it.

In the above-described vapor chamber,
The main flow groove is located at a crossing portion communicating with the communication groove and a position different from the crossing portion in the first direction and between a pair of the liquid flow channel convex portions adjacent to each other. A main body, and
The depth of the intersecting portion of the mainstream groove is deeper than the depth of the mainstream groove main body portion,
You may do it.

In the above-described vapor chamber,
A depth of the intersecting portion of the mainstream groove is deeper than a depth of the communication groove;
You may do it.

In the above-described vapor chamber,
A rounded curved portion is provided at a corner of the liquid flow path convex portion,
You may do it.

In the above-described vapor chamber,
A plurality of mainstream groove protrusions protruding into the mainstream groove;
You may do it.

In the above-described vapor chamber,
The cross section of the mainstream groove convex portion is formed in a curved shape,
You may do it.

In the above-described vapor chamber,
A plurality of connecting groove protrusions protruding into the connecting groove;
You may do it.

In the above-described vapor chamber,
The cross section of the connecting groove convex portion is formed in a curved shape,
You may do it.

In the above-described vapor chamber,
The communication grooves are aligned in a second direction intersecting the first direction;
You may do it.

In the above-described vapor chamber,
The second metal sheet is provided on the first metal sheet;
The liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side,
You may do it.

In the above-described vapor chamber,
A third metal sheet interposed between the first metal sheet and the second metal sheet;
The steam flow path portion is a second steam provided on at least one of a surface of the second metal sheet on the third metal sheet side and a surface of the third metal sheet on the second metal sheet side. Having a flow path section,
The liquid channel portion is provided on a surface of the first metal sheet on the side of the third metal sheet,
The third metal sheet is provided with a communication portion that communicates the second vapor flow path portion and the liquid flow path portion.
You may do it.

In the above-described vapor chamber,
A third metal sheet interposed between the first metal sheet and the second metal sheet;
The third metal sheet includes a first surface provided on the first metal sheet side, and a second surface provided on the second metal sheet side,
The steam channel part is provided on the second surface of the third metal sheet,
The liquid flow path portion is provided on the first surface of the third metal sheet and communicates with the vapor flow path portion.
You may do it.

The present invention also provides:
A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet provided on the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
The second metal sheet has a plurality of main groove groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the main groove of the first metal sheet. Chamber,
I will provide a.

The present invention also provides:
A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet provided on the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The second metal sheet has a plurality of communication groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the communication groove of the first metal sheet. Chamber,
I will provide a.

The present invention also provides:
A housing;
A device housed in the housing;
An electronic device comprising the above-described vapor chamber in thermal contact with the device;
I will provide a.

The present invention also provides:
A metal sheet for a vapor chamber for a vapor chamber having a sealed space containing a vapor flow path through which the vapor of the hydraulic fluid passes, and a liquid flow path through which the liquid hydraulic fluid passes. There,
The first side,
A second surface provided on the opposite side of the first surface,
The liquid flow path portion is provided on the first surface,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
Metal sheet for vapor chamber,
I will provide a.

The present invention also provides:
A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
Vapor chamber manufacturing method,
I will provide a.

In the above-described vapor chamber manufacturing method,
Forming the vapor flow path portion on at least one of the surface of the second metal sheet on the first metal sheet side and the surface of the third metal sheet on the second metal sheet side by half etching; and ,
A step of forming a third metal sheet provided with a communication portion for communicating the vapor flow path portion and the liquid flow path portion,
In the joining step, the first metal sheet and the second metal sheet are joined via the third metal sheet.
You may do it.

The present invention also provides:
A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion, and a third metal sheet interposed between the first metal sheet and the second metal sheet,
The liquid channel portion is formed on a surface of the third metal sheet on the first metal sheet side, and the vapor channel portion is formed on a surface of the third metal sheet on the second metal sheet side. Process,
A joining step of joining the first metal sheet and the second metal sheet via the third metal sheet, wherein the sealed space is formed between the first metal sheet and the second metal sheet. Joining process;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
I will provide a.

The present invention also provides:
A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
The second metal sheet has a plurality of main groove groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the main groove of the first metal sheet. Manufacturing method of chamber,
I will provide a.

The present invention also provides:
A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The second metal sheet has a plurality of communication groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the communication groove of the first metal sheet. Manufacturing method of chamber,
I will provide a.

  ADVANTAGE OF THE INVENTION According to this invention, the transport function of a liquid hydraulic fluid can be improved and heat transport efficiency can be improved.

FIG. 1 is a schematic perspective view for explaining an electronic apparatus according to a first embodiment of the present invention. FIG. 2 is a top view showing the vapor chamber according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view taken along line AA showing the vapor chamber of FIG. FIG. 4 is a top view of the lower metal sheet of FIG. FIG. 5 is a bottom view of the upper metal sheet of FIG. FIG. 6 is an enlarged top view showing the liquid flow path portion of FIG. FIG. 7 is a cross-sectional view showing the upper channel wall portion of the upper metal sheet added to the cross section taken along line BB in FIG. 6. FIG. 8 is a cross-sectional view showing the upper channel wall portion of the upper metal sheet added to the CC cross section of FIG. 6. FIG. 9 is a cross-sectional view showing the upper channel wall portion of the upper metal sheet added to the cross section taken along the line D-D in FIG. 6. FIG. 10 is a diagram for explaining a preparation process of the lower metal sheet in the method of manufacturing the vapor chamber according to the first embodiment of the present invention. FIG. 11 is a diagram for explaining a first half etching step of the lower metal sheet in the method of manufacturing the vapor chamber according to the first embodiment of the present invention. FIG. 12 is a diagram for explaining a second half etching step of the lower metal sheet in the method of manufacturing the vapor chamber according to the first embodiment of the present invention. FIG. 13 is a diagram for explaining a temporary fixing step in the method of manufacturing a vapor chamber according to the first embodiment of the present invention. FIG. 14 is a diagram for explaining a permanent joining step in the vapor chamber manufacturing method according to the first embodiment of the present invention. FIG. 15 is a view for explaining a hydraulic fluid sealing step in the vapor chamber manufacturing method according to the first embodiment of the present invention. FIG. 16 is a top view showing a modification of the liquid flow path convex portion shown in FIG. FIG. 17 is a top view illustrating another modification of the liquid flow path convex portion illustrated in FIG. 6. FIG. 18 is a top view showing another modification of the liquid flow path convex portion shown in FIG. FIG. 19 is a top view showing another modification of the liquid flow path convex portion shown in FIG. FIG. 20 is a diagram showing another modification of FIG. FIG. 21 is an enlarged cross-sectional view showing a mainstream groove convex portion in the vapor chamber according to the second embodiment of the present invention, and corresponds to FIG. FIG. 22 is an enlarged cross-sectional view showing the communication groove convex portion in the vapor chamber according to the second embodiment of the present invention, and corresponds to FIG. FIG. 23 is a cross-sectional view showing a vapor chamber according to the third embodiment of the present invention. FIG. 24 is a bottom view of the upper metal sheet of FIG. FIG. 25 is a top view of the intermediate metal sheet of FIG. FIG. 26 is a cross-sectional view showing a modification of the vapor chamber of FIG. FIG. 27 is an enlarged cross-sectional view showing a mainstream groove convex portion in a modification of the vapor chamber shown in FIG. FIG. 28 is an enlarged cross-sectional view showing a communication groove convex portion in a modification of the vapor chamber shown in FIG. FIG. 29 is a sectional view showing a vapor chamber in the fourth embodiment of the present invention. FIG. 30 is a top view of the intermediate metal sheet of FIG. FIG. 31 is a sectional view showing a vapor chamber in the fifth embodiment of the present invention. FIG. 32 is a bottom view of the intermediate metal sheet of FIG. FIG. 33 is a top view of the intermediate metal sheet of FIG. FIG. 34 is a cross-sectional view showing a modification of the vapor chamber of FIG. FIG. 35 is an enlarged cross-sectional view showing a mainstream groove convex portion in a modification of the vapor chamber shown in FIG. FIG. 36 is an enlarged cross-sectional view showing a communication groove convex portion in a modification of the vapor chamber shown in FIG.

  Embodiments of the present invention will be described below with reference to the drawings. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale and the vertical / horizontal dimensional ratio are appropriately changed and exaggerated from those of the actual ones.

  In addition, as used in this specification, the shape, geometric conditions, physical characteristics, and their degree are specified, for example, terms such as “parallel”, “orthogonal”, “identical”, length, angle, and physical characteristics The value of, etc. shall be interpreted including the range where the same function can be expected without being bound by a strict meaning. Further, in the drawings, for the sake of clarity, the shapes of a plurality of parts that can be expected to have the same function are regularly described, but the function is expected without being bound by a strict meaning. As long as it is possible, the shapes of the portions may be different from each other. In the drawings, the boundary lines indicating the joining surfaces of the members are shown by simple straight lines for convenience, but are not restricted to being strictly straight lines, and a desired joining performance can be expected. As long as it is possible, the shape of the boundary line is arbitrary.

(First embodiment)
A vapor chamber, an electronic apparatus, a vapor chamber metal sheet, and a method for manufacturing the vapor chamber according to the first embodiment of the present invention will be described with reference to FIGS. The vapor chamber 1 in the present embodiment is an apparatus that is mounted on the electronic device E in order to cool the device D as a heating element housed in the electronic device E. Examples of the device D include a central processing unit (CPU) used in a mobile terminal such as a mobile terminal or a tablet terminal, an electronic device (cooled apparatus) with heat generation such as a light emitting diode (LED), a power semiconductor, and the like. It is done.

  Here, first, the electronic device E in which the vapor chamber 1 according to the present embodiment is mounted will be described by taking a tablet terminal as an example. As shown in FIG. 1, the electronic apparatus E (tablet terminal) includes a housing H, a device D accommodated in the housing H, and a vapor chamber 1. In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. The vapor chamber 1 is accommodated in the housing H and is disposed so as to be in thermal contact with the device D. Thereby, the vapor chamber 1 can receive the heat generated in the device D when the electronic apparatus E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 through a working fluid 2 described later. In this way, device D is effectively cooled. When the electronic device E is a tablet terminal, the device D corresponds to a central processing unit or the like.

  Next, the vapor chamber 1 according to the present embodiment will be described. The vapor chamber 1 has a sealed space 3 in which a working fluid 2 is enclosed, and the working fluid 2 in the sealed space 3 repeats a phase change, thereby effectively cooling the device D of the electronic apparatus E described above. It is supposed to be.

  The vapor chamber 1 is generally formed in a thin flat plate shape. The planar shape of the vapor chamber 1 is arbitrary, but may be a rectangular shape as shown in FIG. In this case, the vapor chamber 1 has four linear outer edges 1a and 1b that form a planar outer contour. Of these, the two outer edges 1a are formed along a first direction X described later, and the remaining two outer edges 1b are formed along a second direction Y described later. The plane shape of the vapor chamber 1 may be, for example, a rectangle with one side of 1 cm and the other side of 3 cm, or a square with one side of 15 cm, and the plane dimension of the vapor chamber 1 is arbitrary. . Moreover, the planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be an arbitrary shape such as a circular shape, an elliptical shape, an L shape, or a T shape.

  As shown in FIGS. 2 and 3, the vapor chamber 1 includes a lower metal sheet 10 (first metal sheet, vapor chamber metal sheet) and an upper metal sheet 20 (second metal layer) laminated on the lower metal sheet 10. Metal sheet, metal sheet for vapor chamber). In the present embodiment, the upper metal sheet 20 is provided on the lower metal sheet 10. The lower metal sheet 10 has an upper surface 10a (first surface) and a lower surface 10b (second surface) provided on the side opposite to the upper surface 10a. The upper metal sheet 20 has a lower surface 20a (surface on the lower metal sheet 10 side) superimposed on the upper surface 10a (surface on the upper metal sheet 20 side) of the lower metal sheet 10 and a side opposite to the lower surface 20a. And an upper surface 20b provided. A device D that is an object to be cooled is attached to a lower surface 10b of the lower metal sheet 10 (in particular, a lower surface of an evaporation unit 11 described later).

  Between the lower metal sheet 10 and the upper metal sheet 20, a sealed space 3 in which the hydraulic fluid 2 is enclosed is formed. In the present embodiment, the sealed space 3 includes a steam flow path 80 (a lower steam flow path recess 12 and an upper steam flow path recess 21 described later) through which the vapor of the hydraulic fluid 2 mainly passes, and a mainly liquid hydraulic fluid 2. And a liquid flow path portion 30 through which. Examples of the working fluid 2 include pure water, ethanol, methanol, acetone and the like.

  The lower metal sheet 10 and the upper metal sheet 20 are bonded by diffusion bonding described later. In the form shown in FIG. 2 and FIG. 3, the lower metal sheet 10 and the upper metal sheet 20 are both formed in a rectangular shape in plan view, but are not limited thereto. Here, the plan view means a direction in which the vapor chamber 1 receives heat from the device D (lower surface 10b of the lower metal sheet 10) and a surface that releases the received heat (upper surface 20b of the upper metal sheet 20). This corresponds to, for example, a state where the vapor chamber 1 is viewed from above (see FIG. 2) or a state viewed from below.

  When the vapor chamber 1 is installed in the mobile terminal, the vertical relationship between the lower metal sheet 10 and the upper metal sheet 20 may be broken depending on the attitude of the mobile terminal. However, in the present embodiment, for convenience, the metal sheet that receives heat from the device D is referred to as the lower metal sheet 10, the metal sheet that releases the received heat is referred to as the upper metal sheet 20, and the lower metal sheet 10 is A description will be given in a state where the upper metal sheet 20 is disposed on the upper side and the upper metal sheet 20 is disposed on the upper side.

  As shown in FIG. 4, the lower metal sheet 10 is provided with an evaporation section 11 where the working fluid 2 evaporates to generate steam, and a lower steam flow path provided on the upper surface 10 a and formed in a rectangular shape in plan view. And a recess 12 (first steam channel recess, first steam channel part). Among these, the lower steam flow path recess 12 constitutes a part of the sealed space 3 described above, and is mainly configured to allow the steam generated in the evaporation section 11 to pass therethrough.

  The evaporation unit 11 is disposed in the lower steam flow path recess 12, and the steam in the lower steam flow path recess 12 diffuses away from the evaporation unit 11, and most of the steam is relatively It is transported toward the periphery where the temperature is low. The evaporating unit 11 is a part that receives heat from the device D attached to the lower surface 10 b of the lower metal sheet 10 and evaporates the working fluid 2 in the sealed space 3. For this reason, the term “evaporating section 11” is not limited to a portion overlapping the device D, but is used as a concept including a portion where the hydraulic fluid 2 can be evaporated without overlapping the device D. Here, the evaporating part 11 can be provided at an arbitrary position of the lower metal sheet 10, but FIGS. 2 and 4 show examples provided in the central part of the lower metal sheet 10. . In this case, the operation of the vapor chamber 1 can be stabilized regardless of the attitude of the mobile terminal in which the vapor chamber 1 is installed.

  In the present embodiment, as shown in FIG. 3 and FIG. 4, the lower metal sheet 10 has a lower steam flow path recess 12 that is located above the bottom steam flow path recess 12 from the bottom surface 12 a (described later) (bottom surface 12 a). A plurality of lower flow path wall portions 13 (first flow path wall portions, first flow path protruding portions) that protrude in a direction perpendicular to the first flow path are provided. In the present embodiment, an example is shown in which the lower flow path wall 13 extends in an elongated shape along the first direction X (longitudinal direction, left-right direction in FIG. 4) of the vapor chamber 1. The lower flow path wall portion 13 includes an upper surface 13a (first contact surface, protruding end surface) that comes into contact with a lower surface 22a of the upper flow path wall portion 22 described later. The upper surface 13 a is a surface that is not etched by two etching processes described later, and is formed on the same plane as the upper surface 10 a of the lower metal sheet 10. Further, the lower flow path wall portions 13 are spaced apart at equal intervals and are arranged in parallel to each other.

  As shown in FIGS. 3 and 4, the lower steam passage recess 12 includes a plurality of lower steam passages 81 (first steam passages) partitioned by the lower passage wall portion 13. The lower steam passage 81 extends in an elongated shape along the first direction X, and is disposed in parallel to each other. Both end portions of each lower steam passage 81 communicate with a lower communication steam passage 82 that is elongated along the second direction Y, and each lower steam passage 81 passes through the lower communication steam passage 82. Communicate. In this way, the vapor of the working fluid 2 flows around each lower flow path wall 13 (the lower steam passage 81 and the lower communication steam path 82), and reaches the peripheral portion of the lower steam flow path recess 12. It is comprised so that a vapor | steam may be transported toward the direction, and it suppresses that the flow of a vapor | steam is prevented. In FIG. 3, the cross section (cross section in the second direction Y) of the lower steam passage 81 of the lower steam flow path recess 12 is a rectangular shape. However, the present invention is not limited to this, and the cross-sectional shape of the lower steam passage 81 may be, for example, curved, semicircular, or V-shaped, and can diffuse the vapor of the working fluid 2. It is optional if possible. The same applies to the lower communication steam passage 82. The width of the lower steam passage 81 (dimension in the second direction Y) corresponds to a distance d between lower flow path wall portions 13 described later. The same applies to the width of the lower communication steam passage 82 (the dimension in the first direction X).

  The lower flow path wall portion 13 is disposed so as to overlap with a corresponding upper flow path wall portion 22 (described later) of the upper metal sheet 20 in a plan view, thereby improving the mechanical strength of the vapor chamber 1. . The lower steam passage 81 is formed so as to overlap with a corresponding upper steam passage 83 (described later) in plan view. Similarly, the lower communication steam passage 82 is formed so as to overlap with a corresponding upper communication steam passage 84 (described later) in plan view.

  The width w0 of the lower flow path wall portion 13 is, for example, 0.1 mm to 30 mm, preferably 0.1 mm to 2.0 mm, and the interval d between the lower flow path wall portions 13 adjacent to each other is 0. It is 1 mm to 30 mm, preferably 0.1 mm to 2.0 mm. Here, the width w0 is a dimension of the lower flow path wall portion 13 in the second direction Y orthogonal to the first direction X of the lower flow path wall section 13, and is a dimension on the upper surface 10a of the lower metal sheet 10. For example, it corresponds to the vertical dimension in FIG. The distance d means the dimension on the upper surface 10 a of the lower metal sheet 10. In addition, the height of the lower flow path wall 13 (in other words, the maximum depth of the lower steam flow path recess 12) h0 (see FIG. 3) is preferably 10 μm to 300 μm. The extending direction of the lower flow path wall 13 is not limited to the upper side (or vertical) as long as it protrudes from the bottom surface 12a of the lower steam flow path recess 12, and is arbitrary.

  As shown in FIGS. 3 and 4, a lower peripheral wall 14 is provided at the peripheral edge of the lower metal sheet 10. The lower peripheral wall 14 is formed so as to surround the sealed space 3, particularly the lower steam flow path recess 12, and defines the sealed space 3. Further, lower alignment holes 15 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at four corners of the lower peripheral wall 14 in plan view.

  In the present embodiment, the upper metal sheet 20 has substantially the same structure as that of the lower metal sheet 10 except that a liquid flow path portion 30 described later is not provided. Hereinafter, the configuration of the upper metal sheet 20 will be described in more detail.

  As shown in FIGS. 3 and 5, the upper metal sheet 20 has an upper steam channel recess 21 (second steam channel recess, second steam channel part) provided on the lower surface 20a. The upper steam flow path recess 21 constitutes a part of the sealed space 3 and is mainly configured to diffuse and cool the steam generated in the evaporation section 11. More specifically, the steam in the upper steam flow path recess 21 diffuses in the direction away from the evaporation section 11, and most of the steam is transported toward the peripheral portion having a relatively low temperature. As shown in FIG. 3, a housing member Ha constituting a part of a housing H (see FIG. 1) such as a mobile terminal is disposed on the upper surface 20 b of the upper metal sheet 20. Thereby, the steam in the upper steam flow path recess 21 is cooled by the outside via the upper metal sheet 20 and the housing member Ha.

  In the present embodiment, as shown in FIGS. 2, 3, and 5, in the upper steam flow path recess 21 of the upper metal sheet 20, the bottom side of the upper steam flow path recess 21 is lower (perpendicular to the bottom surface 21 a). A plurality of upper flow path wall portions 22 (second flow path wall portions, second flow path protruding portions) protruding in the direction) are provided. In the present embodiment, an example is shown in which the upper flow path wall portion 22 extends in an elongated shape along the first direction X (the left-right direction in FIG. 5) of the vapor chamber 1. The upper flow path wall portion 22 is in a flat shape that contacts the upper surface 10a of the lower metal sheet 10 (more specifically, the upper surface 13a of the lower flow path wall portion 13 described above) and covers the liquid flow path portion 30. The lower surface 22a (2nd contact surface, protrusion end surface) is included. In addition, the upper flow path wall portions 22 are arranged in parallel with each other at regular intervals.

  As shown in FIGS. 3 and 5, the upper steam passage recess 21 includes a plurality of upper steam passages 83 (second steam passages) partitioned by the upper passage wall portion 22. The upper steam passage 83 extends in an elongated shape along the first direction X and is disposed in parallel to each other. Both end portions of each upper steam passage 83 communicate with an upper communication steam passage 84 extending in an elongated shape along the second direction Y, and each upper steam passage 83 communicates with each other via the upper communication steam passage 84. Yes. In this way, the steam of the working fluid 2 flows around each upper flow path wall portion 22 (upper steam passage 83 and upper communication steam path 84), and the steam flows toward the peripheral edge of the upper steam flow path recess 21. It is configured to be transported and prevents the steam flow from being hindered. In FIG. 3, the cross section (cross section in the second direction Y) of the upper steam passage 83 of the upper steam passage recess 21 is rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the upper steam passage 83 may be, for example, a curved shape, a semicircular shape, or a V shape, as long as the vapor of the working fluid 2 can be diffused. Is optional. The cross sectional shape of the upper communication steam passage 84 is the same. The width of the upper steam passage 83 (dimension in the second direction Y) and the width of the upper communication steam passage 84 are the same as the width of the lower steam passage 81 and the width of the lower communication steam passage 82 as shown in FIG. May be different.

  The upper flow path wall portion 22 is disposed so as to overlap the corresponding lower flow path wall portion 13 of the lower metal sheet 10 in a plan view, thereby improving the mechanical strength of the vapor chamber 1. Further, the upper steam passage 83 is formed so as to overlap the corresponding lower steam passage 81 in a plan view. Similarly, the upper communication steam passage 84 is formed so as to overlap the corresponding lower communication steam passage 82 in plan view.

  The width and height of the upper flow path wall portion 22 are preferably the same as the width w0 and height h0 of the lower flow path wall portion 13 described above. Here, the bottom surface 21a of the upper steam flow path recess 21 can be called a ceiling surface in the vertical arrangement relationship between the lower metal sheet 10 and the upper metal sheet 20 as shown in FIG. Since it corresponds to the back surface of the road recess 21, it is referred to as a bottom surface 21 a in this specification.

  As shown in FIGS. 3 and 5, an upper peripheral wall 23 is provided at the peripheral edge of the upper metal sheet 20. The upper peripheral wall 23 is formed so as to surround the sealed space 3, particularly, the upper steam flow path recess 21, and defines the sealed space 3. Further, upper alignment holes 24 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at the four corners of the upper peripheral wall 23 in plan view. That is, each upper alignment hole 24 is disposed so as to overlap each lower alignment hole 15 described above during temporary fixing, which will be described later, and is configured such that the lower metal sheet 10 and the upper metal sheet 20 can be positioned. .

  Such lower metal sheet 10 and upper metal sheet 20 are preferably permanently joined to each other by diffusion bonding. More specifically, as shown in FIG. 3, the upper surface 14a of the lower peripheral wall 14 of the lower metal sheet 10 and the lower surface 23a of the upper peripheral wall 23 of the upper metal sheet 20 come into contact with each other, and the lower peripheral wall 14 and the upper peripheral wall 23 are joined to each other. Thus, a sealed space 3 in which the hydraulic fluid 2 is sealed is formed between the lower metal sheet 10 and the upper metal sheet 20. Further, the upper surface 13 a of the lower flow path wall portion 13 of the lower metal sheet 10 and the lower surface 22 a of the upper flow path wall portion 22 of the upper metal sheet 20 come into contact with each other and correspond to each lower flow path wall portion 13. The upper flow path wall portion 22 is joined to each other. Thereby, the mechanical strength of the vapor chamber 1 is improved. In particular, since the lower flow path wall portion 13 and the upper flow path wall portion 22 according to the present embodiment are arranged at equal intervals, the mechanical strength at each position of the vapor chamber 1 can be equalized. The lower metal sheet 10 and the upper metal sheet 20 may be joined by other methods such as brazing as long as they can be permanently joined instead of diffusion joining. Note that the term “permanently bonded” is not limited to a strict meaning, and the upper surface 10a of the lower metal sheet 10 is maintained to such an extent that the sealing performance of the sealed space 3 can be maintained during operation of the vapor chamber 1. It is used as a term meaning that it is bonded to such an extent that the bonding between the upper metal sheet 20 and the lower surface 20a of the upper metal sheet 20 can be maintained.

  As shown in FIG. 2, the vapor chamber 1 further includes an injection part 4 that injects the working fluid 2 into the sealed space 3 at one of the pair of end parts in the first direction X. . The injection portion 4 includes a lower injection protrusion 16 that protrudes from the end surface of the lower metal sheet 10, and an upper injection protrusion 25 that protrudes from the end surface of the upper metal sheet 20. Among these, the lower injection channel recess 17 is formed on the upper surface of the lower injection projection 16, and the upper injection channel recess 26 is formed on the lower surface of the upper injection projection 25. The lower injection channel recess 17 communicates with the lower steam channel recess 12, and the upper injection channel recess 26 communicates with the upper steam channel recess 21. The lower injection channel recess 17 and the upper injection channel recess 26 form an injection channel for the working fluid 2 when the lower metal sheet 10 and the upper metal sheet 20 are joined. The hydraulic fluid 2 is injected into the sealed space 3 through the injection channel. In the present embodiment, the example in which the injection part 4 is provided at one end of the pair of end parts in the first direction X of the vapor chamber 1 is shown, but is not limited thereto. It can be provided at any position. Two or more injection parts 4 may be provided.

  Next, the liquid flow path part 30 of the lower metal sheet 10 will be described in more detail with reference to FIGS. 3, 4, 6 to 9.

  As shown in FIGS. 3 and 4, the liquid flow path portion through which the liquid working fluid 2 passes through the upper surface 10 a of the lower metal sheet 10 (more specifically, the upper surface 13 a of each lower flow path wall portion 13). 30 is provided. The liquid flow path part 30 constitutes a part of the sealed space 3 described above, and communicates with the lower steam flow path recess 12 and the upper steam flow path recess 21 described above. In addition, the liquid flow path part 30 is not necessarily provided in all the lower flow path wall parts 13. For example, the lower flow path wall part 13 in which the liquid flow path part 30 is not provided may exist.

  As shown in FIG. 6, the liquid flow path portion 30 has a plurality of main flow grooves 31. Each of the main flow grooves 31 extends in the first direction X so that the liquid working fluid 2 passes therethrough, and is disposed at different positions in the second direction Y described above. The main flow groove 31 is mainly configured to transport the hydraulic fluid 2 condensed from the steam generated in the evaporation unit 11 toward the evaporation unit 11.

  A convex row 41 is provided between a pair of adjacent mainstream grooves 31. The convex part row 41 includes a plurality of liquid flow path convex parts 41 a arranged in the first direction X. In each convex part row 41, the liquid flow path convex parts 41a are arranged in the first direction X at a constant pitch. Further, the liquid flow path convex part 41 a of one convex part row 41 and the liquid flow path convex part 41 a of the other convex part row 41 are arranged at the same position in the first direction X. In this way, the arrangement of the liquid flow path convex portions 41a is in a lattice shape. The liquid flow path convex portions 41 a may be arranged in a lattice shape over the entire liquid flow path portions 30.

  A communication groove 51 is interposed between the liquid channel convex portions 41a adjacent to each other. The communication groove 51 extends in the second direction Y and is aligned in the second direction Y. In the present embodiment, the second direction in which the connecting grooves 51 are aligned is a direction Y orthogonal to the first direction X. Further, the communication groove 51 communicates with a corresponding pair of main flow grooves 31 (main flow grooves 31 adjacent in the vertical direction in FIG. 6), and the hydraulic fluid 2 can come and go between these main flow grooves 31. Yes. The communication groove 51 is a region between the liquid flow path convex portions 41 a adjacent to each other in the first direction X and is a region between the pair of main flow grooves 31 adjacent to each other in the second direction Y.

  As shown in FIG. 6, the mainstream groove 31 includes an intersecting portion P that communicates with the communication groove 51 and a mainstream groove main body portion 31a.

  Among these, at the intersection P, a pair of connecting grooves 51 located on both sides of the mainstream groove 31 in the second direction Y communicate with the mainstream groove 31. The pair of communication grooves 51 are aligned in the second direction Y, and are arranged on a straight line. In this way, at the intersection P, the mainstream groove 31 and the communication groove 51 intersect in a cross shape. The intersecting portion P is a region between the mainstream groove main body portions 31a adjacent to each other in the first direction X and a region between the communication grooves 51 adjacent to each other in the second direction Y. In other words, it is a region where the mainstream groove 31 and the row of connecting grooves 51 intersect (that is, an overlapping region).

  The main flow groove main body portion 31a is disposed at a position different from the intersecting portion P in the first direction X, and is a portion located between the liquid flow channel convex portions 41a adjacent to each other in the second direction Y. The intersecting portions P and the mainstream groove main body portions 31a are alternately arranged.

  The width w1 (dimension in the second direction Y) of the main flow groove 31 is preferably larger than the width w2 (dimension in the second direction Y) of the liquid flow path convex portion 41a. In this case, the ratio of the mainstream groove 31 to the upper surface 13a of the lower flow path wall 13 can be increased. For this reason, the transport density of the liquid working fluid 2 can be improved by increasing the flow path density of the main flow grooves 31 on the upper surface 13a. For example, the width w1 of the main flow groove 31 may be 30 μm to 200 μm, and the width w2 of the liquid flow path convex portion 41a may be 20 μm to 180 μm.

  The depth h1 of the main flow groove 31 shown in FIG. 7 is preferably smaller than the depth h0 of the lower steam passage recess 12 described above. In this case, the capillary action of the mainstream groove 31 can be enhanced. For example, the depth h1 of the mainstream groove 31 is preferably about half of h0, and may be 5 μm to 180 μm.

  Further, the width w3 of the communication groove 51 is larger than the width w1 of the mainstream groove 31 (more specifically, the width of the mainstream groove main body 31a). The width w3 of the communication groove 51 may be 40 μm to 300 μm, for example.

  The cross-sectional shape (cross-section in the second direction Y) of the main flow groove 31 is not particularly limited, and can be, for example, rectangular, curved, semicircular, or V-shaped. The shape of the cross section (cross section in the first direction X) of the communication groove 51 is the same. 7 and 8 show examples in which the cross sections of the main flow groove 31 and the communication groove 51 are formed in a curved shape, respectively. In this case, the width of the main flow groove 31 and the communication groove 51 is the width of the groove on the upper surface 13 a of the lower flow path wall portion 13. Similarly, the width of the liquid flow path convex portion 41a is the width of the convex portion on the upper surface 13a.

  By the way, in FIG. 6, each liquid flow path convex part 41a is formed in the rectangular shape so that the 1st direction X may become a longitudinal direction by planar view if it sees globally. The liquid flow path convex portion 41 a may be formed in the same shape throughout each liquid flow path portion 30. However, rounded curved portions 45 are provided at the corners of the respective liquid flow path convex portions 41a. Thereby, the corner | angular part of each liquid flow path convex part 41a is formed in the curve shape smoothly, and reduction of the flow path resistance of the liquid working fluid 2 is aimed at. In addition, two curved portions 45 are respectively provided at the right end portion and the left end portion in FIG. 6 of the liquid flow path convex portion 41 a, and a linear portion 46 is provided between the two curved portions 45. An example is shown. For this reason, the width w3 of the communication groove 51 is a distance between the linear portions 46 of the liquid flow path convex portions 41a adjacent to each other in the first direction X. Although not shown, the same applies to the case where the curved portion 45 is not formed at the corner of each liquid flow path convex portion 41a. However, the end shape of the liquid flow path convex portion 41a is not limited to this. For example, each of the right end portion and the left end portion may be formed such that the entire end portion is curved without being provided with the linear portion 46 (for example, in a semicircular shape). In this case, the width w3 of each communication groove 51 is the minimum distance between the liquid flow channel convex portions 41a adjacent to each other in the first direction X.

  As shown in FIGS. 8 and 9, in the present embodiment, the depth h3 of the communication groove 51 is greater than the depth h1 of the main flow groove 31 (more specifically, the depth of the main flow groove main body 31a). It is getting deeper. Here, as described above, when the cross-sectional shape of each mainstream groove 31 and the cross-sectional shape of each communication groove 51 are formed in a curved shape, the depth of the grooves 31 and 51 is the deepest position in the groove. The depth at. The depth h3 of the communication groove 51 may be, for example, 10 μm to 250 μm.

  In the present embodiment, as shown in FIG. 9, the depth h1 'of the intersecting portion P of the mainstream groove 31 is deeper than the depth h1 of the mainstream groove main body 31a. Further, the depth h <b> 1 ′ of the intersecting portion P of the mainstream groove 31 may be deeper than the depth h <b> 3 of the communication groove 51. The depth h1 'of such an intersection P may be, for example, 20m to 300m. The depth h <b> 1 ′ of the intersection P is the depth at the deepest position in the intersection P.

  As described above, the depth h3 of the connecting groove 51 is deeper than the depth h1 of the mainstream groove main body 31a of the mainstream groove 31, and the depth h1 ′ of the intersection P of the mainstream groove 31 is the mainstream. It is deeper than the depth h1 of the groove body 31a. Thus, a buffer region Q deeper than the depth h1 of the mainstream groove main body 31a is formed in a region extending from the intersection P to the intersection P via the connecting groove 51. The buffer region Q can store the liquid working fluid 2. Usually, each main flow groove 31 and each communication groove 51 of the liquid flow path section 30 are filled with the liquid working fluid 2. For this reason, since the depth (h1 ′ and h3) of the buffer region Q is deeper than the depth h1 of the mainstream groove main body portion 31a, a large amount of hydraulic fluid 2 can be stored in the buffer region Q. It has become. As described above, since each main flow groove 31 and each communication groove 51 are filled with the working fluid 2, the working fluid 2 can be stored in the buffer region Q regardless of the posture of the vapor chamber 1. . In the present embodiment, since the communication grooves 51 are aligned in the second direction Y, the buffer region Q is formed to extend continuously in the second direction Y.

  A large number of intersecting portions P are formed in each liquid flow path portion 30 of the vapor chamber 1, and the depth h1 ′ of at least one of the intersecting portions P is the depth h1 ( Or if it is deeper than the depth h3) of the connection groove | channel 51, the storage performance of the hydraulic fluid 2 in the said cross | intersection part P can be improved. Since this storage performance improves as the number of intersections P having h1 ′ deeper than the depth h1 of the mainstream groove main body 31a increases, the depths h1 ′ of all intersections P have the same depth. It is preferable to have. However, it is clear that the storage performance of the hydraulic fluid 2 can be improved even if the depth h1 ′ of some of the intersecting portions P is not deeper than the depth h1 of the mainstream groove main body portion 31a due to manufacturing errors or the like. It is. The same applies to the depth h3 of the communication groove 51.

  Here, a method for confirming the width and depth of the main flow groove 31 and the width and depth of the communication groove 51 from the completed vapor chamber 1 will be described. In general, the main flow groove 31 and the communication groove 51 are not visible from the outside of the vapor chamber 1. For this reason, the method of confirming the width | variety and the depth of the mainstream groove | channel 31 and the communication groove | channel 51 from the cross-sectional shape obtained by cut | disconnecting the completed vapor chamber 1 in a desired position is mentioned.

  Specifically, first, the vapor chamber 1 was cut into 10 mm square pieces with a wire saw to prepare a sample. Subsequently, the sample is embedded in the resin while vacuum degassing so that the resin enters the vapor flow path recesses 12 and 21 and the liquid flow path section 30 (the main flow groove 31 and the communication groove 51). Next, trimming is performed with a diamond knife so as to obtain a desired cross section. At this time, for example, using a diamond knife of a microtome (for example, an ultramicrotome manufactured by Leica Microsystems), trimming is performed to a portion 40 μm away from the measurement target position. For example, if the pitch of the communication grooves 51 is 200 μm, it is possible to specify a portion 40 μm away from the communication groove 51 as the measurement target by cutting 160 μm from the communication groove 51 adjacent to the communication groove 51 as the measurement target. it can. Next, the cut surface for observation is produced by cutting the trimmed cut surface. At this time, using a cross-section sample preparation device (for example, a cross section polisher manufactured by JOEL), the protruding width is set to 40 μm, the voltage is set to 5 kV, the time is set to 6 hours, and the cut surface is cut by ion beam processing. Thereafter, the cut surface of the obtained sample is observed. At this time, using a scanning electron microscope (for example, a scanning electron microscope manufactured by Carl Zeiss), the voltage is set to 5 kV, the working distance is set to 3 mm, the observation magnification is set to 200 times or 500 times, and the cut surface is observed. To do. In this way, the width and depth of the mainstream groove 31 and the connecting groove 51 can be measured. The observation magnification reference at the time of photographing is Polaroid 545. The method described above is an example, and the apparatus to be used, the measurement conditions, and the like can be arbitrarily determined according to the shape, structure, etc. of the sample.

  As described above, the width w <b> 3 of the communication groove 51 is larger than the width w <b> 1 of the main flow groove 31. Thus, the buffer region Q is a region that is opened larger than the mainstream groove main body 31a. For this reason, in the second half etching process shown in FIG. 12, the etching solution enters the buffer region Q more than the mainstream groove main body 31a. As a result, erosion by the etchant in the buffer region Q proceeds, and the depth of the buffer region Q becomes deeper. A portion of the buffer region Q corresponding to the intersecting portion P communicates with the mainstream groove main body portion 31 a, so that the etching solution can enter more easily than the communication groove 51. As a result, the depth h <b> 1 ′ of the intersecting portion P can be deeper than the depth h <b> 3 of the communication groove 51. In this way, a buffer region Q as shown in FIG. 9 is formed.

  By the way, the liquid flow path portion 30 described above is formed on the upper surface 13 a of the lower flow path wall portion 13 of the lower metal sheet 10. On the other hand, in the present embodiment, the lower surface 22a of the upper flow path wall portion 22 of the upper metal sheet 20 is formed flat. Thus, each main flow groove 31 of the liquid flow path section 30 is covered with the flat lower surface 22a. In this case, as shown in FIG. 7, two corners 37 having a right angle or an acute angle are formed by a pair of side walls 35, 36 extending in the first direction X of the main flow groove 31 and the lower surface 22 a of the upper flow path wall 22. And the capillary action at these two corners 37 can be enhanced. That is, even when the cross section of the mainstream groove 31 is formed in a curved shape, the capillary action can be enhanced at the corner portion 37.

  Similarly, each communication groove 51 of the liquid flow path portion 30 is covered with a flat lower surface 22a. In this case, as shown in FIGS. 6 and 8, two right-angled or acute-angled two side walls 55, 56 extending in the second direction Y of the communication groove 51 and the lower surface 22 a of the upper flow path wall portion 22. Corners 57 can be formed, and the capillary action at these two corners 57 can be enhanced. That is, even when the cross section of the communication groove 51 is formed in a curved shape, the capillary action can be enhanced at the corner portion 57.

  Here, the liquid working fluid 2 condensed from the vapor enters the main flow groove 31 through the communication groove 51 as described later. For this reason, the capillary action of the communication groove 51 is enhanced, so that the condensed liquid working fluid 2 can smoothly enter the main flow grooves 31. That is, the condensed liquid working fluid 2 is not limited to the main flow groove 31 on the side close to the steam flow path recesses 12, 21 but the main flow groove on the side far from the steam flow path recesses 12, 21 due to the capillary action of the communication groove 51. 31 can also enter smoothly, and the transport function of the condensed liquid working fluid 2 can be improved. In addition, by making the width w3 of the communication groove 51 larger than the width w1 of the main flow groove 31, the flow resistance of the hydraulic fluid 2 in the communication groove 51 can be reduced. The liquid working fluid 2 can smoothly enter each main flow groove 31. The hydraulic fluid 2 that has entered the main flow grooves 31 can be smoothly transported toward the evaporation section 11 by the capillary action of the main flow grooves 31. For this reason, the transport function of the liquid working fluid 2 can be improved as the entire liquid flow path section 30.

  The material used for the lower metal sheet 10 and the upper metal sheet 20 is not particularly limited as long as the material has good thermal conductivity. For example, the lower metal sheet 10 and the upper metal sheet 20 are made of copper. (Oxygen-free copper) or a copper alloy is preferable. Thereby, the thermal conductivity of the lower metal sheet 10 and the upper metal sheet 20 can be increased. For this reason, the heat dissipation efficiency of the vapor chamber 1 can be increased. Alternatively, other metal materials such as aluminum and other metal alloy materials such as stainless steel can be used for the metal sheets 10 and 20 as long as a desired heat dissipation efficiency can be obtained. The vapor chamber 1 has a thickness of 0.1 mm to 1.0 mm. Although FIG. 3 shows a case where the thickness T1 of the lower metal sheet 10 and the thickness T2 of the upper metal sheet 20 are equal, the present invention is not limited to this, and the thickness T1 of the lower metal sheet 10 and the upper metal sheet 10 are equal to each other. The thickness T2 of the metal sheet 20 may not be equal.

  Next, the operation of the present embodiment having such a configuration will be described. Here, although the manufacturing method of the vapor chamber 1 is demonstrated using FIG. 10 thru | or FIG. 15, description of the half etching process of the upper side metal sheet 20 is simplified. 10 to 15 show the same cross section as the cross sectional view of FIG.

  First, as shown in FIG. 10, a flat metal material sheet M is prepared as a preparation step.

  Subsequently, as shown in FIG. 11, the metal material sheet M is half-etched to form a lower steam flow path recess 12 that constitutes a part of the sealed space 3. In this case, first, a first resist film (not shown) is formed on the upper surface Ma of the metal material sheet M in a pattern corresponding to the plurality of lower flow path wall portions 13 and the lower peripheral wall 14 by photolithography. . Subsequently, as the first half etching step, the upper surface Ma of the metal material sheet M is half-etched. As a result, a portion of the upper surface Ma of the metal material sheet M corresponding to the resist opening (not shown) of the first resist film is half-etched, so that the lower vapor channel recess 12 as shown in FIG. A side flow path wall 13 and a lower peripheral wall 14 are formed. At this time, the lower injection channel recess 17 shown in FIGS. 2 and 4 is also formed at the same time, and the metal material sheet M is etched from the upper surface Ma and the lower surface so as to have an outer contour shape as shown in FIG. A predetermined outer contour shape is obtained. After the first half etching process, the first resist film is removed. Note that half-etching means etching for forming a recess that does not penetrate the material. For this reason, the depth of the recess formed by half etching is not limited to being half the thickness of the lower metal sheet 10. As the etchant, for example, an iron chloride-based etchant such as a ferric chloride aqueous solution or a copper chloride-based etchant such as a copper chloride aqueous solution can be used.

  After the lower steam passage recess 12 is formed, the liquid passage portion 30 is formed on the upper surface 13a of the lower passage wall portion 13 as shown in FIG.

  In this case, first, a second resist film (not shown) is formed on the upper surface 13a of the lower flow path wall 13 in a pattern corresponding to the liquid flow path convex portion 41a of the liquid flow path section 30 by photolithography. The Subsequently, as a second half etching step, the upper surface 13a of the lower flow path wall 13 is half etched. As a result, a portion of the upper surface 13 a corresponding to the resist opening (not shown) of the second resist film is half-etched, and the liquid flow path portion 30 is formed on the upper surface 13 a of the lower flow path wall portion 13. The That is, each liquid flow path convex part 41a is formed in the said upper surface 13a. The main flow grooves 31 and the communication grooves 51 are defined by these liquid flow path convex portions 41a. After the second half etching process, the second resist film is removed.

  Thus, the lower metal sheet 10 in which the liquid flow path part 30 is formed is obtained. As the second half etching step, which is a step different from the first half etching step, the liquid channel portion 30 is formed, so that the mainstream at a depth different from the depth h0 of the lower steam channel recess 12 is obtained. The groove 31 and the communication groove 51 can be easily formed. However, the lower steam flow path recess 12, the main flow groove 31 and the communication groove 51 may be formed by the same half etching process. In this case, the number of half-etching steps can be reduced, and the manufacturing cost of the vapor chamber 1 can be reduced.

  On the other hand, similarly to the lower metal sheet 10, the upper metal sheet 20 is half-etched from the lower surface 20 a to form the upper steam channel recess 21, the upper channel wall 22, and the upper peripheral wall 23. In this way, the above-described upper metal sheet 20 is obtained.

  Next, as shown in FIG. 13, as a temporary fixing step, the lower metal sheet 10 having the lower steam flow path recess 12 and the upper metal sheet 20 having the upper steam flow path recess 21 are temporarily fixed. In this case, first, using the lower alignment hole 15 (see FIGS. 2 and 4) of the lower metal sheet 10 and the upper alignment hole 24 (see FIGS. 2 and 5) of the upper metal sheet 20, The metal sheet 10 and the upper metal sheet 20 are positioned. Subsequently, the lower metal sheet 10 and the upper metal sheet 20 are fixed. The fixing method is not particularly limited. For example, the lower metal sheet 10 and the upper metal sheet 20 are fixed by performing resistance welding on the lower metal sheet 10 and the upper metal sheet 20. May be. In this case, it is preferable to perform resistance welding in a spot manner using the electrode rod 40 as shown in FIG. Laser welding may be performed instead of resistance welding. Alternatively, the lower metal sheet 10 and the upper metal sheet 20 may be ultrasonically bonded and fixed by irradiating ultrasonic waves. Furthermore, although an adhesive may be used, it is preferable to use an adhesive that does not have an organic component or has few organic components. Thus, the lower metal sheet 10 and the upper metal sheet 20 are fixed in a positioned state.

  After temporary fixing, as shown in FIG. 14, the lower metal sheet 10 and the upper metal sheet 20 are permanently bonded by diffusion bonding as a permanent bonding step. In diffusion bonding, the lower metal sheet 10 and the upper metal sheet 20 to be bonded are brought into close contact with each other, and the metal sheets 10 and 20 are pressurized in a controlled atmosphere such as in a vacuum or an inert gas. It is the method of joining together using the diffusion of the atom produced on a joining surface by heating together. In diffusion bonding, the materials of the lower metal sheet 10 and the upper metal sheet 20 are heated to a temperature close to the melting point. However, since the temperature is lower than the melting point, the metal sheets 10 and 20 can be prevented from melting and deforming. More specifically, the upper surface 14a of the lower peripheral wall 14 of the lower metal sheet 10 and the lower surface 23a of the upper peripheral wall 23 of the upper metal sheet 20 are diffusion bonded. Thus, the sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20 by the lower peripheral wall 14 and the upper peripheral wall 23. Further, the lower injection channel recess 17 (see FIGS. 2 and 4) and the upper injection channel recess 26 (see FIGS. 2 and 5) form an injection channel for the working fluid 2 communicating with the sealed space 3. Is done. Further, the upper surface 13a of the lower flow path wall portion 13 of the lower metal sheet 10 and the lower surface 22a of the upper flow path wall portion 22 of the upper metal sheet 20 are diffusion-bonded as a bonding surface, and the vapor chamber 1 Mechanical strength is improved. The liquid flow path portion 30 formed on the upper surface 13 a of the lower flow path wall portion 13 remains as a flow path for the liquid working fluid 2.

  After permanent joining, as shown in FIG. 15, the working fluid 2 is injected into the sealed space 3 from the injection portion 4 (see FIG. 2) as an encapsulation process. At this time, first, the sealed space 3 is evacuated and decompressed (for example, 5 Pa or less, preferably 1 Pa or less), and then the working fluid 2 is injected into the sealed space 3. At the time of injection, the working fluid 2 passes through an injection channel formed by the lower injection channel recess 17 and the upper injection channel recess 26. For example, the amount of the hydraulic fluid 2 enclosed may be 10% to 40% with respect to the total volume of the sealed space 3, although it depends on the configuration of the liquid flow path portion 30 inside the vapor chamber 1.

  After the injection of the working fluid 2, the above-described injection flow path is sealed. For example, the injection part 4 may be irradiated with a laser, and the injection part 4 may be partially melted to seal the injection flow path. As a result, communication between the sealed space 3 and the outside is blocked, and the hydraulic fluid 2 is sealed in the sealed space 3. In this way, the hydraulic fluid 2 in the sealed space 3 is prevented from leaking outside. For sealing, the injection part 4 may be crimped (may be pressed and plastically deformed), or may be brazed.

  As described above, the vapor chamber 1 according to the present embodiment is obtained.

  Next, a method for operating the vapor chamber 1, that is, a method for cooling the device D will be described.

  The vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like, and a device D such as a CPU to be cooled is attached to the lower surface 10b of the lower metal sheet 10. . Since the amount of the hydraulic fluid 2 injected into the sealed space 3 is small, the liquid hydraulic fluid 2 in the sealed space 3 has a surface tension that causes the wall surface of the sealed space 3, that is, the lower steam channel recess 12 to be It adheres to the wall surface, the wall surface of the upper steam passage recess 21 and the wall surface of the liquid passage portion 30.

  When the device D generates heat in this state, the hydraulic fluid 2 present in the evaporation unit 11 in the lower steam flow path recess 12 receives heat from the device D. The received heat is absorbed as latent heat, the working fluid 2 evaporates (vaporizes), and the vapor of the working fluid 2 is generated. Most of the generated steam diffuses in the lower steam flow path recess 12 and the upper steam flow path recess 21 constituting the sealed space 3 (see solid arrows in FIG. 4). The steam in the upper steam flow path recess 21 and the lower steam flow path recess 12 is separated from the evaporation section 11, and most of the steam is transported toward the periphery of the vapor chamber 1 having a relatively low temperature. The diffused vapor dissipates heat to the lower metal sheet 10 and the upper metal sheet 20 and is cooled. The heat received from the steam by the lower metal sheet 10 and the upper metal sheet 20 is transmitted to the outside through the housing member Ha (see FIG. 3).

  The steam loses the latent heat absorbed in the evaporation section 11 by being dissipated to the lower metal sheet 10 and the upper metal sheet 20 and condenses. The hydraulic fluid 2 condensed into a liquid state adheres to the wall surface of the lower steam channel recess 12 or the wall surface of the upper steam channel recess 21. Here, since the hydraulic fluid 2 continues to evaporate in the evaporation section 11, the hydraulic fluid 2 in the portion other than the evaporation section 11 in the liquid flow path section 30 is transported toward the evaporation section 11 (FIG. 4). (See dashed arrow). As a result, the liquid working fluid 2 adhering to the wall surface of the lower steam channel recess 12 and the wall surface of the upper steam channel recess 21 moves toward the liquid channel unit 30, and enters the liquid channel unit 30. Get in. That is, it passes through the connecting groove 51 and enters the mainstream groove 31. Here, as described above, since the width w3 of the communication groove 51 is larger than the width w1 of the main flow groove 31, the flow path resistance of the hydraulic fluid 2 in each communication groove 51 is small. For this reason, the liquid working fluid 2 adhering to the wall surfaces of the respective vapor flow path recesses 12 and 21 passes through the communication grooves 51 and smoothly enters the main flow grooves 31. Then, each main flow groove 31 and each communication groove 51 are filled with the liquid working fluid 2. For this reason, the filled hydraulic fluid 2 obtains a propulsive force toward the evaporation unit 11 by the capillary action of each main flow groove 31 and is smoothly transported toward the evaporation unit 11.

  In the liquid flow path portion 30, each main flow groove 31 communicates with another adjacent main flow groove 31 via a corresponding communication groove 51. As a result, the liquid working fluid 2 travels between the main flow grooves 31 adjacent to each other, and the occurrence of dryout in the main flow grooves 31 is suppressed. For this reason, a capillary action is imparted to the hydraulic fluid 2 in each main flow groove 31, and the hydraulic fluid 2 is smoothly transported toward the evaporation section 11.

  The hydraulic fluid 2 that has reached the evaporator 11 receives heat from the device D again and evaporates. In this way, the hydraulic fluid 2 recirculates in the vapor chamber 1 while repeating phase change, that is, evaporation and condensation, and moves and releases the heat of the device D. As a result, the device D is cooled.

  By the way, a part of the hydraulic fluid 2 toward the evaporation unit 11 is drawn into the buffer region Q constituted by the intersection P and stored.

  Here, when dryout occurs in the mainstream groove main body 31a, the hydraulic fluid 2 stored in the buffer region Q moves toward the dryout generation portion. More specifically, when dryout occurs in the mainstream groove main body portion 31a, the hydraulic fluid 2 is generated from the buffer region Q closest to the dryout generation portion by the capillary action of the mainstream groove main body portion 31a. Move to the department. Thereby, the hydraulic fluid 2 is filled in the dry-out generation portion, and the dry-out is eliminated.

  In the mainstream groove main body 31a, when bubbles are generated by the vapor in the liquid working fluid 2, the bubbles are drawn into and held in the buffer region Q on the downstream side (the evaporation unit 11 side). Since the depth of the buffer region Q is deeper than the depth h1 of the mainstream groove main body 31a, the bubbles drawn into the buffer region Q are suppressed from moving from the buffer region Q to the mainstream groove main body 31a. The For this reason, the bubble which generate | occur | produced in the mainstream groove main-body part 31a can be capture | acquired by the buffer area | region Q, and it can suppress that the flow to the evaporation part 11 of the hydraulic fluid 2 is prevented by the bubble.

  Thus, according to the present embodiment, the width w3 of the communication groove 51 is larger than the width w1 of the mainstream groove 31. As a result, the flow resistance of the hydraulic fluid 2 in each communication groove 51 can be reduced. For this reason, the liquid working fluid 2 condensed from the steam can smoothly enter the main flow grooves 31. That is, not only the main flow groove 31 on the side close to the steam flow path recesses 12, 21 but also the main flow groove 31 on the side far from the steam flow path recesses 12, 21 can smoothly enter, and the condensed liquid working fluid The transportation function of 2 can be improved. As a result, the transport function of the liquid working fluid 2 can be improved, and the heat transport efficiency can be improved.

  Further, according to the present embodiment, the depth h3 of the connecting groove 51 is deeper than the depth h1 of the mainstream groove 31. As a result, a buffer region Q for storing the hydraulic fluid 2 can be formed in each communication groove 51. For this reason, when the dryout occurs in the mainstream groove 31, the hydraulic fluid 2 stored in the buffer region Q can be moved to the dryout generation portion. For this reason, dryout can be eliminated and the transport function of the hydraulic fluid 2 in each main flow groove 31 can be recovered. Further, when bubbles are generated in the mainstream groove 31, the bubbles can be drawn into the buffer region Q and captured. Also in this point, the transport function of the hydraulic fluid 2 in each main flow groove 31 can be recovered.

  Further, according to the present embodiment, the depth h1 'of the intersecting portion P of the mainstream groove 31 is deeper than the depth h1 of the mainstream groove main body 31a. As a result, the buffer region Q can be extended to the intersection P. For this reason, the storage amount of the working fluid 2 in the buffer region Q can be increased, and the dryout can be more easily eliminated.

  Further, according to the present embodiment, the rounded curved portion 45 is provided at the corner of the liquid flow path convex portion 41a. As a result, the corners of the respective liquid flow path convex portions 41a can be smoothly formed in a curved shape, and the flow resistance of the liquid working liquid 2 can be reduced.

  Further, according to the present embodiment, the depth h <b> 1 ′ of the intersecting portion P of the main flow groove 31 is deeper than the depth h <b> 3 of the communication groove 51. As a result, the depth of the buffer region Q can be increased on the side closer to the dryout generation portion of the buffer region Q. For this reason, the stored working fluid 2 can be smoothly moved to the dry-out generation portion, and the dry-out can be further easily eliminated.

  In the above-described embodiment, the example in which the second direction in which the communication grooves 51 are aligned is the direction Y orthogonal to the first direction X has been described. However, the present invention is not limited to this, and the second direction Y in which the connecting grooves 51 are aligned may not be orthogonal to the first direction as long as it intersects the first direction X.

  Moreover, in this Embodiment mentioned above, the liquid flow path convex part 41a was demonstrated to the whole of each liquid flow path part 30, and the example arrange | positioned at rectangular shape at the grid | lattice form was demonstrated. However, the present invention is not limited to this, and in some regions of each liquid flow path portion 30, the liquid flow path convex portions 41a may be arranged in a shape as shown in FIGS. .

  For example, as shown in FIG. 16, the direction in which the communication grooves 51 are aligned may be inclined with respect to the first direction X and the second direction Y, respectively. In this case, the inclination angle θ of the connecting groove 51 with respect to the first direction X is arbitrary. In the example shown in FIG. 16, the planar shape of each liquid flow path convex portion 41a is a parallelogram. When such a shape is adopted for the rectangular vapor chamber 1, the four outer edges 1 a and 1 b (see FIG. 2) forming the outer contour of the vapor chamber 1 and the communication groove 51 are not orthogonal to each other. In this case, it can be prevented from being deformed so as to be bent at a fold line extending in the second direction Y, and the grooves 31 and 51 of the liquid flow path section 30 can be prevented from being crushed. In addition, the rounded curved part 45 may be formed in the corner | angular part of the liquid flow path convex part 41a shown in FIG. 16 similarly to the liquid flow path convex part 41a shown in FIG. The same applies to the liquid channel convex portion 41a shown in FIG. 17 and the second liquid channel convex portion 60 shown in FIG.

  In FIG. 17, the liquid flow path convex portion 41a having the shape as shown in FIG. 16 is formed in line symmetry with respect to one main flow groove 31S. In other words, the liquid flow path convex portion 41a is formed symmetrically with respect to the reference main flow groove 31S. The row of connecting grooves 51 on one side of the main flow groove 31S and the row of connecting grooves 51 on the other side are V-shaped. In this case, the liquid working fluid 2 flowing through the communication groove 51 flows while having a velocity component toward the lower side in FIG. For this reason, it is easy to enter the mainstream groove 31. Then, the hydraulic fluid 2 flowing through the communication groove 51 on one side of the main flow groove 31S and the hydraulic fluid 2 flowing through the communication groove 51 on the other side merge at the intersection P of the main flow groove 31S, and in the second direction Y. The velocity component is lost. For this reason, it is easy to enter the mainstream groove 31 </ b> S by the downward speed component that has been present when flowing through the communication groove 51. When the evaporation part 11 is arrange | positioned at the lower side of FIG. 17, the flow to the evaporation part 11 of the hydraulic fluid 2 can be strengthened, and the transport function of the hydraulic fluid 2 can be improved. Moreover, the deformation of the vapor chamber 1 can be prevented in the same manner as the example shown in FIG.

  In FIG. 18, a second liquid channel convex portion 60 is provided in the liquid channel portion 30 instead of the liquid channel convex portion 41 a, and the planar shape of the second liquid channel convex portion 60 is as follows. , Rhombus (or parallelogram). A first liquid flow channel groove 61 and a second liquid flow channel groove 62 are formed between the second liquid flow channel convex portions 60 adjacent to each other. The direction in which the first liquid passage groove 61 extends and the direction in which the second liquid passage groove 62 extends are inclined and intersected with respect to the first direction X and the second direction Y, respectively. Thereby, the row | line | column of the 1st liquid flow path groove 61 and the row | line | column of the 2nd liquid flow path groove | channel 62 have comprised X shape. The first liquid passage groove 61 and the second liquid passage groove 62 communicate with the main flow groove 31 or the communication groove 51 formed outside the region where the second liquid passage convex portion 60 is formed. When the second liquid flow path convex portion 60 is provided in a part of the liquid flow path portion 30, deformation of the vapor chamber 1 can be prevented in the same manner as in the example shown in FIG.

  Further, the planar shape of the second liquid flow path convex portion 60 shown in FIG. 18 may be elliptical as shown in FIG. Also in the example shown in FIG. 19, the deformation of the vapor chamber 1 can be prevented.

  Further, in the above-described embodiment, the example in which the upper flow path wall portion 22 of the upper metal sheet 20 extends in the elongated shape along the first direction X of the vapor chamber 1 has been described. However, it is not limited to this, and the shape of the upper flow path wall portion 22 is arbitrary. For example, the upper flow path wall portion 22 may be formed as a cylindrical boss. Also in this case, the upper flow path wall portion 22 is disposed so as to overlap the lower flow path wall portion 13 in plan view, and the lower surface 22a of the upper flow path wall portion 22 is placed on the lower flow path wall portion 13. It is preferable to contact the upper surface 13a.

  Moreover, in this Embodiment mentioned above, although the upper side metal sheet 20 demonstrated the example which has the upper side steam flow path recessed part 21, it is not restricted to this, The upper side metal sheet 20 is the whole. It is not necessary to have the upper side vapor | steam flow path recessed part 21 formed in flat form. In this case, the lower surface 20a of the upper metal sheet 20 comes into contact with the upper surface 13a of the lower flow path wall 13 as the second contact surface, and the mechanical strength of the vapor chamber 1 can be improved. . Moreover, the etching process of the lower surface 20a of the upper metal sheet 20 can be made unnecessary.

  Moreover, in this Embodiment mentioned above, the lower metal sheet 10 demonstrated the example which has the lower side steam flow path recessed part 12 and the liquid flow path part 30. As shown in FIG. However, the present invention is not limited to this. If the upper metal sheet 20 has the upper steam flow path recess 21, the lower metal sheet 10 does not have the lower steam flow path recess 12, and the liquid flow The path portion 30 may be provided on the upper surface 10 a of the lower metal sheet 10. In this case, as shown in FIG. 20, the region where the liquid flow path portion 30 is formed in the upper surface 10 a is a region facing the upper steam flow path recess 21 in addition to the region facing the upper flow path wall portion 22. Of these, it may be formed in a region excluding the upper flow path wall 22. In this case, the number of main flow grooves 31 constituting the liquid flow path section 30 can be increased, and the transport function of the liquid working fluid 2 can be improved. However, the region for forming the liquid flow path portion 30 is not limited to the form shown in FIG. 20, and is arbitrary as long as the transport function of the liquid working fluid 2 can be secured. In the form shown in FIG. 20, the lower surface 22a (contact surface) of the upper flow path wall portion 22 of the upper metal sheet 20 is one of the lower surfaces 20a of the upper metal sheet 20 in order to secure a vapor flow path. The lower surface 22a of the upper flow path wall portion 22 comes into contact with a part of the region where the liquid flow path portion 30 is formed in the upper surface 10a of the lower metal sheet 10.

  Further, in the present embodiment described above, the example in which the vapor chamber 1 is manufactured mainly by etching has been described. However, the present invention is not limited to this and may be manufactured by a 3D printer. For example, the vapor chamber 1 may be manufactured together by a 3D printer at once, or each metal sheet 10 and 20 may be manufactured separately by a 3D printer and then joined.

(Second Embodiment)
Next, with reference to FIG. 21 and FIG. 22, a vapor chamber, an electronic device, a metal sheet for a vapor chamber, and a method for manufacturing the vapor chamber in the second embodiment of the present invention will be described.

  In the second embodiment shown in FIG. 21 and FIG. 22, the main flow groove convex portion protrudes in the main flow groove and the communication groove convex portion protrudes in the communication groove. Other configurations are substantially the same as those of the first embodiment shown in FIGS. 21 and 22, the same parts as those in the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 21, in the present embodiment, the upper metal sheet 20 has a plurality of mainstream groove convex portions 27 provided on the lower surface 20a. Each main flow groove convex portion 27 protrudes from the lower surface 20 a to the main flow groove 31 of the lower metal sheet 10. The lower end of the main flow groove convex portion 27 is separated from the bottom of the main flow groove 31, and the flow path for the hydraulic fluid 2 is secured. Further, each main flow groove convex portion 27 is formed to extend in the first direction X along the corresponding main flow groove 31.

  The cross section of the mainstream groove convex portion 27 is formed in a curved shape. Further, as shown in FIG. 21, the side edge of the mainstream groove convex portion 27 is in contact with or close to the side walls 35 and 36 of the mainstream groove 31. Thereby, the corner | angular part 37 formed by the side walls 35 and 36 of the mainstream groove | channel 31 and the lower surface 22a of the upper flow path wall part 22 is formed in the wedge shape (or acute angle shape). In this way, the channel cross section (the channel cross section in the second direction Y) defined by the main flow groove 31 and the main flow groove convex portion 27 is formed in a crescent shape as shown in FIG.

  As shown in FIG. 22, in the present embodiment, the upper metal sheet 20 has a plurality of connecting groove protrusions 28 provided on the lower surface 20a. Each connecting groove convex portion 28 protrudes from the lower surface 20 a to the connecting groove 51 of the lower metal sheet 10. The lower end of the communication groove convex portion 28 is separated from the bottom of the communication groove 51, and the flow path for the hydraulic fluid 2 is secured. In addition, each communication groove convex portion 28 is formed to extend in the second direction Y along the corresponding communication groove 51. At the intersection P of the mainstream groove 31, the mainstream groove convex portion 27 and the communication groove convex portion 28 described above intersect in a cross shape.

  The cross section of the communication groove convex portion 28 is formed in a curved shape like the mainstream groove convex portion 27. Further, as shown in FIG. 22, the side edge of the connecting groove convex portion 28 is in contact with or close to the pair of side walls 55, 56 extending in the second direction Y of the connecting groove 51. Thereby, the corner | angular part 57 formed by the side walls 55 and 56 of the connection groove | channel 51 and the lower surface 22a of the upper flow path wall part 22 is formed in the wedge shape (or acute angle shape). In this way, the channel cross section (the channel cross section in the first direction X) defined by the communication groove 51 and the communication groove convex portion 28 is formed in a crescent shape as shown in FIG. The side walls 55 and 56 correspond to the above-described linear portion 46 of the liquid flow path convex portion 41a.

  The mainstream groove convex portion 27 and the communication groove convex portion 28 are formed by, for example, half-etching the upper metal sheet 20 to form the upper flow path wall portion 22 and the like, and then pressing the upper metal sheet 20 alone. be able to. Alternatively, in the permanent joining step shown in FIG. 14, the mainstream groove convex portion 27 and the communication groove convex portion 28 can be formed by increasing the pressure applied to the lower metal sheet 10 and the upper metal sheet 20. That is, by increasing the pressing force, a part of the upper flow path wall portion 22 of the upper metal sheet 20 can enter the main flow groove 31 and the communication groove 51, and thereby a curved cross section can be obtained. The mainstream groove convex part 27 and the communication groove convex part 28 which have can be formed.

  As described above, according to the present embodiment, the mainstream groove convex portion 27 protrudes from the lower surface 20a of the upper metal sheet 20 to the corresponding mainstream groove 31 among the mainstream grooves 31 of the lower metal sheet 10. Thus, a corner 37 formed by the side walls 35 and 36 of the main flow groove 31 and the lower surface 22a of the upper flow path wall portion 22 is defined by the side walls 35 and 36 of the main flow groove 31 and the main flow groove convex portion 27. It can be a very small space. For this reason, the capillary action in the corner | angular part 37 can be improved. As a result, the transport function of the liquid working fluid 2 in each main flow groove 31 can be improved, and the heat transport efficiency can be improved. In particular, even when the intersecting portion P of each main flow groove 31 is configured as a buffer region Q as shown in FIG. 6, the working fluid 2 in the main flow groove main body 31 a is subjected to the capillary action by the main flow groove convex portion 27. A high driving force toward the evaporation unit 11 can be provided, and the transport function of the hydraulic fluid 2 can be effectively improved.

  Moreover, according to this Embodiment, the cross section of the mainstream groove convex part 27 is formed in curve shape. Thereby, the corner | angular part 37 can be made into a shape like the edge part of a crescent moon shape. For this reason, the capillary action in the corner | angular part 37 can be improved further.

  Further, according to the present embodiment, the communication groove convex portion 28 protrudes from the lower surface 20 a of the upper metal sheet 20 into the corresponding communication groove 51 of the lower metal sheet 10. Thus, the corner 57 formed by the side walls 55 and 56 of the communication groove 51 and the lower surface 22a of the upper flow path wall portion 22 is defined by the side walls 55 and 56 of the communication groove 51 and the communication groove convex portion 28. It can be a very small space. For this reason, the capillary action in the corner | angular part 57 can be improved.

  Here, the liquid working fluid 2 condensed from the vapor enters the main flow groove 31 through the communication groove 51 as described above. For this reason, the capillary action of the communication groove 51 is enhanced, so that the condensed liquid working fluid 2 can smoothly enter the main flow grooves 31. That is, the condensed liquid working fluid 2 is not limited to the main flow groove 31 on the side close to the steam flow path recesses 12, 21 but the main flow groove on the side far from the steam flow path recesses 12, 21 due to the capillary action of the communication groove 51. 31 can also enter smoothly, and the transport function of the condensed liquid working fluid 2 can be improved. In addition, by making the width w3 of the communication groove 51 larger than the width w1 of the main flow groove 31, the flow resistance of the hydraulic fluid 2 in the communication groove 51 can be reduced. The liquid working fluid 2 can smoothly enter each main flow groove 31. The hydraulic fluid 2 that has entered the main flow grooves 31 can be smoothly transported toward the evaporation section 11 by the capillary action of the main flow grooves 31. For this reason, the transport function of the liquid working fluid 2 can be improved as the entire liquid flow path section 30. Further, as described above, by increasing the capillary action of the communication groove 51, when dryout occurs, the hydraulic fluid 2 can be moved between the main flow grooves 31 by the capillary action of the communication groove 51, Dry out can be eliminated.

  Moreover, according to this Embodiment, the cross section of the communication groove convex part 28 is formed in curved shape. Thus, the corner 57 can be shaped like a crescent-shaped end. For this reason, the capillary action in the corner | angular part 57 can be improved further.

  In the above-described embodiment, an example in which the cross section of the mainstream groove 31 and the cross section of the communication groove 51 are formed in a curved shape has been described. However, the present invention is not limited to this, and the cross section of the main flow groove 31 and the cross section of the communication groove 51 may be formed in a rectangular shape although not shown. Even in this case, the capillary action at the corners 37 and 57 can be enhanced, and the transport function of the liquid working fluid 2 in the main flow groove 31 and the communication groove 51 can be improved. In order to make the cross section rectangular, the main flow groove 31 and the communication groove 51 are preferably formed by pressing or cutting.

  Further, in the above-described embodiment, the example in which the width w3 of the communication groove 51 is larger than the width w1 of the mainstream groove 31 has been described. However, the present invention is not limited to this, and the width w3 of each communication groove 51 may not be larger than the width w1 of each mainstream groove 31. That is, the effect of enhancing the capillary action of the mainstream groove 31 by the mainstream groove convex portion 27 and enhancing the transport function of the liquid working fluid 2 in the mainstream groove 31 is the effect of the width w3 of the connecting groove 51 and the width w1 of the mainstream groove 31. It can be demonstrated regardless of the magnitude relationship. Similarly, the effect of enhancing the capillary action of the communication groove 51 by the communication groove convex portion 28 and enhancing the transport function of the condensed liquid working fluid 2 is also the effect of the width w3 of the communication groove 51 and the width w1 of the main flow groove 31. It can be demonstrated regardless of the magnitude relationship.

(Third embodiment)
Next, with reference to FIGS. 23 to 28, a vapor chamber, an electronic device, a metal sheet for a vapor chamber, and a method for manufacturing the vapor chamber according to a third embodiment of the present invention will be described.

  In the third embodiment shown in FIG. 23 to FIG. 28, an intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, and the steam flow path portion is on the intermediate metal sheet side of the upper metal sheet. The liquid channel part is provided on the surface of the lower metal sheet on the side of the intermediate metal sheet, and the intermediate metal sheet is provided with a communication part for communicating the vapor channel part and the liquid channel part. The other differences are substantially the same as those of the first embodiment shown in FIGS. 1 to 20. 23 to 28, the same parts as those of the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 23, in the present embodiment, an intermediate metal sheet 70 (third metal sheet) is interposed between the lower metal sheet 10 (first metal sheet) and the upper metal sheet 20 (second metal sheet). ) Is interposed. That is, in the vapor chamber 1 according to the present embodiment, the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 are laminated in this order. The intermediate metal sheet 70 is provided on the lower metal sheet 10, and the upper metal sheet 20 is provided on the intermediate metal sheet 70. In FIG. 23, the hydraulic fluid 2 is not shown for the sake of clarity. The same applies to FIGS. 26, 31 and 34 described later.

  The intermediate metal sheet 70 includes a lower surface 70a (first surface) provided on the lower metal sheet 10 side and an upper surface 70b (first surface) provided on the side opposite to the lower surface 70a and provided on the upper metal sheet 20 side. 2 sides). Among these, the lower surface 70 a is overlaid on the upper surface 10 a of the lower metal sheet 10, and the upper surface 70 b is overlaid on the lower surface 20 a of the upper metal sheet 20. The lower metal sheet 10 and the intermediate metal sheet 70 are bonded by diffusion bonding, and the intermediate metal sheet 70 and the upper metal sheet 20 are bonded by diffusion bonding. The intermediate metal sheet 70 can be formed of the same material as the lower metal sheet 10 and the upper metal sheet 20. The thickness of the intermediate metal sheet 70 is, for example, 10 μm to 300 μm.

  The sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20, and a part of the sealed space 3 is also formed in the intermediate metal sheet 70. In the present embodiment, the sealed space 3 has a steam flow path portion 80 through which the vapor of the hydraulic fluid 2 mainly passes and a liquid flow path portion 30 through which the liquid hydraulic fluid 2 passes mainly. The vapor flow path 80 and the liquid flow path 30 communicate with each other so that the working fluid 2 can be recirculated. The steam channel 80 has a lower steam channel recess 12 (first steam channel) and an upper steam channel recess 21 (second steam channel).

  The lower metal sheet 10 including the lower steam channel recess 12 and the liquid channel part 30 can have the same configuration as the lower metal sheet 10 in the first embodiment shown in FIGS. 1 to 20. . For this reason, detailed description is omitted here.

  In the present embodiment, the upper metal sheet 20 is not provided with the liquid flow path portion 30. Further, the upper metal sheet 20 has an upper steam channel recess 21 (second steam channel part) provided on the lower surface 20a. In the upper steam channel recess 21, a plurality of upper channel projections 90 (second channel projections) projecting downward (in a direction perpendicular to the bottom surface 21 a) from the bottom surface 21 a of the upper steam channel recess 21 are provided. ing. The upper channel protrusion 90 is a portion where the material of the upper metal sheet 20 remains without being etched in the half etching process.

  As shown in FIG. 23, the upper channel protrusion 90 has a lower surface 90 a located on the same plane as the lower surface 20 a of the upper metal sheet 20. The lower surface 90 a is in contact with the upper surface 70 b of the intermediate metal sheet 70. Thus, the mechanical strength of the vapor chamber 1 is improved when the sealed space 3 is decompressed.

  As shown in FIG. 24, in the present embodiment, the upper flow path protrusions 90 are arranged in a staggered pattern in plan view. Thereby, it is comprised so that the vapor | steam of the working fluid 2 may flow the circumference | surroundings of the upper side flow-path protrusion part 90, and it suppresses that the flow of a vapor | steam is prevented. Moreover, the planar shape of the lower surface of the upper flow path protrusion 90 is a circular shape, and also in this respect, the vapor flow of the hydraulic fluid 2 is prevented from being hindered. Note that the planar shape of the upper flow path projecting portion 90 is not limited to a circular shape as long as it is possible to prevent the flow of the vapor of the working fluid 2 from being hindered.

  As shown in FIG. 25, the intermediate metal sheet 70 is provided with a communication hole 71 (communication portion) that communicates the upper steam passage recess 21 and the liquid passage portion 30. The communication hole 71 passes through the intermediate metal sheet 70 and constitutes a part of the above-described sealed space 3. Further, the communication holes 71 are arranged between the upper flow path protrusions 90 adjacent to each other in plan view, and the communication holes 71 are arranged in a staggered pattern in plan view.

  As shown in FIG. 23, the communication hole 71 extends from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70. As a result, the liquid working fluid 2 generated by condensing from the steam of the working fluid 2 in the upper steam passage recess 21 passes through the communication hole 71 and enters the main flow groove 31 of the fluid passage portion 30. It is configured. On the other hand, the vapor of the working fluid 2 evaporated in the evaporation section 11 can be diffused not only in the lower steam passage recess 12 but also in the upper steam passage recess 21 through the communication hole 71. Yes.

  The communication hole 71 may be formed by etching from the upper surface 70 b of the intermediate metal sheet 70. In this case, the communication hole 71 may be curved so as to swell toward the lower surface 70a. Alternatively, the communication hole 71 may be etched from the lower surface 70a of the intermediate metal sheet 70. In this case, the communication hole 71 may be curved so as to swell toward the upper surface 70b. Furthermore, the communication hole 71 may be formed by half etching from the lower surface 70a and half etching from the upper surface 70b. In this case, the shape or size of the communication hole 71 may be different between the portion on the upper surface 70b side and the portion on the lower surface 70a side. In the present embodiment, as shown in FIG. 25, an example is shown in which the planar shape of the communication hole 71 is circular. When the diameter φ of the communication hole 71 is the minimum diameter in the range from the upper surface 70b to the lower surface 70a, the diameter φ of the communication hole 71 may be, for example, 50 μm to 2000 μm. The planar shape of the communication hole 71 is not limited to a circular shape.

  As shown in FIG. 25, in the present embodiment, the communication hole 71 is a part of one lower steam passage 81 and a lower portion of the other of the pair of lower steam passages 81 adjacent to each other in plan view. It overlaps part of the side steam passage 81. Thus, a pair of lower steam passages 81 adjacent to each other communicate with each other via the communication hole 71. For this reason, the flow path cross-sectional area of the communication hole 71 can be increased, and the vapor of the working fluid 2 can be smoothly diffused into the upper vapor flow path recess 21. The communication hole 71 may overlap with a part of each of the three or more lower steam passages 81 to communicate with the lower steam passages 81.

  Further, as shown in FIG. 25, the intermediate metal sheet 70 is provided with intermediate alignment holes 72 for positioning the metal sheets 10, 20, 70. That is, each intermediate alignment hole 72 is disposed so as to overlap with each of the lower alignment hole 15 and the upper alignment hole 24 described above when temporarily fixed, and positioning of the metal sheets 10, 20, 70 is possible. .

  In the present embodiment, the injection part 4 may be formed in the same manner as the injection part 4 of the first embodiment shown in FIGS. In this case, an injection protrusion (not shown) may be provided on the intermediate metal sheet 70, and an injection flow path may be provided in the injection protrusion. Alternatively, an injection hole may be provided in the lower metal sheet 10 or the upper metal sheet 20, and the working fluid 2 may be injected from the injection hole.

  In addition, the vapor chamber 1 according to the present embodiment includes a lower steam flow path recess 12 and a liquid flow path section 30 of the lower metal sheet 10 and an upper steam flow path recess 21 of the upper metal sheet 20 shown in FIGS. It can be formed in the same manner as in the first embodiment shown in FIG. Further, the communication hole 71 of the intermediate metal sheet 70 can also be formed by etching. Thereafter, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70. That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion bonded. As a result, a sealed space 3 is formed. Note that the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion-bonded at a time.

  As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the upper steam channel recess 21 is provided on the lower surface 20 a of the upper metal sheet 20. The liquid flow path portion 30 is provided on the upper surface 10 a of the lower metal sheet 10. The intermediate metal sheet 70 is provided with a communication hole 71 that allows the upper steam flow path recess 21 and the liquid flow path section 30 to communicate with each other. Thus, even when the vapor chamber 1 is constituted by the three metal sheets 10, 20, 70, the hydraulic fluid 2 is refluxed in the vapor chamber 1 while repeating the phase change in the sealed space 3. The heat of device D can be transferred and released. Moreover, since the upper side vapor | steam flow path recessed part 21 of the upper side metal sheet 20 is communicating widely, the spreading | diffusion of the vapor | steam of the working fluid 2 can be performed smoothly, and heat transport efficiency can be improved.

  Further, according to the present embodiment, the liquid flow path portion 30 similar to that of the first embodiment shown in FIGS. 1 to 20 is provided on the upper surface 10 a of the lower metal sheet 10. Thereby, the transport function of the liquid working fluid 2 can be improved, and the heat transport efficiency can be improved.

  In the example shown in FIG. 23, an example is shown in which the cross-sectional shape of the lower steam flow path recess 12 and the cross-sectional shape of the upper steam flow path recess 21 are formed in a rectangular shape. However, the present invention is not limited to this, and the cross-sectional shape of the vapor channel recesses 12 and 21 may be formed in a curved shape. The same applies to the main flow groove 31 and the communication groove 51 of the liquid flow path section 30.

  In the above-described embodiment, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the present invention is not limited to this, and two or more intermediate metal sheets 70 may be interposed between the lower metal sheet 10 and the upper metal sheet 20.

  Moreover, in this Embodiment mentioned above, although the upper side metal sheet 20 demonstrated the example which has the upper side steam flow path recessed part 21, it is not restricted to this, As shown in FIG. An intermediate steam channel recess 75 (second steam channel part) may be provided on the upper surface 70 b of the intermediate metal sheet 70. The intermediate steam channel recess 75 may have, for example, a shape such that the upper steam channel recess 21 is turned upside down. That is, an intermediate flow path wall 76 similar to the upper flow path wall 22 may be provided in the intermediate steam flow path recess 75. The intermediate steam flow path recess 75 communicates with the communication hole 71 described above. Further, as shown in FIG. 26, the upper metal sheet 20 may be formed in a flat plate shape as a whole and not have the upper steam flow path recess 21. Alternatively, an upper steam channel recess 21 (second steam channel part) as shown in FIG. 23 may be provided in the upper metal sheet 20. In this case, the second steam flow path portion is provided in both the upper metal sheet 20 and the intermediate metal sheet 70.

  Moreover, in this Embodiment mentioned above, as shown in FIG. 27, the intermediate metal sheet 70 may have the some mainstream groove convex part 77 provided in the lower surface 70a. Each main flow groove convex portion 77 protrudes from the lower surface 70 a to the main flow groove 31 of the lower metal sheet 10. The mainstream groove convex portion 77 can be formed in the same manner as the mainstream groove convex portion 27 in the second embodiment. Further, as shown in FIG. 28, the intermediate metal sheet 70 may have a plurality of connecting groove protrusions 78 provided on the lower surface 70a. Each communication groove convex portion 78 protrudes from the lower surface 70 a to the communication groove 51 of the lower metal sheet 10. The communication groove convex part 78 can be formed in the same manner as the communication groove convex part 28 in the second embodiment.

(Fourth embodiment)
Next, with reference to FIG. 29 and FIG. 30, a vapor chamber, an electronic device, a vapor chamber metal sheet, and a vapor chamber manufacturing method according to a fourth embodiment of the present invention will be described.

  In the fourth embodiment shown in FIG. 29 and FIG. 30, the upper channel protrusion and the communication hole are mainly different in that they are elongated along the first direction. This is substantially the same as the third embodiment shown in FIGS. 29 and 30, the same parts as those of the third embodiment shown in FIGS. 23 to 28 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 29, in the present embodiment, the upper channel protrusion 90 (second channel protrusion) provided on the upper metal sheet 20 is the same as that of the first embodiment shown in FIGS. It is comprised similarly to the upper side flow-path wall part 22 in a form. For this reason, in the following, the upper channel protrusion 90 is referred to as the upper channel wall 22, and a detailed description of the upper metal sheet 20 including the upper channel protrusion 90 is omitted.

  As shown in FIG. 30, in the present embodiment, the communication hole 71 provided in the intermediate metal sheet 70 is formed so as to extend in an elongated shape along the first direction X. Also in the present embodiment, the communication hole 71 is disposed between the upper flow path wall portions 22 adjacent to each other in plan view. The width w4 (dimension in the second direction Y) of the communication hole 71 may be, for example, 50 μm to 1500 μm. Here, the width w4 of the communication hole 71 is the minimum width in the range from the upper surface 70b to the lower surface 70a.

  The communication hole 71 in the present embodiment overlaps the lower steam passage 81 of the lower steam passage recess 12 in plan view. In addition, the upper steam passage 83 of the upper steam passage recess 21 that overlaps the lower steam passage 81 overlaps the communication hole 71 in plan view. That is, the communication hole 71 is provided between the lower steam passage 81 and the upper steam passage 83 that overlap each other so as to overlap these. For this reason, the steam of the working fluid 2 in the lower steam passage 81 can quickly reach the upper steam passage 83 via the communication hole 71 and can smoothly diffuse into the upper steam passage 83.

  As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the upper steam channel recess 21 is provided on the lower surface 20 a of the upper metal sheet 20. The liquid flow path portion 30 is provided on the upper surface 10 a of the lower metal sheet 10. The intermediate metal sheet 70 is provided with a communication hole 71 that allows the upper steam flow path recess 21 and the liquid flow path section 30 to communicate with each other. Thus, even when the vapor chamber 1 is constituted by the three metal sheets 10, 20, 70, the hydraulic fluid 2 is refluxed in the vapor chamber 1 while repeating the phase change in the sealed space 3. The heat of device D can be transferred and released.

  Further, according to the present embodiment, the liquid flow path portion 30 similar to that of the first embodiment shown in FIGS. 1 to 20 is provided on the upper surface 10 a of the lower metal sheet 10. Thereby, the transport function of the liquid working fluid 2 can be improved, and the heat transport efficiency can be improved.

(Fifth embodiment)
Next, a vapor chamber, an electronic device, a vapor chamber metal sheet, and a vapor chamber manufacturing method according to a fifth embodiment of the present invention will be described with reference to FIGS.

  In the fifth embodiment shown in FIG. 31 to FIG. 36, an intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, and a steam flow path is provided on the upper surface of the intermediate metal sheet. The liquid flow path portion is mainly different in that it is provided on the lower surface of the intermediate metal sheet, and other configurations are substantially the same as those of the third embodiment shown in FIGS. In FIG. 31 to FIG. 36, the same parts as those in the third embodiment shown in FIG. 23 to FIG.

  As shown in FIG. 31, in the present embodiment, the steam flow path portion 80 is provided on the upper surface 70 b of the intermediate metal sheet 70. That is, the steam flow path portion 80 according to the present embodiment is formed so as to extend from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70 and penetrates the intermediate metal sheet 70. The liquid flow path part 30 is provided on the lower surface 70 a of the intermediate metal sheet 70. For this reason, the intermediate metal sheet 70 according to the present embodiment may be referred to as a wick sheet. The vapor flow path 80 and the liquid flow path 30 communicate with each other so that the working fluid 2 can be recirculated.

  As shown in FIGS. 32 and 33, the intermediate metal sheet 70 has a frame body portion 73 formed in a rectangular frame shape in plan view, and a plurality of land portions 74 provided in the frame body portion 73. doing. The frame portion 73 and the land portion 74 are portions where the material of the intermediate metal sheet 70 remains without being etched when the intermediate metal sheet 70 is etched. The land portions 74 extend in an elongated shape along the first direction X, and a plurality of land portions 74 are arranged in the steam flow path portion 80. The land portions 74 are supported by each other via a support portion (not shown) and supported by the frame body portion 73. The support portion is formed so as to prevent the steam flow of the working fluid 2 flowing in the intermediate steam passage 85 described later from being hindered. For example, the support portion may be formed in a part of a range from the upper surface 70b to the lower surface 70a of the intermediate metal sheet 70 in the vertical direction of FIG.

  The steam flow path portion 80 includes a plurality of intermediate steam passages 85 (third steam passages) partitioned by the land portions 74. The intermediate steam passage 85 extends in an elongated shape along the first direction X, and is disposed in parallel to each other. Both end portions of each intermediate steam passage 85 communicate with an intermediate communication steam passage 86 extending in an elongated shape along the second direction Y, and each intermediate steam passage 85 communicates with each other via the intermediate communication steam passage 86. Yes. In this manner, the vapor of the working fluid 2 flows around each land portion 74 (the intermediate steam passage 85 and the intermediate communication steam passage 86), and the steam is transported toward the peripheral portion of the steam flow path portion 80. This prevents the steam flow from being hindered. In FIG. 31, the intermediate steam passage 85 has a rectangular cross section (cross section in the second direction Y). However, the present invention is not limited to this, and the cross-sectional shape of the intermediate steam passage 85 may be, for example, a curved shape, a semicircular shape, or a V shape, and if the vapor of the working fluid 2 can be diffused. Is optional. The intermediate communication steam passage 86 is the same. The intermediate steam passage 85 and the intermediate communication steam passage 86 can be formed by etching similarly to the communication hole 71 in the third embodiment shown in FIGS. 23 to 28, and have the same cross-sectional shape as the communication hole 71. Can have.

  The width w5 (dimension in the second direction Y) of the land portion 74 of the intermediate metal sheet 70 may be, for example, 50 μm to 2000 μm when the maximum dimension in the range from the upper surface 70b to the lower surface 70a is used. The width w6 (dimension in the second direction Y) of the intermediate steam passage 85 may be, for example, 50 μm to 2000 μm when the minimum dimension is in the range from the upper surface 70b to the lower surface 70a. The same applies to the width (the dimension in the first direction X) of the intermediate communication steam passage 86.

  The liquid flow path portion 30 is provided in the land portion 74 on the lower surface 70 a of the intermediate metal sheet 70. That is, the liquid flow path portion 30 is provided on the lower surface of the land portion 74.

  In the upper surface 10a of the lower metal sheet 10 in the present embodiment, the lower steam channel recess 12 is not provided, and the liquid channel part 30 is not provided. The upper surface 10a is formed in a flat shape. Similarly, the lower surface 20a of the upper metal sheet 20 is not provided with the upper steam passage recess 21 and is not provided with the liquid passage portion 30. The lower surface 20a is formed in a flat shape. The thickness of the lower metal sheet 10 and the upper metal sheet 20 according to the present embodiment is, for example, 8 μm to 100 μm.

  Further, the vapor chamber 1 according to the present embodiment can form the vapor flow path portion 80 and the liquid flow path portion 30 of the intermediate metal sheet 70 by etching. Thereafter, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70. That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion bonded. As a result, a sealed space 3 is formed. Note that the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion-bonded at a time.

  As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the steam flow path portion 80 is provided on the upper surface 70b of the intermediate metal sheet 70. The liquid flow path portion 30 is provided on the lower surface 70 a of the intermediate metal sheet 70. Thus, even when the vapor chamber 1 is constituted by the three metal sheets 10, 20, 70, the hydraulic fluid 2 is refluxed in the vapor chamber 1 while repeating the phase change in the sealed space 3. The heat of device D can be transferred and released.

  Further, according to the present embodiment, the steam flow path portion 80 is provided on the upper surface 70b of the intermediate metal sheet 70 interposed between the lower metal sheet 10 and the upper metal sheet 20, and the liquid is formed on the lower surface 70a. A flow path portion 30 is provided. This eliminates the need for etching processing for forming a steam channel and a liquid channel on the lower metal sheet 10 and the upper metal sheet 20. That is, the number of members to be etched can be reduced. For this reason, the manufacturing process of the vapor chamber 1 can be simplified and the vapor chamber 1 can be easily manufactured. Further, since the vapor channel 80 and the liquid channel 30 are formed in the intermediate metal sheet 70, the vapor channel 80 and the liquid channel 30 can be positioned with high accuracy during the etching process. For this reason, it is not necessary to align the vapor flow path portion 80 and the liquid flow path portion 30 in the assembly process. As a result, the vapor chamber 1 can be easily manufactured. Further, the height (or depth) of the steam channel can be defined by the thickness of the intermediate metal sheet 70, and the vapor chamber 1 can be easily manufactured.

  Further, according to the present embodiment, the liquid flow path portion 30 similar to that of the first embodiment shown in FIGS. 1 to 20 is provided on the lower surface 70 a of the intermediate metal sheet 70. Thereby, the transport function of the liquid working fluid 2 can be improved, and the heat transport efficiency can be improved.

  Further, according to the present embodiment, the steam flow path 80 extends from the upper surface 70b of the intermediate metal sheet 70 to the lower surface 70a. Thereby, the channel resistance of the steam channel 80 can be reduced. For this reason, the liquid working fluid 2 that is generated by condensing from the steam of the working fluid 2 in the steam passage portion 80 can smoothly enter the main flow groove 31 of the liquid passage portion 30. On the other hand, the vapor of the working fluid 2 evaporated in the evaporation unit 11 can be smoothly diffused into the vapor channel 80.

  In the above-described embodiment, the example in which the liquid flow path portion 30 is provided on the lower surface 70a of the intermediate metal sheet 70 has been described. However, the present invention is not limited to this, and as shown in FIG. 34, the liquid flow path section 30 may be provided not only on the lower surface 70a but also on the upper surface 70b. In this case, it is possible to increase the number of channels for transporting the liquid working fluid 2 to the portion near the evaporation portion 11 in the evaporation section 11 or the intermediate metal sheet 70, and to improve the transport efficiency of the liquid working fluid 2. . For this reason, the heat transport efficiency of the vapor chamber 1 can be improved.

  Moreover, in this Embodiment mentioned above, the steam flow path part 80 demonstrated the example formed so that it might extend from the upper surface 70b of the intermediate metal sheet 70 to the lower surface 70a. However, the present invention is not limited to this, and the steam flow path portion 80 is similar to the lower steam flow path recess 12 shown in FIGS. 1 to 20, or the upper steam flow path recess shown in FIGS. As shown in FIG. 21, the upper surface 70 b of the intermediate metal sheet 70 may be formed in a concave shape. In this case, the intermediate metal sheet 70 may be provided with a communication hole (not shown) that communicates the vapor channel 80 with the liquid channel 30.

  In the above-described embodiment, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the present invention is not limited to this, and other metal sheets (not shown) may be interposed between the lower metal sheet 10 and the intermediate metal sheet 70, and the upper metal sheet 20, the intermediate metal sheet 70, and the like. Another metal sheet (not shown) may be interposed between the two.

  Moreover, in this Embodiment mentioned above, as shown in FIG. 35, the lower metal sheet 10 may have the some mainstream groove convex part 18 provided in the upper surface 10a. Each main flow groove convex portion 18 protrudes from the upper surface 10 a to the main flow groove 31 of the intermediate metal sheet 70. The mainstream groove convex portion 18 can be formed in the same manner as the mainstream groove convex portion 27 in the second embodiment. Further, as shown in FIG. 36, the lower metal sheet 10 may have a plurality of connecting groove protrusions 19 provided on the upper surface 10a. Each communication groove convex portion 19 protrudes from the upper surface 10 a to the communication groove 51 of the intermediate metal sheet 70. The communication groove convex portion 19 can be formed in the same manner as the communication groove convex portion 28 in the second embodiment.

  The present invention is not limited to the above-described embodiments and modifications, and can be embodied by modifying the components without departing from the scope of the invention at the stage of implementation. In addition, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above embodiments and modifications. Some components may be deleted from all the components shown in each embodiment and each modification. Moreover, in each said embodiment and each modification, you may replace the structure of the lower metal sheet 10 and the structure of the upper metal sheet 20. FIG.

DESCRIPTION OF SYMBOLS 1 Vapor chamber 2 Hydraulic fluid 3 Sealing space 10 Lower metal sheet 12 Lower steam channel recessed part 12a Bottom surface 13 Lower channel wall part 13a Upper surface 20 Upper metal sheet 21 Upper steam channel recessed part 21a Bottom surface 22 Upper channel wall part 22a lower surface 27 main flow groove convex portion 28 communication groove convex portion 30 liquid flow channel portion 31 main flow groove 41 convex portion row 41a liquid flow channel convex portion 51 communication groove 70 intermediate metal sheet 70a lower surface 70b upper surface 71 communication hole 80 steam flow channel portion 81 Lower steam passage 90 Upper channel protrusion D Device E Electronic device H Housing P Intersection Q Buffer region X First direction Y Second direction

Claims (22)

A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet laminated to the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
Vapor chamber.   The vapor chamber according to claim 1, wherein a depth of the communication groove is deeper than a depth of the main flow groove. The main flow groove is located at a crossing portion communicating with the communication groove and a position different from the crossing portion in the first direction and between a pair of the liquid flow channel convex portions adjacent to each other. A main body, and
The vapor chamber according to claim 1 or 2, wherein a depth of the intersecting portion of the main flow groove is deeper than a depth of the main flow groove main body.   The vapor chamber according to claim 3, wherein a depth of the intersecting portion of the main flow groove is deeper than a depth of the communication groove.   The vapor chamber according to any one of claims 1 to 4, wherein a rounded curved portion is provided at a corner of the liquid flow path convex portion.   The vapor chamber according to any one of claims 1 to 5, further comprising a plurality of main flow groove protrusions protruding into the main flow groove.   The vapor chamber according to claim 6, wherein a cross section of the mainstream groove convex portion is formed in a curved shape.   The vapor chamber according to any one of claims 1 to 7, further comprising a plurality of communication groove protrusions protruding into the communication groove.   The vapor chamber according to claim 8, wherein a cross section of the communication groove convex portion is formed in a curved shape.   The vapor chamber according to claim 1, wherein the communication grooves are aligned in a second direction intersecting the first direction. The second metal sheet is provided on the first metal sheet;
11. The vapor chamber according to claim 1, wherein the liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side. A third metal sheet interposed between the first metal sheet and the second metal sheet;
The steam flow path portion is a second steam provided on at least one of a surface of the second metal sheet on the third metal sheet side and a surface of the third metal sheet on the second metal sheet side. Having a flow path section,
The liquid channel portion is provided on a surface of the first metal sheet on the side of the third metal sheet,
11. The vapor chamber according to claim 1, wherein the third metal sheet is provided with a communication portion that communicates the second vapor flow path portion and the liquid flow path portion. A third metal sheet interposed between the first metal sheet and the second metal sheet;
The third metal sheet includes a first surface provided on the first metal sheet side, and a second surface provided on the second metal sheet side,
The steam channel part is provided on the second surface of the third metal sheet,
11. The vapor chamber according to claim 1, wherein the liquid flow path portion is provided on the first surface of the third metal sheet and communicates with the vapor flow path portion. A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet provided on the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
The second metal sheet has a plurality of main groove groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the main groove of the first metal sheet. Chamber. A vapor chamber filled with hydraulic fluid,
A first metal sheet;
A second metal sheet provided on the first metal sheet;
A sealed space provided between the first metal sheet and the second metal sheet, a vapor channel portion through which the vapor of the working fluid passes, a liquid channel portion through which the liquid working fluid passes, A sealed space having
The liquid flow path portion is provided on a surface of the first metal sheet on the second metal sheet side,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The second metal sheet has a plurality of communication groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the communication groove of the first metal sheet. Chamber. A housing;
A device housed in the housing;
An electronic apparatus comprising: a vapor chamber according to any one of claims 1 to 15, which is in thermal contact with the device. A metal sheet for a vapor chamber for a vapor chamber having a sealed space containing a vapor flow path through which the vapor of the hydraulic fluid passes, and a liquid flow path through which the liquid hydraulic fluid passes. There,
The first side,
A second surface provided on the opposite side of the first surface,
The liquid flow path portion is provided on the first surface,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
Metal sheet for vapor chamber. A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The width of the communication groove is larger than the width of the mainstream groove,
A method for manufacturing a vapor chamber. Forming the vapor flow path portion on at least one of the surface of the second metal sheet on the first metal sheet side and the surface of the third metal sheet on the second metal sheet side by half etching; and ,
A step of forming a third metal sheet provided with a communication portion for communicating the vapor flow path portion and the liquid flow path portion,
19. The method of manufacturing a vapor chamber according to claim 18, wherein in the joining step, the first metal sheet and the second metal sheet are joined via the third metal sheet. A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion, and a third metal sheet interposed between the first metal sheet and the second metal sheet,
The liquid channel portion is formed on a surface of the third metal sheet on the first metal sheet side, and the vapor channel portion is formed on a surface of the third metal sheet on the second metal sheet side. Process,
A joining step of joining the first metal sheet and the second metal sheet via the third metal sheet, wherein the sealed space is formed between the first metal sheet and the second metal sheet. Joining process;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The method of manufacturing a vapor chamber, wherein the width of the communication groove is larger than the width of the mainstream groove. A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
The second metal sheet has a plurality of main groove groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the main groove of the first metal sheet. A method for manufacturing a chamber. A sealed space provided between the first metal sheet and the second metal sheet, in which the working fluid is enclosed, a steam flow path portion through which the steam of the working fluid passes, and a liquid through which the liquid working fluid passes. A vapor chamber having a sealed space including a flow path portion,
A half-etching step of forming the liquid flow path portion on the surface of the first metal sheet on the second metal sheet side by half-etching;
A joining step for joining the first metal sheet and the second metal sheet, the joining step for forming the sealed space between the first metal sheet and the second metal sheet;
A sealing step of sealing the hydraulic fluid in the sealed space,
The liquid flow path section has a plurality of main flow grooves each extending in the first direction and through which the liquid working fluid passes.
Between the pair of adjacent main flow grooves adjacent to each other, a convex row including a plurality of liquid flow path convex portions arranged in the first direction via a communication groove is provided,
The communication groove communicates with a corresponding pair of the main flow grooves,
The second metal sheet has a plurality of communication groove protrusions that respectively protrude from the surface of the second metal sheet on the first metal sheet side into the communication groove of the first metal sheet. A method for manufacturing a chamber.

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